A polishing process method of a partial non-full-aperture cylindrical lens

Abstract

The application provides a polishing process method of a local non-full-aperture cylindrical lens, opposite surfaces of the cylindrical lens form a first cylindrical surface and a plane, and a concave area is formed on one side of the plane, the concave area comprises a second cylindrical surface and chord surfaces arranged on opposite sides of the second cylindrical surface, and two ends of the second cylindrical surface and edges of the chord surfaces are connected with the plane of the cylindrical lens; the method comprises the following steps: S1, detecting the thickness and the edge thickness difference of the cylindrical lens to be processed; S2, marking tool reference points and workpiece reference points by using end calibration tools and reference tools respectively, and generating tool coordinate systems and workpiece coordinate systems; S3, mounting the cylindrical lens to be processed on a clamp and mounting a polishing tool on a manipulator; S4, calculating the running track and the posture parameters of the polishing tool by using a simulation tool; S5, moving the polishing tool to be in contact with the surface of the concave area; S6, running a polishing program and polishing according to the running track and the posture parameters; and S7, unloading the polished cylindrical lens and measuring the surface shape precision and the shape and position size.

Description

Technical Field

[0001] This disclosure generally relates to the field of optical component processing technology, and specifically to a polishing process method for a partially non-full-aperture cylindrical mirror. Background Technology

[0002] Cylindrical mirrors, as important optical components, are widely used in laser processing, optical imaging, optical communication, medical devices, and other fields. Their core function is to achieve beam focusing, collimation, deflection, or wavefront modulation through a cylindrically symmetric surface (one direction being a plane or a low-curvature generatrix, and the other direction being a high-curvature sagittal surface). As optical systems develop towards higher precision, miniaturization, and multifunctionality, the demand for locally cylindrical mirrors is increasingly prominent. These components require high-precision surface shape control only in specific areas (such as the edge annular region, the central circular region, or segmented regions), while the surface shape accuracy or surface roughness requirements for other areas are lower.

[0003] Traditional cylindrical mirror polishing processes mainly rely on classical polishing or specialized processing equipment. However, these methods have significant bottlenecks in achieving high-precision control in localized areas, making them unsuitable for emerging application demands. Classical polishing removes material through the relative motion between the polishing disc and the workpiece, as well as the chemical action of the abrasive. Its surface accuracy is highly dependent on the operator's experience. For localized cylindrical mirrors, the large difference in curvature between the sagittal and generatrical surfaces makes it difficult to uniformly control the pressure distribution of the polishing disc in localized areas, easily leading to "edge effects." Furthermore, classical polishing is inefficient and cannot meet the needs of mass production. Therefore, a precise and efficient polishing process for localized cylindrical mirrors is urgently needed. Summary of the Invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a polishing process for partially non-full-aperture cylindrical mirrors to solve the above problems.

[0005] This application provides a polishing process for a partially non-full-aperture cylindrical mirror, wherein the two opposite sides of the cylindrical mirror form a first cylindrical surface and a plane, wherein a concave region is formed on one side of the plane, the concave region includes a second cylindrical surface and chord surfaces disposed on opposite sides of the second cylindrical surface, and both ends of the second cylindrical surface and the edge of the chord surface are connected to the plane of the cylindrical mirror. The method includes: S1: Select the cylindrical mirror to be processed, and detect the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: After determining that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, the tool reference point and the workpiece reference point are calibrated by the end calibration tool and the reference tool respectively, and the tool coordinate system and the workpiece coordinate system are generated. S3: Mount the cylindrical mirror to be processed onto the fixture, and mount the polishing tool onto the robotic arm; S4: Obtain the shape parameters of the concave area, and calculate the running trajectory and posture parameters of the polishing tool using simulation tools; S5: Move the polishing tool until it contacts the surface of the concave area; S6: Run the polishing program and polish according to the running trajectory and the posture parameters; S7: Unload the polished cylindrical mirror and measure its surface accuracy and dimensions. According to the technical solution provided in the embodiments of this application, in step S1, when inspecting the cylindrical mirror to be processed, an outside micrometer is used to measure the thickness of the concave area and the edge thickness difference, and a vernier caliper and measuring instrument are used to inspect the external dimensions of the concave area.

[0006] According to the technical solution provided in the embodiments of this application, in step S2, both the end calibration tool and the reference tool are cylindrical structures, and the front end is designed as a cone.

