柔性压力传感器及其制备方法、可穿戴设备

By employing a specific design for the interdigitated electrode layer and using polymer-free materials, the contradiction between sensitivity and detection range in flexible pressure sensors has been resolved, resulting in a flexible pressure sensor with high sensitivity and a wide detection range, suitable for detecting complex shapes and curved surfaces.

CN120820262BActive Publication Date: 2026-07-17BEIJING GRAPHENE TECH RES INST CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING GRAPHENE TECH RES INST CO LTD
Filing Date
2025-05-28
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing flexible pressure sensors present a trade-off between sensitivity, detection limit, thickness, and detection range, making it difficult to improve sensitivity and expand the detection range while maintaining thinness and lightness.

Method used

The design employs an interdigitated electrode layer, including a first electrode layer and a second electrode layer. The specific shape and arrangement of the interdigitated fingers in the interdigitated electrode layer increase the effective contact area. Combined with a pressure-sensitive layer and an annular insulating layer, stress concentration is avoided. The design uses a planar design and polymer-free materials to adapt to complex shapes and curved surfaces.

Benefits of technology

The sensitivity and detection range of the flexible pressure sensor have been improved, its mechanical stability and service life have been enhanced, response time delay has been avoided, it is suitable for force detection of flexible non-planar objects, and the accuracy of the detection signal has been improved.

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Abstract

本申请涉及一种柔性压力传感器及其制备方法、可穿戴设备,柔性压力传感器包括:柔性基底;叉指电极层,位于柔性基底上,包括第一电极层、环形绝缘层和第二电极层,第一电极层位于柔性基底表面,包括第一环状电极,以及沿着第一环状电极的内侧壁依次固定的多个第一尖角状叉指,环形绝缘层包覆第一环状电极,第二电极层包括第二环状电极,以及沿着第二环状电极的内侧壁依次固定的多个第二尖角状叉指,且第二环状电极位于第一环状电极外侧的柔性基底表面,第二尖角状叉指从第一环状电极外侧跨过环形绝缘层延伸到第一环状电极的内侧,并位于相邻的第一尖角状叉指之间的柔性基底表面;压感层,位于叉指电极层上。提升传感器的灵敏度和检测范围。
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