A multi-heater rod three-degree-of-freedom adjustable ion source and a method of using the same

CN120878535BActive Publication Date: 2026-10-27WELCH MATERIALS (ZHEJIANG) INC
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202510988502.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-07-17
Publication Date
2026-10-27
Estimated Expiration
2045-07-17

AI Technical Summary

Technical Problem

[0004]但是,目前各大厂商生产的离子源产品仍然存在以下问题:1)均只使用2个加热棒,且分布方式为V型,加热空间在结构上受到限制;2)大部分厂商的加热棒位置是固定,无法根据质谱图的反馈调节加热棒的位置,只能通过调节流量或者温度,误差补偿性差

Benefits of technology

[0020]1)本发明所设计的可微调位姿坐标的延长加热棒组件能够扩展中原离子源加热气调节的局限性,同时设置有至少两个可微调的延长加热棒组件,可以更有效的提高离子源腔体温度,增大去溶剂与样品雾化的速度,提高离子化效率。

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN120878535B_ABST
    Figure CN120878535B_ABST
Patent Text Reader

Abstract

The application provides a multi-heating-rod three-degree-of-freedom adjustable ion source and a use method thereof, and relates to the field of ion source product design. The application comprises an ion source cavity, an ion source body and at least two extended heating rod assemblies. The ion source body is arranged on the side wall of the ion source cavity and the working end thereof is located in the inner cavity of the ion source cavity. The outer wall of the ion source cavity is provided with branch installation grooves matched with the number of the extended heating rod assemblies. The extended heating rod assembly comprises a moving platform, an extended heating rod and three branches. The three branches are arranged on the bottom of the moving platform and surround the heating head of the extended heating rod. The extended heating rod assembly designed by the application can expand the limitation of the heating gas adjustment of the Zhongyuan ion source. At least two extended heating rod assemblies which can be finely adjusted are arranged, so that the temperature of the ion source cavity can be more effectively improved, the speed of the desolvation and sample atomization can be increased, and the ionization efficiency can be improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This invention relates to the field of ion source product design, and in particular to a three-degree-of-freedom adjustable ion source with multiple heating rods and its usage method. Background Technology

[0002] A mass spectrometer is an instrument used to analyze particles. Its basic principle is to ionize microscopic particles into ions (through an ion source), and then separate ions with different mass-to-charge ratios using a mass analyzer (quadrupole mass analyzer, time-of-flight mass analyzer, magnetic mass analyzer, etc.) for quantitative / qualitative ion analysis. During the operation of a mass spectrometer, the ion source converts the sample into ions, completing the ionization process. The application of heated gas in the ion source can significantly improve ionization efficiency. The mechanism is twofold: first, it further atomizes the sample, forming smaller droplets and increasing the sample surface area, which promotes the subsequent desolvation process; second, it increases the temperature within the ion source, accelerating solvent evaporation and causing the charged droplets to rapidly vaporize, thus separating sample ions from the liquid phase and forming charged ions in the gas phase, thereby improving ionization efficiency.

[0003] Based on this ion source heating principle, each mass spectrometer manufacturer produces its own ion source products. The main structure includes an ion source cavity (used to fix the ESI / APCI source body and connect with the mass spectrometer vacuum interface, etc.), an ESI / APCI source body (used to ionize the sample), a nozzle adjustment structure (used to adjust the nozzle position), an exhaust gas emission device (used to exhaust the exhaust gas generated by the ion source), and auxiliary devices (such as observation window, explosion-proof port, heating device, etc.). Among them, AB's 7500 changed the distribution method of the heating gas.

[0004] However, the ion source products produced by major manufacturers still have the following problems: 1) They all use only 2 heating rods, and the distribution is V-shaped, which limits the heating space in terms of structure; 2) The heating rods of most manufacturers are fixed in position, and the position of the heating rods cannot be adjusted according to the feedback of the mass spectrum. The only way to adjust the flow rate or temperature is to adjust the flow rate or temperature, which results in poor error compensation.