[0007] According to the technical solution provided in the embodiments of this application, in step S2, a dial indicator is installed on the end calibration tool to detect the alignment accuracy between the end calibration tool and the reference tool.

[0008] According to the technical solution provided in the embodiments of this application, in step S3, the cylindrical mirror to be processed is precisely mounted on the fixture and matched with the workpiece reference point, and the polishing tool is precisely mounted on the robot arm and matched with the tool reference point.

[0009] According to the technical solution provided in the embodiments of this application, in step S4, when the polishing tool moves to the edge of the concave area, the range of the movement beyond the boundary does not exceed one-third of the diameter of the polishing tool.

[0010] According to the technical solution provided in the embodiments of this application, in step S4, when calculating the attitude parameters, the attitude range is limited according to the trajectory range of the running trajectory.

[0011] According to the technical solution provided in the embodiments of this application, between steps S5 and S6, the polishing tool is rotated after contact to confirm that there is no rotational jamming.

[0012] According to the technical solution provided in the embodiments of this application, in step S6, the feed speed of the polishing tool is set to 0.3mm / s-1mm / s, the pressure is 0.1MPa-0.5MPa, and the rotation speed is 500rpm-800rpm; the processing time for a single operation is no more than 30min.

[0013] According to the technical solution provided in the embodiments of this application, in step S7, when the polished cylindrical mirror does not meet the requirements, the feed speed of the local running trajectory is modified according to the surface shape detection feedback in order to repair the cylindrical mirror.

[0014] Compared with existing technologies, the beneficial effects of this application are as follows: The cylindrical mirror polishing method provided in this application is based on a robotic arm polishing process. Utilizing the high flexibility, high degree of freedom, and high controllability of the robotic arm, it achieves precise and efficient polishing of local cylindrical mirrors through high-precision positioning, polishing trajectory planning, and surface error control. This process broadens the design possibilities for cylindrical mirrors, develops a robotic arm-based local cylindrical mirror polishing process, reduces labor and time costs, and thus improves processing stability and reliability. Attached Figure Description

[0015] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 A flowchart illustrating the polishing process of the partially non-full-aperture cylindrical mirror provided in this application; Figure 2 This is a schematic diagram of a cylindrical mirror. Figure 3 for Figure 2 The cross-sectional view of the cylindrical mirror along the AA direction is shown in the figure. Figure 4 for Figure 2 The cross-sectional view of the cylindrical mirror along the BB direction is shown. Figure 5 A schematic diagram of the end calibration tool and reference tool.

[0016] Reference numerals in the attached figures: 1. First cylindrical surface; 2. Plane; 3. Concave area; 4. Second cylindrical surface; 5. Chord surface; 6. End calibration tool; 7. Reference tool; 8. Dial indicator; 9. Workpiece disc; 10. Threaded hole. Detailed Implementation

[0017] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0018] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0019] Please refer to Figures 1-5This application provides a polishing process for a partially non-full-aperture cylindrical mirror. The cylindrical mirror has a first cylindrical surface 1 and a plane 2 formed on two opposite sides. A concave region 3 is formed on one side of the plane 2. The concave region 3 includes a second cylindrical surface 4 and chord surfaces 5 disposed on opposite sides of the second cylindrical surface 4. Both ends of the second cylindrical surface 4 and the edge of the chord surface 5 are connected to the plane 2 of the cylindrical mirror. The method includes: S1: Select the cylindrical mirror to be processed, and detect the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: After determining that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, the tool reference point and the workpiece reference point are calibrated by the end calibration tool 6 and the reference tool 7 respectively, and the tool coordinate system and the workpiece coordinate system are generated. S3: Mount the cylindrical mirror to be processed onto the fixture, and mount the polishing tool onto the robotic arm; S4: Obtain the shape parameters of the concave region 3, and calculate the running trajectory and posture parameters of the polishing tool using a simulation tool; S5: Move the polishing tool until it contacts the surface of the recessed area 3; S6: Run the polishing program and polish according to the running trajectory and the posture parameters; S7: Unload the polished cylindrical mirror and measure its surface accuracy and dimensions.

