Galvanometer and laser radar

Abstract

The application provides a galvanometer and a laser radar. The galvanometer comprises a fixed seat, the fixed seat having a first hollow region; a support frame, the support frame being arranged in the first hollow region, the support frame being connected with the fixed seat through a first shaft, the support frame being provided with a second hollow region; a reflecting mirror, the reflecting mirror being arranged in the second hollow region, the reflecting mirror being connected with the support frame through a second shaft; wherein at least one of the first shaft and the second shaft is a curved shaft. In the galvanometer, at least one of the first shaft and the second shaft is a curved shaft, the curved shaft having a greater length than a straight shaft without reducing the area of the reflecting mirror, thereby the length of the first shaft and / or the second shaft can be increased, so that the structural stress borne by the first shaft and / or the second shaft can be reduced while the galvanometer provides a greater torsion angle, thereby the galvanometer has better reliability.

Description

Technical Field

[0001] This application relates to the field of laser detection technology, and in particular to a galvanometer and a lidar. Background Technology

[0002] LiDAR is a radar system that uses laser beams to detect the position, velocity, and other characteristics of target objects. In recent years, the application of galvanometers in lidar has become a development trend. A galvanometer is a micromirror with advantages such as small size, high oscillation frequency, and no rotating parts.

[0003] With the widespread application of lidar, higher requirements have been placed on it, such as the need for a larger scanning field of view and a longer detection range, which requires the galvanometer to provide a larger torsion angle. However, a larger torsion angle also means greater structural stress, which can affect the reliability of the galvanometer. Summary of the Invention

[0004] This application provides a galvanometer and a lidar, which aims to make the galvanometer more reliable when providing a larger torsion angle.

[0005] The specific technical solution is as follows:

[0006] An embodiment of the first aspect of this application provides a galvanometer, the galvanometer comprising: a fixed base having a first hollow area; a support frame disposed within the first hollow area, the support frame being connected to the fixed base via a first axis, the support frame having a second hollow area; and a reflector disposed within the second hollow area, the reflector being connected to the support frame via a second axis; wherein at least one of the first axis and the second axis is a bending axis.

[0007] In the embodiments of this application, at least one of the first axis and the second axis of the galvanometer is a curved axis. Without reducing the area of ​​the reflector, the curved axis has a longer length than the straight axis. Thus, the length of the first axis and / or the second axis can be increased. In this way, while the galvanometer provides a larger torsion angle, the structural stress borne by the first axis and / or the second axis can be reduced, thereby giving the galvanometer better reliability.

[0008] In some embodiments, the bending shaft includes a first segment, a second segment, a third segment, a fourth segment, a fifth segment, a sixth segment, and a seventh segment connected in sequence; the first segment, the third segment, the fifth segment, and the seventh segment are all straight segments extending along a first direction; along the first direction, the third segment and the fifth segment are both located between the first segment and the seventh segment; along a second direction, the first segment and the seventh segment are both located between the third segment and the fifth segment, and the second direction is perpendicular to the first direction.

[0009] In some embodiments, the second segment, the fourth segment, and the sixth segment are all straight segments that extend along the second direction.

[0010] In some embodiments, the second segment and the sixth segment are both straight segments extending along the second direction; the fourth segment includes a first sub-segment, a second sub-segment, and a third sub-segment connected in sequence, the first sub-segment being connected to the third segment, the third sub-segment being connected to the fifth segment, the first sub-segment and the third sub-segment being straight segments extending along the second direction; along the first direction, the third sub-segment is located between the second segment and the first sub-segment.

[0011] In some embodiments, the second sub-segment is a straight line segment, and the angle between the second sub-segment and the first sub-segment is greater than or equal to 135° and less than or equal to 165°.

[0012] In some embodiments, the connection between any two adjacent segments is formed with a rounded corner structure.

[0013] In some embodiments, the minimum distance between the second segment and the fourth segment along the first direction is not less than 25 μm; and / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 25 μm.

[0014] In some embodiments, the minimum distance between the second segment and the fourth segment along the first direction is not less than 50 μm; and / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 50 μm.

