一种扫描测头标定的动态误差补偿方法
By constructing a dynamic model of probe deflection with a three-axis linear displacement sensor and a time delay, the problem of time-consuming scanning probe calibration and failure to consider dynamic effects was solved, thus achieving a high-efficiency improvement in measurement accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU JITRI HUST INTELLIGENT EQUIP TECH CO LTD
- Filing Date
- 2024-04-23
- Publication Date
- 2026-07-17
AI Technical Summary
Existing methods for calibrating scanning probes on coordinate measuring machines are time-consuming and fail to effectively account for the dynamic effects of the probe, resulting in reduced measurement accuracy.
A dynamic model of probe deflection based on a triaxial linear displacement sensor and a time delay is adopted. The model parameters are established through a 25-point calibration method to compensate for dynamic errors in the probe signal. This includes constructing a dynamic model of probe deflection based on the triaxial linear displacement sensor signal and the time delay, and calculating the actual deflection through interpolation.
While shortening calibration time, it significantly improves measurement accuracy and reduces the impact of dynamic errors, maintaining high accuracy, especially at high detection speeds.
Smart Images
Figure CN120831075B_ABST