[0020] Specifically, the cylindrical mirror has two opposing surfaces: a first cylindrical surface 1 and a plane 2. On one side of plane 2, there is a concave region 3, which is the area requiring high-precision polishing. The concave region 3 consists of two parts: a second cylindrical surface 4, a curved surface with a certain curvature, which is the core processing part of the concave region 3; and a chord surface 5, located on opposite sides of the second cylindrical surface 4, connecting the second cylindrical surface 4 to plane 2 of the cylindrical mirror. Specifically, the two ends of the second cylindrical surface 4 smoothly connect to plane 2, and the edge of the chord surface 5 also connects to plane 2, forming a complete local concave structure. This structure dictates that the polishing process must be specifically adapted to the curvature of the second cylindrical surface 4 and the transition characteristics of the chord surface 5, requiring high-precision processing only on the concave region 3, while other areas of the cylindrical mirror (such as the non-concave parts of the first cylindrical surface 1 and plane 2) do not require the same precision control. For ease of explanation, the first cylindrical surface 1 is a cylindrical surface cut off from the side of a cylinder by a circular region, and the second cylindrical surface 4 is a cylindrical surface cut off from the side of a cylinder by a rectangular region.

[0021] Specifically, in step S1, the partially non-full-aperture cylindrical mirror to be processed is first selected, and its basic parameters are checked, with a focus on the thickness and edge thickness difference of the cylindrical mirror. The thickness mainly refers to the overall thickness of the cylindrical mirror and the thickness at the location of the concave region 3, while the edge thickness difference mainly refers to the thickness difference at different edge positions of the cylindrical mirror. The purpose of this step is to confirm whether the initial blank state of the cylindrical mirror to be processed meets the processing requirements, and to avoid subsequent processing failure to achieve the expected accuracy due to excessive initial dimensional deviation. If the thickness or edge thickness difference exceeds the machinable range, the blank needs to be adjusted or replaced in advance to ensure the feasibility of processing.

[0022] In step S2, after confirming that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the processing requirements, coordinate system calibration is performed. Specifically, the tool reference point and workpiece reference point are determined using an end-effector calibration tool and a reference tool, respectively; the polishing tool and cylindrical mirror are positioned separately, where the tool reference point is the spatial reference position of the polishing tool, and the workpiece reference point is the spatial reference position of the cylindrical mirror. Based on these two reference points, a tool coordinate system describing the spatial position of the polishing tool and a workpiece coordinate system describing the spatial position of the cylindrical mirror are generated. The establishment of these two coordinate systems provides a unified spatial reference for subsequent processing, ensuring that the movement of the polishing tool and the position of the cylindrical mirror can be accurately quantified, which is the basis for achieving positioning accuracy. During positioning, the end-effector calibration tool is mounted on the robot arm, and the reference tool is mounted on the threaded hole 10 of the workpiece disk 9.

[0023] In step S3, the cylindrical mirror to be processed is mounted on a special fixture, which is then installed at the threaded hole 10 on the workpiece disk 9 to ensure the cylindrical mirror remains stable and does not loosen during processing. Simultaneously, the polishing tool is mounted on a robotic arm, enabling the tool to perform multi-dimensional movements under the robot's drive. The core of this step is placing the cylindrical mirror and polishing tool in a physically feasible position for processing, providing the hardware foundation for subsequent trajectory execution and polishing operations—the fixture must ensure the position of the cylindrical mirror matches the workpiece coordinate system, and the robotic arm must ensure the controllability of the polishing tool's movement.

[0024] In step S4, the shape parameters of the concave region 3 are obtained, including the radius of curvature of the second cylindrical surface 4, the extension angle of the chord surface 5, and the boundary range of the concave region 3. Simulation tools are used for data processing: on the one hand, the trajectory of the polishing tool is calculated, i.e., the path the tool moves in space, ensuring it completely covers all areas of the concave region 3 to be processed; on the other hand, posture parameters are calculated, i.e., the spatial posture of the tool during its movement, such as the contact angle between the tool and the second cylindrical surface and the chord surface, to adapt to the curved surface characteristics of the concave region 3. This step is crucial for achieving precise local processing. Pre-planning using simulation tools can avoid processing errors caused by mismatch between the tool movement and the shape of the concave region.

[0025] In step S5, the robotic arm is controlled to move the polishing tool until it contacts the surface of the recessed area 3. The purpose of this step is to establish the initial physical contact between the tool and the surface to be processed, confirm that the tool is in the starting position where polishing can begin, and provide a physical starting point reference for the formal processing.