[0015] In some embodiments, the second segment, the fourth segment, and the sixth segment are all straight line segments, the angle between the second segment and the first segment is greater than 90°, the angle between the fourth segment and the third segment is greater than 90°, and the angle between the sixth segment and the fifth segment is greater than 90°; the second segment and the sixth segment are parallel.

[0016] In some embodiments, the bending shaft includes a first segment, a second segment, and a third segment connected in sequence, a first bending angle is formed between the first segment and the second segment, and a second bending angle is formed between the second segment and the third segment, both the first bending angle and the second bending angle being less than 90°.

[0017] In some embodiments, the galvanometer has a first central axis passing through the center of the reflector and extending along a first direction;

[0018] The first segment and the third segment are located on both sides of the first central axis.

[0019] In some embodiments, the first segment has a first end away from the reflector, the third segment has a second end close to the reflector, the maximum distance between the first end and the first central axis is L1, the maximum distance between the second end and the first central axis is L2, and the length of the bending axis along the first direction is L3. Then L1, L2, and L3 satisfy the following relationships: 0.5L3 < L1 < L3; 0.5L3 < L2 < L3.

[0020] In some embodiments, the width of the first segment gradually decreases from the end furthest from the second segment to the end closest to the second segment; the width of the third segment gradually decreases from the end furthest from the second segment to the end closest to the second segment; and the width of the second segment gradually decreases from the middle to both ends.

[0021] An embodiment of the second aspect of this application provides a lidar, which includes the galvanometer in any of the above embodiments. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a galvanometer provided in one embodiment of this application;

[0023] Figure 2 This is a schematic diagram of the structure of a galvanometer provided in another embodiment of this application;

[0024] Figure 3 This is a schematic diagram of the structure of a galvanometer provided in another embodiment of this application;

[0025] Figure 4 This is a schematic diagram of the structure of a bending shaft provided in one embodiment of this application;

[0026] Figure 5 This is a schematic diagram of the structure of a bending shaft provided in another embodiment of this application;

[0027] Figure 6 This is a schematic diagram of the structure of a bending shaft provided in another embodiment of this application;

[0028] Figure 7 This is a schematic diagram of the structure of a galvanometer provided in another embodiment of this application;

[0029] Figure 8 Stress distribution diagram (using the straight axis) obtained for numerical simulation of the galvanometer;

[0030] Figure 9 Stress distribution diagram obtained for numerical simulation of the galvanometer (using a bending shaft with uniform width in each section of the bending shaft);

[0031] Figure 10 Stress distribution diagram obtained for numerical simulation of the galvanometer (using a bending axis, with width variations in each segment of the bending axis);

[0032] Figure 11 This is a schematic diagram of a lidar according to one embodiment of this application (the arrows in the diagram represent laser beams).

[0033] The annotations in the attached figures are explained as follows:

[0034] 10. Galvanometer;

[0035] 100. Fixing base; 101. First hollow area;

[0036] 200. Support frame; 201. Second hollow area;

[0037] 300. Reflector;

[0038] 400, First Axis;

[0039] 500, Second Axis;

[0040] 600, Bending Shaft;

[0041] 610. First section; 620. Second section; 630. Third section; 640. Fourth section; 641. First sub-section; 642. Second sub-section; 643. Third sub-section; 650. Fifth section; 660. Sixth section; 670. Seventh section;

[0042] 20. Laser emitter;

[0043] 30. Controller. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0045] In the description of this application, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the accompanying drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0047] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0048] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0049] LiDAR is a radar system that uses laser beams to detect the position, velocity, and other characteristics of target objects. In recent years, the application of galvanometers in lidar has become a development trend. A galvanometer is a micromirror with advantages such as small size, high oscillation frequency, and no rotating parts.

[0050] With the widespread application of lidar, higher requirements have been placed on lidar, such as the need to achieve a larger scanning field of view and a longer detection range. This requires the galvanometer to provide a larger torsion angle and optical aperture. However, a large optical aperture means an increase in the size of the reflector and greater structural stress on the torsion shaft. A larger torsion angle also means greater structural stress, and all of these factors will affect the reliability of the galvanometer.

[0051] Based on the above, an embodiment of the first aspect of this application provides a galvanometer designed to provide better reliability when offering a larger torsion angle.

