A high-concentration electronic-grade hydrogen peroxide purification device

Abstract

The application relates to the technical field of electronic-grade hydrogen peroxide production, in particular to a high-concentration electronic-grade hydrogen peroxide purification device, which comprises a production operation table, a replacement linkage column is rotationally connected to the inner side of the production operation table, purification tanks are arranged at the two ends of the replacement linkage column, non-stop replacement assemblies are arranged at the top end and the bottom end of the replacement linkage column, and the non-stop replacement assembly comprises a pipeline switching mechanism and a transmission mechanism. By starting the non-stop replacement assembly, the two purification tanks are driven to rotate, the liquid inlet and outlet pipelines of the long-time used purification tank are closed in the rotating process, and the liquid inlet and outlet pipelines of the standby used purification tank are opened, so that when the purification tank with the declined purification effect is replaced, the electronic-grade hydrogen peroxide production line continues to operate, the liquid loss amount caused by the replacement of the filter core is reduced, and the production efficiency of the hydrogen peroxide production line and the maintenance time of the staff are improved.

Description

Technical Field

[0001] This invention relates to the field of electronic-grade hydrogen peroxide production technology, and more specifically, to a purification device for high-concentration electronic-grade hydrogen peroxide. Background Technology

[0002] Hydrogen peroxide (chemical formula H2O2) is a colorless liquid composed of hydrogen and oxygen elements, containing additional oxygen atoms. It is stable at room temperature and pressure, but it has strong oxidizing properties. Hydrogen peroxide has a wide range of applications in many fields. High-concentration electronic-grade hydrogen peroxide is commonly used in semiconductor manufacturing processes, electronic device production, and new energy fields.

[0003] Existing electronic-grade hydrogen peroxide, due to its much higher concentration than ordinary hydrogen peroxide, requires multiple filtration processes during its production and purification, which affects the purification efficiency. When the purification efficiency decreases, the hydrogen peroxide production line needs to be shut down during the replacement of the filter cartridges. The downtime of the electronic-grade hydrogen peroxide production line is approximately 2-3 hours, resulting in a liquid loss of about 0.3 tons. Therefore, the downtime for filter cartridge replacement affects the production efficiency of the hydrogen peroxide purification production line.

[0004] Based on this, the present invention discloses a purification device for high-concentration electronic-grade hydrogen peroxide. Summary of the Invention

[0005] To address the issue raised in the background art that existing electronic-grade hydrogen peroxide, due to its significantly higher concentration than ordinary hydrogen peroxide, requires multiple filtration processes during production and purification, thus affecting purification efficiency, and that the production line needs to be shut down during filter replacement when purification efficiency decreases (approximately 2-3 hours), resulting in a liquid loss of about 0.3 tons), this invention provides a high-concentration electronic-grade hydrogen peroxide purification device. This device includes a production operating table with a replacement linkage column rotatably connected to its inner side. Purification tanks are located at both ends of the replacement linkage column, and non-stop replacement components are installed at both the top and bottom of the column. These non-stop replacement components include: The pipeline switching mechanism is located outside the replacement linkage column and at a position corresponding to the inlet and outlet of the purification tank. It is used to cooperate with the switching of the purification tank. The transmission mechanism is located at the top of the production control table and inside the production control table. It is used to drive the pipeline switching mechanism.

[0006] Preferably, the non-stop replacement assembly includes a replacement connector, an annular connector, a mounting screw, an inlet horn can, and an outlet horn can. The replacement connector is fixedly connected to the center of the replacement linkage column, and the annular connector is fixedly connected to the center of the purification tank. The mounting screw is rotatably connected to the annular connector near the replacement connector, and the mounting screw is threadedly connected to the replacement connector. The inlet horn can is fixedly connected to the top of the purification tank, and the outlet horn can is fixedly connected to the bottom of the purification tank.

