Talc Porcelain, its Preparation Methods and Applications

Abstract

This application relates to a talc porcelain, its preparation method, and its application. The preparation method of the talc porcelain provided in this application includes the following steps: mixing magnesium powder, a dispersant, and a solvent to prepare a slurry; mixing the slurry with a binder and a plasticizer, molding it, and preparing green porcelain sheets; stacking the green porcelain sheets and performing isostatic pressing to prepare a green body; degreasing and sintering the green body to prepare talc porcelain; wherein the magnesium powder includes talc powder, barium carbonate, silicon dioxide, and alumina in a mass ratio of (50~70):(6~18):(15~25):(4~12). The sintering process parameters include: a sintering temperature of 1250℃~1300℃ and a sintering time of 2h~6h. The preparation method provided in this application can further broaden the sintering temperature range of talc porcelain while ensuring its strength, thereby enabling the large-scale production of talc porcelain.

Description

Technical Field

[0001] This application relates to the field of ceramic technology, specifically to a talc porcelain, its preparation method, and its application. Background Technology

[0002] Talc ceramic is a magnesium ceramic material made primarily from talc and sintered at high temperatures. The main crystalline phase of talc ceramic is protoencite, also known as magnesium metasilicate (chemical formula MgSiO3). It is a high-frequency structural ceramic with excellent electrical properties and low cost. Due to its good chemical stability and low dielectric loss, it is widely used in semiconductor devices such as integrated circuits.

[0003] However, the sintering temperature range for talc porcelain is relatively narrow, only around 20℃. This lower sintering temperature range limits the sintering of the porcelain body; a lower sintering temperature results in underfiring, leading to insufficient mechanical strength and affecting the product quality. A higher sintering temperature, on the other hand, easily causes deformation, posing significant difficulties to the actual firing process and hindering large-scale production. Summary of the Invention

[0004] Based on this, this application provides a talc porcelain, its preparation method, and its application. The preparation method provided by this application can further broaden the sintering temperature range of talc porcelain while ensuring its strength, thereby enabling the large-scale production of talc porcelain.

[0005] The first aspect of this application provides a method for preparing talc porcelain, comprising the following steps:

[0006] A slurry is prepared by mixing magnesium-containing powder, dispersant, and solvent.

[0007] The slurry is mixed with a binder and a plasticizer, and after molding, raw ceramic tiles are prepared.

[0008] After the green ceramic pieces are stacked, they are subjected to isostatic pressing to prepare a green body;

[0009] The talc porcelain is prepared by degreasing and sintering the green body;

[0010] The magnesium-containing powder comprises talc, barium carbonate, silicon dioxide, and aluminum oxide in a mass ratio of (50~70):(6~18):(15~25):(4~12).

[0011] The sintering process parameters include: sintering temperature of 1250℃~1300℃ and sintering time of 2h~6h.

[0012] In one embodiment, the mass ratio of the magnesium powder, dispersant, and solvent is (3~5):(0.02~0.06):(4~6).

[0013] In one embodiment, the dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant, and JM558B dispersant.

[0014] In one embodiment, the solvent comprises ethyl acetate and butyl acetate in a mass ratio of 3:(1.5~2.5).

[0015] In one embodiment, the step of mixing the slurry with the binder and the plasticizer has one or more of the following features:

[0016] (1) The mass ratio of the slurry, the binder and the plasticizer is 1:(0.1~0.3):(0.02~0.05);

[0017] (2) The adhesive comprises one or more of polyvinyl butyral and ethyl cellulose;

[0018] (3) The plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

[0019] In one embodiment, the steps for preparing the green ceramic tile include:

[0020] The slurry is mixed with a binder and a plasticizer, and after degassing and casting, green ceramic tiles are prepared.

[0021] The degassing process parameters include: a vacuum degree of -0.015 MPa to -0.01 MPa and a degassing time of 20 min to 40 min.

[0022] In one embodiment, the process parameters of the isostatic pressing treatment include: a temperature of 65°C to 75°C and a pressure of 55MPa to 65MPa.

