Vacuum simulation test device for actuator and test method thereof

Abstract

The application discloses a vacuum simulation testing device of an actuator and a testing method thereof. The vacuum simulation testing device of the actuator comprises a support, a lifting module connected to the support, a load unit connected to a moving end of the lifting module, and a driving unit for driving the lifting module to perform lifting action. The load unit is used for loading the actuator to be tested. The driving unit drives the lifting module to lift under a set torque, and synchronously drives the load unit to simulate the stress state of the actuator under a vacuum state. The vacuum condition of the actual working condition of the actuator is simulated by the lifting module, the driving unit and the load unit, so that the off-line working condition parameter detection of the actuator is realized. Compared with the existing online mode, the cost is lower, the time consumption is shorter, and the equipment testing efficiency is significantly improved.

Description

Technical Field

[0001] This invention relates to the field of testing technology for thin film deposition equipment, and more particularly to a vacuum simulation testing device and testing method for an actuator. Background Technology

[0002] In the semiconductor industry, especially in CVD (Chemical Vapor Deposition) equipment, the actuators are mostly operated in a vacuum environment. When the actuators malfunction or the component design needs to be optimized, it is difficult to test them on the machine. Machine testing is conducted under vacuum conditions, but switching between vacuum and atmospheric conditions takes a long time and is expensive, resulting in high testing costs.

[0003] The CVD actuator needs to set a torque alarm value during operation. In order to ensure that the PIN (ejector pin) bears a moderate load during the lifting process to protect the wafer, the load torque fed back by the actuator motor will change when different custom parts are replaced. The torque alarm value needs to be reset. This requires testing on an offline test bench to reset the torque alarm value, which also leads to obvious drawbacks of online testing. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a vacuum simulation testing device and testing method for actuators, so as to solve the technical problems of high cost and long time consumption in testing existing actuators under vacuum conditions.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] In a first aspect, embodiments of the present invention provide a vacuum simulation testing device for an actuator, comprising: a support, a lifting module connected to the support, a load unit connected to the movable end of the lifting module, and a drive unit for driving the lifting module to perform lifting actions; the load unit is used to load the actuator to be tested, and the drive unit drives the lifting module to lift and lower under a set torque, simultaneously driving the load unit to simulate the force state of the actuator under vacuum.

[0007] The lifting module is a linear lead screw module.

[0008] The linear lead screw module is a ball screw.

[0009] The drive unit is a servo motor.

[0010] The load unit is a robotic arm.

[0011] The bracket is also connected to the base, which includes a top support plate, and the actuator to be tested is connected to the space below the top support plate.

[0012] The actuator is a lifting and lowering module that performs the lifting and lowering action of the heating unit of the CVD equipment.

[0013] Secondly, embodiments of the present invention provide a vacuum simulation testing method, which is performed by a vacuum simulation testing device of the actuator as described in any of the above claims, and includes the following steps:

[0014] Calculate the vacuum force that the actuator under test will withstand under the set vacuum conditions;

[0015] Calculate the load torque of the drive unit under the current vacuum force conditions;

[0016] Set the load torque to the current test torque value of the drive unit;

[0017] Control the actuator to perform lifting and lowering actions, and simultaneously test the operating parameters of the actuator.

[0018] The formula for calculating the vacuum force is: Fv=P*πR 2 Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external ambient air pressure, and R is the radius of the bellows of the actuator.

[0019] The formula for calculating the load torque is as follows:

[0020] F = Fv - F A -mg; where F A P represents the reaction force of the bellows on the actuator. B η is the pitch of the linear screw module, i is the reduction ratio between the drive unit and the lifting module, η is the mechanical efficiency, μ0 is the friction coefficient of the linear screw module, F0 is the preload of the linear screw module, F is the axial load, and m is the load mass.

[0021] The vacuum simulation testing device and method for the actuator of the present invention simulate the vacuum conditions under actual working conditions of the actuator through a lifting module, a drive unit and a load unit, thereby realizing the offline detection of the actuator's working parameters. Compared with the existing online method, it has lower cost and shorter time consumption, and significantly improves the equipment testing efficiency.

[0022] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other objects, features and advantages of the present invention more obvious and understandable, preferred embodiments are described in detail below. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the actuator part tested by the vacuum simulation test device for the actuator in an embodiment of the present invention.

[0024] Figure 2 This is a side view of the actuator portion of the vacuum simulation test device for the actuator according to an embodiment of the present invention.