[0007] Preferably, the pipeline switching mechanism includes a fixed frame, a stabilizing pipe seat, a semi-ring pipe, and an output connecting pipe. The fixed frame is fixedly connected to the top and bottom of the inner side of the production operating table. The stabilizing pipe seat is fixedly connected to the inner side of the fixed frame near the end of the replacement connecting seat. The semi-ring pipe is fixedly connected to the inner side of the stabilizing pipe seat. The output connecting pipe is fixedly connected to both ends of the semi-ring pipe.

[0008] Preferably, the pipeline switching mechanism further includes a ball valve, a linkage gear, a first liquid guiding hose, and a replacement connector. The output connecting pipe is internally equipped with a ball valve, and the transmission end of the ball valve is fixedly connected to the linkage gear. The end of the output connecting pipe away from the replacement linkage column is detachably connected to the first liquid guiding hose, and the end of the first liquid guiding hose away from the output connecting pipe is detachably connected to the replacement connector. The replacement connector located at the top of the production operating table is detachably connected to the inlet horn tank, and the replacement connector located at the bottom of the production operating table is detachably connected to the outlet horn tank.

[0009] Preferably, the pipeline switching mechanism further includes a transmission disc and an annular rack. The transmission disc is fixedly connected to the outer side of the replacement linkage column and to the corresponding positions of the inlet and outlet horn tanks. An annular rack is fixedly connected to the ring side of the transmission disc, and the annular rack meshes with the linkage gear.

[0010] Preferably, the non-stop replacement assembly further includes a second liquid guiding hose, a liquid inlet air pipe, and a liquid outlet pipe. A second liquid guiding hose is provided on one side of the stabilizing pipe seat. The end of the second liquid guiding hose located at the top of the production operating table away from the corresponding stabilizing pipe seat is detachably connected to a liquid inlet air pipe, which is fixedly connected to the production operating table. The end of the second liquid guiding hose located at the bottom of the production operating table away from the corresponding stabilizing pipe seat is detachably connected to a liquid outlet pipe, which is fixedly connected to the production operating table.

[0011] Preferably, the transmission mechanism includes a first bevel gear, a second bevel gear, and a servo motor. The first bevel gear is fixedly connected to the top of the replacement linkage column and to the outer side inside the production operating table. The second bevel gear is rotatably connected to the inside of the production operating table at a position corresponding to the first bevel gear. The first bevel gear and the second bevel gear are meshed together. The servo motor is fixedly connected to the inside of the production operating table at a position corresponding to the first bevel gear. The output end of the servo motor is fixedly connected to the second bevel gear.

[0012] Preferably, the purification tank is provided with a resin separation filter element inside, and multiple fixing blocks are fixedly connected to the outside of the resin separation filter element. An electrolysis column is fixedly connected to the end of the corresponding fixing block away from the resin separation filter element.

[0013] Preferably, a membrane separation filter element is fixedly connected to the center of the inner side of the resin separation filter element, and multiple liquid guiding holes are opened on the outer side of the membrane separation filter element. An activated carbon filter element is disposed between the membrane separation filter element and the resin separation filter element, and the activated carbon filter element is fixedly connected to the resin separation filter element.

[0014] Preferably, the bottom end of the membrane separation filter element extends through the resin separation filter element into the purification tank, and a liquid guide tube is fixedly connected to the end of the resin separation filter element extending into the purification tank. A fixing tube is fixedly connected to the outside of the liquid guide tube, and the fixing tube is fixedly connected to the liquid outlet canister.

[0015] 1. In this high-concentration electronic-grade hydrogen peroxide purification device, through the structural design of the non-stop replacement component and purification tank, when the purification effect of the purification tank that has been used for a long time decreases, the non-stop replacement component is activated, which drives the two purification tanks to rotate. During the rotation, the inlet and outlet liquid pipes of the purification tank that has been used for a long time are closed, while the inlet and outlet water pipes of the purification tank that is in standby are opened. This allows the electronic-grade hydrogen peroxide production line to continue operating while the purification tank with decreased purification effect is being replaced, reducing the amount of liquid loss caused by downtime for filter replacement, and improving the production efficiency of the hydrogen peroxide production line and the maintenance time for staff.