[0023] In one embodiment, the degreasing process parameters include: holding at 75℃~85℃ for 1h~3h, raising the temperature to 125℃~135℃ and holding for 1h~3h, raising the temperature to 345℃~355℃ at a heating rate of 0.2℃ / min~1.5℃ / min, and holding for 1.5h~2.5h.

[0024] A second aspect of this application provides a talc porcelain prepared by the preparation method described in any embodiment of the first aspect of this application.

[0025] A third aspect of this application provides a semiconductor device comprising the talc ceramic described in the second aspect of this application.

[0026] In the preparation method of talc porcelain provided in this application, by selecting talc powder, barium carbonate, silicon dioxide and aluminum oxide in a specific mass ratio and using them as magnesium-containing powder, on the one hand, the viscosity of the high-temperature liquid phase structure generated during sintering can be increased, and on the other hand, the skeletal effect of the magnesium-containing powder can make the talc porcelain less prone to deformation, thereby broadening the sintering range of talc porcelain.

[0027] On the other hand, by adjusting the raw material formula of talc porcelain and supplementing it with preparation steps such as isostatic pressing, degreasing, and sintering, it is possible to further prevent phase transformation aging of talc porcelain and improve its strength. Detailed Implementation

[0028] The following detailed description, in conjunction with specific embodiments, provides a more complete and clear account of the talc porcelain of this application, its preparation method, and its applications. This application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this application.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0030] In this article, "one or more" refers to any one, two or more of the listed items.

[0031] In this application, terms such as "first aspect," "second aspect," "third aspect," "fourth aspect," and "fifth aspect" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or quantity, nor should they be construed as implicitly indicating the importance or quantity of the indicated technical features. Moreover, terms such as "first," "second," "third," "fourth," and "fifth" serve only as a non-exhaustive enumeration and should be understood not to constitute a closed limitation on quantity.

[0032] In this application, the technical features described in an open-ended manner include both closed technical solutions consisting of the listed features and open technical solutions that include the listed features.

[0033] In this application, numerical ranges are referred to as continuous unless otherwise specified, and include the minimum and maximum values ​​of the range, as well as every value between the minimum and maximum values. Furthermore, when the range refers to integers, it includes every integer between the minimum and maximum values ​​of the range. Additionally, when multiple ranges are provided to describe a feature or characteristic, the ranges may be merged. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all subranges to which they are incorporated.

[0034] Unless otherwise specified, the percentage content mentioned in this application refers to mass percentage for solid-liquid mixtures and solid-phase-solid mixtures, and volume percentage for liquid-phase-liquid mixtures.

[0035] Unless otherwise specified, all percentage concentrations mentioned in this application refer to the final concentration. The final concentration refers to the proportion of the added component in the system after the addition of that component.

[0036] Unless otherwise specified, the temperature parameters in this application may be either constant temperature processing or processing within a certain temperature range. The constant temperature processing allows for temperature fluctuations within the precision range controlled by the instrument.

[0037] The first aspect of this application provides a method for preparing talc porcelain, comprising the following steps:

[0038] S10. Mix magnesium-containing powder, dispersant, and solvent to prepare a slurry;

[0039] S20. The slurry is mixed with a binder and a plasticizer, and after molding, a green ceramic tile is prepared.

[0040] S30. After stacking the green ceramic sheets, perform isostatic pressing to prepare a green body;

[0041] S40. The green body is degreased and sintered to prepare the talc porcelain.

[0042] In one example, in step S10, the magnesium-containing powder comprises talc, barium carbonate, silica, and alumina in a mass ratio of (50~70):(6~18):(15~25):(4~12). It is understood that in this application, the mass ratio of talc, barium carbonate, silica, and alumina can be selected from any value between (50~70):(6~18):(15~25):(4~12). Specifically, the mass ratio of talc, barium carbonate, silica, and alumina includes, but is not limited to, 50:6:15:4, 60:8:20:8, 60:11:20:8, 61:11:20:8, 62:11:20:8, 61:12:22:8, 65:11:20:8, or 70:18:25:12.

[0043] Preferably, the mass ratio of talc, barium carbonate, silica, and alumina is (58~63):(8~13):(18~22):(6~10). Magnesium-containing powder selected from this mass range can achieve high bonding strength between particles, giving it excellent flexural strength.