[0052] like Figure 1 , Figure 2 as well as Figure 3As shown, the galvanometer 10 in this embodiment includes a fixed base 100, a support frame 200, and a reflector 300. The fixed base 100 has a first hollow area 101, and the support frame 200 is disposed within the first hollow area 101. The support frame 200 is connected to the fixed base 100 via a first shaft 400. The support frame 200 has a second hollow area 201, and the reflector 300 is disposed within the second hollow area 201. The reflector 300 is connected to the support frame 200 via a second shaft 500. At least one of the first shaft 400 and the second shaft 500 is a bending shaft 600.

[0053] The mounting base 100 is used to fix and install the entire galvanometer 10 structure. The first hollow area 101 in the mounting base 100 is used to accommodate the moving parts of the galvanometer 10. The support frame 200 and the reflector 300 constitute the moving parts of the galvanometer 10, wherein the reflector 300 is used to reflect the laser beam. When the lidar is working, the support frame 200 rotates relative to the mounting base 100, and the reflector 300 rotates relative to the support frame 200, thereby causing the reflector 300 to deflect the laser beam to scan various positions in the field of view. Typically, coils are provided on the support frame 200 and / or the reflector 300. The galvanometer 10 is placed in an external magnetic field. When the coil is energized, a Lorentz force is generated, which drives the support frame 200 and the reflector 300 to rotate in the magnetic field. The changing electrical signal in the coil drives the support frame 200 and the reflector 300 to continuously reciprocate.

[0054] The first axis 400 is used to connect the support frame 200 and the fixed seat 100, and the second axis 500 is used to connect the fixed seat 100 and the galvanometer 10. The first axis 400 can also be called the slow axis, and the second axis 500 can also be called the fast axis.

[0055] In the related technology, the galvanometer 10 has both its fast and slow axes as straight axes, resulting in relatively short lengths for both. The stress calculation formula for the shaft structure under torsional conditions is as follows:

[0056] τ max =Gbθα / L

[0057] In the formula, τ max The maximum stress of the shaft is represented by G, the shear modulus is b, the thickness of the shaft is θ, the torsional angle of the shaft is α, the coefficient related to the width and thickness of the shaft is α, and the total length of the shaft is L.

[0058] As can be seen from the above formula, the maximum stress on the shaft is inversely proportional to the total length of the shaft. Therefore, by increasing the total length of the shaft, the maximum stress on the shaft can be reduced.

[0059] In the embodiments of this application, at least one of the first axis 400 and the second axis 500 of the galvanometer 10 is a curved axis 600. Without reducing the area of ​​the reflector 300, the curved axis 600 has a longer length than the straight axis. This allows for an increase in the length of the first axis 400 and / or the second axis 500. Thus, with the galvanometer 10 providing a larger torsion angle, the structural stress borne by the first axis 400 and / or the second axis 500 can be reduced, thereby giving the galvanometer 10 better reliability.

[0060] In some embodiments, such as Figure 4 , Figure 5 as well as Figure 6 As shown, the bending shaft 600 includes a first segment 610, a second segment 620, a third segment 630, a fourth segment 640, a fifth segment 650, a sixth segment 660, and a seventh segment 670 connected sequentially. The first segment 610, the third segment 630, the fifth segment 650, and the seventh segment 670 are all straight segments extending along a first direction. Along the first direction, the third segment 630 and the fifth segment 650 are both located between the first segment 610 and the seventh segment 670. Along a second direction, the first segment 610 and the seventh segment 670 are both located between the third segment 630 and the fifth segment 650, and the second direction is perpendicular to the first direction.

[0061] In this embodiment, the curved shaft 600 includes seven segments, of which the first segment 610, the third segment 630, the fifth segment 650, and the seventh segment 670 are straight segments extending along a first direction. Furthermore, along the first direction, the third segment 630 and the fifth segment 650 are located between the first segment 610 and the seventh segment 670; along a second direction, the first segment 610 and the seventh segment 670 are located between the third segment 630 and the fifth segment 650. The first segment 610 and the third segment 630 are connected by the second segment 620, the third segment 630 and the fifth segment 650 are connected by the fourth segment 640, and the fifth segment 650 and the seventh segment 670 are connected by the sixth segment 660. This arrangement results in the curved shaft 600 having a meandering structural form. Consequently, the curved shaft 600 is significantly longer than a straight shaft. Correspondingly, with the galvanometer 10 providing a larger torsion angle, the structural stress on the bending shaft 600 can be significantly reduced, thereby significantly improving the reliability of the galvanometer 10.

