A multi-dimensional force sensor and a method of bridging thereof

Abstract

The present application relates to the technical field of force sensor, in particular to a kind of multi-dimensional force sensor and its group bridge method, including upper receiving section, lower receiving section, four load-bearing columns being arranged between upper receiving section and lower receiving section, four the load-bearing column is vertically arranged, two the load-bearing column is symmetrically arranged left and right, two the load-bearing column is symmetrically arranged front and back;The load-bearing column is all set to patch face, and the integrated strain gauge is all set on the patch face;By optimizing the layout of elastomer and integrated strain gauge, the multi-dimensional force sensor is simple in structure, the processing difficulty and processing cost are reduced, the processing is more convenient, the processing efficiency is higher, and the crosstalk precision of six-dimensional force sensor is improved.

Description

Technical Field

[0001] This invention relates to the field of force sensor technology, and specifically to a multidimensional force sensor and its bridging method. Background Technology

[0002] Multidimensional force sensors typically require the elastic strain region to be distributed across different areas of an elastic body. The elastic body generally adopts a composite structure such as a cross beam or Stewart. While these structures can achieve multi-directional force measurement, they also bring problems such as structural complexity, difficult processing, and high cost. Furthermore, due to the mutual influence of forces in different directions, as well as the cumbersome process of strain gauge bonding and the difficulty in controlling the accuracy of bonding position and angle, traditional multidimensional force sensors are prone to large crosstalk errors during measurement. Therefore, existing multidimensional force sensors are complex in structure and expensive, and cannot meet the needs of practical applications. Summary of the Invention

[0003] The purpose of this invention is to provide a multidimensional force sensor and its bridging method, thereby solving the technical problems of complex structure and high cost of current multidimensional force sensors.

[0004] The solution of the present invention to the above-mentioned technical problems is as follows: A multidimensional force sensor includes an upper support section, a lower support section, and four load-bearing columns disposed between the upper and lower support sections. All four load-bearing columns are vertically arranged, two of the load-bearing columns are symmetrically arranged left and right, and two of the load-bearing columns are symmetrically arranged front and back. Each load-bearing column is provided with a patch surface, and each patch surface is provided with an integrated strain gauge.

[0005] Further defined, the integrated strain gauge includes a substrate and two first inclined strain units, two second inclined strain units, two first vertical strain units, two second vertical strain units and two parallel strain units, all disposed on the substrate, and the substrate is bonded to the patch surface; Two first inclined strain units are symmetrically arranged in the lateral direction and perpendicular to each other; two second inclined strain units are symmetrically arranged on opposite sides of the two first inclined strain units, and the first inclined strain unit and the adjacent second inclined strain unit are perpendicular to each other. The two parallel strain units are connected to each other, and the two second vertical strain units are connected to each other.

[0006] Further defined, the first tilt strain unit includes a first tilt strain sensitive gate, two first tilt strain pads, and two tilt strain zeroing gates; The first tilted strain sensitive grid has an angle of 45° with the horizontal direction. The first tilted strain sensitive grid is connected between the two tilted strain zeroing grids. The first tilted strain sensitive grid is connected to the corresponding first tilted strain pad through the tilted strain zeroing grid. The first tilted strain sensitive grid in the two first tilted strain units is arranged vertically, and the first tilted strain sensitive grid and the tilted strain zeroing grid are arranged in the same direction. The second tilt strain unit includes a second tilt strain sensitive gate, two second tilt strain pads, and two tilt strain zeroing gates; The second tilted strain sensitive gate has an angle of 45° with the horizontal direction. The second tilted strain sensitive gate is connected between the two tilted strain zeroing gates. The second tilted strain sensitive gate is connected to the corresponding second tilted strain pad through the tilted strain zeroing gate. The second tilted strain sensitive gate in the two second tilted strain units is arranged vertically. The second tilted strain sensitive gate is arranged vertically with the adjacent first tilted strain sensitive gate. The second tilted strain sensitive gate and the tilted strain zeroing gate are arranged in the same direction.

[0007] Further defined, the first vertical strain unit includes a first vertical strain sensitive gate, two first vertical strain zeroing gates, and two first vertical strain pads; The first vertical strain sensitive grid is vertically arranged, and the first vertical strain sensitive grid is arranged between the two first vertical strain zeroing grids. The first vertical strain sensitive grid is connected to the corresponding first vertical strain pad through the first vertical strain zeroing grid, and the first vertical strain sensitive grid and the first vertical strain zeroing grid are arranged in the same direction. Both the second inclined strain unit and the two first inclined strain unit are disposed between the two first vertical strain sensitive grids.

