Process file generation method and semiconductor process equipment

CN120688462APending Publication Date: 2025-09-23BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202510685658.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-26
Publication Date
2025-09-23

AI Technical Summary

Technical Problem

In the prior art, during the process of generating process files for semiconductor process equipment, process instructions are large in scale and cannot be flexibly adjusted, resulting in low operating efficiency, high maintenance difficulty, redundant process instructions for different equipment types, and complex code maintenance.

Method used

The process template files corresponding to various process types are stored in advance. The target process template file is automatically selected to generate the process file through the process recipe edited by the user. The process instructions are separated from the code and maintained by the template file, so that the sequence and content of the process instructions can be flexibly adjusted and modified.

Benefits of technology

The efficiency of process file generation is improved, the number of instructions in the process files is reduced, the process running time is shortened, and the operating efficiency and equipment production capacity of semiconductor process equipment are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a process file generation method and semiconductor process equipment. In the process file generation method, a process formula edited by a user is obtained, a target process template file is determined from a plurality of process template files according to a process type, and a process file is generated according to a process set value and the target process template file. In the generation mode, the plurality of process template files are created in advance, and the target process template file can be automatically selected to generate the process file according to the process formula edited by the user, so that the generation efficiency of the process file is improved; meanwhile, according to the generation mode, the process instructions are separated from the codes, the process instructions of the corresponding process types are maintained through the process template file, flexible adjustment of the sequence of the process instructions is achieved, flexible modification of the process instructions is achieved, the number of the process instructions in the process file is reduced, and the processing efficiency is improved. Therefore, the process operation time of the process file is shortened, and the process operation efficiency of the semiconductor process equipment is improved.
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