Index table with piece table adjustment method, system and thinning apparatus

Abstract

The application discloses a method and system for adjusting a support table on a dividing table and a thinning device, wherein the method comprises the following steps: acquiring distances from three first distance sensors to a bearing surface of the support table and determining whether the bearing surface is horizontal; when it is determined that the bearing surface is not horizontal, determining a real-time angle and a height change parameter corresponding to each height adjustment component according to measured data of the three first distance sensors and three second distance sensors distributed below support discs of the support table; and calculating distances required for adjusting each height adjustment component according to the real-time angle and the height change parameter corresponding to each height adjustment component; and controlling two height adjustment components to adjust the distances required for adjusting. The application can determine the state of the bearing surface of each support table in real time, can accurately adjust the two height adjustment components in combination with data of the two groups of distance sensors, can timely and accurately realize leveling of the bearing surface, and can ensure processing quality.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device processing, and in particular to the adjustment method, system and thinning equipment of the indexing stage and wafer support stage. Background Technology

[0002] A wafer thinning machine is a device used for thinning wafers. Patent application CN115338717A discloses a commonly used multi-station wafer thinning machine. Each wafer stage is connected to the indexing plate via a three-point leveling structure.

[0003] During wafer thinning, the condition of the bearing surface of the wafer stage will affect the quality of thinning. After the existing structure is assembled and debugged, the bearing surface can be guaranteed to be horizontal. However, because the wafer stage is under continuous pressure, the condition of the wafer stage will change after a certain period of use, thus causing its bearing surface to be unable to maintain a horizontal state.

[0004] The existing structure can only be adjusted manually by adjusting the three-point leveling structure, which cannot adjust the condition of the bearing surface in a timely and efficient manner. Summary of the Invention

[0005] The purpose of this invention is to solve the above-mentioned problems existing in the prior art and to provide an adjustment method, system and thinning device for the indexing plate bearing stage.

[0006] The objective of this invention is achieved through the following technical solution:

[0007] The adjustment method for the bearing platform on the indexing table includes the following steps:

[0008] S1, obtain the distances from three equal-height, triangularly distributed sensors above the support platform to the support surface of the support platform in real time, and determine whether the support surface is horizontal;

[0009] S2, when it is determined that the bearing surface is not horizontal, the distances from the bottom surface of the support plate to the support plate are obtained by three second distance sensors of equal height and triangularly distributed below the support plate of the bearing stage. The second distance sensors are set on the indexing table. The support plate is connected to the indexing table through two height adjustment components and one support component. A second distance sensor is set next to each of the two height adjustment components and the support component. The positions of each first distance sensor and each second distance sensor correspond.

[0010] S3, determine the real-time angle between the bearing surface and the support surface and the height change parameter corresponding to each height adjustment component based on the distance measured by the first distance sensor and the second distance sensor;

[0011] S4. Calculate the distance that each height adjustment component needs to be adjusted based on the determined real-time included angle and the height change parameters corresponding to each height adjustment component.

[0012] S5, control the two height adjustment components to adjust the distance that needs to be adjusted.

[0013] Preferably, if the difference between the maximum and minimum values ​​of the distances measured by the three first ranging sensors to the bearing surface is greater than a threshold, then the bearing surface is determined to be non-horizontal.

[0014] Preferably, the three first ranging sensors are connected to the indexing table via mounting rings coaxial with the plate support.

[0015] Preferably, the two height adjustment components and one support component are arranged in an equilateral triangle.

[0016] Preferably, in step S4, the distance that the two height adjustment components need to be adjusted is determined based on the height of the support surface of the support component.

[0017] Preferably, when it is determined that the distance measured in real time by a first ranging sensor is greater than the distance measured when the bearing surface is horizontal, the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted is determined according to the following formula:

[0018] ;

[0019] Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted; H is the height difference between the bearing surface and the bottom surface of the support plate when they are both horizontal; h y Let L be the absolute value of the difference between the distance measured by the second ranging sensor when the bottom surface of the support plate is horizontal and the distance measured when the bearing surface is determined to be not horizontal; L is the length of the line connecting the observation point of the first ranging sensor and the second ranging sensor on the bearing plate and the detection point on the bottom surface of the support plate when the bearing surface and the bottom surface of the support plate are horizontal; α is the difference between the angle between the line connecting the observation point and the detection point of the first ranging sensor and the second ranging sensor on them and the horizontal plane and the real-time angle when the bearing surface and the bottom surface of the support plate are horizontal.

