Gap detection method and system

Abstract

The present disclosure provides a gap detection method and system, and relates to the technical field of measurement. The gap is the space between the internal components of a dry vacuum pump stator. The method comprises: covering an easy-to-abrade coating on at least one surface forming the gap; wherein the easy-to-abrade coating does not interfere with the movement of the rotor and the stator and can abrade in thickness when moving; driving the rotor to rotate relative to the stator until the easy-to-abrade coating no longer abrades; and obtaining the remaining thickness of the easy-to-abrade coating after stopping rotation to obtain the gap value. The embodiment of the present disclosure characterizes the dynamic gap between the internal components of the dry vacuum pump stator by setting the easy-to-abrade coating, thereby converting the measurement object from the difficult-to-measure dynamic gap to the easily-measured coating thickness, so as to realize accurate measurement of the size of the dynamic gap at a lower cost.

Description

Technical Field

[0001] This disclosure relates to the field of measurement technology, and in particular to a gap detection method and system. Background Technology

[0002] Dry vacuum pumps (such as claw pumps and roots pumps) are widely used vacuum generation devices in semiconductor manufacturing, vacuum coating, and panel processing. During operation, dynamic gaps exist between the internal components of a dry vacuum pump. In related technologies, the measurement of these dynamic gaps is typically based on sensors. However, sensors are expensive and their accuracy is low due to the influence of temperature and vibration generated during the operation of the dry vacuum pump. Summary of the Invention

[0003] To overcome the problems existing in related technologies, this disclosure provides a gap detection method and system.

[0004] According to a first aspect of the present disclosure, a gap detection method is provided, wherein the gap is the space between internal components of a dry vacuum pump stator, the method comprising:

[0005] At least one surface forming the gap is covered with a wear-resistant coating; wherein the wear-resistant coating does not interfere with the movement of the rotor and stator and is capable of thickness wear during movement;

[0006] Drive the rotor to rotate relative to the stator until the wear-prone coating no longer wears;

[0007] The remaining thickness of the wear-prone coating after rotation stops is obtained to determine the gap value.

[0008] In some embodiments, the components forming the gap are the stator and the rotor.

[0009] In some embodiments, the rotor includes a shaft and rotor plates disposed on the shaft, and the stator includes a housing that accommodates the rotor plates;

[0010] The step of covering at least one surface forming the gap with an easily abrasive coating includes:

[0011] A pre-defined wear-resistant coating of a predetermined thickness is uniformly applied to the side of the housing parallel to the rotating shaft and close to the rotor blades; and / or

[0012] A pre-defined wear-resistant coating is uniformly applied to the side of the rotor blades parallel to the shaft.

[0013] In some embodiments, the rotor blades on the rotating shaft are multi-stage, and the stator further includes transverse walls for dividing the internal space of the housing to accommodate the rotor blades of each stage respectively;

[0014] The step of covering at least one surface forming the gap with an abrasion-resistant coating further includes:

[0015] A pre-defined wear-resistant coating is uniformly applied to the side of the transverse wall perpendicular to the rotating shaft; and / or

[0016] A pre-defined, wear-resistant coating is uniformly applied to the side of the rotor blades perpendicular to the shaft.

[0017] In some embodiments, the components forming the gap are a first rotor and a second rotor located in the same stator cavity.

[0018] In some embodiments, the first rotor and the second rotor are arranged in parallel and spaced apart, and each of the first rotor and the second rotor includes a rotating shaft and rotor plates disposed on the rotating shaft, and the stator includes a housing that accommodates the first rotor and the second rotor;

[0019] The step of covering at least one surface forming the gap with an easily abrasive coating includes:

[0020] A pre-defined wear-resistant coating is uniformly applied to the side of the first rotor or the second rotor that is parallel to the shaft and opposite to the other rotor.

[0021] A pre-defined, easily abrasive coating is uniformly applied to the sides of the first and second rotors that are parallel to the shaft and opposite to the other rotor.

[0022] In some embodiments, the step of obtaining the remaining thickness of the wear-prone coating after rotation stops to obtain the gap value includes:

[0023] Measure the remaining thickness at multiple preset points on the wear-prone coating;

[0024] The average remaining thickness at the multiple preset points is used as the gap value.