[0044] In the preparation method of talc porcelain provided in this application, by selecting talc powder, barium carbonate, silicon dioxide and aluminum oxide in a specific mass ratio and using them as magnesium-containing powder, on the one hand, the viscosity of the high-temperature liquid phase structure generated during sintering can be increased, and on the other hand, the skeletal effect of the magnesium-containing powder can make the talc porcelain less prone to deformation, thereby expanding the sintering range of talc porcelain to 50°C.

[0045] On the other hand, by adjusting the raw material formula of talc porcelain and supplementing it with preparation steps such as isostatic pressing, degreasing, and sintering, it is possible to further prevent phase transformation aging of talc porcelain and improve its strength.

[0046] In one example, in step S40, the sintering process parameters include: a sintering temperature of 1250℃~1300℃ and a sintering time of 2h~6h. The sintering temperature in this application can be selected from any value between 1250℃ and 1300℃. Specifically, the sintering temperature includes, but is not limited to, 1250℃, 1260℃, 1270℃, 1275℃, 1278℃, 1280℃, 1282℃, 1285℃, 1290℃, 1295℃, or 1300℃. Specifically, the sintering time includes, but is not limited to, 2h, 2.5h, 3h, 4h, 4.5h, 5h, 5.5h, or 6h.

[0047] In one example, in step S10, the mass ratio of the magnesium powder, dispersant, and solvent is (3~5):(0.02~0.06):(4~6). Understandably, the mass ratio of the magnesium powder, dispersant, and solvent can be selected from any value between (3~5):(0.02~0.06):(4~6). Specifically, the mass ratio of the magnesium powder, dispersant, and solvent includes, but is not limited to, 3:0.02:4, 4:0.02:4, 4:0.03:4, 4:0.03:5, 4:0.03:6, 4:0.04:3, 4:0.04:5, 4:0.04:6, 5:0.02:4, 5:0.04:6, or 5:0.06:6. Further limiting the mass ratio of the magnesium powder, dispersant, and solvent is beneficial for improving the dispersion performance of the magnesium powder and increasing the mixing rate.

[0048] In one example, in step S10, the dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant, and JM558B dispersant. Using these dispersants can better disperse and stabilize magnesium-containing powders, reduce agglomeration, further promote uniform dispersion, and contribute to the densification of magnesium ceramics.

[0049] In one example, in step S10, the solvent comprises ethyl acetate and butyl acetate in a mass ratio of 3:(1.5~2.5). Specifically, the mass ratio of ethyl acetate to butyl acetate includes, but is not limited to, 3:1.5, 3:1.8, 3:1.9, 3:2, 3:2.1, 3:2.2, or 3:2.5. By using ethyl acetate and butyl acetate in combination, the surface tension between powders can be effectively reduced, the contact between powder particles can be improved, and the mixing effect can be enhanced; moreover, ethyl acetate and butyl acetate have high volatility and can be quickly removed during subsequent drying or degreasing processes, reducing residual content.

[0050] In one example, in step S20, the mass ratio of the slurry, the binder, and the plasticizer is 1:(0.1~0.3):(0.02~0.05). Specifically, the mass ratio of the slurry, binder, and plasticizer includes, but is not limited to, 1:0.1:0.02, 1:0.15:0.02, 1:0.17:0.02, 1:0.175:0.02, 1:0.175:0.03, 1:0.175:0.035, 1:0.2:0.03, 1:0.02:0.035, or 1:0.3:0.05. By limiting the mass ratio of the slurry, binder, and plasticizer, the bonding strength and impact resistance can be enhanced, thereby enabling the subsequently prepared talc porcelain to possess excellent strength properties.

[0051] In one example, in step S20, the adhesive comprises one or more of polyvinyl butyral and ethyl cellulose.

[0052] In one example, in step S20, the plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

[0053] In one specific example, in step S20, the plasticizer is selected from polyvinyl butyral resin with a solid content of 30%.

[0054] Understandably, in steps S10 and S20 of this application, the mixing method can be any mixing method known in the art, such as ball milling. The ball milling speed can be 10Hz to 20Hz, the ball milling time can be 4h to 10h, and the ball milling liquid-to-material ratio can be (2 to 3):1.