[0062] In one embodiment, such as Figure 4 As shown, the second segment 620, the fourth segment 640 and the sixth segment 660 are all straight segments that extend along the second direction.

[0063] Typically, both the fast and slow axes of the galvanometer 10 are fabricated using photolithography. During photolithography, straight segments are easier to control in terms of morphology, thus reducing morphological deviations after forming. Therefore, constructing the second segment 620, the fourth segment 640, and the sixth segment 660 as straight segments helps improve the forming accuracy of the bending axis 600.

[0064] In one embodiment, such as Figure 5 As shown, the second segment 620 and the sixth segment 660 are both straight segments extending along a second direction. The fourth segment 640 includes a first sub-segment 641, a second sub-segment 642, and a third sub-segment 643 connected in sequence. The first sub-segment 641 is connected to the third segment 630, and the third sub-segment 643 is connected to the fifth segment 650. The first sub-segment 641 and the third sub-segment 643 are straight segments extending along the second direction. Along the first direction, the third sub-segment 643 is located between the second segment 620 and the first sub-segment 641.

[0065] In this embodiment, the second segment 620, the sixth segment 660, and the first sub-segment 641 and the third sub-segment 643 are all straight segments, which helps to reduce morphological deviations after photolithography. Based on this, the fourth segment 640 includes the first sub-segment 641, the second sub-segment 642, and the third sub-segment 643 connected sequentially. Along the first direction, the third sub-segment 643 is located between the second segment 620 and the first sub-segment 641; that is, the third sub-segment 643 is closer to the second segment 620 than the first sub-segment 641. Compared to the fourth segment 640 being entirely composed of straight segments, the length of the bending axis 600 along the first direction can be reduced while maintaining the total length of the bending axis 600. This allows for the placement of a larger reflector 300, thereby increasing the reflective area.

[0066] Furthermore, the second segment 642 is a straight segment, and the angle between the second segment 642 and the first segment 641 is greater than or equal to 135° and less than or equal to 165°. If the angle between the second segment 642 and the first segment 641 is too large, the reduction in the length of the bent shaft 600 along the first direction will be less noticeable. If the angle between the second segment 642 and the first segment 641 is too small, a load effect is easily induced during etching, resulting in uneven etching. After repeated verification through multiple experiments, the applicant found that when the angle between the second segment 642 and the first segment 641 is greater than or equal to 135° and less than or equal to 165°, the reduction in the length of the bent shaft 600 along the first direction is more significant, and a load effect is less likely to be induced during etching.

[0067] In some embodiments, the connection between any two adjacent segments is formed with rounded corners. By forming rounded corners at the connection between adjacent components, stress concentration at the connection can be reduced or avoided.

[0068] In some embodiments, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is not less than 25 μm. Specifically, please refer to... Figure 4 In the embodiment where the fourth segment 640 is a straight line segment, the distance between all points of the second segment 620 and the fourth segment 640 is equal. Therefore, the distance between the second segment 620 and the fourth segment 640 is equal to the minimum distance between them along the first direction. Please refer to... Figure 5 In the embodiment where the fourth segment 640 includes a first sub-segment 641, a second sub-segment 642, and a third sub-segment 643, the third sub-segment 643 is closer to the second segment 620 than the first sub-segment 641 and the second sub-segment 642. Therefore, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is equal to the distance between the third sub-segment 643 and the second segment 620.

[0069] The connection points between the second segment 620 and the third segment 630, as well as the connection points between the third segment 630 and the fourth segment 640, have rounded corner structures. The larger the radius of these rounded corners, the better the effect of reducing stress concentration. The size of this radius is limited by the distance between the second segment 620 and the fourth segment 640. In other words, when the distance between the second segment 620 and the fourth segment 640 is large, the half-angle of the rounded corner structure can be set relatively large. After extensive experimental verification, the applicant found that the distance between the second segment 620 and the fourth segment 640 along the first direction must be no less than 25 μm to ensure that the rounded corner structures at the connection points of the second segment 620 and the third segment 630, as well as the connection points between the third segment 630 and the fourth segment 640, have sufficient rounded corner radii, thereby achieving a more significant effect in reducing stress concentration.