[0026] In step S6, a preset polishing program is run, causing the polishing tool to move along the trajectory calculated in step S4 while maintaining the planned posture parameters during the polishing operation. During this process, the tool removes material through relative movement with the surface of the concave region 3, gradually machining the surface accuracy of the concave region 3 to the target requirements. The synergistic effect of the trajectory and posture parameters ensures the precision and uniformity of the machining process.

[0027] In step S7, after polishing, the cylindrical mirror is unloaded from the fixture and subjected to precision testing: the surface accuracy of the concave region 3 is measured, as well as its geometric dimensions. These measurements verify whether the processing results meet the design requirements, providing a basis for subsequent possible adjustments or acceptance criteria.

[0028] Furthermore, in step S1, when inspecting the cylindrical mirror to be processed, an outside micrometer is used to measure the thickness of the concave region 3 and the edge thickness difference, and a vernier caliper and measuring instrument are used to inspect the external dimensions of the concave region 3.

[0029] Specifically, in step S1, the inspection of the cylindrical mirror to be processed needs to be completed using specific tools to ensure accurate initial parameters are obtained. Specifically, an outside micrometer is used to inspect the thickness and edge thickness difference of the concave area 3. At the same time, in order to fully understand the shape characteristics of the concave area 3, a vernier caliper and a measuring instrument are also used for auxiliary inspection: the vernier caliper is used to measure the planar dimensions of the concave area 3, such as the chord length of the second cylindrical surface 4, the width of the chord surface 5, and the projection range of the entire concave area 3 on the cylindrical mirror plane; the measuring instrument is used to obtain more detailed shape data, such as the relative position of the concave area 3 and the edge of the cylindrical mirror.

[0030] Furthermore, in step S2, both the end calibration tool 6 and the reference tool 7 are cylindrical structures, with a conical front end.

[0031] Specifically, in step S2, when calibrating the tool reference point and the workpiece reference point, the end-point calibration tool 6 and the reference tool 7 employ a specific structural design to ensure calibration accuracy. Both the end-point calibration tool 6 and the reference tool 7 have cylindrical bodies, which facilitates maintaining a stable posture during installation and use, reducing positioning deviations caused by irregular tool shapes. The front ends of both tools are designed as conical structures. The tip of the cone has a positioning advantage, enabling high-precision alignment through point contact. During calibration, the conical tip of the end-point calibration tool 6 and the conical tip of the reference tool 7 form a precise contact point, which serves as the core reference for reference point positioning. This design significantly reduces the ambiguity of the reference point caused by excessively large or complex contact surfaces, resulting in more accurate determination of the coordinates of the tool reference point and the workpiece reference point.

[0032] Furthermore, in step S2, a dial indicator 8 is installed on the end calibration tool 6 to detect the alignment accuracy between the end calibration tool 6 and the reference tool 7.

[0033] Specifically, in step S2, to ensure precise alignment between the tool reference point and the workpiece reference point, thereby improving the calibration accuracy of the tool coordinate system and the workpiece coordinate system, a dial indicator 8 is installed on the end-effector calibration tool 6. This dial indicator 8 is used to detect the alignment accuracy between the end-effector calibration tool 6 and the reference tool 7 in real time. During positioning, the end-effector calibration tool 6 is mounted on the robot arm, while the reference tool 7 is fixed at the threaded hole 10 of the workpiece disk 9. The installation of both must ensure that the tips of the front cones are on the same vertical line. By monitoring the alignment status through the dial indicator 8, the spatial positional deviation between the two reference points can be quantitatively fed back, ensuring that the tips of the end-effector calibration tool 6 and the reference tool 7 are completely coincident on the vertical line.

[0034] Furthermore, in step S3, the cylindrical mirror to be processed is precisely mounted on the fixture and matched with the workpiece reference point, and the polishing tool is precisely mounted on the robot arm and matched with the tool reference point.

[0035] Specifically, in step S3, the mounting operation must strictly match the cylindrical mirror to be processed with the workpiece reference point and the polishing tool with the tool reference point to ensure that their positions in physical space are consistent with the coordinate system parameters calibrated in step S2, thus laying the foundation for accurate positioning in subsequent processing.