[0005] In summary, there is an urgent need to provide an ion source product that can solve the problem of heating rods being limited in heating space. Summary of the Invention

[0006] To address the limitation of heating space in current ion source products, this invention provides a three-degree-of-freedom adjustable ion source with multiple heating rods. This expands upon the limitations of adjusting the heating gas in traditional ion sources, while effectively increasing the temperature of the ion source cavity, accelerating solvent removal and sample atomization, and improving ionization efficiency.

[0007] The present invention provides a multi-heating rod three-degree-of-freedom adjustable ion source, comprising an ion source cavity, an ion source body, and at least two extension heating rod assemblies. The ion source body is disposed on the side wall of the ion source cavity, with its working end located in the inner cavity of the ion source cavity. The outer wall of the ion source cavity is provided with a branch mounting groove matching the number of extension heating rod assemblies. The branch mounting groove is provided with a heating head through hole, and the branch mounting groove, the heating head through hole, and the inner cavity of the ion source cavity are sequentially connected. The extension heating rod assembly includes a moving platform, an extension heating rod, and three branches. The extension heating rod is disposed on the top of the moving platform, and the heating head of the extension heating rod passes through the moving platform. The heating head portion of the extension heating rod... The three branches, passing through the heating head through-hole and located within the ion source cavity, are all located at the bottom of the moving platform and surround the heating head of the extended heating rod. Each branch includes two sliding joints and a driving member. The sliding joints include a transition fork, a sliding fork, and a moving block. The two transition forks are fixedly connected to the bottom of the moving platform and the inner bottom surface of the branch mounting groove, respectively. The two sliding forks are fixedly connected to the driving member and the driving shaft of the driving member, respectively. In the same sliding joint, the notches of the transition fork and the sliding fork are perpendicular to each other, and the two ends of the moving block are rotatably disposed in the notches of the transition fork and the sliding fork, respectively.

[0008] In one feasible embodiment, the moving platform is parallel to the inner bottom surface of the support mounting groove.

[0009] In one feasible embodiment, a plurality of fixed heating rods are provided on the side wall of the ion source cavity, and the heating head of the fixed heating rod passes through the side wall of the ion source cavity and is located in the inner cavity of the ion source cavity.

[0010] In one feasible embodiment, the number of fixed heating rods is two; the heating heads of the two fixed heating rods and the working end of the ion source body are located on the same plane, the heating heads of the two fixed heating rods are respectively located on both sides of the working end of the ion source body, and the heating heads of the two fixed heating rods are not parallel to each other.

[0011] In one feasible embodiment, the ion source cavity includes a main body cavity and a beveled cavity that are interconnected. One or more sidewalls of the beveled cavity are beveled sidewalls, which are not parallel to the sidewalls of the main body cavity. The branch mounting groove is provided on the beveled sidewall and the branch mounting groove is provided on the sidewall of the beveled cavity. The ion source body and the fixed heating rod are provided on the sidewall of the main body cavity.

[0012] In one feasible embodiment, the sidewall of the ion source cavity is further provided with several observation windows.

[0013] In one feasible embodiment, the driving component is an electric push cylinder, and the electric push cylinder is also equipped with an encoder.

[0014] In one feasible embodiment, in the same group of extended heating rod assemblies, three branches are evenly arranged around the heating head of the extended heating rod.

[0015] In one possible embodiment, the diameter of the heating head of the extended heating rod is smaller than the diameter of the heating head through hole.

[0016] This invention also provides a method for using a three-degree-of-freedom adjustable ion source, comprising the following steps:

[0017] Step 1) Adjust the pose coordinates of the heating head of the extended heating rod within the ion source cavity using the moving platform and branch chain;

[0018] Step 2) Introduce the sample into the inner cavity of the ion source chamber.