[0008] Further defined, the second vertical strain unit includes a second vertical strain sensitive gate, a second vertical strain pad, a second vertical strain first zero-adjustment gate, and a second vertical strain second zero-adjustment gate; The second vertical strain sensitive gate is disposed between the second vertical strain first zero-adjustment gate and the second vertical strain second zero-adjustment gate. The second vertical strain pad is connected to the second vertical strain first zero-adjustment gate. In the two second vertical strain units, the two second vertical strain second zero-adjustment gates are connected to each other. The second vertical strain first zero-adjustment gate and the second vertical strain second zero-adjustment gate are both arranged in the same direction as the second vertical strain sensitive gate. The two first tilted strain units, the two second tilted strain units, and the two first vertical strain units are all disposed between the two second vertical strain sensitive gates.

[0009] Further defined, the parallel strain unit includes a parallel strain sensitive grid, a parallel strain pad, a first parallel strain zeroing grid, and a second parallel strain zeroing grid, wherein the first parallel strain zeroing grid and the second parallel strain zeroing grid are both arranged in the same direction as the parallel strain sensitive grid; The parallel strain sensitive grid is disposed between the first parallel strain zero-adjustment grid and the second parallel strain zero-adjustment grid. The parallel strain pad is connected to the first parallel strain zero-adjustment grid. Among the two parallel strain units, the two second parallel strain zero-adjustment grids are connected to each other. The two first tilted strain units, the two second tilted strain units, the two first vertical strain units, and the two second vertical strain units are all disposed between the two parallel strain units.

[0010] A multidimensional force sensor bridge circuit, based on the aforementioned multidimensional force sensor, includes an Fx Wheatstone bridge and an Fy Wheatstone bridge. The Fx Wheatstone bridge is composed of two first tilted strain units on the front patch surface and two first tilted strain units on the rear patch surface in sequence. The Fy Wheatstone bridge is composed of two first tilted strain elements on the left patch surface and two first tilted strain elements on the right patch surface, in sequence.

[0011] Furthermore, the multidimensional force sensor bridge circuit also includes an Fz Wheatstone bridge; The Fz Wheatstone bridge consists of two parallel strain units on the front patch surface, two second vertical strain units on the front patch surface, two parallel strain units on the right patch surface, two second vertical strain units on the right patch surface, two parallel strain units on the rear patch surface, two second vertical strain units on the rear patch surface, two parallel strain units on the left patch surface, and two second vertical strain units on the left patch surface. The two parallel strain units on the front patch surface are connected in parallel with the two parallel strain units on the left patch surface. The two second vertical strain units on the front patch surface are connected in parallel with the two second vertical strain units on the left patch surface. The two parallel strain units on the right patch surface are connected in parallel with the two parallel strain units on the rear patch surface. The two second vertical strain units on the right patch surface are connected in parallel with the two second vertical strain units on the rear patch surface.

[0012] Furthermore, the multidimensional force sensor bridge circuit also includes an Mx Wheatstone bridge and a My Wheatstone bridge; The Mx Wheatstone bridge is composed of two first vertical strain units on the front patch surface and two first vertical strain units on the rear patch surface connected together. The My Wheatstone bridge is composed of two first vertical strain elements on the right side patch surface and two first vertical strain elements on the right side patch surface connected together.

[0013] Furthermore, the multidimensional force sensor bridge circuit also includes an Mz Wheatstone bridge; The Mz Wheatstone bridge comprises two second tilted strain units on the front patch surface, two second tilted strain units on the right patch surface, two second tilted strain units on the rear patch surface, and two second tilted strain units on the left patch surface connected together.

[0014] The beneficial effects of this invention are as follows: 1. The multidimensional force sensor provided by this invention has a simple structure, reduces processing difficulty and cost, makes processing more convenient, and improves processing efficiency.

[0015] 2. This invention, by designing an integrated strain gauge that includes multiple directions, can detect strain in different directions on the patch surface. At the same time, by setting them all on a single substrate, it reduces the difficulty of bonding, improves bonding efficiency, and increases the detection accuracy and sensitivity of the multidimensional force sensor.