[0025] Figure 3 This is a schematic diagram of the overall structure of the vacuum simulation test device for the actuator according to an embodiment of the present invention.

[0026] Figure 4 This is a side view of the vacuum simulation test device for the actuator according to an embodiment of the present invention.

[0027] Figure 5 This is a front view of the vacuum simulation test apparatus for the actuator of an embodiment of the present invention.

[0028] Figure 6 This is a schematic diagram of the overall structure of the vacuum simulation test device and the test state of the actuator according to an embodiment of the present invention.

[0029] Figure 7 for Figure 6 The side view shown.

[0030] Explanation of reference numerals in the attached figures:

[0031] Actuator 1, drive motor 11, coupling 12, lead screw module 13, base 14, heating unit 15, heating plate 151, support column 152, connecting arm 16, bellows 17, vacuum testing device 2, base 21, top support plate 211, frame 212, lower space 213, connector 214, bracket 22, load unit 23, drive unit 24, lifting module 25. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0036] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral molding; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0038] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0039] In the semiconductor industry, especially in CVD (Chemical Vapor Deposition) equipment, the actuators are mostly operated in a vacuum environment. When the actuators malfunction or the component design needs to be optimized, it is difficult to test them on the machine. Machine testing is conducted under vacuum conditions, but switching between vacuum and atmospheric conditions takes a long time and is expensive, resulting in high testing costs.

[0040] CVD actuators require a torque alarm value to be set during operation. To ensure the PIN (ejector pin) bears appropriate load during lifting to protect the wafer, the load torque fed back by the actuator's motor changes when different custom parts are replaced. This necessitates resetting the torque alarm value, requiring testing on an offline test bench, which leads to significant drawbacks of online testing. To address these issues, this embodiment discloses a vacuum simulation testing device 2 for the actuator and its testing method.

[0041] Please see Figures 1 to 2 This is a schematic diagram of the actuator 1 from different perspectives, tested by the vacuum simulation testing device 2 of the actuator in this embodiment. The actuator 1 is a drive component in a CVD machine used to drive the heating unit to move up and down within the process chamber. The actuator 1 includes: a drive motor 11, a coupling 12 connected to the output shaft of the drive motor 11, a lead screw module 13 connected to the output end of the coupling 12, a base 14 connected to the moving end of the lead screw module 13, and a heating unit 15 connected to the base 14. The heating unit 15 includes a heating plate 151 and a support column 152 connected to the bottom of the heating plate 151. The lower end of the support column 152 is connected to the base 14. A bellows 17 is also sleeved around the support column 152. The lower end of the bellows 17 is sealed to the base 14, and the upper end of the bellows 17 is sealed to the bottom wall of the process chamber. In the test state, the upper end of the bellows 17 is sealed to the corresponding support surface of the test device.

[0042] It should be noted that the above describes the structure of the actuator 1 tested by the vacuum simulation test device 2 of this embodiment. It can be understood that the vacuum simulation test device 2 of this embodiment can also perform vacuum simulation tests on other objects that work in a vacuum environment and are used to perform lifting actions.

[0043] Please see Figures 3 to 5 The vacuum simulation test device 2 for the actuator in this embodiment includes: a support 22, a lifting module 25 connected to the support 22, a load unit 23 connected to the moving end of the lifting module 25, and a drive unit 24 for driving the lifting module 25 to perform lifting actions; the load unit 23 is used to load the actuator 1 to be tested, and the drive unit 24 drives the lifting module 25 to lift and lower under a set torque, and synchronously drives the load unit 23 to simulate the force state of the actuator 1 in a vacuum state.

[0044] The vacuum simulation testing device 2 for the actuator in this embodiment is an offline test. Instead, it uses a drive unit 24 to drive a lifting module 25, which in turn drives a load unit 23. The load unit 23 provides a continuous vacuum force to the load. This vacuum force is the upward thrust exerted on the load by the actuator 1 under actual vacuum operating conditions due to the pressure difference between the inside and outside of the process chamber. The drive unit 24 in this embodiment can control its torque, so that during the lifting and lowering of the load, the load unit 23 provides a continuous vacuum force to the load to simulate the vacuum conditions of the actuator 1 under actual operating conditions. In other words, the vacuum simulation testing device 2 for the actuator in this embodiment simulates the vacuum environment through a mechanical structure. Compared with the real vacuum testing environment, its cost is significantly lower, and the testing process is simpler and more convenient, ultimately significantly improving testing efficiency.