[0019] The multi-heating rod, three-degree-of-freedom adjustable ion source provided by this invention has the following beneficial effects:

[0020] 1) The adjustable pose coordinate extension heating rod assembly designed in this invention can expand the limitations of heating gas adjustment in the original ion source. At the same time, it is equipped with at least two adjustable extension heating rod assemblies, which can more effectively increase the temperature of the ion source cavity, increase the speed of solvent removal and sample atomization, and improve ionization efficiency.

[0021] 2) The branched-drive mode designed in this invention allows for fine-tuning of the pose coordinates of the heating head of the extended heating rod through three branches, thereby altering the spatial distribution of the extended heating rod. This ensures that the heating head of the extended heating rod maintains a certain angle within the ion source cavity, thus agitating ions when hot gas is introduced, promoting and focusing them, and improving the efficiency of sample ions entering the ion optical system through the vacuum interface. Simultaneously, by fine-tuning the length of the heating head of different extended heating rods within the ion source cavity, different gas temperatures can be achieved at the outlet of the extended heating rod, creating a temperature gradient distribution and forming a localized weak gas turbulence field. This allows the atomized sample to have more space for heating, improving ionization efficiency.

[0022] 3) The branch drive mode designed in this invention belongs to the 3-UPU drive mode, which can realize the displacement adjustment of the extended heating rod in the xyz space. It has the characteristics of high sensitivity, high rigidity and high stability, and can realize the precise position and orientation adjustment of the heating head of the extended heating rod in the cavity of the ion source. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0024] Figure 2 This is a side view of the present invention.

[0025] Figure 3 This is a schematic diagram of the ion source cavity in this invention.

[0026] Figure 4 This is a schematic diagram of the extended heating rod assembly in this invention.

[0027] Figure 5 This is a schematic diagram of the overall structure of the branch of the present invention.