[0025] In some embodiments, the wear-resistant coating forms powdery wear products during the wear process, and the step of driving the rotor to rotate relative to the stator until the wear-resistant coating no longer wears includes:

[0026] The rotor is driven to rotate relative to the stator until the powdery wear products are no longer discharged from the dry vacuum pump.

[0027] In some embodiments, the wear-resistant coating comprises at least one metal oxide.

[0028] According to a second aspect of the present disclosure, a dynamic gap detection system for a dry vacuum pump is provided. The system is applied to a dry vacuum pump, which includes a stator and a rotor, and a gap exists between the stator and the rotor.

[0029] The system includes:

[0030] A cover module for covering the stator side or rotor side that forms the gap with an easily worn coating;

[0031] The drive module is used to control the relative rotation of the stator and the rotor to cause wear on the wear-prone coating;

[0032] The acquisition module is used to determine the dynamic gap size between the stator and the rotor based on the thickness of the wear area of ​​the easily worn coating.

[0033] The technical solutions provided in this disclosure may have the following beneficial effects:

[0034] This disclosure allows for the measurement of clearances between internal components of a dry vacuum pump stator. Specifically, an abrasion-resistant coating can be first applied to at least one surface forming the clearance. This coating does not interfere with the movement of the rotor and stator and undergoes thickness wear during movement. Subsequently, the rotor can be driven to rotate relative to the stator until the abrasion-resistant coating no longer wears. The clearance value is obtained by measuring the remaining thickness of the abrasion-resistant coating after rotation stops. This disclosure transforms the measurement object from the difficult-to-measure dynamic clearance to the easily measurable coating thickness by setting an abrasion-resistant coating to characterize the dynamic clearance between internal components of a dry vacuum pump stator. This achieves accurate measurement of the dynamic clearance size at a lower cost, providing accurate data support for pump parameter design and contributing to improved pump stability and performance. Attached Figure Description

[0035] Figure 1 A flowchart illustrating a gap detection method according to an embodiment of this disclosure is shown.

[0036] Figure 2 This diagram illustrates the coverage location of an easily worn coating according to an embodiment of the present disclosure.

[0037] Figure 3 This diagram illustrates the coverage thickness of an easily worn coating according to an embodiment of the present disclosure.

[0038] Figure 4 This diagram illustrates the remaining thickness of an easily worn coating according to an embodiment of the present disclosure.

[0039] Figure 5 This diagram illustrates the structure of a claw pump covered with a wear-resistant coating according to an embodiment of the present disclosure.

[0040] Figure 6 The diagram illustrates the implementation process of a gap detection method according to an embodiment of this disclosure.

[0041] Figure 7A schematic diagram of the architecture of a gap detection system according to an embodiment of this disclosure is shown.

[0042] Figure label:

[0043] 100 - Dry vacuum pump; 200 - Stator; 201 - Horizontal wall; 300 - Rotor; 301 - Rotor blades; 400 - Wear-resistant coating. Detailed Implementation

[0044] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this disclosure. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this disclosure as detailed in the appended claims.

[0045] The terminology used in this disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The singular forms “a,” “the,” and “the” as used in this disclosure and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

[0046] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0047] To facilitate understanding, the following explanations are provided for several terms used in this disclosure:

[0048] A dry vacuum pump, also known as a dry-type vacuum pump, is a type of vacuum pump that does not use oil or other liquids as a working medium, relying entirely on its mechanical structure to compress and expel gas. Its core characteristic is "oil-free operation"—there is no lubricating oil inside the pump chamber. A sealed cavity is formed through the precise fit of the rotors, and the volume is periodically changed to remove gas.

[0049] The stator, the external stationary part of a dry vacuum pump, is a cylindrical structure that surrounds the rotor. The stator's function is to support the rotor's rotation and guide gas flow through its internal channels or spaces. The stator has a sealing design to ensure that gas does not leak.

[0050] The rotor, the rotating part of a dry vacuum pump, consists of multiple rotor blades installed inside the stator. The rotor's main function is to compress and expel gas from the inlet end through rotation. The rotor design of a dry vacuum pump creates a highly efficient vacuum environment.

