Multistage spray cleaning method and device for phosphine plant off-gas treatment

By combining a multi-stage spray purification method with an intelligent prediction model, the concentration and flow rate of the spray liquid are dynamically adjusted, solving the problem of unstable purification efficiency in the exhaust gas treatment of phosphine plants, and achieving efficient, safe and economical exhaust gas treatment.

CN120919822BActive Publication Date: 2026-07-31CANGZHOU BOHAI NEW DISTRICT SHENGTAI CHEM CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CANGZHOU BOHAI NEW DISTRICT SHENGTAI CHEM CO LTD
Filing Date
2025-08-01
Publication Date
2026-07-31

AI Technical Summary

Technical Problem

Existing spray systems are unable to cope with complex and ever-changing operating conditions, resulting in unstable exhaust gas purification efficiency, resource waste, and secondary pollution in phosphine plants.

Method used

A multi-stage spray purification method is adopted, and the concentration and flow rate of the spray liquid are dynamically adjusted through multi-parameter coordinated control and intelligent prediction model to achieve efficient purification of waste gas and optimized utilization of resources.

Benefits of technology

It improved purification efficiency to 99.2%, reduced reagent consumption by 33%, decreased electricity costs by 18%, reduced equipment downtime rate by 75%, and improved response speed to 37 seconds, achieving safe and stable waste gas treatment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

This application provides a multi-stage spray purification method and apparatus for treating waste gas from a phosphine plant, relating to the field of waste treatment. The method includes: acquiring operating parameters and waste gas parameters of the annular spray main duct; determining the operating modes of the three-waste spray unit and the emergency exhaust spray unit; using a trained prediction model to predict the operating parameters, waste gas parameters, first spray liquid parameters and / or second spray liquid parameters, and environmental parameters to obtain the concentration decay trend and corresponding minimum spray liquid concentration for future periods; adjusting the operating parameters under the operating mode based on the minimum spray liquid concentration and the concentration decay trend to obtain target operating parameters; and purifying the waste gas to be treated based on the target operating parameters to obtain purified waste gas. This application effectively enhances the self-adaptive capability and emergency response speed of the purification system by co-optimizing the spray process through dynamic mode decision-making and prediction models, significantly improving purification safety and resource utilization.
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Description

Technical Field

[0001] This application relates to the field of waste treatment, and more specifically, to a multi-stage spray purification method and apparatus for treating exhaust gas from a phosphine plant. Background Technology

[0002] Phosphine (PH3), an important industrial gas, is widely used in semiconductor manufacturing, pesticide synthesis, and flame-retardant materials. The industrial production of phosphine typically involves the reaction of red phosphorus with a strong alkali at high temperatures. This process not only produces the target product but also generates large quantities of waste gases containing residual phosphine, alkaline gases (such as NH3), water vapor, and other toxic impurities. These waste gases are highly toxic, corrosive, flammable, and explosive. Direct emission without effective treatment poses a serious threat to the environment and the health of operators.

[0003] Currently, spray absorption is a mature and widely used waste gas purification technology. It achieves the dissolution, neutralization, or chemical reaction removal of pollutants through full contact between liquid spray and waste gas. However, traditional spray systems have fixed operating parameters or rely solely on manual experience for adjustment, making it difficult to cope with complex and changing operating conditions. This leads to problems such as unstable purification efficiency, resource waste, and even secondary pollution. Summary of the Invention

[0004] The purpose of this application is to provide a multi-stage spray purification method and apparatus for treating waste gas from a phosphine plant, which solves the above-mentioned problems in the prior art. Through multi-parameter coordinated control and intelligent prediction models, it achieves efficient purification of waste gas during the phosphine preparation process, optimized resource utilization, and safe and stable operation of the purification system.

[0005] In a first aspect, a multi-stage spray purification method for treating exhaust gas from a phosphine plant is provided, the method comprising:

[0006] The operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters are obtained; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit;

[0007] Based on the operating parameters and the exhaust gas parameters, the operating modes of the three waste spray unit and the emergency exhaust spray unit are determined;

[0008] Using a trained prediction model, the operating parameters, the exhaust gas parameters, the first spray liquid parameters and / or the second spray liquid parameters and environmental parameters are predicted to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods.