[0016] 2. In this high-concentration electronic-grade hydrogen peroxide purification device, through the coordinated design of the pipeline switching mechanism and the purification tank structure, when the two purification tanks are driven to rotate around the switching linkage column by the transmission mechanism, the rotation of the ring rack simultaneously drives the ball valves located on both sides to rotate clockwise and counterclockwise, thereby closing one output connection pipe and opening the other output connection pipe, avoiding flow fluctuations of hydrogen peroxide during the transportation process, and converting a single power input into multi-directional precise action output, ensuring the stability of hydrogen peroxide transportation.

[0017] 3. In this high-concentration electronic-grade hydrogen peroxide purification device, through the structural design of resin separation filter, electrolysis column, liquid guiding hole and activated carbon filter, when high-purity water and oxygen are injected into the purification tank through the liquid outlet pipe, they are electrolyzed by the electrolysis column to generate high-concentration hydrogen peroxide, which then adsorbs metal ions through the resin separation filter. At the same time, as the water pressure in the purification tank increases, the hydrogen peroxide that has permeated into the resin separation filter passes through the activated carbon filter to remove pigments and odors, and then passes through the liquid guiding hole to filter dissolved impurities. Through multi-stage purification, the carbon content in the hydrogen peroxide is reduced, making it reach a purity suitable for microelectronics manufacturing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structure of the second liquid guiding hose and the liquid inlet gas pipe of the present invention; Figure 3 This is a schematic diagram of the liquid outlet pipe of the present invention; Figure 4 This is a schematic diagram of the structure of the first fluid guiding hose and the replacement connector of the present invention; Figure 5 This is a schematic diagram of the linkage gear and annular rack of the present invention; Figure 6 This is a schematic diagram of the structure of the stabilizing pipe seat and semi-circular pipe of the present invention; Figure 7 This is a schematic diagram of the purification tank of the present invention; Figure 8 This is a schematic diagram of the internal structure of the purification tank of the present invention; Figure 9 This is a schematic diagram of the structure of the fixing block and electrolysis column of the present invention; Figure 10 This is a schematic diagram of the structure of the activated carbon filter element of the present invention.

[0019] The meanings of the labels in the diagram are as follows: 1. Production operating table; 2. Replacement of linkage column; 3. Replacement of connector; 4. Purification tank; 5. Annular connector; 6. Installation of stabilizing screw; 7. Liquid inlet horn tank; 8. Fixing frame; 9. Stabilizing tube seat; 10. Semi-circular pipe; 11. Output connecting pipe; 12. Ball valve; 13. Linkage gear; 14. First liquid guiding hose; 15. Replacement of connector; 16. Transmission disc; 17. Annular rack; 18. Second liquid guiding hose; 19. Liquid inlet gas pipe; 20. Liquid outlet pipe; 21. First bevel gear; 22. Second bevel gear; 23. Servo motor; 24. Liquid outlet horn tank; 25. Resin separation filter element; 26. Fixing block; 27. Electrolysis column; 28. Membrane separation filter element; 29. ​​Liquid guiding hole; 30. Activated carbon filter element; 31. Liquid guiding pipe; 32. Fixing pipe. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Therefore, this invention provides a purification device for high-concentration electronic-grade hydrogen peroxide, including a production operating table 1. A replacement linkage column 2 is rotatably connected to the inner side of the production operating table 1. To facilitate the production of electronic-grade hydrogen peroxide, purification tanks 4 are provided at both ends of the replacement linkage column 2. A non-stop replacement assembly is provided at both the top and bottom ends of the replacement linkage column 2. The non-stop replacement assembly includes: The pipeline switching mechanism is located outside the replacement linkage column 2 and at a position corresponding to the inlet and outlet of the purification tank 4. It is used to cooperate with the switching of the purification tank 4. The transmission mechanism is located at the top of the production operating table 1 and inside the production operating table 1, and is used to drive the pipeline switching mechanism to operate.