[0051] For example, the rotor in a dry vacuum pump can have multiple stages of rotor blades, and the stator can be internally provided with multiple stages of transverse walls to surround the multi-stage rotor blades. Each stage of rotor blades and transverse walls cooperates to independently complete a certain gas compression or transport process, and multiple cascaded rotor blades and transverse walls can form a higher compression capacity. For example, in a multi-stage dry vacuum pump, each stage of rotor blades and transverse walls progressively compresses the gas until the desired final vacuum level is reached.

[0052] For example, when a dry vacuum pump is stopped, there is a static gap between its rotor and stator. However, when the dry vacuum pump is running, the gap between its rotor and stator becomes a dynamic gap. Due to the influence of the dry vacuum pump's structure, temperature, and vibration, the value of the dynamic gap will differ from the value of the static gap.

[0053] The dynamic clearance has a significant impact on pump performance. Insufficient dynamic clearance can lead to friction, wear, and even jamming between the stator and rotor, affecting normal equipment operation. Excessive dynamic clearance, on the other hand, reduces the pumping efficiency of the dry vacuum pump and increases energy consumption. Therefore, accurately measuring the dynamic clearance of a dry vacuum pump is crucial for optimizing its design and improving its performance and reliability.

[0054] In related technologies, the dynamic clearance of dry vacuum pumps is usually measured using non-contact methods (such as laser measurement). However, this method involves high equipment costs, is difficult to perform, and its accuracy is affected by factors such as temperature, vibration, and the structure of the dry vacuum pump, making it difficult to accurately obtain dynamic clearance data for dry vacuum pumps.

[0055] In view of this, the embodiments of this disclosure characterize the dynamic gap between the stator and the rotor by setting an easy-to-wear coating, thereby changing the measurement object from the difficult-to-measure dynamic gap to the easily-to-measure coating thickness, thereby achieving accurate measurement of the dynamic gap size at a lower cost.

[0056] The exemplary embodiments of this disclosure will now be described in detail.

[0057] First, this disclosure provides a gap detection method, which is used to detect the space between internal components of a dry vacuum pump stator. For example, it can be the gap between the stator and rotor, or the gap between multiple rotors within the stator cavity, or it can be used to detect multiple gaps simultaneously.

[0058] Furthermore, those skilled in the art will recognize that, depending on actual needs, the methods provided in this disclosure can be applied to various types of dry vacuum pumps such as claw pumps, screw pumps, vortex pumps, and Roots pumps. This disclosure does not limit the types of dry vacuum pumps.

[0059] Figure 1 This diagram illustrates a flow chart of a gap detection method according to an embodiment of the present disclosure, as shown below. Figure 1 As shown, the gap detection method provided in this embodiment includes the following steps.

[0060] S101, an easy-wear coating is applied to at least one surface forming the gap.

[0061] Understandably, the purpose of applying a wear-resistant coating is to quantify the dynamic gaps between components within the stator that are difficult to measure, by adjusting the thickness of the coating. This can be achieved by applying the wear-resistant coating to either side of the gap. For example, when quantifying the dynamic gap between the stator and rotor using a wear-resistant coating, the coating can be applied to the stator side, the rotor side, or both sides simultaneously.

[0062] In some embodiments, the wear-resistant coating does not interfere with the movement of the rotor and stator, and can undergo thickness wear during movement. That is, on the one hand, the thickness of the wear-resistant coating can be less than or equal to the size of the static gap formed by the components at its covered location, so that the coverage of the wear-resistant coating does not interfere with the assembly and movement of the components in the dry vacuum pump. On the other hand, the thickness of the wear-resistant coating can be as close as possible to the size of the static gap formed by the components at its covered location, so that the wear-resistant coating can wear as the gap decreases during the movement of the components, thus characterizing the dynamic gap size between the components.

[0063] S102 drives the rotor to rotate relative to the stator until the wear-resistant coating no longer wears.