[0020] Preferably, when it is determined that the distance measured in real time by a first ranging sensor is less than the distance measured when the bearing surface is horizontal, the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted is determined according to the following formula:

[0021] ;

[0022] Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted; H is the height difference between the bearing surface and the bottom surface of the support plate when they are both horizontal; h y Let L be the absolute value of the difference between the distance measured by the second ranging sensor when the bottom surface of the support plate is horizontal and the distance measured when the bearing surface is determined to be not horizontal. Let L be the length of the line connecting the observation point of the first ranging sensor and the second ranging sensor on the bearing plate and the detection point on the bottom surface of the support plate when the bearing surface and the bottom surface of the support plate are horizontal. Let α be the sum of the angle between the line connecting the observation point and the detection point of the first ranging sensor and the second ranging sensor on them and the horizontal plane and the real-time angle when the bearing surface and the bottom surface of the support plate are horizontal.

[0023] Preferably, the adjustment method of the indexing plate support table further includes S6, after the two height adjustment components adjust the distance to be adjusted, S1 is executed.

[0024] The adjustment system of the indexing table and the bearing table includes:

[0025] A horizontal state determination unit is used to obtain the distances from three equal-height, triangularly distributed sensors above the support platform to the support surface of the support platform in real time, and to determine whether the support surface is horizontal.

[0026] The data acquisition unit is used to acquire the distances from three second distance sensors of equal height and triangularly distributed below the support plate of the bearing platform to the bottom surface of the support plate when it is determined that the bearing surface is not horizontal. The second distance sensors are set on the indexing table. The support plate is connected to the indexing table through two height adjustment components and one support component. A second distance sensor is set next to each of the two height adjustment components and the support component. The positions of each first distance sensor and each second distance sensor correspond.

[0027] The parameter determination unit is used to determine the real-time included angle between the bearing surface and the support surface and the height change parameter corresponding to each of the height adjustment components based on the distances measured by the first distance sensor and the second distance sensor.

[0028] The distance determination unit is used to calculate the distance that each height adjustment component needs to be adjusted based on the real-time included angle and the height change parameters corresponding to each height adjustment component.

[0029] An adjustment unit is used to control the two height adjustment components to adjust the distance that needs to be adjusted.

[0030] The thinning device includes a processor and a memory, the memory storing a program executable by the processor, which, when executed, implements the stage adjustment method as described above.

[0031] The advantages of the technical solution of this invention are mainly reflected in:

[0032] The present invention uses a first ranging sensor to determine the status of the bearing surface of each bearing stage in real time, which facilitates timely adjustment. Furthermore, a second ranging sensor is set on the indexing stage to detect the bottom surface of the support plate. The data from the two sets of ranging sensors can be combined to accurately adjust the two height adjustment components, which can achieve timely and accurate leveling of the bearing surface, thereby ensuring processing quality.

[0033] The adjustment method of the present invention is simple to calculate, easy to implement, more efficient, and more accurate.

[0034] This invention adopts a novel structure for the adjustment component, which is easy for enterprises to assemble themselves, helps reduce equipment costs, and facilitates the later maintenance of the equipment.

[0035] The present invention employs a support component and two adjustment components, which not only simplifies the structure but also makes adjustment more convenient. Attached Figure Description

[0036] Figure 1 This is a perspective view of the support structure of the present invention (only one support platform is shown in the figure).

[0037] Figure 2 This is a cross-sectional view of the adjustment component of the present invention;

[0038] Figure 3 This is a perspective view of the adjustment component of the present invention;

[0039] Figure 4 This is a perspective view of the torque transmission component of the present invention;

[0040] Figure 5 This is a schematic diagram of the process of the method of the present invention;

[0041] Figure 6 This is a schematic diagram of an inverted frustum formed by the circles of the three observation points of the first ranging sensor and the circles of the three detection points of the second ranging sensor when the bearing surface and the bottom surface of the support plate are horizontal.

[0042] Figure 7 This is a schematic diagram illustrating the principle of calculating the distance of the adjustment component corresponding to the first ranging sensor when the distance measured in real time by the first ranging sensor is greater than the standard distance.