[0022] Example 1 like Figures 1-10 As shown, the non-stop replacement assembly includes a replacement connector 3, an annular connector 5, a mounting screw 6, an inlet horn tank 7, and an outlet horn tank 24. To facilitate the disassembly and replacement of the purification tank 4, the replacement connector 3 is fixedly connected to the center of the replacement linkage column 2, and the annular connector 5 is fixedly connected to the center of the purification tank 4. The mounting screw 6 is rotatably connected to the annular connector 5 near the replacement connector 3. The mounting screw 6 is threadedly connected to the replacement connector 3. The inlet horn tank 7 is fixedly connected to the top of the purification tank 4, which facilitates the injection of high-purity water and oxygen into the purification tank 4. The outlet horn tank 24 is fixedly connected to the bottom of the purification tank 4, which facilitates the output of purified electronic-grade hydrogen peroxide.

[0023] The pipeline switching mechanism includes a fixed frame 8, a stabilizing pipe seat 9, a semi-ring pipe 10, and an output connecting pipe 11. The fixed frame 8 is fixedly connected to the top and bottom of the inner side of the production operating table 1. The stabilizing pipe seat 9 is fixedly connected to the inner side of the fixed frame 8 near the end of the replacement connecting seat 3. The semi-ring pipe 10 is fixedly connected to the inner side of the stabilizing pipe seat 9. The output connecting pipe 11 is fixedly connected to both ends of the semi-ring pipe 10.

[0024] The pipeline switching mechanism also includes a ball valve 12, a linkage gear 13, a first liquid guiding hose 14, and a replacement connector 15. The ball valve 12 is installed inside the output connecting pipe 11. The transmission end of the ball valve 12 is fixedly connected to the linkage gear 13. The end of the output connecting pipe 11 away from the replacement linkage column 2 is detachably connected to the first liquid guiding hose 14. The end of the first liquid guiding hose 14 away from the output connecting pipe 11 is detachably connected to the replacement connector 15. The replacement connector 15 located at the top of the production operating table 1 is detachably connected to the inlet horn tank 7, and the replacement connector 15 located at the bottom of the production operating table 1 is detachably connected to the outlet horn tank 24, thereby facilitating the subsequent disassembly and replacement of the purification tank 4.

[0025] To facilitate simultaneous operation of the two corresponding ball valves 12, the pipeline switching mechanism also includes a transmission disc 16 and an annular rack 17. The transmission disc 16 is fixedly connected to the outer side of the replacement linkage column 2 and to the corresponding positions of the inlet horn tank 7 and the outlet horn tank 24. The annular rack 17 is fixedly connected to the ring side of the transmission disc 16, and the annular rack 17 is meshed with the linkage gear 13.

[0026] The non-stop replacement assembly also includes a second liquid guiding hose 18, a liquid inlet gas pipe 19, and a liquid outlet pipe 20. The second liquid guiding hose 18 is provided on one side of the stabilizing pipe seat 9. The end of the second liquid guiding hose 18 located at the top of the production operating table 1 away from the corresponding stabilizing pipe seat 9 is detachably connected to the liquid inlet gas pipe 19, so as to facilitate the injection of high-purity water and oxygen into the purification tank 4 through the liquid inlet gas pipe 19. The liquid inlet gas pipe 19 is fixedly connected to the production operating table 1. The second liquid guiding hose 18 located at the bottom of the production operating table 1 away from the corresponding stabilizing pipe seat 9 is detachably connected to the liquid outlet pipe 20. The liquid outlet pipe 20 is fixedly connected to the production operating table 1, so as to facilitate the output of purified electronic-grade hydrogen peroxide through the liquid outlet pipe 20.