[0064] In some embodiments, the dry vacuum pump can be operated according to set operating parameters, causing the rotor and stator to rotate relative to each other. During the operation of the dry vacuum pump, the rotor rotates at high speed. When the rotor rotates at high speed, due to the vibration characteristics of the bearings themselves, as well as the effects of the rotor's thermal expansion, deflection, stress deformation, and load, the rotor may experience axial and / or radial displacement. This displacement may cause the dynamic clearance between the rotor and stator to decrease relative to the static clearance, and may also cause the dynamic clearance between individual rotors within the same stator cavity to decrease relative to the static clearance, thereby causing wear on the easily worn coating as the rotor and stator rotate relative to each other.

[0065] In some embodiments, a preset operating time for the dry vacuum pump can be configured to ensure that the wear-prone coating is sufficiently worn away. That is, it is determined that after the dry vacuum pump has been operating for the preset operating time, the wear-prone coating will no longer wear away.

[0066] In some embodiments, the wear-resistant coating may form powdery wear products during the wear process. These powdery wear products are discharged from the exhaust end of the dry vacuum pump as it operates. Therefore, by monitoring the discharge of the powdery products, it can be determined whether the wear-resistant coating is still in the wear process.

[0067] In other words, the rotor can be driven to rotate relative to the stator until powdery wear products are no longer discharged from the dry vacuum pump, thus confirming that the wear-prone coating is no longer worn.

[0068] Understandably, the wear particle size of the wear-resistant coating is closely related to the accuracy of its representation of dynamic gap size. By selecting appropriate materials to ensure that the wear-resistant coating falls off in powder form after being subjected to friction, rather than peeling off in large pieces or chunks, the accuracy of the obtained gap values ​​can be improved.

[0069] For example, the easy-wear coating may include at least one metal oxide, such as aluminum oxide, titanium oxide, potassium oxide, etc. This type of easy-wear coating is applied to the surface of the component in the form of a slurry and forms a cured coating after drying. By pre-sanding the cured coating, an easy-wear coating that meets the assembly dimensional requirements can be obtained.

[0070] S103, obtain the remaining thickness of the easily worn coating after the rotation stops to obtain the gap value.

[0071] In some embodiments, after the dry vacuum pump stops operating, the gap value can be obtained by measuring the remaining thickness of the wear-resistant coating after wear. This gap value is the dynamic gap size between the component covered with the wear-resistant coating and its adjacent components.

[0072] For example, after the dry vacuum pump stops operating, the components covered with the wear-prone coating in the dry vacuum pump can be disassembled. Then, a high-precision measuring device (such as a coordinate measuring machine, a high-precision thickness gauge, etc.) is used to measure the wear area of ​​the wear-prone coating to obtain the remaining thickness of the wear-prone coating wear area. This remaining thickness can be used to characterize the aforementioned gap value.

[0073] For example, wear on a wear-prone coating covering the same location may be uneven. For instance, the remaining thickness of the wear-prone coating may vary, with some areas showing no wear. In this case, the remaining thickness at multiple predetermined points in the wear-prone coating can be measured separately, and the average of the remaining thickness at these multiple predetermined points can be used as the aforementioned gap value.

[0074] The above combination Figure 1 The basic concept of measuring dynamic clearance in the embodiments of this disclosure has been explained. Next, the coverage position of the wear-resistant coating in the stator will be described in detail.

[0075] In some embodiments, the components forming the gap may be the stator and the rotor, and the wear-resistant coating may be used to characterize the radial and / or axial gap between the stator and the rotor.

[0076] For example, please refer to Figure 2 The rotor 300 may include a rotating shaft and rotor plates 301 disposed on the rotating shaft, and the stator 200 includes a housing that accommodates the rotor plates 301.

[0077] like Figure 2 As shown in A, when covering the wear-resistant coating 400, the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the housing parallel to the rotating shaft and close to the rotor plate 301, the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the rotor plate 301 parallel to the rotating shaft, and the wear-resistant coating 400 of a preset thickness can be covered on both the side of the housing parallel to the rotating shaft and close to the rotor plate 301 and the side of the rotor plate 301 parallel to the rotating shaft.

[0078] By setting the wear-resistant coating 400 in the above manner, the remaining thickness of the wear-resistant coating 400 can be used to characterize the minimum radial clearance between the housing and the rotor blades 301 during the operation of the dry vacuum pump.