[0043] Figure 8 This is a schematic diagram illustrating the principle of calculating the distance of the adjustment component corresponding to the first ranging sensor when the distance measured in real time by the first ranging sensor is less than the standard distance. Detailed Implementation

[0044] The objectives, advantages, and features of this invention will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this invention, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this invention.

[0045] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0046] The method for adjusting the substrate support platform disclosed in this invention will be described below with reference to the accompanying drawings. This method is an improvement upon the existing substrate support structure of a thinning machine, as shown in the attached drawings. Figure 1 As shown, the plate-bearing structure includes an indexing table 100 and a plate-bearing platform 300 disposed on the indexing table 100. The plate-bearing platform 300 is connected to the indexing table 100 through a height adjustment component 500 and a support component 700.

[0047] The specific structure of the indexing table is known technology and will not be described in detail here. Multiple support platforms 300 are evenly distributed around the circumference of the indexing table. The number of support platforms 300 can be designed according to needs. Preferably, the number of support platforms 300 is not less than 3, as shown in the attached figure. Figure 1 As shown, the plate receiving stage 300 includes a suction cup assembly 310 and a rotary drive assembly 320 for driving the suction cup assembly 310 to rotate. The rotary drive assembly 320 is disposed on the indexing stage 100.

[0048] As attached Figure 1 As shown, the rotary drive assembly 320 includes a support disk 321, which connects the height adjustment assembly 500 and the support assembly 700. There are two height adjustment assemblies 500, arranged in a triangular pattern with the support assembly 700. Preferably, they are arranged in an equilateral triangle around the center of the support disk 321. Correspondingly, the support disk 321 has three connecting holes evenly distributed circumferentially to connect the height adjustment assembly 500 and the support assembly 700.

[0049] The height adjustment component 500 can be a known device capable of generating linear movement, such as an electric cylinder, a servo hydraulic press, etc.

[0050] As attached Figure 2 Appendix Figure 3 As shown, the height adjustment assembly 500 includes an electric driver 510 connected to the indexing table. The electric driver 510 is connected to the lower end of a rotating shaft 520 and drives the rotating shaft 520 to rotate. The axis of the rotating shaft 520 extends in the vertical direction. A baffle 521 is formed on the rotating shaft 520. The baffle 521 is disposed on a bearing 530. The bearing 530 is fitted on the rotating shaft 520 and located on the indexing table. An adjusting sleeve 540 is threaded to the upper end of the rotating shaft 520. The adjusting sleeve 540 is connected to the bearing plate table 300.

[0051] The electric drive 510 can be a known geared motor 511, which can be directly fixed to the indexing table. For ease of assembly and component protection, the electric drive 510 includes a motor 511 and a reducer 513 connected to the motor 511 via a coupling 512. The electric drive 510 is fixed to the indexing table via an outer sleeve 550, specifically at the bottom of the indexing table. The coupling 512 and reducer 513 are disposed within the outer sleeve 550, and the reducer 513 can be fixedly connected to the outer sleeve. The motor 511 is fixed to the bottom of the outer sleeve 550. Furthermore, to facilitate connection between the coupling 512, reducer 513, and motor 511, mounting ports 551 are provided on the outer sleeve 550. Two mounting ports 551 are symmetrically arranged on both sides of the outer sleeve 550.

[0052] As attached Figure 4 As shown, the electric actuator 510 is connected to the rotating shaft 520 via a torque transmission member 560. The torque transmission member 560 is an annular sleeve. The sleeve has a first notch 561 extending from one end to the other and a second notch 562 communicating with the first notch 561. The second notch 562 extends circumferentially along the sleeve, with its extension length approximately half the circumference of the sleeve. Simultaneously, the sleeve has two pairs of locking holes 563. The axis of the locking holes 563 is perpendicular to the axis of the sleeve. A pair of locking holes 563 are concentrically arranged on both sides of the first notch 561, and of the two pairs of locking holes 563, the two located on the same side of the first notch 561 are distributed on both sides of the second notch 562. Correspondingly, for ease of assembly, the side wall of the outer sleeve 550 has two operating ports 552 corresponding to the position of the torque transmission member 560, arranged opposite to each other. When assembly is required, the power output shaft 514 is inserted into the lower end of the sleeve, and the rotating shaft 520 is inserted into the upper end of the sleeve. Then, the bolts are inserted into the two pairs of locking holes 563 through the operating port 552 and locked with nuts to achieve the connection between the sleeve and the power output shaft 514 and the rotating shaft 520.