[0016] 3. When the multi-dimensional force sensor provided by this invention is subjected to axial force, the load-bearing columns in opposite directions are subjected to the same force direction; when subjected to torque force, the load-bearing columns in opposite directions are subjected to opposite force directions. The Wheatstone bridge assembled in this way can cancel out the crosstalk of the forces in each direction to zero, and can reduce the crosstalk error from 1% to below 0.3%. Attached Figure Description

[0017] Figure 1 This is a structural diagram of the multidimensional force sensor of the present invention; Figure 2 This is a schematic diagram of the integrated strain gauge of the present invention; Figure 3 This is a circuit diagram of the multidimensional force sensor bridge of the present invention; Figure 4 This is the circuit diagram of the Fz Wheatstone bridge of the present invention; Figure 5 This is the circuit diagram of the Mz Wheatstone bridge of the present invention; In the figure, 10-first tilted strain unit; 11-first tilted strain sensitive grid; 12-first tilted strain pad; 13-tilted strain zeroing grid; 20-second tilted strain unit; 21-second tilted strain sensitive grid; 22-second tilted strain pad; 23-tilted strain zeroing grid; 30-first vertical strain unit; 31-first vertical strain sensitive grid; 32-first vertical strain zeroing grid; 33-first vertical strain pad; 40-second vertical strain unit; 41-second vertical strain sensitive grid; 42-second vertical strain first zeroing grid; 43-second vertical strain pad; 44-second vertical strain second zeroing grid; 50-parallel strain unit; 51-parallel strain sensitive grid; 52-parallel strain first zeroing grid; 53-parallel strain pad; 54-parallel strain second zeroing grid; 60-substrate; 61-positioning mark; 70-elastic body; 71-upper receiving section; 72-lower receiving section; 73-load-bearing column. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0020] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0021] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] Example 1 refer to Figure 1 This invention provides a multidimensional force sensor, including an elastic body 70 and an integrated strain gauge. The elastic body 70 includes an upper support section 71, a lower support section 72, and four load-bearing columns 73 disposed between the upper support section 71 and the lower support section 72. The load-bearing columns 73 are all vertically arranged. The upper support section 71 and the lower support section 72 can both be cylindrical structures. The four load-bearing columns 73 are arranged at equal intervals around the axis of the upper support section 71, so that two load-bearing columns 73 are symmetrically arranged left and right, and two load-bearing columns 73 are symmetrically arranged front and back. The load-bearing columns 73 are provided with a patch surface for attaching the integrated strain gauge. The patch surface faces the outside of the load-bearing column 73, and the integrated strain gauge is arranged in a horizontal direction.

[0023] The diameter of the upper support section 71 and the lower support section 72 can both be selected as 110mm, and the height of the multi-dimensional force sensor can be selected as 77mm; the strain of the load-bearing column can be selected as 500μF~1000μF, and the sensitive grid resistance value of the integrated strain gauge can be selected as 300Ω~2000Ω.

[0024] To reduce the complexity of the bridge circuit and improve process efficiency, a resistance adjustment grid is placed between each sensitive grid and the pad, which can directly compensate for the zero-point output of the Wheatstone bridge. Since the intervention of the resistance wire is avoided, the temperature performance of the sensor is improved.

[0025] Preferably, four positioning marks 61 are provided on the substrate 60. The positioning marks 61 can be isosceles triangles or equilateral triangles. The four positioning marks 61 are provided on the upper, lower, left and right periphery of the substrate 60. The apex of the positioning marks 61 at different positions faces the orientation of that position. For example, the apex of the positioning mark 61 on the upper side of the substrate 60 is set vertically upward, and the apex of the positioning mark 61 on the right side of the substrate 60 is set horizontally to the right.

[0026] When the multidimensional force sensor is loaded in the Fx or Fy direction, shear strains of equal magnitude and in the same direction are generated on the two patch surfaces parallel to the force direction. When the multidimensional force sensor is loaded in the Fz direction, Poisson stresses of equal magnitude and in the same direction are generated on all four patch surfaces, resulting in compressive strain in the vertical direction and tensile strain in the horizontal direction.

[0027] When the multidimensional force sensor is loaded in the Mx or My direction, Poisson stresses of equal magnitude and opposite direction are generated on the opposite patch surfaces. Obviously, if the strain generated on the patch surface parallel to the x direction is used to detect Mx, and the shear strain generated on the patch surface parallel to the y direction is used to detect My, then the influence of the force in the Mx and My directions on the Fz direction is exactly zero.

[0028] When the multidimensional force sensor is loaded in the Mz direction, shear strains of equal magnitude and opposite direction are generated on each patch surface. If the shear strain generated on the patch surface parallel to the x direction is used to detect Fx, and the shear strain generated on the patch surface parallel to the y direction is used to detect Fy, then the influence of the force on the Mz direction when Fx and Fy are subjected to force is exactly zero.