[0055] In one example, step S20, the step of preparing the green ceramic tile, includes:

[0056] The slurry is mixed with a binder and a plasticizer, and after degassing and casting, green ceramic tiles are prepared.

[0057] In one example, the degassing process parameters include: a vacuum degree of -0.015 MPa to -0.01 MPa and a degassing time of 20 min to 40 min. By applying negative pressure and controlling the degassing time, bubbles can be rapidly made to rise and be released; and with the addition of the binder in the aforementioned steps, the bonding performance of the material can be better improved, further enhancing the density of the material and increasing the strength of the talc porcelain provided in this application.

[0058] Understandably, this application does not limit the thickness of the green ceramic sheet or the laminate, and the thickness of both can be determined according to actual needs. In one example, the thickness of the green ceramic sheet is 150μm~300μm.

[0059] In one specific example, step S20 includes the following steps:

[0060] S210. The slurry is mixed with a binder and a plasticizer, and after degassing and casting, a cast sheet is prepared.

[0061] S220. Dry the cast film to prepare a single-layer green ceramic sheet;

[0062] S230. The single-layer green ceramic sheets are stacked, vacuum-packed, and then subjected to isostatic pressing to prepare a green body.

[0063] In step S220, the cast film can be dried by heating.

[0064] In one example, in step S30, the process parameters for isostatic pressing include: a temperature of 65℃~75℃ and a pressure of 55MPa~65MPa. Specifically, the isostatic pressing temperature includes, but is not limited to, 65℃, 66℃, 67℃, 68℃, 69℃, 70℃, 71℃, 72℃, 73℃, 74℃, or 75℃. The isostatic pressing pressure includes, but is not limited to, 55MPa, 56 MPa, 57 MPa, 58 MPa, 59 MPa, 60 MPa, 62 MPa, 63 MPa, or 65 MPa. Isostatic pressing at these temperatures and pressures can release residual stress after lamination, reduce the risk of material deformation, and enhance intermolecular interactions, increasing the material's density and thus improving the strength of the talc ceramic.

[0065] In one example, in step S40, the degreasing process parameters include: holding at 75℃~85℃ for 1h~3h, raising the temperature to 125℃~135℃ and holding for 1h~3h, raising the temperature to 345℃~355℃ at a heating rate of 0.2℃ / min~1.5℃ / min, and holding for 1.5h~2.5h. Understandably, the holding temperature in the first stage can be selected from any value between 75℃~85℃, specifically including but not limited to 75℃, 76℃, 77℃, 79℃, 80℃, 82℃, or 85℃. The holding temperature in the second stage can be selected from any value between 125℃~135℃, specifically including but not limited to 126℃, 128℃, 130℃, 133℃, or 135℃. The holding temperature for the second stage can be selected from any value between 345℃ and 355℃, specifically including but not limited to 346℃, 348℃, 350℃, 353℃, or 355℃. The heating rate includes but is not limited to 0.2℃ / min, 0.5℃ / min, 0.7℃ / min, 1℃ / min, 1.2℃ / min, or 1.5℃ / min.

[0066] Setting the heating rate to 0.2℃ / min~1.5℃ / min avoids material stress and cracking temperature caused by excessively rapid temperature changes, ensuring the stability and uniformity of the material during the degreasing process. Simultaneously, holding the material at 75℃~85℃, 125℃~135℃, and 345℃~355℃ respectively ensures the removal of moisture from the organic matter, reducing the material's porosity. Furthermore, the final holding temperature of 345℃~355℃ preheats the material, which, in conjunction with the subsequent sintering steps, further improves the material's mechanical properties.

[0067] In one example, the method for preparing the talc porcelain further includes the following steps:

[0068] S50. Level the talc porcelain that does not meet the flatness requirements.

[0069] In one example, the leveling process was performed at a temperature of 1240℃~1260℃.

[0070] A second aspect of this application provides a talc porcelain prepared by the preparation method described in any example of the first aspect of this application.

[0071] A third aspect of this application provides an application of the talc ceramic described in the second aspect of this application in the fabrication of semiconductor devices.