[0079] For example, please continue to refer to Figure 2 The rotor blades 301 on the rotating shaft are multi-stage, and the stator 200 also includes transverse walls 201 for dividing the internal space of the housing to accommodate the rotor blades 301 of each stage.

[0080] like Figure 2 As shown in B, when covering the wear-resistant coating 400, the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the transverse wall 201 perpendicular to the rotating shaft, or the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the rotor blade 301 perpendicular to the rotating shaft, or the wear-resistant coating 400 of a preset thickness can be covered on both the side of the transverse wall 201 perpendicular to the rotating shaft and the side of the rotor blade 301 perpendicular to the rotating shaft.

[0081] By setting the wear-resistant coating 400 in the above manner, the remaining thickness of the wear-resistant coating 400 can be used to characterize the minimum axial clearance between the transverse wall 201 and the rotor blades 301 during the operation of the dry vacuum pump.

[0082] For example, please continue to refer to Figure 2The main reason for the axial displacement of rotor 300 is that the rotor shaft is connected to a bearing fixed to the bearing housing only at one end, while the bearing at the other end is elastically connected to the bearing housing. In other words, the shaft itself is resisted by the axial elastic force generated by the compression of the elastic element against the fixed bearing at the other end. The purpose of this design in a dry vacuum pump is to adjust the static axial clearance between rotor 300 and stator 200 by changing the compression of the elastic element. This results in the shaft itself having a certain degree of freedom in the axial direction, which can lead to a relatively large axial displacement of rotor 300 during rotation.

[0083] For example, since each stage rotor blade 301 has two sides perpendicular to the shaft, when choosing to cover the rotor blade 301 with the wear-resistant coating 400, the wear-resistant coating 400 can be applied to the side of the rotor blade 301 closest to the inlet end of the dry vacuum pump. Correspondingly, and when choosing to cover the side of the transverse wall 201 with the wear-resistant coating 400, the wear-resistant coating 400 can be applied to the side of the transverse wall 201 closest to the inlet end of the dry vacuum pump.

[0084] It is understandable that the end of the shaft that is elastically connected to the bearing housing via the bearing is the end closest to the inlet end of the dry vacuum pump. Therefore, during the rotation of the rotor 300, the maximum value of its axial displacement points towards the inlet end of the dry vacuum pump. Thus, in order to characterize the dynamic clearance change between the stator 200 and the rotor 300 in this direction, the wear-resistant coating 400 can be applied to the transverse wall 201 used to form the clearance and the side of the rotor blades 301 closest to the inlet end.

[0085] Furthermore, in the structural design of the dry vacuum pump itself, the static gap between the transverse wall 201 and the rotor blades 301 is larger closer to the inlet end. Therefore, by covering the side near the inlet end with the wear-resistant coating 400, a larger initial thickness of the wear-resistant coating 400 can be achieved, making it easier to measure the thickness of the wear-resistant coating 400.

[0086] This is why the end of the shaft that is elastically connected to the bearing housing via the bearing is closer to the inlet end of the dry vacuum pump. Since the static clearance between the transverse wall 201 and the rotor blades 301 is smaller closer to the exhaust end, if the end of the shaft that is elastically connected to the bearing housing via the bearing is located closer to the exhaust end, this dynamic displacement pointing towards the exhaust end may cause blockage at the exhaust end, preventing the dry vacuum pump from working properly.

[0087] In some embodiments, the thickness of the wear-resistant coating 400 between each stage of the transverse wall 201 and the rotor blades 301 gradually decreases from the inlet end to the outlet end of the dry vacuum pump. As mentioned above, since the static gap between each stage of the rotor blades 301 and the housing gradually decreases, the thickness of the wear-resistant coating 400 can be gradually reduced to accommodate the decrease in static gap, thereby meeting the assembly requirements between the stator 200 and the rotor 300 in the dry vacuum pump.

[0088] In addition, please refer to Figure 3 and Figure 4 Considering the fit between the stator 200 and the rotor 300, after measuring the size of the dynamic clearance on one side of the rotor blade 301 perpendicular to the shaft, the size of the dynamic clearance on the other side can be calculated.