[0053] As attached Figure 2 Appendix Figure 3 As shown, in order to better guide the rotating shaft 520 and facilitate the installation of the outer sleeve 550, the rotating shaft 520 is rotatably disposed in the support sleeve 570. The support sleeve 570 is fixed on the indexing table and its lower end is inserted into the outer sleeve 550. The upper end of the outer sleeve 550 is provided with a circumferential notch 553 and a deformation notch 554 that communicates with and is located above the circumferential notch. Coaxial locking holes 555 are provided on both sides of the deformation notch 554. The outer sleeve 550 and the support sleeve 570 are fixed by bolts passing through the locking holes and nuts.

[0054] As attached Figure 2 Appendix Figure 3 As shown, the bearing 530 can be a known end-face bearing, a planar thrust ball bearing, etc. The bearing 530 is disposed in a limiting groove at the top of the support sleeve 570. The rotating shaft 520 is connected to a first elastic element 580 that presses against the bearing 530 via a baffle 521. The first elastic element 580 can be a known spring, preferably a set of disc springs. One end of the first elastic element 580 abuts against the bottom of the support sleeve 570, while the lower end of the rotating shaft 520 is connected to an adjusting nut 590. The other end of the first elastic element 580 abuts against the adjusting nut 590 at the lower end of the rotating shaft 520 or a washer above the adjusting nut 590.

[0055] Furthermore, to better control the adjustment of the adjusting sleeve 540, a top bolt 501 is coaxially connected to the top of the rotating shaft 520. A second elastic element 502 is fitted onto the top bolt 501. One end of the second elastic element 502 abuts against the head of the top bolt 501, and the other end abuts against the stepped surface inside the adjusting sleeve 540. The second elastic element 502 can also be a known spring, preferably a disc spring.

[0056] To prevent the adjusting sleeve 540 from exiting the connecting hole on the support plate 321, a first nut 503 is also connected to the top of the rotating shaft 520. The first nut 503 can leave a certain gap with the top surface of the support plate for subsequent adjustment.

[0057] As attached Figure 1As shown, the support assembly 700 includes a support screw 710, on which a support platform 720 is concentrically disposed. The top surface of the support platform 720 serves as a support surface for supporting the support disk. The support screw 710 is screwed onto the indexing table and passes through a connecting hole on the support disk 321. The support platform 720 is supported below the support disk 321. Furthermore, to better support the support screw 710, a pad 730 is also provided on the support screw 710, abutting against the top surface of the indexing table. To prevent loosening, a second nut (not shown in the figure) located above the support disk 321 can also be connected to the upper end of the screw.

[0058] As attached Figure 1 As shown, in order to promptly determine the horizontal state of the bearing surface of the bearing platform 300 for adjustment, a first distance measuring sensor matching each bearing platform is also provided on the indexing platform. Each bearing platform is matched with three first distance measuring sensors. The first distance measuring sensors are evenly fixed on a mounting ring 200 around the circumference. The mounting ring 200 is concentrically connected to the top of the bearing platform via a connecting rod or other connecting component. Simultaneously, the observation points of the three first distance measuring sensors on the bearing surface are close to the edge of the bearing surface of the bearing platform; that is, the diameter of the circle containing the three observation points is slightly smaller than the diameter of the bearing surface. The three first distance measuring sensors 900 can detect their respective distances to the bearing surface. When the bearing surface is horizontal, the distance values ​​measured by the three first distance measuring sensors 900 are the same; when the bearing surface is inclined, the distance values ​​measured by the three first distance measuring sensors 900 are different.

[0059] Simultaneously, a set of second ranging sensors 400 are provided on the indexing table, located below the support plate of each of the bearing stages. Preferably, there are three second ranging sensors 400 under each support plate, and their positions correspond to those of the support assembly 700 and the height adjustment assembly 500, respectively, to measure the distance between the second ranging sensor 400 and the bottom surface of the support plate 321. That is, a second ranging sensor is arranged adjacent to the support assembly 700 and the two height adjustment assemblies 500, and the position of each second ranging sensor matches the position of a first ranging sensor.