[0029] The measurement range of the multi-dimensional force sensor in the Fx and Fy directions is 0~2t, with a measurement sensitivity of 1.3mV / V; the measurement range of the multi-dimensional force sensor in the Fz direction is 0~10t, with a measurement sensitivity of 1.1mV / V; the measurement range of the multi-dimensional force sensor in the Mx and My directions is 0~2000Nm, with a measurement sensitivity of 1.3mV / V; and the measurement range of the multi-dimensional force sensor in the Mz direction is 0~1500Nm, with a measurement sensitivity of 1.3mV / V.

[0030] Example 2 refer to Figure 2 Based on the multidimensional force sensor described in Embodiment 1, this embodiment provides an integrated strain gauge, including a substrate 60, two first inclined strain units 10, two second inclined strain units 20, two first vertical strain units 30, two second vertical strain units 40, and two parallel strain units 50. The substrate 60 is bonded to the patch surface, and the two first inclined strain units 10, two second inclined strain units 20, two first vertical strain units 30, two second vertical strain units 40, and two parallel strain units 50 are all disposed on the substrate 60.

[0031] The two first inclined strain units 10 are symmetrically arranged in the lateral direction, preferably symmetrically arranged about the vertical axis of symmetry of the substrate 60; the two first inclined strain units 10 are arranged perpendicular to each other; the two second inclined strain units 20 are symmetrically arranged on opposite sides of the two first inclined strain units 10, the first inclined strain unit 10 and the adjacent second inclined strain unit 20 are arranged perpendicular to each other, the two parallel strain units 50 are connected to each other, and the two second vertical strain units 40 are connected to each other.

[0032] Further defined, the first tilt strain unit 10 includes a first tilt strain sensitive gate 11, two first tilt strain pads 12 and two tilt strain zeroing gates 13, wherein the first tilt strain sensitive gate 11 and the tilt strain zeroing gates 13 are arranged in the same direction.

[0033] The angle between the first tilted strain sensitive gate 11 and the horizontal direction is 45°. The first tilted strain sensitive gate 11 is connected between two tilted strain zeroing gates 13. The first tilted strain sensitive gate 11 is connected to the corresponding first tilted strain pad 12 through the tilted strain zeroing gate 13. At this time, the angle between the first tilted strain sensitive gates 11 in the two first tilted strain units 10 is 90°.

[0034] By placing two first inclined strain units 10 in the middle of the substrate 60, the uniformity of shear strain at the center of the strain surface can be assessed, facilitating the detection of shear strain under force in the Fx and Fy directions of multidimensional force sensing.

[0035] Further defined, the second tilted strain unit 20 includes a second tilted strain sensitive gate 21, two second tilted strain pads 22 and two tilted strain zeroing gates 23, with the second tilted strain sensitive gate 21 and the tilted strain zeroing gates 23 arranged in the same direction.

[0036] The second tilted strain sensitive grid 21 has an angle of 45° with the horizontal direction. The second tilted strain sensitive grid 21 is connected between two tilted strain zeroing grids 23. The second tilted strain sensitive grid 21 is connected to the corresponding second tilted strain pad 22 through the tilted strain zeroing grid 23. The angle between the second tilted strain sensitive grids 21 in the two second tilted strain units 20 is 90°, and the angle between the second tilted strain sensitive grid 21 and the adjacent first tilted strain sensitive grid 11 is 90°. By setting the two second tilted strain units 20 on opposite sides of the two first tilted strain units 10, the second tilted strain units 20 are close to the center of the strain surface, which is used to detect the shear strain of the force in the Mz direction of multidimensional force sensing.

[0037] The length of both the first tilted strain sensitive grid 11 and the second tilted strain sensitive grid 21 can be selected as 4.4 mm, and the width of both the first tilted strain sensitive grid 11 and the second tilted strain sensitive grid 21 can be selected as 2 mm.

[0038] Further defined, the first vertical strain unit 30 includes a first vertical strain sensitive gate 31, two first vertical strain zeroing gates 32 and two first vertical strain pads 33, with the first vertical strain sensitive gate 31 and the first vertical strain zeroing gate 32 arranged in the same direction.

[0039] The first vertical strain sensitive grid 31 is vertically arranged and is located between two first vertical strain zeroing grids 32. The first vertical strain sensitive grid 31 is connected to the corresponding first vertical strain pad 33 through the first vertical strain zeroing grid 32. Preferably, the two second tilted strain units 20 and the two first tilted strain units 10 are all located between the two first vertical strain sensitive grids 31 to facilitate strain detection of the strain surface in the Mx and My directions of multidimensional force sensing.