[0045] In this embodiment, the lifting module 25 is a linear lead screw module. Specifically, the linear lead screw module is a ball screw. In other embodiments, the lifting module 25 may also be other modules capable of performing stable and reliable vertical lifting actions, which can change the external lifting thrust according to the output torque of the drive unit 24.

[0046] The drive unit 24 is a servo motor. The use of a servo motor leverages its characteristics of closed-loop high-precision control, wide speed range, fast dynamic response, low inertia, and high rigidity, enabling the achievement of different torque settings and adjustment ranges, and providing a stable and reliable vacuum simulation state.

[0047] Furthermore, the load unit 23 is a robotic arm connected to the moving end of the linear screw module. When the screw of the linear screw module is rotated under control, it drives the screw block to rise and fall, simultaneously driving the robotic arm to rise and fall. During testing, the robotic arm is connected to the load, which in this embodiment corresponds to the heating unit 15. In other embodiments, the robotic arm can also be replaced by a support such as a pallet, which only needs to have the function of lifting the load.

[0048] Please refer to it again. Figure 4 and Figure 5 The bracket 22 is also connected to the base 21, which includes a top support plate 211. The actuator 1 to be tested is connected to the space 213 below the top support plate 211. The upper end of the bellows 17 of the actuator 1 is sealed against the lower surface of the top support plate 211. The support column 152 passes through the top support plate 211. The heating plate 151 is loaded on the load unit 23. In this embodiment, the heating plate 151 is supported above the load unit 23. Under actual working conditions, the heating plate 151 is located in the vacuum process chamber, and the other parts of the actuator 1 are located outside the process chamber.

[0049] Specifically, the base 21 also includes a frame 212, and a top support plate 211 is connected to the top of the frame 212. The bottom of the top support plate 211 is also provided with a connector 214, and the actuator 1 is provided with a connecting arm 16. One end of the connecting arm 16 is connected to the lead screw module 13, and the other end is fixedly connected to the connector 214, thereby fixing the actuator 1 to the vacuum simulation device 2 of the actuator.

[0050] In this embodiment, the actuator 1 is a lifting actuator module that performs the lifting action of the heating unit of the CVD equipment.

[0051] The vacuum simulation test device 2 for the actuator in this embodiment simulates the vacuum conditions under the actual working conditions of the actuator through the lifting module 25, the drive unit 24 and the load unit 23, thereby realizing the offline detection of the actuator's working parameters. Compared with the existing online method, it has lower cost and shorter time consumption, and significantly improves the equipment testing efficiency.

[0052] This embodiment also discloses a test method for a vacuum simulation device based on the above-described actuator. The test method is performed by a vacuum simulation test device 2 of the actuator as described in any of the above embodiments, and includes the following steps:

[0053] The first step is to calculate the vacuum force that the actuator 1 under the set vacuum conditions will withstand. Different process equipment have different vacuum requirements, so the accurate value of the vacuum force that the actuator 1 will withstand must first be determined based on the actual working conditions of the actuator 1.

[0054] The second step is to calculate the load torque of the drive unit 24 under the current vacuum force conditions. That is, this step requires further calculation of the torque load that the drive unit 24 needs to output based on the vacuum force data determined in the first step. During the test, the vacuum force on the load is adjusted by controlling the output torque of the drive unit 24.

[0055] The third step is to set the load torque to the current test torque value of the drive unit 24; based on the output torque of the drive unit 24 determined in the first and second steps, it is set as the vacuum force on the load during the test. During the descent and ascent of the actuator 1, the drive unit 24 maintains the set torque output, so that the load (i.e., the heating unit 15) always bears the vacuum force of the simulated vacuum environment output by the drive unit 24 during the lifting and lowering process. In this process, although the load is not in a vacuum environment, the vacuum force borne by the actual load is consistent with that of the vacuum environment, thereby achieving mechanical simulation of the vacuum environment.

[0056] The fourth step is to control the actuator 1 to perform the lifting action and simultaneously test the operating parameters of the actuator 1. That is, the actuator 1 performs the lifting action according to the actual operating conditions, and the vacuum force simulated by the drive unit 24 is applied to the load accordingly. This allows the operating condition of the actuator 1 to be tested, so as to detect faults or optimize the design of the actuator 1.