[0060] The indexing table, height adjustment component, first ranging sensor 900, second ranging sensor 400, and rotation drive component are all connected to the control device.

[0061] Furthermore, when the bearing surface of the bearing stage is horizontal, the extension direction of its axis is defined as the Z-axis direction, and a three-dimensional coordinate system is constructed with the Z-axis direction as the Z-axis. The position coordinates of each second ranging sensor 400 and the first ranging sensor 900 in the three-dimensional coordinate system are determined.

[0062] As attached Figure 5 As shown, the method for adjusting the support platform based on the above-mentioned support structure includes the following steps:

[0063] S1, acquire the distances from the three first ranging sensors to the bearing surface of the support stage as measured in real time, and determine whether the bearing surface is horizontal; specifically, if the difference between the maximum and minimum values ​​of the distances from the three first ranging sensors to the bearing surface is greater than a threshold, then the bearing surface is determined to be non-horizontal. The threshold can be determined as needed, for example, 1-5 micrometers, and is not limited here.

[0064] S2, when it is determined that the bearing surface is not horizontal, obtain the distances from the three second distance sensors to the bottom surface of the support plate.

[0065] S3, determine the real-time angle between the bearing surface and the support surface and the height change parameter corresponding to each height adjustment component based on the distance measured by the first distance sensor and the second distance sensor;

[0066] In specific calculations, the coordinates of three points on the bearing surface can be determined based on the distance values ​​measured by the first ranging sensor and their position coordinates, thereby determining the first plane. Similarly, the coordinates of three points on the top surface can be determined based on the height values ​​measured by the second ranging sensor along the second Z-axis and their position coordinates, thereby determining the second plane. The angle between the second plane and the first plane can be calculated based on the determined coordinates of the six points. The corresponding calculation method is a known technique and will not be elaborated here. The height variation parameter is the absolute value h of the difference between the distance measured by each second ranging sensor when the bottom surface of the support plate is horizontal and the distance measured when the bearing surface is determined to be non-horizontal. x .

[0067] S4. Calculate the distance that each height adjustment component needs to be adjusted based on the determined real-time included angle and the height change parameters corresponding to each height adjustment component.

[0068] Since the height of the support surface of the support assembly is constant, the distance that the two height adjustment components need to be adjusted is determined based on the height of the support surface of the support assembly during adjustment. (See attached image) Figure 6 As shown, when the bearing surface and the bottom surface of the support plate remain horizontal, the circles containing the three observation points of the three first ranging sensors and the circles containing the three detection points of the three second ranging sensors form the top and bottom surfaces of an inverted frustum. We define the radius of the circle containing the three observation points of the three first ranging sensors as R, the radius of the circle containing the three detection points of the three second ranging sensors as r, and the height difference between them when the bearing surface and the bottom surface of the support plate are horizontal as H.

[0069] In this embodiment, it is assumed that the detection point of the second ranging sensor next to the height adjustment component when the bottom surface of the support plate is horizontal is point E (the position of point E can be regarded as the connection position between the height adjustment component and the support plate), and the observation point of the first ranging sensor corresponding to the second ranging sensor when the bearing surface is horizontal is B.

[0070] As attached Figure 7 As shown, when the distance measured in real time by a first ranging sensor is greater than the distance measured when the bearing surface is horizontal, point B moves to position B1. Point E, measured by the second ranging sensor corresponding to the first ranging sensor, moves to point E1. Since the horizontal movement of point E is very small, we can ignore its horizontal movement, i.e., consider it to move only in the Z-axis direction. Simultaneously, the distance between points B and E (one generatrix of the aforementioned inverted frustum) should not change with position or should change negligibly. Therefore, BE = B1E1 = L, and thus:

[0071] 𝐻+ℎ y =ℎ 𝑥 +ℎ;

[0072] ℎ 𝑥 =𝐿𝑠𝑖𝑛a;

[0073] Therefore, we can conclude that: ;

[0074] Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted; L is the length of the line connecting the observation point on the bearing surface and the detection point on the bottom surface of the support plate corresponding to the position of the bearing surface and the bottom surface of the support plate when the bearing surface and the bottom surface of the support plate are horizontal; a is the difference between the angle between the line connecting the observation point and the detection point on the bearing surface and the bottom surface of the support plate corresponding to the position of the bearing surface and the bottom surface of the support plate and the horizontal plane and the real-time angle, that is, the difference between the angle between the line connecting points B and E and the horizontal plane and the real-time angle.

