超高电极基板及其加工方法

By using a composite substrate structure and laser grooving and hole-filling electroplating processes, the problems of uneven and recessed electrodes in existing technologies have been solved, enabling the processing of large-size and ultra-thick electrodes and improving the reliability of substrate products.

CN120857359BActive Publication Date: 2026-07-17JIANGSU PROVISION ELECTRONICS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGSU PROVISION ELECTRONICS CO LTD
Filing Date
2025-07-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing packaging substrate processing technology cannot meet the production requirements for millimeter-level electrode height and thickness, resulting in uneven electrode surfaces and depression defects.

Method used

Using a composite substrate structure, insulating layers and copper foil layers are stacked, and large-size, ultra-thick electrodes are fabricated using laser sintering and hole-filling electroplating processes. Electrode pillars are then obtained by combining laser sintering and hole-filling electroplating processes and surface treatment is performed to ensure that the electrode surface is flat.

Benefits of technology

It enables the processing of large-size, ultra-thick electrodes with a smooth, un-dented electrode surface, significantly improving the reliability of substrate products.

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Abstract

本发明公开了一种超高电极基板及其加工方法,该方法包括:提供设有第一至第N‑1层线路层和转接铜层的复合基板;转接铜层上设置第一绝缘层和第一铜箔层,第N‑1层线路层上设置第二绝缘层和第二铜箔层;制作出多个凹槽,将浆料填入凹槽中并经固化研磨后制得多个电极柱;对增厚的第一铜箔层及第一绝缘层激光烧槽,制得多个电极主体雏形,电极主体雏形设有电极柱、电极顶层和电极绝缘部;在电极顶层上做出电极顶层图形,得到电极主体;将露出电极主体外的转接铜层部分去除,制得多个厚度均大于0.2mm且所在回路相互独立的电极。该方法新颖、合理,所得基板中的电极具有大尺寸、超高厚度、表面平整、无凹陷不良等优点,满足了电极生产需求。
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