[0057] Furthermore, through the above testing methods, the alarm torque under different vacuum environments can be set after testing of the actuator 1, making the alarm more accurate.

[0058] The formula for calculating the vacuum force is: Fv=P*πR 2 Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external ambient pressure, and R is the radius of the bellows 17 of the actuator. The magnitude of the vacuum force Fv is related to the diameter of the bellows 17 and the internal pressure difference.

[0059] The formula for calculating the load torque is as follows:

[0060] F = Fv - F A -mg; where F A P represents the reaction force of the bellows on the actuator. B Where is the pitch of the linear screw module, i is the reduction ratio between the drive unit and the lifting module, η is the mechanical efficiency (typically 0.85-0.95), μ0 is the friction coefficient of the linear screw module (typically between 0.1-0.3), and F0 is the preload of the linear screw module (typically...). 1 / 3F, where F is the axial load in N and m is the load mass.

[0061] If a gearbox is provided between the drive unit 24 and the lifting module 25, i is the speed ratio between the servo motor and the retarder. If no gearbox is provided, i is 1.

[0062] During the test, the Partly due to T L The calculation results have little impact, and this part of the calculated value can be ignored to simplify the calculation process.

[0063] The testing method in this embodiment simulates the vacuum conditions of the actuator under actual operating conditions through a lifting module, a drive unit, and a load unit, thereby achieving offline detection of actuator operating parameters. Compared with existing online methods, this method is lower in cost and shorter in time, significantly improving equipment testing efficiency. Furthermore, it allows for the pre-setting of warning torques under different vacuum conditions through advance testing, resulting in more accurate alarms.

[0064] The above examples are merely illustrative of the technical content of the present invention to facilitate easier understanding by the reader, but do not imply that the implementation of the present invention is limited to these examples. Any technical extensions or re-creations made based on the present invention are protected by the present invention. The scope of protection of the present invention is defined by the claims.

Claims

1. A vacuum simulation testing device for an actuator, wherein the actuator is a drive assembly in a CVD equipment for driving a heating unit to move up and down within a process chamber, the drive assembly including a heating unit, the heating unit including a heating plate and a support column connected to the bottom of the heating plate, and a bellows sleeved on the support column, wherein in the test state, the upper end of the bellows is sealed to the corresponding support surface of the vacuum simulation testing device, characterized in that, include: The system includes a support frame, a lifting module connected to the support frame, a load unit connected to the moving end of the lifting module, and a drive unit that drives the lifting module to perform lifting actions. The load unit is used to load the actuator to be tested, and the drive unit drives the lifting module to lift and lower under a set torque, simultaneously driving the load unit to simulate the force state of the actuator under vacuum.

2. The vacuum simulation testing device for the actuator according to claim 1, characterized in that, The lifting module is a linear lead screw module.

3. The vacuum simulation testing device for the actuator according to claim 2, characterized in that, The linear lead screw module is a ball screw.

4. The vacuum simulation testing device for the actuator according to claim 2, characterized in that, The drive unit is a servo motor.

5. The vacuum simulation testing device for the actuator according to claim 4, characterized in that, The load unit is a robotic arm.

6. The vacuum simulation testing apparatus for the actuator according to any one of claims 1 to 5, characterized in that, The bracket is also connected to the base, which includes a top support plate, and the actuator to be tested is connected to the space below the top support plate.

7. A vacuum simulation testing method, wherein the testing method is performed by a vacuum simulation testing device of the actuator according to any one of claims 1 to 6, characterized in that, Includes the following steps: Calculate the vacuum force that the actuator under test will withstand under the set vacuum conditions; Calculate the load torque of the drive unit under the current vacuum force conditions; Set the load torque to the current test torque value of the drive unit; Control the actuator to perform lifting and lowering actions, and simultaneously test the operating parameters of the actuator.

8. The vacuum simulation testing method according to claim 7, characterized in that, The formula for calculating the vacuum force is: Fv = P * πR 2 Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external environmental pressure, and R is the bellows radius of the actuator.

9. The vacuum simulation testing method according to claim 8, characterized in that, The formula for calculating the load torque is: , ;in, The reaction force of the bellows on the actuator. Let be the pitch of the linear lead screw module, and i be the reduction ratio between the drive unit and the lifting module. For mechanical efficiency, The coefficient of friction for the linear lead screw module. F represents the preload of the linear lead screw module, F represents the axial load, and m represents the load mass.

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