[0040] Further specifying, since the deformation directions of the two strain surfaces in the Mx and My directions of multidimensional force sensing are opposite, only the larger vertical strain needs to be collected, so two vertical sensitive grids are used for detection; while in the Fz direction of multidimensional force sensing, the strains on all four sides are consistent, so all Poisson strains need to be collected, so two vertical sensitive grids and two horizontal sensitive grids are used for detection; in order to simplify the bridge circuit composition, it is preferable to connect the two vertical sensitive grids used for multidimensional force sensing in the Fz direction in series, and connect the two horizontal sensitive grids in series.

[0041] Specifically, the second vertical strain unit 40 includes a second vertical strain sensitive gate 41, a second vertical strain pad 43, a second vertical strain first zero-adjustment gate 42 and a second vertical strain second zero-adjustment gate 44, and the second vertical strain first zero-adjustment gate 42 and the second vertical strain second zero-adjustment gate 44 are both arranged in the same direction as the second vertical strain sensitive gate 41.

[0042] The parallel strain unit 50 includes a parallel strain sensitive grid 51, a parallel strain pad 53, a first parallel strain zeroing grid 52, and a second parallel strain zeroing grid 54. The first parallel strain zeroing grid 52 and the second parallel strain zeroing grid 54 are both arranged in the same direction as the parallel strain sensitive grid 51.

[0043] The second vertical strain sensitive grid 41 is disposed between the second vertical strain first zero-adjustment grid 42 and the second vertical strain second zero-adjustment grid 44. The second vertical strain pad 43 is connected to the second vertical strain first zero-adjustment grid 42. Among the two second vertical strain units 40, the two second vertical strain second zero-adjustment grids 44 are connected in series. The two first tilted strain units 10, the two second tilted strain units 20 and the two first vertical strain units 30 are all disposed between the two second vertical strain sensitive grids 41.

[0044] Similarly, the parallel strain sensitive grid 51 is disposed between the first parallel strain zeroing grid 52 and the second parallel strain zeroing grid 54, the parallel strain pad 53 is connected to the first parallel strain zeroing grid 52, and the two parallel strain second zeroing grids 54 are connected in series in the two parallel strain units 50; the two first tilted strain units 10, the two second tilted strain units 20, the two first vertical strain units 30 and the two second vertical strain units 40 are all disposed between the two parallel strain units 50.

[0045] The length of the first vertical strain sensitive grid 31 can be selected as 4.4 mm and the width can be selected as 1.5 mm. The second vertical strain sensitive grid 41 has the same size as the first vertical strain sensitive grid 31. The length of the parallel strain sensitive grid 51 can be selected as 4.4 mm and the width can be selected as 2 mm.

[0046] At this time, the integrated strain gauges are arranged from left to right as follows: parallel strain unit 50, second vertical strain unit 40, first vertical strain unit 30, second inclined strain unit 20, first inclined strain unit 10, first inclined strain unit 10, second inclined strain unit 20, first vertical strain unit 30, second vertical strain unit 40, and parallel strain unit 50.

[0047] Example 3 Based on the multidimensional force sensor described in Embodiments 1 and 2, this embodiment provides a multidimensional force sensor bridge circuit. For ease of explanation, the parallel strain unit 50, the second vertical strain unit 40, the first vertical strain unit 30, the second inclined strain unit 20, the first inclined strain unit 10, the first inclined strain unit 10, the second inclined strain unit 20, the first vertical strain unit 30, the second vertical strain unit 40, and the arranged parallel strain unit 50 in the integrated strain gauge are respectively represented as strain unit Xn, where X is the Xth patch surface starting counterclockwise from the front patch surface, and n is the nth strain unit from left to right in the integrated strain gauge. X takes values ​​from 1 to 4, and n takes values ​​from 1 to 10. For example, 1-5 are the first inclined strain unit 10 on the left side of the front strain surface, and 3-8 are the first vertical strain unit 30 on the right side of the rear strain surface.

[0048] refer to Figure 3 The multidimensional force sensor bridge circuit includes Fx Wheatstone bridge, Fy Wheatstone bridge, Fz Wheatstone bridge, Mx Wheatstone bridge, My Wheatstone bridge and Mz Wheatstone bridge.

[0049] The Fx Wheatstone bridge is the first full-bridge measurement circuit, which is formed by connecting strain units 1-6, 1-5, 3-5, and 3-6 in sequence. Strain unit 3-6 is also connected to strain unit 1-6. The positive input power supply E+ is connected between strain unit 1-6 and strain unit 1-5, and the negative input power supply E- is connected between strain unit 3-5 and strain unit 3-6. The negative output terminal S- is between strain unit 1-5 and strain unit 3-5, and the positive output terminal S+ is between strain unit 3-6 and strain unit 1-6. The Fx Wheatstone bridge is used to realize the Fx direction measurement of the multi-dimensional force sensor.

