Vacuum pressure control system, control method and device

Abstract

The invention provides a vacuum pressure control system, method and device. The control system comprises an air inlet pipeline, a control unit, a vacuum cavity and an air exhaust pipeline. The air inlet pipeline is connected between the air source and the vacuum cavity and adjusts the air inlet and air outlet proportion of the system based on a control signal of the control unit. The air inlet pipeline comprises an adjusting valve, a stop valve and a bypass stop valve, the adjusting valve and the stop valve are connected between the air source and the vacuum cavity in series, one end of the bypass stop valve is connected between the adjusting valve and the stop valve, and the other end of the bypass stop valve is directly communicated with the external environment. The exhaust pipeline exhausts the vacuum cavity based on a control signal of the control unit; the exhaust pipeline comprises a first valve, a buffer tank, a second valve and a vacuum pump; the control unit adjusts the opening degree of the air inlet pipeline valve and the air outlet pipeline valve based on the actual pressure of the vacuum cavity, so that the pressure of the vacuum cavity meets the preset pressure. The vacuum pressure control device has the technical characteristics of high vacuum pressure control precision, fast response and stable adjustment.

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