[0089] First, please refer to... Figure 3 In the assembled dry vacuum pump, the static clearance between each stage rotor blade 301 and the side of the transverse wall 201 is known, and the coating thickness can also be measured in advance. For example, Figure 3 In the figure, X1 is the static gap between the left side of rotor blade 301 and the left side of transverse wall 201 (the same applies to the right side, not shown in the figure), and X2 is the thickness of the coating. To meet the assembly requirements, X2 < X1.

[0090] Please refer to further details. Figure 4 After the wear-prone coating 400 wears down, the remaining thickness X4 of the wear-prone coating 400 can be measured. The thickness X3 that is worn away can be obtained by subtracting X2 from X4. Therefore, X4 can represent the dynamic gap between the left side of the rotor blade 301 and the left side of the transverse wall 201, and the sum of the static gap on the right side of the rotor blade 301 and X3 is the dynamic gap between the right side of the rotor blade 301 and the right side of the transverse wall 201.

[0091] In some embodiments, the components forming the gap may be a first rotor 300 and a second rotor 300 located within the same stator 200 cavity, and the wear-resistant coating 400 may be used to characterize the gap between the rotors 300. Please refer to... Figure 5 , Figure 5 Taking a claw pump as an example, the structural relationship between the first rotor 300 and the second rotor 300 in a dry vacuum pump and the coverage position of the wear-resistant coating 400 are illustrated.

[0092] Specifically, the first rotor 300 and the second rotor 300 can be arranged in parallel at intervals. Both the first rotor 300 and the second rotor 300 include a rotating shaft and rotor plates 301 arranged on the rotating shaft. The stator 200 includes a housing that accommodates the first rotor 300 and the second rotor 300.

[0093] During the operation of the claw pump, there are certain gaps between each rotor 300 and between the rotor 300 and the housing, so that the claw pump can operate without lubricating oil and can operate without friction.

[0094] For example, when covering the wear-resistant coating 400, the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the first rotor 300 or the second rotor 300 that is parallel to the shaft and opposite to the other rotor 300, or the wear-resistant coating 400 of a preset thickness can be uniformly covered on the side of the first rotor 300 and the second rotor 300 that is parallel to the shaft and opposite to the other rotor 300.

[0095] In other words, the wear-resistant coating 400 can cover the side of the rotor blades 301 parallel to the shaft. After the wear-resistant coating 400 is applied, as the claw pump operates, the first rotor 300 and the second rotor 300 rotate synchronously, causing the wear-resistant coating 400 to wear down. Thus, the remaining thickness of the wear-resistant coating 400 can characterize the minimum gap between the rotor blades 301 of the first rotor 300 and the second rotor 300 during the operation of the dry vacuum pump.

[0096] It is understandable that the above combination Figures 2 to 5 This document describes various application methods for the wear-resistant coating 400. Depending on the application location, the remaining thickness of the wear-resistant coating 400 can be used to characterize the axial clearance between the stator 200 and the rotor 300, the radial clearance between the stator 200 and the rotor 300, or the radial clearance between rotors 300. Depending on actual needs, the above application methods can be used individually or in combination; this disclosure does not limit this application.

[0097] To facilitate understanding, the following will combine... Figure 6 Taking the measurement of the axial clearance between the stator 200 and the rotor 300 as an example, the complete implementation process of the embodiments of this disclosure is explained.

[0098] Please refer to Figure 6 The rotor 300 in the dry vacuum pump 100 includes a shaft and multi-stage rotor plates 301 disposed on the shaft, and the stator 200 in the dry vacuum pump 100 includes multi-stage transverse walls 201 corresponding to the multi-stage rotor plates 301. This embodiment aims to measure the axial clearance between the stator 200 and the rotor 300, that is, the axial clearance between each stage transverse wall 201 and the rotor plates 301. Since the dynamic clearance between each stage rotor plate 301 and the housing may be different, the dynamic clearance of each stage needs to be measured separately during the measurement process.

