Light spot compensation method and device, equipment, storage medium and computer program product

CN120909218APending Publication Date: 2025-11-07SHENZHEN TETELASER TECH CO LTD
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Patent Information

Application Number
CN202510939012.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-08
Publication Date
2025-11-07

AI Technical Summary

Technical Problem

When a traditional Gaussian beam is incident on a high-refractive-index material after passing through a high-magnification objective lens, it results in significant thermal damage in the axial direction. Furthermore, the efficiency of the single-focus processing mode is difficult to meet market demands, and the reliance on the reciprocating motion of the motion platform increases the requirements for platform consistency.

Method used

By acquiring the aberration function of a single focal point, the aberration function is expanded and pre-compensated using the adaptive optics control of the liquid crystal spatial light modulator to generate a phase-compensated Z-axis phase hologram, which is then loaded onto the SLM. The spot shape of the XY plane and Z axis is optimized by combining the GSW algorithm to generate an optimized three-dimensional focused spot.

Benefits of technology

It improves the scattering phenomenon of light spot, increases processing efficiency, significantly reduces the heat-affected zone, and improves processing accuracy and shape accuracy, meeting the stringent requirements of high-end manufacturing industry.

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Abstract

The invention relates to the technical field of laser processing, and discloses a light spot compensation method and device, equipment, a storage medium and a computer program product, and the method comprises the steps: obtaining an aberration function of a single focus; performing expansion and pre-compensation on a polynomial in the aberration function of the single focus based on self-adaptive optical regulation and control of a liquid crystal spatial light modulator to obtain a phase expression of aberration of the single focus; removing an out-of-focus phase in the phase expression of the single-focus aberration to obtain a single-focus compensation phase expression; and generating a Z-axis phase hologram after phase compensation according to the compensation phase expression of the single focus, and loading the Z-axis phase hologram to an SLM to obtain a Z-axis light spot after compensation. The compensated Z-axis light spot is obtained through the compensation phase expression, and the scattering phenomenon of the light spot is improved; and in combination with the GSW algorithm, the focusing state and the light spot form of the light spots on the X-Y plane are optimized at the same time, and the machining efficiency is improved.
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Citation Information

Patent Citations

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