[0072] The following are specific examples. Unless otherwise specified, the raw materials used in the examples are all commercially available products.

[0073] Example 1

[0074] Embodiment 1 of this application provides a talc porcelain and its preparation method, including the following steps:

[0075] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0076] (2) In step (1), magnesium powder is added to dispersant SC-0505k and solvent, so that the mass ratio of magnesium powder, dispersant and solvent is 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above mixture is ball-milled at a speed of 15 Hz for 8 hours, and the ball milling material-liquid ratio is 3:1 to obtain slurry.

[0077] (3) Add PVB adhesive (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is complete, continue ball milling and mixing for 8 hours.

[0078] (4) The slurry in step (3) is degassed under vacuum for 30 minutes at a pressure of -0.01 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0079] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 70°C and a pressure of 60MPa for 50 minutes to obtain the green body.

[0080] (6) After keeping the green blank in step (5) at 80°C for 2 hours, raise the temperature to 130°C and keep it for 2 hours. Then raise the temperature to 350°C at a rate of 0.5°C / min and keep it for 2 hours to perform degreasing treatment; prepare semi-finished products.

[0081] (7) The semi-finished product in step (6) is sintered at 1280°C for 3 hours to obtain talc porcelain.

[0082] Example 2

[0083] Embodiment 2 of this application provides a talc porcelain and its preparation method, including the following steps:

[0084] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 55:18:15:12 to prepare magnesium-containing powder.

[0085] (2) In step (1), magnesium powder is added to dispersant SC-0505k and solvent, so that the mass ratio of magnesium powder, dispersant and solvent is 3:0.02:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:1.5; then the above mixture is ball-milled at a speed of 20 Hz for 8 hours, and the ball milling material-liquid ratio is 3:1 to obtain slurry.

[0086] (3) Add PVB adhesive and dibutyl phthalate with a solid content of 30% to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.1:0.02; after the addition is complete, continue ball milling and mixing for 8 hours.

[0087] (4) The slurry in step (3) is degassed under vacuum for 40 minutes at a pressure of -0.015 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0088] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 65°C and a pressure of 55MPa for 60 minutes to obtain the green body.

[0089] (6) After keeping the green blank in step (5) at 75°C for 3 hours, raise the temperature to 125°C and keep it for 2 hours. Then raise the temperature to 345°C at a heating rate of 0.2°C / min and keep it for 1.5 hours to perform degreasing treatment; prepare semi-finished products.

[0090] (7) The semi-finished product in step (6) is sintered at 1250°C for 4 hours to obtain talc porcelain.

[0091] Example 3

[0092] Embodiment 3 of this application provides a talc porcelain and its preparation method, including the following steps:

[0093] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 70:15:15:10 to prepare magnesium-containing powder.

[0094] (2) In step (1), add JM558B dispersant and solvent to the magnesium powder, so that the mass ratio of magnesium powder, dispersant and solvent is 5:0.06:6, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2.5; then the above mixture is ball-milled at a speed of 20 Hz for 8 hours, and the ball milling material-liquid ratio is 3:1 to obtain slurry.

[0095] (3) Add PVB adhesive and dibutyl phthalate with a solid content of 30% to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.3:0.05; after the addition is complete, continue ball milling and mixing for 8 hours.

[0096] (4) The slurry in step (3) is degassed under vacuum for 20 minutes at a pressure of -0.01 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0097] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 75°C and a pressure of 65MPa for 60 minutes to obtain the green body.

[0098] (6) After keeping the green blank in step (5) at 85°C for 1 hour, raise the temperature to 135°C and keep it for 1 hour, then raise the temperature to 355°C at a rate of 1.5°C / min and keep it for 2.5 hours to perform degreasing treatment; prepare semi-finished products.

[0099] (7) The semi-finished product in step (6) is sintered at 1300℃ for 2 hours to obtain talc porcelain.

[0100] Example 4

[0101] Embodiment 4 of this application provides a talc porcelain and its preparation method, including the following steps:

[0102] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0103] (2) In step (1), dispersant DP8300 and solvent are added to the magnesium powder to make the mass ratio of magnesium powder, dispersant and solvent 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above mixture is ball-milled at a speed of 15 Hz for 8 hours with a ball milling material-to-liquid ratio of 3:1 to obtain a slurry.