[0099] Therefore, when applying the wear-resistant coating 400, it is necessary to apply the wear-resistant coating 400 to the side of the rotor blade 301 and / or the transverse wall 201 perpendicular to the shaft, for each stage of the gap formed between the rotor blade 301 and the transverse wall 201. For example, the wear-resistant coating 400 can be applied to a portion of the rotor blade 301 used to form the gap, or the wear-resistant coating 400 can be applied to a portion of the housing used to form the gap. Figure 6 In this manner, a wear-resistant coating 400 can also be applied to some levels of rotor blades 301 and the remaining levels of housing, or a wear-resistant coating 400 can be applied to both rotor blades 301 and transverse wall 201 of the same level. This disclosure does not limit this approach.

[0100] After the wear-resistant coating 400 is applied, the stator 200 and rotor 300 can be driven to rotate relative to each other until the wear-resistant coating 400 no longer wears. Subsequently, for each stage of the gap between the rotor blade 301 and the transverse wall 201, the dynamic gap size between the rotor blade 301 and the transverse wall 201 can be determined based on the remaining thickness of the wear-resistant coating 400 in that stage of the gap. Specifically, the remaining thickness of the wear-resistant coating 400 at multiple preset points in each stage of the gap can be measured, and the average of the remaining thicknesses at these preset points is taken as the dynamic gap size between the rotor blade 301 and the transverse wall 201 in that stage.

[0101] Based on the same inventive concept, this disclosure also provides a gap detection system, as shown in the following embodiments. Since the principle by which this system embodiment solves the problem is similar to that of the above-described method embodiment, the implementation of this system embodiment can refer to the implementation of the above-described method embodiment, and repeated details will not be elaborated further.

[0102] Figure 7 This diagram illustrates the structure of a gap detection system according to an embodiment of the present disclosure, as shown below. Figure 7 As shown, the gap detection system 700 includes: a coverage module 701, a driving module 702, and an acquisition module 703.

[0103] The covering module 701 is used to cover at least one surface forming the gap with a wear-resistant coating. The wear-resistant coating does not interfere with the movement of the rotor and stator and is capable of thickness wear during movement.

[0104] Drive module 702 is used to drive the rotor to rotate relative to the stator until the wear-resistant coating no longer wears.

[0105] The acquisition module 703 is used to acquire the remaining thickness of the easily worn coating after the rotation stops in order to obtain the gap value.

[0106] In some embodiments, the covering module 701 may be a coating machine, a spray gun, etc.

[0107] The drive module 702 can be a processor, microcontroller, microcontroller, or other device that can send commands to the dry vacuum pump to make the dry vacuum pump operate according to the set operating parameters.

[0108] The acquisition module 703 can be a coordinate measuring machine, a high-precision thickness gauge, etc.

[0109] In some embodiments, the components forming the gap are the stator and the rotor.

[0110] In some embodiments, the rotor includes a shaft and rotor plates disposed on the shaft, and the stator includes a housing accommodating the rotor plates. The covering module 701 is specifically configured to uniformly cover the side of the housing parallel to the shaft and close to the rotor plates with a pre-set abrasion-resistant coating of a predetermined thickness; and / or uniformly cover the side of the rotor plates parallel to the shaft with a pre-set abrasion-resistant coating of a predetermined thickness.

[0111] In some embodiments, the rotor blades on the shaft are multi-stage, and the stator further includes transverse walls for dividing the internal space of the housing to accommodate the rotor blades of each stage respectively. The covering module 701 is specifically used to uniformly cover the transverse walls with a wear-resistant coating of a predetermined thickness on the side of the shaft perpendicular to the shaft; and / or uniformly cover the rotor blades with a wear-resistant coating of a predetermined thickness on the side of the rotor blades perpendicular to the shaft.

[0112] In some embodiments, the components forming the gap are a first rotor and a second rotor located within the same stator cavity.

[0113] In some embodiments, the first rotor and the second rotor are arranged parallel to each other and spaced apart. Both the first rotor and the second rotor include a rotating shaft and rotor plates disposed on the rotating shaft. The stator includes a housing that accommodates the first rotor and the second rotor. The covering module 701 is specifically used to uniformly cover the side of the first rotor or the second rotor parallel to the rotating shaft and opposite to the other rotor with a pre-set wear-resistant coating of a predetermined thickness; and to uniformly cover the side of the first rotor and the second rotor parallel to the rotating shaft and opposite to the other rotor with a pre-set wear-resistant coating of a predetermined thickness.