[0028] Figure Labels

[0029] Ion source cavity 1

[0030] Body cavity 1a

[0031] Oblique cavity 1b

[0032] Branch mounting slot 11

[0033] Heating head through hole 11.1

[0034] Observation window 12

[0035] Ion source body 2

[0036] Dynamic Platform 3

[0037] Extended heating rod 4

[0038] Heating terminal 41

[0039] Heating head 42

[0040] Branch 5

[0041] Mobile Sub-51

[0042] Adapter fork-shaped part 51.1

[0043] Movable fork-shaped component 51.2

[0044] Move block 51.3

[0045] Drive component 52

[0046] Fixed heating rod 6 Detailed Implementation

[0047] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. In the description of the present invention, it should be noted that the terms "left side", "right side", "upper side", "lower side", "above", "below", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0048] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0049] Furthermore, in the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0050] A multi-heating rod, three-degree-of-freedom adjustable ion source, see [link / reference]. Figure 1 For reference Figure 2 and Figure 3 The ion source includes an ion source cavity 1, an ion source body 2, and at least two extension heating rod assemblies. The ion source body 2 is disposed on the side wall of the ion source cavity 1, with its working end located in the inner cavity of the ion source cavity 1. The outer wall of the ion source cavity 1 is provided with branch mounting grooves 11 matching the number of extension heating rod assemblies. Each branch mounting groove 11 has a heating head through hole 11.1. The branch mounting grooves 11, the heating head through hole 11.1, and the inner cavity of the ion source cavity 1 are sequentially connected. (Continue reading...) Figure 1 For reference Figure 2 and Figure 3The extended heating rod assembly includes a moving platform 3, an extended heating rod 4, and three branches 5. The extended heating rod 4 is located on top of the moving platform 3, and its heating head passes through the moving platform 3. A portion of the heating head of the extended heating rod 4 passes through a heating head through-hole 11.1 and is located within the inner cavity of the ion source chamber 1. Specifically, the extended heating rod 4 includes a heating terminal 41 and a heating head 42 connected to each other. The heating terminal 41 is located on top of the moving platform 3 and is used for connecting an external heating device. The heating head 42 has an outlet hole for introducing external hot gas into the inner cavity of the ion source chamber 1. (See also...) Figure 4 and Figure 5 All three branches 5 are located at the bottom of the moving platform 3 and surround the heating head of the extension heating rod 4. It is understood that, in order to ensure that the heating head of the extension heating rod 4 is located within the inner cavity of the ion source chamber 1, the length of the heating head of the extension heating rod 4 should be greater than the length of any one of the branches 5, and the lengths of the three branches 5 should also be the same. (Continue reading...) Figure 4 and Figure 5 The branch 5 includes two sliding joints 51 and a driving member 52. Each sliding joint 51 includes a transition fork 51.1, a moving fork 51.2, and a moving block 51.3. Specifically, the transition fork 51.1 includes two parallel transition fork plates with a notch between them. Similarly, the moving fork 51.2 includes two parallel moving fork plates with a notch between them. (Continue reading...) Figure 4 and Figure 5 The two connecting fork-shaped parts 51.1 are fixedly connected to the bottom of the moving platform 3 and the inner bottom surface of the support mounting groove 11, respectively. The two moving fork-shaped parts 51.2 are fixedly connected to the driving member 52 and the driving shaft of the driving member 52, respectively. In the same moving pair 51, the notch of the connecting fork-shaped part 51.1 and the notch of the moving fork-shaped part 51.2 are perpendicular to each other, and the two ends of the moving block 51.3 are rotatably disposed in the notch of the connecting fork-shaped part 51.1 and the notch of the moving fork-shaped part 51.2, respectively.

[0051] Specifically, the driving mode between these three branches 5 is a 3-UPU driving mode, which is currently quite common. For a detailed explanation of the principle, please refer to the article titled "Analysis of Relevant Factors Concerning the Workspace Range and Accuracy of a Mobile 3-UPU Parallel Mechanism" published in the journal *Design and Research*. Here, for ease of understanding, a brief description of the 3-UPU driving mode is provided:

[0052] 3-UPU refers to three parallel UPU branches, each consisting of two u-joints and one p-joint, with the p-joint located between the two u-joints. The u-joints are universal joints used to achieve movement in two directions, namely, movement in the xy-plane; the p-joint is a displacement joint used to achieve movement in the z-axis direction. Therefore, as long as the above conditions are met, movement within the xyz space can be achieved.

[0053] Correspondingly, in this application, the movable joint 51 can be regarded as a u-joint, and the driving member 52 can be regarded as a p-joint. One end of the movable block 51.3 is rotatably connected to the transition fork member 51.1, so that the moving platform 3 can move in one direction, which is defined as the x-axis direction. The other end of the movable block 51.3 is rotatably connected to the movable fork member 51.2, so that the moving platform 3 can move in another direction, which is defined as the y-axis direction. Because the notch of the transition fork member 51.1 and the notch of the movable fork member 51.2 are perpendicular to each other, the x-axis direction and the y-axis direction are perpendicular to each other to form an xy plane. At the same time, the movement direction of the driving shaft of the driving member 52 is defined as the z-axis direction. Therefore, according to the principle of the 3-UPU drive mode, the sliding joint 51 can realize movement in the xy plane, and the driving component 52 can realize movement in the z axis, which meets the requirements of the u joint and p joint in the 3-UPU drive mode, so that the position of the heating head of the extended heating rod 4 can be finely adjusted through the three branches 5 and the moving platform 3. In addition, it is worth emphasizing that the xy plane is preferably the plane where the moving platform 3 is located, and the z axis direction is preferably the direction perpendicular to the moving platform 3.