[0075] Therefore, when it is determined that the distance measured in real time by a first ranging sensor is greater than the distance measured when the bearing surface is horizontal, then the formula can be used. To determine the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted.

[0076] Conversely, as shown in the appendix Figure 8As shown, when the distance measured by a first ranging sensor in real time is less than the distance measured when the bearing surface is horizontal, then point B moves to position B2, and point E measured by the second ranging sensor corresponding to the first ranging sensor moves to point E2. Since the horizontal movement of point E is very small, we can ignore the horizontal movement of point E. Meanwhile, the distance between points B and E (one generatrix of the aforementioned inverted frustum) should not change with position or the change should be negligible. Therefore, BE = B2E2 = L, and thus:

[0077] 𝐻−ℎ y =ℎ𝑥−ℎ;

[0078] 𝑠 𝑛𝑎=ℎigh / 𝐿;

[0079] Therefore, we can conclude that: ;

[0080] Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted, and a is the sum of the angle between the line connecting the observation point and the detection point of the first and second ranging sensors on them and the horizontal plane and the real-time angle when the bearing surface and the bottom surface of the support plate are kept horizontal, that is, the sum of the angle between the line connecting points B and E and the horizontal plane and the real-time angle.

[0081] That is, when it is determined that the distance measured by a second ranging sensor indicates that the detection point on the support plate corresponding to the second ranging sensor is below the standard position, the formula can be used. To determine the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted.

[0082] S5, control the two height adjustment components to adjust the distance that needs to be adjusted.

[0083] S6, after the height adjustment component is adjusted, repeat S1 to obtain the distance measured by the first ranging sensor 900 and determine whether the bearing surface has returned to a horizontal state; if yes, stop the height adjustment component; if no, adjust again. Example 2

[0084] This embodiment discloses an adjustment system for the bearing stage on an indexing platform, including the following steps:

[0085] A horizontal state determination unit is used to obtain the distances from three equal-height, triangularly distributed sensors above the support platform to the support surface of the support platform in real time, and to determine whether the support surface is horizontal.

[0086] The data acquisition unit is used to acquire the distances from three equal-height, triangularly distributed support plates below the support plate of the bearing platform to the bottom surface of the support plate when it is determined that the bearing surface is not horizontal. The second distance sensors are set on the indexing table, and the support plate is connected to the indexing table through two height adjustment components and one support component.

[0087] The parameter determination unit is used to determine the real-time included angle between the bearing surface and the support surface and the height change parameter corresponding to each of the height adjustment components based on the distances measured by the first distance sensor and the second distance sensor.

[0088] The distance determination unit is used to calculate the distance that each height adjustment component needs to be adjusted based on the real-time included angle and the height change parameters corresponding to each height adjustment component.

[0089] An adjustment unit is used to control the two height adjustment components to adjust the distance that needs to be adjusted. Example 3

[0090] This embodiment discloses a thinning device, including a processor and a memory, wherein the memory stores a program that can be executed by the processor, and when the program is executed, it implements the platen stage adjustment method as described above.

[0091] This invention has many other embodiments, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this invention.