[0070] In some embodiments, the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is not less than 25 μm. Specifically, please refer to... Figure 4 In the embodiment where the fourth segment 640 is a straight line segment, the distance between all points of the sixth segment 660 and the fourth segment 640 is equal. Therefore, the distance between the sixth segment 660 and the fourth segment 640 is equal to the minimum distance between them along the first direction. Please refer to... Figure 5 In the embodiment where the fourth segment 640 includes a first sub-segment 641, a second sub-segment 642, and a third sub-segment 643, the first sub-segment 641 is closer to the sixth segment 660 than the second sub-segment 642 and the third sub-segment 643. Therefore, the minimum distance between the sixth segment 660 and the fourth segment 640 along the first direction is equal to the distance between the first sub-segment 641 and the sixth segment 660.

[0071] The connection points between the sixth segment 660 and the fifth segment 650, as well as the connection points between the fifth segment 650 and the fourth segment 640, have rounded corner structures. The larger the radius of these rounded corners, the better the effect of reducing stress concentration. However, the size of this radius is limited by the distance between the sixth segment 660 and the fourth segment 640. In other words, when the distance between the sixth segment 660 and the fourth segment 640 is large, the half-angle of the rounded corner structure can be set relatively larger. After extensive experimental verification, the applicant found that the distance between the fourth segment 640 and the sixth segment 660 along the first direction must be no less than 25 μm to ensure that the rounded corner structures at the connection points of the sixth segment 660 and the fifth segment 650, as well as the connection points between the fifth segment 650 and the fourth segment 640, have sufficient rounded corner radii, thereby achieving a more significant effect in reducing stress concentration.

[0072] Furthermore, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is not less than 50 μm. After extensive testing, the applicant discovered that when the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is not less than 50 μm, the stress concentration at the connection points between the second segment 620 and the third segment 630, and between the third segment 630 and the fourth segment 640, is significantly reduced.

[0073] Furthermore, the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is not less than 50 μm. After extensive experimental verification, the applicant discovered that when the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is not less than 50 μm, the stress concentration at the connection points between the sixth segment 660 and the fifth segment 650, as well as the connection points between the fifth segment 650 and the fourth segment 640, is significantly reduced.

[0074] In one embodiment, such as Figure 6 As shown, the second segment 620, the fourth segment 640 and the sixth segment 660 are all straight line segments. The angle between the second segment 620 and the first segment 610 is greater than 90°, the angle between the fourth segment 640 and the third segment 630 is greater than 90°, the angle between the sixth segment 660 and the fifth segment 650 is greater than 90°, and the second segment 620 and the sixth segment 660 are parallel.

[0075] Given that the first segment 610, the third segment 630, the fifth segment 650, and the seventh segment 670 all extend along the first direction, the angles between the second segment 620 and the third segment 630 are also greater than 90°, as are the angles between the fourth segment 640 and the fifth segment 650, and the angles between the sixth segment 660 and the seventh segment 670. Therefore, a bending axis 600 longer than the straight axis can be constructed. This helps to reduce the structural stress on the first axis 400 and / or the second axis 500, thereby improving the reliability of the galvanometer 10.

[0076] In other embodiments, such as Figure 7 As shown, the bending shaft 600 includes a first segment 610, a second segment 620 and a third segment 630 connected in sequence. A first bending angle is formed between the first segment 610 and the second segment 620, and a second bending angle is formed between the second segment 620 and the third segment 630. Both the first bending angle and the second bending angle are less than 90°.

[0077] This design gives the bending shaft 600 an overall "S"-shaped structure. This also allows for the construction of a bending shaft 600 that is longer than the straight shaft. This helps reduce the structural stress on the first shaft 400 and / or the second shaft 500, thereby improving the reliability of the galvanometer 10.