[0036] The mounting process of the cylindrical mirror to be processed is as follows: Place the cylindrical mirror on a special fixture, and adjust its position through the positioning structure of the fixture so that the preset workpiece reference point on the cylindrical mirror (such as the feature point on the edge of the concave area 3, the mark point on the plane 2) completely corresponds to the workpiece reference point calibrated in step S2, that is, the coordinates of the two coincide in the workpiece coordinate system, so as to ensure that the spatial position of the cylindrical mirror is accurately bound to the workpiece coordinate system.

[0037] The mounting of the polishing tool needs to be completed in conjunction with the robot arm: the polishing tool is mounted on the end effector of the robot arm and fixed by the mechanical connection structure. The mounting angle and position of the tool are adjusted so that the center of the polishing tool or the preset tool reference point is aligned with the tool reference point marked in step S2. That is, the coordinates of the tool reference point in the tool coordinate system are consistent with the coordinates of the tool reference point, ensuring that the motion reference of the polishing tool is completely matched with the tool coordinate system.

[0038] Furthermore, in step S4, when the polishing tool moves to the edge of the concave area 3, the range of movement beyond the boundary does not exceed one-third of the diameter of the polishing tool.

[0039] Specifically, in step S4, when calculating the polishing tool's trajectory using the simulation tool, special attention must be paid to controlling the tool's movement boundary as it approaches the edge of the concave region 3. This ensures that the tool's extent beyond the boundary of the concave region 3 does not exceed one-third of its own diameter, thus avoiding over-processing of non-target areas or edge effects. The concave region 3 consists of the second cylindrical surface 4 and the chordal surface 5, with its edge connecting to the plane 2 of the cylindrical mirror, forming a clear processing boundary. When generating the trajectory, the simulation tool first defines the boundary range of the area to be processed based on the three-dimensional model of the concave region 3, and then plans the tool's movement path, ensuring that the main body of the trajectory completely covers the area to be processed on the second cylindrical surface 4 and the chordal surface 5.

[0040] Furthermore, in step S4, the attitude range is limited according to the trajectory range of the running trajectory when calculating the attitude parameters.

[0041] Specifically, in step S4, when calculating the posture parameters of the polishing tool, the trajectory range of the running trajectory should be used as the constraint boundary to ensure that the posture adjustment of the tool always adapts to the curved surface features of the concave area 3 and does not exceed the safe movement range, so as to avoid interference with the non-processed area of ​​the cylindrical mirror.

[0042] The trajectory range of the concave region 3 is a three-dimensional spatial path jointly defined by the boundaries of the second cylindrical surface 4 and the chord surface 5. The simulation tool has clearly defined the spatial coordinate boundaries of this range when planning the trajectory. The calculation of the attitude parameters needs to be based on the surface characteristics of each point on the trajectory to determine the contact angle between the polishing tool and the surface, so as to ensure that the effective contact area between the tool and the processing surface is uniform.

[0043] Furthermore, between steps S5 and S6, the polishing tool is rotated after contact to confirm that there is no rotational jamming.

[0044] Specifically, in step S5, after the polishing tool moves to contact the surface of the concave area, a crucial operation needs to be added before the polishing program is officially started in step S6: drive the polishing tool to rotate, and observe its rotation state to confirm that there is no jamming or obstruction, so as to ensure that the tool can maintain a stable movement posture during the subsequent polishing process. Because the concave area 3 is composed of the second cylindrical surface 4 and the chord surface 5, its surface has a specific curvature change, and the contact point between the polishing tool and the surface of the concave area 3 may exhibit different force states due to the surface shape. After contact is completed in step S5, the robot will control the polishing tool to rotate at a preset low speed. At this time, the smoothness of the tool's rotation needs to be monitored by visual observation or sensor feedback: if the tool jams, makes abnormal noises, or the speed drops suddenly during rotation, it indicates that there may be problems such as excessively tight local contact or unsuitable posture angle between the tool and the surface of the concave area 3; if the rotation is smooth and there is no obvious resistance, it indicates that the contact state between the tool and the surface of the concave area is good and the posture parameters meet the processing requirements.

[0045] Furthermore, in step S6, the feed speed of the polishing tool is set to 0.3mm / s-1mm / s, the pressure is 0.1MPa-0.5MPa, and the rotation speed is 500rpm-800rpm; the processing time for a single operation is no more than 30min.