[0104] (3) Add PVB adhesive (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is complete, continue ball milling and mixing for 8 hours.

[0105] (4) The slurry in step (3) is degassed under vacuum for 30 minutes at a pressure of -0.01 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0106] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 70°C and a pressure of 60MPa for 50 minutes to obtain the green body.

[0107] (6) After keeping the green blank in step (5) at 80°C for 2 hours, raise the temperature to 130°C and keep it for 2 hours. Then raise the temperature to 350°C at a rate of 0.5°C / min and keep it for 2 hours to perform degreasing treatment; prepare semi-finished products.

[0108] (7) The semi-finished product in step (6) is sintered at 1280°C for 3 hours to obtain talc porcelain.

[0109] Example 5

[0110] Embodiment 5 of this application provides a talc porcelain and its preparation method, including the following steps:

[0111] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0112] (2) In step (1), DP8300 dispersant and solvent are added to the magnesium powder to make the mass ratio of magnesium powder, dispersant and solvent 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above mixture is ball-milled at a speed of 15 Hz for 8 hours with a ball milling material-to-liquid ratio of 3:1 to obtain a slurry.

[0113] (3) Add ethyl cellulose (binder) and dibutyl phthalate (plasticizer) to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is complete, continue ball milling and mixing for 8 hours.

[0114] (4) The slurry in step (3) is degassed under vacuum for 30 minutes at a pressure of -0.01 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0115] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 70°C and a pressure of 60MPa for 50 minutes to obtain the green body.

[0116] (6) After keeping the green blank in step (5) at 80°C for 2 hours, raise the temperature to 130°C and keep it for 2 hours. Then raise the temperature to 350°C at a rate of 0.5°C / min and keep it for 2 hours to perform degreasing treatment; prepare semi-finished products.

[0117] (7) The semi-finished product in step (6) is sintered at 1280°C for 3 hours to obtain talc porcelain.

[0118] Example 6

[0119] Embodiment 6 of this application provides a talc porcelain and its preparation method, including the following steps:

[0120] (1) Weigh talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0121] (2) In step (1), dispersant JM558B and solvent are added to the magnesium powder to make the mass ratio of magnesium powder, dispersant and solvent 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above mixture is ball-milled at a speed of 15 Hz for 8 hours with a ball milling material-to-liquid ratio of 3:1 to obtain a slurry.

[0122] (3) Add PVB adhesive (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry in step (2) so that the mass ratio of slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is complete, continue ball milling and mixing for 8 hours.

[0123] (4) The slurry in step (3) is degassed under vacuum for 30 minutes at a pressure of -0.01 MPa and then cast into a film to prepare a cast sheet; the cast sheet is dried at a temperature of 30℃~95℃ to prepare a single-layer green ceramic sheet.

[0124] (5) The single-layer green ceramic pieces from step (4) are stacked and vacuum-packed. Then, isostatic pressing is performed at a temperature of 70°C and a pressure of 60MPa for 50 minutes to obtain the green body.

[0125] (6) After keeping the green blank in step (5) at 80°C for 2 hours, raise the temperature to 130°C and keep it for 2 hours. Then raise the temperature to 350°C at a rate of 0.5°C / min and keep it for 2 hours to perform degreasing treatment; prepare semi-finished products.

[0126] (7) The semi-finished product in step (6) is sintered at 1280°C for 4 hours to obtain talc porcelain.

[0127] Comparative Example 1

[0128] Comparative Example 1 and Example 1 are basically the same, except that in step (1), the magnesium powder includes talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of 80:5:5:10.

[0129] Comparative Example 2

[0130] Comparative Example 2 is basically the same as Example 1, the main difference being that in step (1), the magnesium-containing powder does not include barium carbonate, but specifically includes: weighing talc, silicon dioxide and aluminum oxide in a mass ratio of 72:20:8. Magnesium-containing powder is prepared.