[0078] Furthermore, the galvanometer 10 has a first central axis passing through the center of the reflector 300, and a first axis 400 extending along a first direction. The first segment 610 and the third segment 630 are located on either side of the first central axis. That is, both the first segment 610 and the third segment 630 are offset from the first central axis. This arrangement helps to increase the first bending angle and the second bending angle. Increasing the first bending angle can weaken the stress concentration at the connection between the first segment 610 and the second segment 620, and increasing the second bending angle can weaken the stress concentration at the connection between the second segment 620 and the third segment 630.

[0079] Specifically, the first segment 610 has a first end away from the reflector 300, and the third segment 630 has a second end close to the reflector 300. The maximum distance between the first end and the first central axis is L1, the maximum distance between the second end and the first central axis is L2, and the length of the bending shaft 600 along the first direction is L3. Then, L1, L2, and L3 satisfy the following relationship:

[0080] 0.5L3 < L1 < L3;

[0081] 0.5L3 < L2 < L3.

[0082] The above-mentioned relationship defines the degree of deviation of the first segment 610 from the first central axis, and the degree of deviation of the third segment 630 from the first central axis. After extensive experimental verification, the applicant found that, under the condition of satisfying the above-mentioned relationship, the stress concentration at the connection between the first segment 610 and the second segment 620, and the stress concentration at the connection between the second segment 620 and the third segment 630 can be significantly reduced.

[0083] In one embodiment, the first segment 610, the second segment 620, and the third segment 630 are all segments with a uniform width. That is, the width of the first segment 610 is equal at all positions, the width of the second segment 620 is equal at all positions, and the width of the third segment 630 is equal at all positions. This makes the bending shaft 600 easy to process and shape.

[0084] In another embodiment, please refer to Figure 7 The width of the first segment 610 gradually decreases from the end furthest from the second segment 620 to the end closest to the second segment 620; the width of the third segment 630 gradually decreases from the end furthest from the second segment 620 to the end closest to the second segment 620; and the width of the second segment 620 gradually decreases from the middle to both ends. After extensive research, the applicant discovered that constructing the first segment 610, the second segment 620, and the third segment 630 in the above-described structural form can reduce the maximum stress on the bending shaft 600 while maintaining the same torsion angle of the reflector 300.

[0085] Figures 8 to 10 This is a stress distribution diagram obtained through numerical simulation using the finite element method. Figure 8 The stress distribution of the galvanometer 10 when it is on a straight axis is shown. According to the numerical simulation results, the maximum stress value is 1566 MPa when the straight axis is rotated by 20°. Figure 9 and Figure 10 All figures show the stress distribution when the galvanometer 10 uses a bending shaft 600 with a similar "S"-shaped structure. Figure 9 The bending shaft 600 in the figure has a first section 610, a second section 620 and a third section 630 with uniform widths. According to the results of numerical simulation, when the bending shaft 600 is twisted by 20°, the maximum stress value is 765MPa. Figure 10In the bending shaft 600, the width of the first segment 610 gradually decreases from the end furthest from the second segment 620 to the end closest to the second segment 620; the width of the third segment 630 gradually decreases from the end furthest from the second segment 620 to the end closest to the second segment 620; and the width of the second segment 620 gradually decreases from the middle to both ends. According to numerical simulation results, the maximum stress value is 653 MPa when the bending shaft 600 is twisted by 20°. Therefore, constructing the first segment 610, the second segment 620, and the third segment 630 with the aforementioned width variation structure can further reduce the maximum stress borne by the bending shaft 600, thereby further improving the reliability of the galvanometer 10.

[0086] In some embodiments, the first axis 400 is a bending axis 600, and there are two first axes 400, which are symmetrical about the center of the reflector 300. This arrangement ensures that when the support frame 200 is twisted relative to the fixed base 100 in different directions, the force on the first axis 400 remains essentially the same.

[0087] In some embodiments, the second axis 500 is a bending axis 600, and there are two second axes 500, which are symmetrical about the center of the reflector 300. This arrangement ensures that when the reflector 300 is twisted relative to the support frame 200 in different directions, the force on the second axis 500 remains essentially the same.

[0088] An embodiment of the second aspect of this application provides a lidar that includes the galvanometer 10 in any of the above embodiments.