[0046] Specifically, in step S6, the operating parameters of the polishing tool must be set strictly according to the preset range, including feed speed, pressure, rotation speed and single processing time, in order to adapt to the curved surface characteristics of the concave area 3 of the local non-full-diameter cylindrical mirror and achieve precise and efficient polishing.

[0047] Furthermore, in step S7, if the polished cylindrical mirror does not meet the requirements, the feed speed of the local running trajectory is modified according to the surface shape detection feedback in order to repair the cylindrical mirror.

[0048] Specifically, in step S7, if the polished cylindrical mirror fails the inspection, the feed speed of the local trajectory needs to be adjusted based on the surface shape inspection feedback. The inspection equipment acquires the surface shape accuracy and geometric dimensions of the concave area 3, locating areas with out-of-tolerance accuracy, such as curvature deviation of the second cylindrical surface 4 or insufficient flatness of the chordal surface 5. For areas with insufficient material removal, the feed speed is reduced to increase processing time; for areas with excessive polishing, the feed speed is increased to reduce contact time. During adjustment, other parameters remain unchanged, only the local feed speed is finely adjusted, and the inspection is repeated until the target is met. This strategy can efficiently compensate for errors and improve process flexibility and precision control capabilities.

[0049] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A polishing process for a partially non-full-aperture cylindrical mirror, characterized in that, The cylindrical mirror forms a first cylindrical surface (1) and a plane (2) on opposite sides, respectively. A concave area (3) is formed on one side of the plane (2). The concave area (3) includes a second cylindrical surface (4) and a chord surface (5) on opposite sides of the second cylindrical surface (4). Both ends of the second cylindrical surface (4) and the edge of the chord surface (5) are connected to the plane (2) of the cylindrical mirror. The method includes: S1: Select the cylindrical mirror to be processed, and detect the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: After determining that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, the tool reference point and the workpiece reference point are calibrated by the end calibration tool (6) and the reference tool (7) respectively, and the tool coordinate system and the workpiece coordinate system are generated. S3: Mount the cylindrical mirror to be processed onto the fixture, and mount the polishing tool onto the robotic arm; S4: Obtain the shape parameters of the concave area (3), and calculate the running trajectory and posture parameters of the polishing tool through simulation tools; S5: Move the polishing tool until it contacts the surface of the recessed area (3); S6: Run the polishing program and polish according to the running trajectory and the posture parameters; S7: Unload the polished cylindrical mirror and measure its surface accuracy and dimensions.

2. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 1, characterized in that, In step S1, when inspecting the cylindrical mirror to be processed, an outside micrometer is used to measure the thickness of the concave area (3) and the edge thickness difference, and a vernier caliper and measuring instrument are used to inspect the external dimensions of the concave area (3).

3. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 2, characterized in that, In step S2, both the end calibration tool (6) and the reference tool (7) are cylindrical structures with a conical front end.

4. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 3, characterized in that, In step S2, a dial indicator (8) is installed on the end calibration tool (6) to detect the alignment accuracy of the end calibration tool (6) and the reference tool (7).

5. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 4, characterized in that, In step S3, the cylindrical mirror to be processed is precisely mounted on the fixture and matched with the workpiece reference point, and the polishing tool is precisely mounted on the robot arm and matched with the tool reference point.

6. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 5, characterized in that, In step S4, when the polishing tool moves to the edge of the concave area (3), the movement of the running trajectory exceeds the boundary by no more than one-third of the diameter of the polishing tool.

7. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 6, characterized in that, In step S4, the attitude range is limited according to the trajectory range of the running trajectory when calculating the attitude parameters.

8. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 7, characterized in that, Between steps S5 and S6, the polishing tool is rotated after contact to confirm that there is no rotational jamming.

9. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 8, characterized in that, In step S6, the feed rate of the polishing tool is set to 0.3 mm / s-1 mm / s, the pressure is 0.1 MPa-0.5 MPa, and the rotation speed is 500 rpm-800 rpm; the processing time for a single operation is no more than 30 minutes.

10. The polishing process method for a partially non-full-aperture cylindrical mirror according to claim 9, characterized in that, In step S7, if the polished cylindrical mirror does not meet the requirements, the feed speed of the local running trajectory is modified according to the surface shape detection feedback in order to repair the cylindrical mirror.

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