[0054] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, see reference. Figure 1 For reference Figure 2 and Figure 3 The ion source cavity 1 is further provided with a plurality of fixed heating rods 6 on its side wall. The heating heads of the fixed heating rods 6 pass through the side wall of the ion source cavity 1 and are located in the inner cavity of the ion source cavity 1. In a specific embodiment, see [reference needed]. Figure 1 For reference Figure 2 and Figure 3 The number of fixed heating rods 6 is two. The central axis of the heating head of the two fixed heating rods 6 and the central axis of the working end of the ion source body 2 are located on the same plane. The heating heads of the two fixed heating rods 6 are located on both sides of the working end of the ion source body 2. The central axes of the heating heads of the two fixed heating rods 6 are not parallel. Preferably, the included angle between the heating heads of the two fixed heating rods 6 is 90°, and the whole is V-shaped.

[0055] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, in conjunction with reference to [reference needed] Figure 1 and Figure 3The ion source cavity 1 includes a main body cavity 1a and a beveled cavity 1b that are interconnected. One end of the main body cavity 1a is connected to one end of the beveled cavity 1b so that the main body cavity 1a and the beveled cavity 1b are interconnected. The sidewall of the main body cavity 1a is usually annular. One or more sidewalls of the beveled cavity 1b are beveled sidewalls. The beveled sidewalls are not parallel to the sidewalls of the main body cavity 1a and the included angle α between them is preferably 45°. The branch mounting groove 11 is provided on the sidewall of the beveled cavity 1b. The ion source body 2 and the fixed heating rod 6 are provided on the sidewall of the main body cavity 1a.

[0056] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, see reference. Figure 1 and Figure 3 The side wall of the ion source cavity 1 is also provided with several observation windows 12, which are used by the operator to observe the situation inside the ion source cavity 1 from the outside.

[0057] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, in conjunction with reference to [reference needed] Figure 4 and Figure 5 The driving component 52 is an electric push cylinder, which is also equipped with an encoder. The encoder can measure the displacement of the push rod of the electric push cylinder, realize negative feedback adjustment of the push rod displacement, and ensure the motion accuracy of the end position of the extended heating rod 4.

[0058] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, see reference. Figure 4 In the same group of extended heating rod assemblies, the three branches 5 are evenly arranged around the heating head of the extended heating rod 4. For explanation, "evenly arranged" means that the three branches 5 form an equilateral triangle layout on the mounting plane (moving platform 3 and branch mounting groove 11), and the center point of the equilateral triangle is the center point of the mounting plane.

[0059] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, in conjunction with reference to [reference needed] Figure 1 and Figure 3 The diameter of the heating head of the extended heating rod 4 is smaller than the diameter of the heating head through hole 11.1, so as to prevent the heating head of the extended heating rod 4 from being restricted by the periphery of the heating head through hole 11.1 when the position of the heating head is finely adjusted.

[0060] The multi-heating rod three-degree-of-freedom adjustable ion source provided in this invention, see reference. Figure 1 The moving platform 3 is parallel to the inner bottom surface of the support mounting groove 11.

[0061] This invention also provides a method for using a three-degree-of-freedom adjustable ion source, comprising the following steps:

[0062] Step 1) Adjust the position coordinates of the heating head of the extended heating rod 4 within the ion source cavity 1 using the moving platform 3 and the branch chain 5; further, the position coordinates of the heating head of the extended heating rod 4 within the ion source cavity 1 can be observed through the observation window 12; further still, the heating of the sample can be divided into three modes: the first mode is to use only the heating head of the fixed heating rod 6 to heat the sample, the second mode is to use only the heating head of the extended heating rod 4 to heat the sample, and the third mode is to use both the heating head of the fixed heating rod 6 and the heating head of the extended heating rod 4 to heat the sample simultaneously. The third mode is usually used when delivering samples with extremely low concentrations or high throughput.

[0063] Step 2) Introduce the sample into the inner cavity of the ion source chamber 1; further, during the heating process of the heating head of the extended heating rod 4, the position coordinates of the heating head of the extended heating rod 4 can be adjusted in real time according to the actual mass number intensity feedback in the inner cavity of the ion source chamber 1.