[0050] The Fy Wheatstone bridge is the second full-bridge measurement circuit, consisting of strain units 4-6, 4-5, 2-5, and 2-6 connected in sequence, with strain unit 2-6 also connected to strain unit 4-6. The positive input power supply E+ is connected between strain unit 4-6 and strain unit 4-5, and the negative input power supply E- is connected between strain unit 2-5 and strain unit 2-6. The negative output terminal S- is between strain unit 4-5 and strain unit 2-5, and the positive output terminal S+ is between strain unit 2-6 and strain unit 4-6. The Fy Wheatstone bridge is used to realize the Fy direction measurement of the multi-dimensional force sensor.

[0051] refer to Figure 4 The Fz Wheatstone bridge is the third full-bridge measurement circuit, which includes a first half-bridge, a second half-bridge, a third half-bridge, and a fourth half-bridge connected in series. The first half-bridge and the fourth half-bridge are connected in series.

[0052] The first half-bridge includes strain unit 1-10, strain unit 1-1, strain unit 3-1 and strain unit 3-10. Strain unit 1-10 is connected in series with strain unit 1-1, strain unit 4-1 is connected in series with strain unit 4-10, and the series-connected strain unit 1-10 and strain unit 1-1 are connected in parallel with the series-connected strain unit 4-1 and strain unit 4-10.

[0053] The second half-bridge includes strain unit 1-2, strain unit 1-9, strain unit 4-9 and strain unit 4-2. Strain unit 1-2 and strain unit 1-9 are connected in series, strain unit 4-9 and strain unit 4-2 are connected in series, and the series-connected strain unit 1-2 and strain unit 1-9 are connected in parallel with the series-connected strain unit 4-9 and strain unit 4-2.

[0054] The third half-bridge includes strain unit 2-1, strain unit 2-10, strain unit 3-10 and strain unit 3-1. Strain unit 2-1 and strain unit 2-10 are connected in series, strain unit 3-10 and strain unit 3-1 are connected in series, and the series-connected strain unit 2-1 and strain unit 2-10 are connected in parallel with the series-connected strain unit 3-10 and strain unit 3-1.

[0055] The fourth half-bridge includes strain unit 2-9, strain unit 2-2, strain unit 3-2 and strain unit 3-9. Strain unit 2-9 and strain unit 2-2 are connected in series, strain unit 3-2 and strain unit 3-9 are connected in series, and the series-connected strain unit 2-9 and strain unit 2-2 are connected in parallel with the series-connected strain unit 3-10 and strain unit 3-1.

[0056] The positive input power supply E+ is connected between the third and fourth half-bridges in series, the negative input power supply E- is connected between the first and second half-bridges in series, the negative output terminal S- is between the second and third half-bridges, and the positive output terminal S+ is between the first and fourth half-bridges; the Fz Wheatstone bridge is used to realize the multi-dimensional force sensor Fz measurement.

[0057] The Mx Wheatstone bridge is the fourth full-bridge measurement circuit, consisting of strain gauge units 1-8, 3-8, 1-3, and 3-3 connected in series. Strain gauge unit 1-8 is also connected in series with strain gauge unit 3-3. The positive input power supply E+ is connected between strain gauge unit 1-8 and strain gauge unit 3-8, and the negative input power supply E- is connected between strain gauge unit 1-3 and strain gauge unit 3-3. The negative output terminal S+ is between strain gauge unit 1-8 and strain gauge unit 3-3, and the positive output terminal S- is between strain gauge unit 3-8 and strain gauge unit 1-3. The Mx Wheatstone bridge is used to realize the Mx direction measurement of the multi-dimensional force sensor.

[0058] The My Wheatstone bridge is the fifth full-bridge measurement circuit, consisting of strain gauge units 2-3, 4-3, 2-8, and 4-8 connected in series. Strain gauge unit 2-3 is also connected in series with strain gauge unit 4-8. The positive input power supply E+ is connected between strain gauge unit 2-8 and strain gauge unit 4-8, and the negative input power supply E- is connected between strain gauge unit 2-3 and strain gauge unit 4-3. The negative output terminal S+ is between strain gauge unit 2-3 and strain gauge unit 4-8, and the negative output terminal S- is between strain gauge unit 4-3 and strain gauge unit 2-8. The My Wheatstone bridge is used to realize the direction measurement of the My multidimensional force sensor.

