一种氧化钇保护下的高性能氮空位色心金刚石材料及其制备方法和应用

By subjecting diamond substrates to electron irradiation, nitrogen plasma treatment, and yttrium oxide coating deposition, the problems of low NV-center concentration and poor stability under extreme environments were solved, enabling the application of high-performance nitrogen-vacancy center diamond materials in quantum communication and sensing.

CN120841511BActive Publication Date: 2026-07-17WUHAN INST OF TECH

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
WUHAN INST OF TECH
Filing Date
2025-06-30
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing technologies, the low concentration of NV-center diamond and its limited application in extreme environments restrict its use in fields such as quantum communication, quantum computing, and quantum sensing.

Method used

By subjecting a diamond substrate to electron irradiation and nitrogen plasma treatment, a yttrium oxide coating is deposited, followed by vacuum annealing, which increases the concentration of NV-color centers and enhances their stability under extreme environments.

Benefits of technology

It significantly improves the concentration and stability of NV-centers, enhances the sensitivity and testing accuracy of quantum devices, is suitable for high-precision spectral detection, and maintains stable performance in extreme environments.

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Abstract

本发明提供一种氧化钇保护下的高性能氮空位色心金刚石材料及其制备方法和应用,属于量子材料技术领域。本发明中先对金刚石衬底进行电子辐照和清洁,接着采用氮等离子体进行处理,然后沉积氧化钇涂层,将沉积有氧化钇涂层的金刚石衬底在真空条件下退火,得到了高性能氮空位色心金刚石材料。本发明中通过氮等离子体对金刚石进行处理,能够增加金刚石中的替位氮浓度,使得在后续的退火处理过程中能提升NV‑色心浓度;同时,在金刚石衬底上沉积氧化钇涂层,能减少金刚石表面缺陷的产生,提升NV‑色心浓度,使得制备得到的金刚石材料具备优良的抗腐蚀性能。通过本发明中的制备方法制备得到的金刚石材料能够用于制备在极端条件下使用的量子传感器。
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