[0064] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A three-degree-of-freedom adjustable ion source with multiple heating rods, characterized in that: The ion source includes an ion source cavity (1), an ion source body (2), and at least two extension heating rod assemblies. The ion source body (2) is located on the side wall of the ion source cavity (1) and its working end is located in the inner cavity of the ion source cavity (1). The outer wall of the ion source cavity (1) is provided with a branch mounting groove (11) matching the number of extension heating rod assemblies. The branch mounting groove (11) is provided with a heating head through hole (11.1). The branch mounting groove (11), the heating head through hole (11.1), and the inner cavity of the ion source cavity (1) are connected in sequence. The extended heating rod assembly includes a moving platform (3), an extended heating rod (4), and three branches (5). The extended heating rod (4) is located at the top of the moving platform (3), and the heating head of the extended heating rod (4) passes through the moving platform (3). Part of the heating head of the extended heating rod (4) passes through the heating head through hole (11.1) and is located in the inner cavity of the ion source cavity (1). The three branches (5) are all located at the bottom of the moving platform (3), and the three branches (5) surround the heating head of the extended heating rod (4). The branch (5) includes two sliding joints (51) and a driving member (52). The sliding joint (51) includes a transition fork (51.1), a moving fork (51.2), and a moving block (51.3). The two transition fork (51.1) are fixedly connected to the bottom of the moving platform (3) and the inner bottom surface of the branch mounting groove (11), respectively. The two moving fork (51.2) are fixedly connected to the driving member (52) and the driving shaft of the driving member (52), respectively. In the same sliding joint (51), the notch of the transition fork (51.1) and the notch of the moving fork (51.2) are perpendicular to each other, and the two ends of the moving block (51.3) are rotatably disposed in the notch of the transition fork (51.1) and the notch of the moving fork (51.2), respectively.

2. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: The moving platform (3) is parallel to the inner bottom surface of the branch mounting groove (11).

3. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: The side wall of the ion source cavity (1) is also provided with several fixed heating rods (6), and the heating head of the fixed heating rod (6) passes through the side wall of the ion source cavity (1) and is located in the inner cavity of the ion source cavity (1).

4. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 3, characterized in that: The number of fixed heating rods (6) is two; the heating heads of the two fixed heating rods (6) and the working end of the ion source body (2) are located on the same plane, the heating heads of the two fixed heating rods (6) are located on both sides of the working end of the ion source body (2), and the heating heads of the two fixed heating rods (6) are not parallel to each other.

5. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 3, characterized in that: The ion source cavity (1) includes a main body cavity (1a) and a beveled cavity (1b) that are interconnected. One or more sidewalls of the beveled cavity (1b) are beveled sidewalls. The beveled sidewalls are not parallel to the sidewalls of the main body cavity (1a). The branch mounting groove (11) is provided on the beveled sidewall. The ion source body (2) and the fixed heating rod (6) are provided on the sidewall of the main body cavity (1a).

6. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: The side wall of the ion source cavity (1) is also provided with several observation windows (12).

7. The multi-heating rod three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: The drive unit (52) is an electric push cylinder, and the electric push cylinder is also equipped with an encoder.

8. The three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: In the same group of extended heating rod assemblies, three branches (5) are evenly arranged around the heating head of the extended heating rod (4).

9. The three-degree-of-freedom adjustable ion source according to claim 1, characterized in that: The diameter of the heating head of the extended heating rod (4) is smaller than the diameter of the heating head through hole (11.1).

10. A method of using the three-degree-of-freedom adjustable ion source according to any one of claims 1 to 9, comprising the following steps: Step 1) Adjust the pose coordinates of the heating head of the extended heating rod (4) in the inner cavity of the ion source cavity (1) by using the moving platform (3) and the branch (5); Step 2) Introduce the sample into the inner cavity of the ion source chamber (1).

Citation Information

Patent Citations

  • Electron Bombardment Ion Source Control System

    CN102280348A

  • Multidirectional adjustable pyrolysis-electrospray ion source device

    CN117316754A