[0059] refer to Figure 5 The Mz Wheatstone bridge is the sixth full-bridge measurement circuit, which is composed of strain unit 4-4, strain unit 3-4, strain unit 2-7, strain unit 3-7, strain unit 2-4, strain unit 1-4, strain unit 4-7 and strain unit 1-7 connected in series. Strain unit 4-4 is also connected in series with strain unit 1-7.

[0060] The positive input power supply E+ is connected between strain unit 1-4 and strain unit 4-7, and the negative input power supply E- is connected between strain unit 3-4 and strain unit 2-7. The negative output terminal S+ is between strain unit 4-4 and strain unit 1-7, and the negative output terminal S- is between strain unit 3-7 and strain unit 2-4. The Mz Wheatstone bridge is used to realize the Mz direction measurement of the multi-dimensional force sensor.

[0061] By optimizing the force direction distribution of the sensitive grids in each strain unit, the crosstalk between the forces in each direction and other directions is automatically canceled out. For example, when the multi-dimensional force sensor is loaded in the Fx direction, strain units 1-5, 1-7, 2-4, and 2-6 are subjected to tensile stress, while strain units 1-4, 1-6, 2-5, and 2-7 are subjected to compressive stress. At this time, the first full-bridge measurement circuit can feedback the magnitude of the load in the Fx direction, while in the sixth full-bridge measurement circuit, strain units 1-4, 1-7, 2-4, and 2-7 cancel each other out, and the output remains unchanged. After actual measurement, the crosstalk accuracy of the multi-dimensional force sensor can reach 0.1%.

[0062] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the scope of the invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0063] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art. The above content is only for illustrating the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made based on the technical concept proposed in this invention shall fall within the scope of protection of the claims of this invention.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multidimensional force sensor, characterized in that, The device includes an elastomer (70) and an integrated strain gauge. The elastomer (70) includes an upper support section (71), a lower support section (72), and four load-bearing columns (73) disposed between the upper support section (71) and the lower support section (72). All four load-bearing columns (73) are vertically arranged, with two load-bearing columns (73) arranged symmetrically to the left and right, and two load-bearing columns (73) arranged symmetrically to the front and back. Each load-bearing column (73) is provided with a patch surface, and the integrated strain gauge is disposed on the patch surface. The integrated strain gauge includes a substrate (60) and two first inclined strain units (10), two second inclined strain units (20), two first vertical strain units (30), two second vertical strain units (40) and two parallel strain units (50) all disposed on the substrate (60). The substrate (60) is bonded to the patch surface. Two first inclined strain units (10) are symmetrically arranged in the lateral direction and are perpendicular to each other; two second inclined strain units (20) are symmetrically arranged on opposite sides of the two first inclined strain units (10), and the first inclined strain unit (10) and the adjacent second inclined strain unit (20) are perpendicular to each other. The two parallel strain units (50) are connected to each other, and the two second vertical strain units (40) are connected to each other. Two second vertical strain elements (40) are symmetrically arranged in the transverse direction, and two parallel strain elements (50) are symmetrically arranged in the transverse direction; It also includes a multi-dimensional force sensor bridge circuit, including the Fz Wheatstone bridge; The Fz Wheatstone bridge comprises a first half-bridge, a second half-bridge, a third half-bridge, and a fourth half-bridge connected in series. The first half-bridge and the fourth half-bridge are connected in series. The two parallel strain units (50) on the front patch surface are connected in parallel with the two parallel strain units (50) on the left patch surface to form the first half-bridge; The two second vertical strain units (40) on the front patch surface are connected in parallel with the two second vertical strain units (40) on the left patch surface to form a second half bridge; The two parallel strain units (50) on the right side patch surface are connected in parallel with the two parallel strain units (50) on the rear side patch surface to form a third half-bridge; The two second vertical strain units (40) on the right side patch surface are connected in parallel with the two second vertical strain units (40) on the rear side patch surface to form a fourth half bridge.

2. The multidimensional force sensor according to claim 1, characterized in that, The first tilt strain unit (10) includes a first tilt strain sensitive gate (11), two first tilt strain pads (12) and two first tilt strain zeroing gates (13). The first tilted strain sensitive gate (11) has an angle of 45° with the horizontal direction. The first tilted strain sensitive gate (11) is connected between the two first tilted strain zeroing gates (13). The first tilted strain sensitive gate (11) is connected to the corresponding first tilted strain pad (12) through the first tilted strain zeroing gate (13). The first tilted strain sensitive gate (11) in the two first tilted strain units (10) is vertically arranged. The first tilted strain sensitive gate (11) and the first tilted strain zeroing gate (13) are arranged in the same direction. The second tilt strain unit (20) includes a second tilt strain sensitive gate (21), two second tilt strain pads (22) and two second tilt strain zeroing gates (23). The angle between the second tilted strain sensitive grid (21) and the horizontal direction is 45°. The second tilted strain sensitive grid (21) is connected between the two second tilted strain zeroing grids (23). The second tilted strain sensitive grid (21) is connected to the corresponding second tilted strain pad (22) through the second tilted strain zeroing grid (23). The second tilted strain sensitive grid (21) in the two second tilted strain units (20) is vertically arranged. The second tilted strain sensitive grid (21) is vertically arranged with the adjacent first tilted strain sensitive grid (11). The second tilted strain sensitive grid (21) and the second tilted strain zeroing grid (23) are arranged in the same direction.