[0114] In some embodiments, the acquisition module 703 is used to measure the remaining thickness at multiple preset points on the easily worn coating. The average of the remaining thickness at the multiple preset points is used as the gap value.

[0115] In some embodiments, the wear-resistant coating forms powdery wear products during the wear process. Specifically, drive module 702 is configured to drive the rotor to rotate relative to the stator until the powdery wear products are no longer discharged from the dry vacuum pump.

[0116] In some embodiments, the wear-resistant coating comprises at least one metal oxide.

[0117] The embodiments of this disclosure have been described in detail above with reference to the accompanying drawings. However, this disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of this disclosure, various simple modifications can be made to the technical solutions of this disclosure, and these simple modifications all fall within the protection scope of this disclosure.

[0118] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.

Claims

1. A gap detection method, characterized in that, The gap is the space between the internal components of the stator of the dry vacuum pump, and the components forming the gap are the stator and the rotor; the rotor includes: a rotating shaft and multi-stage rotor blades disposed on the rotating shaft; the stator includes: a housing for accommodating the rotor blades and transverse walls for dividing the internal space of the housing to accommodate the rotor blades of each stage respectively; The method includes: A wear-resistant coating is applied to at least one surface forming the gap; wherein the wear-resistant coating does not interfere with the movement of the rotor and stator and is capable of thickness wear during movement, and the wear-resistant coating forms powdery wear products during the wear process; Drive the rotor to rotate relative to the stator until the powdery wear products are no longer discharged from the dry vacuum pump; The remaining thickness of the easily worn coating after rotation stops is obtained to determine the gap value; The step of covering at least one surface forming the gap with an easily worn coating includes: A pre-defined wear-resistant coating of a predetermined thickness is uniformly applied to the side of the housing parallel to the rotating shaft and close to the rotor blades; and / or A pre-defined wear-resistant coating is uniformly applied to the side of the rotor blades parallel to the shaft. The step of covering at least one surface forming the gap with an abrasion-resistant coating further includes: A pre-defined wear-resistant coating is uniformly applied to the side of the transverse wall perpendicular to the rotating shaft; and / or A pre-defined, wear-resistant coating is uniformly applied to the side of the rotor blades perpendicular to the shaft.

2. The gap detection method according to claim 1, characterized in that, The components that form the gap are the first rotor and the second rotor, which are located in the same stator cavity.

3. The gap detection method according to claim 2, characterized in that, The first rotor and the second rotor are arranged in parallel and spaced apart. Both the first rotor and the second rotor include a rotating shaft and rotor plates disposed on the rotating shaft. The stator includes a housing that accommodates the first rotor and the second rotor. The step of covering at least one surface forming the gap with an easily abrasive coating includes: A pre-defined wear-resistant coating is uniformly applied to the side of the first rotor or the second rotor that is parallel to the shaft and opposite to the other rotor. A pre-defined, easily abrasive coating is uniformly applied to the sides of the first and second rotors that are parallel to the shaft and opposite to the other rotor.

4. The gap detection method according to claim 1, characterized in that, The step of obtaining the remaining thickness of the easily worn coating after rotation stops to obtain the gap value includes: Measure the remaining thickness at multiple preset points on the wear-prone coating; The average remaining thickness at the multiple preset points is used as the gap value.

5. The gap detection method according to claim 1, characterized in that, The wear-resistant coating includes at least one metal oxide.

6. A gap detection system, characterized in that, For performing the method according to any one of claims 1 to 5, the gap is the space between the internal components of the dry vacuum pump stator; The system includes: A covering module is used to cover at least one surface forming the gap with a wear-resistant coating; wherein the wear-resistant coating does not interfere with the movement of the rotor and stator and is capable of thickness wear during movement; A drive module is used to drive the rotor to rotate relative to the stator until the wear-prone coating no longer wears; The acquisition module is used to acquire the remaining thickness of the wear-prone coating after rotation stops in order to obtain the gap value.

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