[0131] Comparative Example 3

[0132] Comparative Example 3 and Example 1 are basically the same, the main difference being that the process parameters for degreasing in step (6) are different, specifically including: after the green blank in step (5) is kept at 100°C for 2 hours, it is heated to 210°C and kept for 2 hours, and then heated to 350°C at a heating rate of 0.5°C / min and kept for 2 hours to carry out degreasing treatment; and a semi-finished product is prepared.

[0133] Comparative Example 4

[0134] Comparative Example 4 is basically the same as Example 1. The main difference is that the process parameters for sintering in step (7) are different. Specifically, the semi-finished product in step (6) is sintered at 1350°C for 4 hours to obtain talc porcelain.

[0135] The performance of the talc ceramics in the examples and comparative examples was tested, and the corresponding test results are shown in Table 1.

[0136] Performance testing:

[0137] (1) The water absorption rate was tested according to GB / T 25995-2010;

[0138] (2) Test the bending strength according to GB / T 39826-2021.

[0139] Table 1

[0140]

[0141] In Comparative Examples 1 and 2, the composition and mass ratio of magnesium powder resulted in talc ceramics with poor strength and high water absorption. In Comparative Example 3, the different degreasing process parameters of the green body led to slightly inferior technical results. In Comparative Example 4, the sintering temperature was too high, which caused over-sintering of the talc ceramics, affecting its strength and water absorption.

[0142] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0143] The embodiments described above are merely illustrative of several implementation methods of this application, intended to facilitate a detailed understanding of the technical solutions of this application, but should not be construed as limiting the scope of protection of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. It should be understood that technical solutions obtained by those skilled in the art based on the technical solutions provided in this application through logical analysis, reasoning, or limited experimentation are all within the scope of protection of the appended claims. Therefore, the scope of protection of this patent application should be determined by the content of the appended claims, and the specification can be used to interpret the content of the claims.

Claims

1. A method for preparing talc porcelain, characterized in that, Includes the following steps: A slurry is prepared by mixing magnesium-containing powder, dispersant, and solvent. The slurry is mixed with a binder and a plasticizer, and after molding, raw ceramic tiles are prepared. After the green ceramic sheets are stacked, they are subjected to isostatic pressing to prepare a green body; The talc porcelain is prepared by degreasing and sintering the green body; The magnesium-containing powder comprises talc, barium carbonate, silicon dioxide, and aluminum oxide in a mass ratio of (50~70):(6~18):(15~25):(4~12). The degreasing process parameters include: holding at 75℃~85℃ for 1h~3h, raising the temperature to 125℃~135℃ and holding for 1h~3h, raising the temperature to 345℃~355℃ at a heating rate of 0.2℃ / min~1.5℃ / min, and holding for 1.5h~2.5h. The sintering process parameters include: sintering temperature of 1250℃~1300℃ and sintering time of 2h~6h.

2. The preparation method according to claim 1, characterized in that, The mass ratio of the magnesium powder, dispersant, and solvent is (3~5):(0.02~0.06):(4~6).

3. The preparation method according to claim 1, characterized in that, The dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant, and JM558B dispersant.

4. The preparation method according to claim 1, characterized in that, The solvent comprises ethyl acetate and butyl acetate in a mass ratio of 3:(1.5~2.5).

5. The preparation method according to claim 1, characterized in that, The step of mixing the slurry with the binder and plasticizer has one or more of the following characteristics: (1) The mass ratio of the slurry, the binder and the plasticizer is 1:(0.1~0.3):(0.02~0.05); (2) The adhesive comprises one or more of polyvinyl butyral and ethyl cellulose; (3) The plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

6. The preparation method according to claim 1, characterized in that, The steps for preparing raw ceramic shards include: The slurry is mixed with a binder and a plasticizer, and after degassing and casting, green ceramic tiles are prepared. The degassing process parameters include: a vacuum degree of -0.015 MPa to -0.01 MPa and a degassing time of 20 min to 40 min.

7. The preparation method according to any one of claims 1 to 6, characterized in that, The process parameters for the isostatic pressing treatment include: temperature of 65℃~75℃ and pressure of 55MPa~65MPa.

8. A type of talc porcelain, characterized in that, It is prepared by the preparation method according to any one of claims 1 to 7.

9. A semiconductor device, characterized in that, Includes the steatite porcelain as described in claim 8.

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