[0089] Specifically, such as Figure 11 As shown, the lidar may also include a laser emitter 20 and a controller 30. The laser emitter 20 is used to emit a laser beam, and the controller 30 is electrically connected to both the laser emitter 20 and the galvanometer 10. The controller 30 is used to control the laser emitter 20 to emit the laser beam and to control the deflection of the galvanometer 10.

[0090] In the lidar of this application embodiment, at least one of the first axis 400 and the second axis 500 in the galvanometer 10 is a curved axis 600. Without reducing the area of ​​the reflector 300, the curved axis 600 has a longer length than the straight axis. This increases the length of the first axis 400 and / or the second axis 500. Thus, with the galvanometer 10 providing a larger torsion angle, the structural stress borne by the first axis 400 and / or the second axis 500 can be reduced, thereby giving the galvanometer 10 better reliability.

[0091] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A galvanometer, characterized in that, include: The fixing seat has a first hollow area; A support frame is provided in the first hollow area, the support frame is connected to the fixed base through a first axis, and the support frame is provided in a second hollow area; A reflector is disposed within the second hollow area, and the reflector is connected to the support frame via a second axis. Wherein, at least one of the first shaft and the second shaft is a curved shaft; The bending shaft includes a first segment, a second segment, a third segment, a fourth segment, a fifth segment, a sixth segment, and a seventh segment connected in sequence; The first segment, the third segment, the fifth segment, and the seventh segment are all straight segments and extend along a first direction; Along the first direction, both the third segment and the fifth segment are located between the first segment and the seventh segment; Along the second direction, both the first segment and the seventh segment are located between the third segment and the fifth segment, and the second direction is perpendicular to the first direction; Both the second segment and the sixth segment are straight segments and extend along the second direction; The fourth segment includes a first sub-segment, a second sub-segment, and a third sub-segment connected in sequence. The first sub-segment is connected to the third segment, and the third sub-segment is connected to the fifth segment. The first sub-segment and the third sub-segment are straight segments and extend along the second direction. Along the first direction, the third sub-segment is located between the second segment and the first sub-segment.

2. The galvanometer according to claim 1, characterized in that, The second sub-segment is a straight line segment, and the angle between the second sub-segment and the first sub-segment is greater than or equal to 135° and less than or equal to 165°.

3. The galvanometer according to claim 1 or 2, characterized in that, The connecting parts between any two adjacent segments all have rounded corners.

4. The galvanometer according to claim 3, characterized in that, The minimum distance between the second segment and the fourth segment along the first direction is not less than 25 μm; And / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 25 μm.

5. The galvanometer according to claim 3, characterized in that, The minimum distance between the second segment and the fourth segment along the first direction is not less than 50 μm; And / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 50 μm.

6. A galvanometer, characterized in that, include: The fixing seat has a first hollow area; A support frame is provided in the first hollow area, the support frame is connected to the fixed base through a first axis, and the support frame is provided in a second hollow area; A reflector is disposed within the second hollow area, and the reflector is connected to the support frame via a second axis. Wherein, at least one of the first shaft and the second shaft is a curved shaft; The bending shaft includes a first segment, a second segment, and a third segment connected in sequence. A first bending angle is formed between the first segment and the second segment, and a second bending angle is formed between the second segment and the third segment. Both the first bending angle and the second bending angle are less than 90°. The width of the first segment gradually decreases from the end furthest from the second segment to the end closest to the second segment; The width of the third segment gradually decreases from the end furthest from the second segment to the end closest to the second segment; The width of the second section gradually decreases from the middle to both ends.

7. The galvanometer according to claim 6, characterized in that, The galvanometer has a first central axis, which passes through the center of the reflector and extends along a first direction. The first segment and the third segment are located on both sides of the first central axis.

8. The galvanometer according to claim 7, characterized in that, The first segment has a first end away from the reflector, and the third segment has a second end close to the reflector. The maximum distance between the first end and the first central axis is L1, the maximum distance between the second end and the first central axis is L2, and the length of the bending axis along the first direction is L3. Then L1, L2, and L3 satisfy the following relationship: 0.5L3 < L1 < L3; 0.5L3 < L2 < L3.

9. A lidar, characterized in that, The galvanometer includes any one of claims 1 to 8.

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