3. The multidimensional force sensor according to claim 2, characterized in that, The first vertical strain unit (30) includes a first vertical strain sensitive gate (31), two first vertical strain zeroing gates (32) and two first vertical strain pads (33). The first vertical strain sensitive grid (31) is vertically arranged and is disposed between two first vertical strain zeroing grids (32). The first vertical strain sensitive grid (31) is connected to the corresponding first vertical strain pad (33) through the first vertical strain zeroing grid (32). The first vertical strain sensitive grid (31) and the first vertical strain zeroing grid (32) are arranged in the same direction. Two second inclined strain units (20) and two first inclined strain units (10) are disposed between two first vertical strain sensitive grids (31).

4. The multidimensional force sensor according to claim 3, characterized in that, The second vertical strain unit (40) includes a second vertical strain sensitive gate (41), a second vertical strain pad (43), a second vertical strain first zero-adjustment gate (42), and a second vertical strain second zero-adjustment gate (44). The second vertical strain sensitive gate (41) is disposed between the second vertical strain first zero-adjustment gate (42) and the second vertical strain second zero-adjustment gate (44). The second vertical strain pad (43) is connected to the second vertical strain first zero-adjustment gate (42). Among the two second vertical strain units (40), the two second vertical strain second zero-adjustment gates (44) are connected to each other. The second vertical strain first zero-adjustment gate (42) and the second vertical strain second zero-adjustment gate (44) are both disposed in the same direction as the second vertical strain sensitive gate (41). The two first tilted strain units (10), the two second tilted strain units (20) and the two first vertical strain units (30) are all disposed between the two second vertical strain sensitive gates (41).

5. The multidimensional force sensor according to claim 4, characterized in that, The parallel strain unit (50) includes a parallel strain sensitive gate (51), a parallel strain pad (53), a first parallel strain zero-adjustment gate (52) and a second parallel strain zero-adjustment gate (54), wherein the first parallel strain zero-adjustment gate (52) and the second parallel strain zero-adjustment gate (54) are both arranged in the same direction as the parallel strain sensitive gate (51); The parallel strain sensitive grid (51) is disposed between the first parallel strain zeroing grid (52) and the second parallel strain zeroing grid (54). The parallel strain pad (53) is connected to the first parallel strain zeroing grid (52). Among the two parallel strain units (50), the two second parallel strain zeroing grids (54) are connected to each other. The two first tilted strain units (10), the two second tilted strain units (20), the two first vertical strain units (30) and the two second vertical strain units (40) are all disposed between the two parallel strain units (50).

6. The multidimensional force sensor according to claim 1, characterized in that, The multidimensional force sensor bridge circuit also includes an Fx Wheatstone bridge and an Fy Wheatstone bridge. The Fx Wheatstone bridge is composed of two first tilted strain elements (10) on the front patch surface and two first tilted strain elements (10) on the rear patch surface in sequence; The Fy Wheatstone bridge is composed of two first tilted strain elements (10) on the left patch surface and two first tilted strain elements (10) on the right patch surface.

7. The multidimensional force sensor according to claim 6, characterized in that, The multidimensional force sensor bridge circuit also includes the Mx Wheatstone bridge and the My Wheatstone bridge. The Mx Wheatstone bridge is composed of two first vertical strain units (30) connected on the front patch surface and two first vertical strain units (30) connected on the rear patch surface; The My Wheatstone bridge is composed of two first vertical strain units (30) on the right side patch surface and two first vertical strain units (30) connected together on the right side patch surface.

8. The multidimensional force sensor according to claim 7, characterized in that, The multidimensional force sensor bridge circuit also includes an Mz Wheatstone bridge. The Mz Wheatstone bridge consists of two second tilted strain units (20) connected together on the front patch surface, two second tilted strain units (20) on the right patch surface, two second tilted strain units (20) on the rear patch surface, and two second tilted strain units (20) on the left patch surface.

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