[0027] During operation, the equipment connects the inlet gas pipe 19 to the external liquid delivery pipeline and oxygen pipeline. A mixture of high-purity water and oxygen is injected into the semi-ring pipe 10 and the stable pipe seat 9 through the inlet gas pipe 19 and the second liquid guide hose 18. Then, the mixture of high-purity water and oxygen is injected into the purification tank 4 through the output connection pipe 11 and the first liquid guide hose 14 via the replacement connector 15 for purification and filtration. The purified and filtered electronic-grade hydrogen peroxide is output through the outlet trumpet tank 24 to the outlet pipe 20, and then transported to the bottling area for unified bottling through the external delivery pipeline connected to the outlet pipe 20.

[0028] When the purification effect of the purification tank 4 decreases after prolonged use, the operator drives the replacement linkage column 2 to rotate. This causes the two purification tanks 4 connected to it to rotate 45° clockwise. Simultaneously, the rotation of the replacement linkage column 2 and the purification tanks 4 drives the transmission disc 16 fixed to it to rotate. The ring rack 17 on the transmission disc 16 then drives the ball valve 12 to rotate through the linkage gear 13. This causes the ring rack 17 to drive the ball valve 12 corresponding to the purification tank 4 in use to rotate counterclockwise in the output connection pipe 11 to close. At the same time, the ring rack 17 drives the ball valve 12 corresponding to the purification tank 4 in standby to rotate clockwise in the output connection pipe 11 to open.

[0029] When the inlet of the purification tank 4 in use is completely closed, the inlet of the purification tank 4 to be used is opened simultaneously, and the electronic-grade hydrogen peroxide production line completes the switching of the purification tank 4 without stopping the machine. After the purification tank 4 to be used is put into use, the staff removes the corresponding replacement connector 15 from the unused purification tank 4, and then removes the installation fixing screw 6 from the replacement connector 3 by rotating the installation fixing screw 6. The purification tank 4 with reduced purification effect is then removed. After the purification tank 4 with reduced purification effect is removed, the new purification tank 4 is installed by reversing the above steps, which facilitates the replacement of the purification tank 4 without stopping the machine next time.

[0030] Through the non-stop replacement component and the structural design of the purification tank 4, when the purification effect of the purification tank 4 decreases after long-term use, the non-stop replacement component is activated, which drives the two purification tanks 4 to rotate. During the rotation, the inlet and outlet liquid pipes of the long-term used purification tank 4 are closed, while the inlet and outlet water pipes of the standby purification tank 4 are opened. This allows the electronic-grade hydrogen peroxide production line to continue operating while the purification tank 4 with decreased purification effect is being replaced, reducing the amount of liquid loss caused by downtime for filter replacement and improving the production efficiency of the hydrogen peroxide production line and the maintenance time for staff.

[0031] Example 2 like Figures 1-10 As shown, in order to facilitate the rotation of the replacement linkage column 2 and the purification tank 4, the transmission mechanism includes a first bevel gear 21, a second bevel gear 22 and a servo motor 23. The first bevel gear 21 is fixedly connected to the top of the replacement linkage column 2 and located on the outer side inside the production operating table 1. In order to facilitate the rotation of the first bevel gear 21, the second bevel gear 22 is rotatably connected inside the production operating table 1 at a position corresponding to the first bevel gear 21. The first bevel gear 21 and the second bevel gear 22 are meshed. The servo motor 23 is fixedly connected inside the production operating table 1 at a position corresponding to the first bevel gear 21. The output end of the servo motor 23 is fixedly connected to the second bevel gear 22.

[0032] During operation, when the replacement linkage column 2 needs to be rotated to replace the purification tank 4, the operator starts the servo motor 23, causing the output end of the servo motor 23 to drive the second bevel gear 22 to rotate. The second bevel gear 22 then drives the replacement linkage column 2 to rotate through the first bevel gear 21. When the two purification tanks 4 are driven to rotate around the replacement linkage column 2 through the transmission mechanism, the rotation of the ring rack 17 simultaneously drives the ball valves 12 located on both sides to rotate clockwise and counterclockwise. Thus, when one output connection pipe 11 is closed, the other output connection pipe 11 is opened, avoiding flow fluctuations of hydrogen peroxide during transportation. This transforms a single power input into multi-directional precise action output, ensuring the stability of hydrogen peroxide transportation.