Claims

1. A method for adjusting the bearing platform on the indexing table, characterized in that, Includes the following steps: S1, obtain the distances from three equal-height, triangularly distributed sensors above the support platform to the support surface of the support platform in real time, and determine whether the support surface is horizontal; S2, when it is determined that the bearing surface is not horizontal, the distances from the bottom surface of the support plate to the support plate are obtained by three second distance sensors of equal height and triangularly distributed below the support plate of the bearing stage. The second distance sensors are set on the indexing table. The support plate is connected to the indexing table through two height adjustment components and one support component. A second distance sensor is set next to each of the two height adjustment components and the support component. The positions of each first distance sensor and each second distance sensor correspond. S3, determine the real-time angle between the bearing surface and the support surface and the height change parameter corresponding to each height adjustment component based on the distance measured by the first distance sensor and the second distance sensor; S4. Calculate the distance that each height adjustment component needs to be adjusted based on the determined real-time included angle and the height change parameters corresponding to each height adjustment component. S5, control the two height adjustment components to adjust the distance that needs to be adjusted; When it is determined that the distance measured in real time by a first ranging sensor is greater than the distance measured when the bearing surface is horizontal, the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted is determined according to the following formula: ; Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted; H is the height difference between the bearing surface and the bottom surface of the support plate when they are both horizontal; h y Let L be the absolute value of the difference between the distance measured by the second ranging sensor when the bottom surface of the support plate is horizontal and the distance measured when the bearing surface is determined to be non-horizontal; L is the length of the line connecting the observation point on the bearing surface and the detection point on the bottom surface of the support plate corresponding to the position of the first ranging sensor and the second ranging sensor when the bearing surface and the bottom surface of the support plate are horizontal; α is the difference between the angle between the line connecting the observation point and the detection point on the bearing surface and the bottom surface of the support plate corresponding to the position and the horizontal plane and the real-time angle when the bearing surface and the bottom surface of the support plate are horizontal. When it is determined that the distance measured in real time by a first ranging sensor is less than the distance measured when the bearing surface is horizontal, the distance that the height adjustment component next to the second ranging sensor corresponding to the first ranging sensor needs to be adjusted is determined according to the following formula: ； Where h is the distance that the height adjustment component next to the second ranging sensor needs to be adjusted; H is the height difference between the bearing surface and the bottom surface of the support plate when they are both horizontal; h y Let L be the absolute value of the difference between the distance measured by the second ranging sensor when the bottom surface of the support plate is horizontal and the distance measured when the bearing surface is determined to be not horizontal. Let L be the length of the line connecting the observation point of the first ranging sensor and the second ranging sensor on the bearing plate and the detection point on the bottom surface of the support plate when the bearing surface and the bottom surface of the support plate are horizontal. Let α be the sum of the angle between the line connecting the observation point and the detection point of the first ranging sensor and the second ranging sensor on them and the horizontal plane and the real-time angle when the bearing surface and the bottom surface of the support plate are horizontal.

2. The adjustment method for the indexing table bearing plate according to claim 1, characterized in that: If the difference between the maximum and minimum distances measured by the three first ranging sensors to the bearing surface is greater than a threshold, then the bearing surface is determined to be non-horizontal.

3. The adjustment method for the indexing table bearing plate according to claim 1, characterized in that: The three first ranging sensors are connected to the indexing table via mounting rings coaxial with the plate support.

4. The method for adjusting the support stage according to claim 1, characterized in that: The two height adjustment components and one support component are arranged in an equilateral triangle.

5. The method for adjusting the support stage according to claim 4, characterized in that: In step S4, the distance that the two height adjustment components need to be adjusted is determined based on the height of the support surface of the support component.

6. The adjustment method for the indexing plate bearing platform according to any one of claims 1-5, characterized in that: It also includes S6, which executes S1 after the two height adjustment components adjust the distance to be adjusted.

7. An adjustment system for the bearing platform on the indexing table, applied to the bearing platform adjustment method as described in claim 1, characterized in that, include: A horizontal state determination unit is used to obtain the distances from three equal-height, triangularly distributed sensors above the support platform to the support surface of the support platform in real time, and to determine whether the support surface is horizontal. The data acquisition unit is used to acquire the distances from three second distance sensors of equal height and triangularly distributed below the support plate of the bearing platform to the bottom surface of the support plate when it is determined that the bearing surface is not horizontal. The second distance sensors are set on the indexing table. The support plate is connected to the indexing table through two height adjustment components and one support component. A second distance sensor is set next to each of the two height adjustment components and the support component. The positions of each first distance sensor and each second distance sensor correspond. The parameter determination unit is used to determine the real-time included angle between the bearing surface and the support surface and the height change parameter corresponding to each of the height adjustment components based on the distances measured by the first distance sensor and the second distance sensor. The distance determination unit is used to calculate the distance that each height adjustment component needs to be adjusted based on the real-time included angle and the height change parameters corresponding to each height adjustment component. An adjustment unit is used to control the two height adjustment components to adjust the distance that needs to be adjusted.

8. A thinning device, comprising a processor and a memory, the memory storing a program executable by the processor, characterized in that: When the program is executed, it implements the plate stage adjustment method as described in any one of claims 1-6.

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