[0033] Example 3 like Figures 1-10 As shown, in order to purify electronic-grade hydrogen peroxide, a resin separation filter element 25 is installed inside the purification tank 4, which facilitates the adsorption of metal ions by the hydrogen peroxide through the resin separation filter element 25. Multiple fixing blocks 26 are fixedly connected to the outside of the resin separation filter element 25, and an electrolysis column 27 is fixedly connected to the end of the fixing block 26 away from the resin separation filter element 25, which facilitates the electrolysis of high-purity water and oxygen injected into the purification tank 4 to form hydrogen peroxide through the electrolysis column 27.

[0034] A membrane separation filter element 28 is fixedly connected to the center of the inner side of the resin separation filter element 25. Multiple liquid guiding holes 29 are opened on the outer side of the membrane separation filter element 28 to facilitate the filtration of dissolved impurities in hydrogen peroxide through the liquid guiding holes 29. An activated carbon filter element 30 is arranged between the membrane separation filter element 28 and the resin separation filter element 25 to facilitate the removal of pigments and odors from hydrogen peroxide through the activated carbon filter element 30. The activated carbon filter element 30 is fixedly connected to the resin separation filter element 25.

[0035] To facilitate the discharge of purified hydrogen peroxide from the purification tank 4, the bottom end of the membrane separation filter element 28 extends through the resin separation filter element 25 into the interior of the purification tank 4. The end of the resin separation filter element 25 extending into the interior of the purification tank 4 is fixedly connected to a liquid guide tube 31. A fixing tube 32 is fixedly connected to the outside of the liquid guide tube 31. The fixing tube 32 is fixedly connected to the liquid outlet canister 24.

[0036] During operation, high-purity water and oxygen are injected into the purification tank 4 through the outlet pipe 20. The hydrogen peroxide is electrolyzed through the electrolysis column 27 to generate a high concentration. Then, the hydrogen peroxide is adsorbed by metal ions through the resin separation filter element 25. At the same time, as the water pressure in the purification tank 4 increases, the hydrogen peroxide that has permeated into the resin separation filter element 25 passes through the activated carbon filter element 30 to remove pigments and odors. Then, dissolved impurities are filtered through the liquid guide hole 29. Through multi-stage purification, the carbon content in the hydrogen peroxide is reduced, making it reach a purity suitable for microelectronics manufacturing.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A purification device for high-concentration electronic-grade hydrogen peroxide, comprising a production operating table (1), characterized in that: The production operating table (1) is rotatably connected to a replacement linkage column (2). Purification tanks (4) are installed at both ends of the replacement linkage column (2). A non-stop replacement assembly is installed at both the top and bottom of the replacement linkage column (2). The non-stop replacement assembly includes: The pipeline switching mechanism is located outside the replacement linkage column (2) and at a position corresponding to the inlet and outlet of the purification tank (4). It is used to cooperate with the switching of the purification tank (4). The transmission mechanism is located at the top of the production operating table (1) and inside the production operating table (1), and is used to drive the pipeline switching mechanism to operate. A replacement connecting seat (3) is fixedly connected to the center of the replacement linkage column (2), and an annular connecting seat (5) is fixedly connected to the center of the purification tank (4). An installation and stabilizing screw (6) is rotatably connected to the annular connecting seat (5) near the replacement connecting seat (3). The installation and stabilizing screw (6) is threadedly connected to the replacement connecting seat (3). An inlet horn can (7) is fixedly connected to the top of the purification tank (4), and an outlet horn can (24) is fixedly connected to the bottom of the purification tank (4). The purification tank (4) is equipped with a resin separation filter element (25). Multiple fixing blocks (26) are fixedly connected to the outside of the resin separation filter element (25). An electrolysis column (27) is fixedly connected to the end of the fixing block (26) away from the resin separation filter element (25). The pipeline switching mechanism includes a fixed frame (8), a stabilizing pipe seat (9), a semi-ring pipe (10), and an output connecting pipe (11). The top and bottom of the production operating table (1) are fixedly connected to the fixed frame (8). The inner side of the fixed frame (8) near the end of the replacement connecting seat (3) is fixedly connected to the stabilizing pipe seat (9). The inner side of the stabilizing pipe seat (9) is fixedly connected to the semi-ring pipe (10). The two ends of the semi-ring pipe (10) are fixedly connected to the output connecting pipe (11). The pipeline switching mechanism also includes a ball valve (12), a linkage gear (13), a first liquid guiding hose (14), and a replacement connector (15). The output connecting pipe (11) is equipped with a ball valve (12). The transmission end of the ball valve (12) is fixedly connected to the linkage gear (13). The end of the output connecting pipe (11) away from the replacement linkage column (2) is detachably connected to the first liquid guiding hose (14). The end of the first liquid guiding hose (14) away from the output connecting pipe (11) is detachably connected to the replacement connector (15). The replacement connector (15) located at the top of the production operating table (1) is detachably connected to the inlet horn tank (7). The replacement connector (15) located at the bottom of the production operating table (1) is detachably connected to the outlet horn tank (24). The pipeline switching mechanism also includes a transmission disc (16) and an annular rack (17). The transmission disc (16) is fixedly connected to the outer side of the replacement linkage column (2) and to the corresponding positions of the inlet horn tank (7) and the outlet horn tank (24). The annular rack (17) is fixedly connected to the ring side of the transmission disc (16). The annular rack (17) meshes with the linkage gear (13).

2. The purification device for high-concentration electronic-grade hydrogen peroxide according to claim 1, characterized in that: The non-stop replacement assembly also includes a second liquid guiding hose (18), a liquid inlet air pipe (19), and a liquid outlet pipe (20). The second liquid guiding hose (18) is provided on one side of the stabilizing pipe seat (9). The end of the second liquid guiding hose (18) located at the top of the production operating table (1) away from the corresponding stabilizing pipe seat (9) is detachably connected to the liquid inlet air pipe (19). The liquid inlet air pipe (19) is fixedly connected to the production operating table (1). The end of the second liquid guiding hose (18) located at the bottom of the production operating table (1) away from the corresponding stabilizing pipe seat (9) is detachably connected to the liquid outlet pipe (20). The liquid outlet pipe (20) is fixedly connected to the production operating table (1).

3. The purification device for high-concentration electronic-grade hydrogen peroxide according to claim 1, characterized in that: The transmission mechanism includes a first bevel gear (21), a second bevel gear (22), and a servo motor (23). The first bevel gear (21) is fixedly connected to the top of the replacement linkage column (2) and to the outside of the production operating table (1). The second bevel gear (22) is rotatably connected to the inside of the production operating table (1) and to the corresponding position of the first bevel gear (21). The first bevel gear (21) and the second bevel gear (22) are meshed. The servo motor (23) is fixedly connected to the inside of the production operating table (1) and to the corresponding position of the first bevel gear (21). The output end of the servo motor (23) is fixedly connected to the second bevel gear (22).

4. The purification device for high-concentration electronic-grade hydrogen peroxide according to claim 1, characterized in that: A membrane separation filter element (28) is fixedly connected to the center of the inner side of the resin separation filter element (25). Multiple liquid guiding holes (29) are opened on the outer side of the membrane separation filter element (28). An activated carbon filter element (30) is provided between the membrane separation filter element (28) and the resin separation filter element (25). The activated carbon filter element (30) is fixedly connected to the resin separation filter element (25).

5. The purification device for high-concentration electronic-grade hydrogen peroxide according to claim 4, characterized in that: The bottom end of the membrane separation filter element (28) extends through the resin separation filter element (25) into the purification tank (4). The end of the resin separation filter element (25) extending into the purification tank (4) is fixedly connected to a liquid guide tube (31). A fixing tube (32) is fixedly connected to the outside of the liquid guide tube (31). The fixing tube (32) is fixedly connected to the liquid outlet canister (24).

Images