[0009] Based on the minimum spray concentration and the concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters;

[0010] The waste gas to be treated is purified based on the target operating parameters to obtain purified waste gas.

[0011] In one possible implementation, the operating modes include: independent mode, parallel mode, and emergency mode.

[0012] In one possible implementation, the waste spraying unit includes a primary spraying module, a secondary spraying module, and a tertiary spraying module; the emergency exhaust spraying unit includes a primary exhaust module, a secondary exhaust module, and a tertiary exhaust module.

[0013] The independent mode is that the primary spray module, the secondary spray module, and the tertiary spray module operate in series; or, the primary exhaust module, the secondary exhaust module, and the tertiary exhaust module operate in series.

[0014] The parallel operation mode is that the primary spray module and the primary exhaust module operate in parallel, and the secondary spray module and the tertiary spray module operate in series with the primary spray module; the secondary exhaust module and the tertiary exhaust module operate in series with the primary exhaust module.

[0015] The emergency mode is that the primary exhaust module, the secondary exhaust module, the secondary sprinkler module, and the tertiary sprinkler module operate in series.

[0016] In one possible implementation, the operating parameters include the network pressure of the annular spray main pipeline;

[0017] After obtaining the concentration decay trend and the corresponding minimum spray concentration for future periods, the method further includes:

[0018] Based on the pipeline pressure, determine the correction factor;

[0019] The minimum spray concentration is corrected according to the correction coefficient to obtain the corrected minimum spray concentration.

[0020] In one possible implementation, the first spray liquid parameter or the second spray liquid parameter both include the current spray liquid concentration and the spray liquid flow rate, wherein the spray liquid flow rate characterizes the rate at which the liquid circulates in the spray tower per unit time; the operating mode includes multiple independently operating spray towers in the three waste spray unit and / or the emergency exhaust spray unit;

[0021] Before obtaining the concentration decay trend and the corresponding minimum spray concentration for future time periods, the method further includes:

[0022] The average flow rate of the multiple spray towers in the operating mode is determined based on the spray liquid flow rate corresponding to the multiple spray towers.

[0023] For any spray tower, when the percentage difference between the spray liquid flow rate and the average flow rate in the spray tower and the average flow rate is greater than a preset percentage, a correction factor is added to the output layer of the trained prediction model; the correction factor is determined based on the spray liquid flow rate of each spray tower in the operating mode and the current spray liquid concentration.

[0024] In one possible implementation, the target operating parameters include: target fluid replenishment volume;

[0025] Based on the minimum spray concentration and the concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters, including:

[0026] The decay rate is determined based on the minimum spray concentration and the current spray concentration;

[0027] Based on the decay rate, determine the replenishment volume adjustment coefficient;

[0028] The replenishment volume of the spray solution configured for future periods is adjusted using the replenishment volume adjustment coefficient to obtain the target replenishment volume.

[0029] In one possible implementation, the target operating parameters include: target spray fluid flow rate;

[0030] Based on the minimum spray concentration and the concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters, including:

[0031] The decay rate is determined based on the minimum spray concentration and the current spray concentration;

[0032] Based on the attenuation rate, determine the flow adjustment coefficient;

[0033] The spray liquid flow rate is adjusted based on the flow rate adjustment coefficient to determine the target spray liquid flow rate.

[0034] Secondly, a multi-stage spray purification device for treating exhaust gas from a phosphine plant is provided. This device is applied to a purification system comprising a waste gas spray unit and an emergency exhaust spray unit, both connected to a main annular spray duct. The device may include:

[0035] The acquisition unit is used to acquire the operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit;

[0036] The determining unit is used to determine the operating mode of the three waste spraying unit and the emergency exhaust spraying unit based on the operating parameters and the exhaust gas parameters;

[0037] The prediction unit is used to use a trained prediction model to predict the operating parameters, the exhaust gas parameters, the first spray liquid parameters and / or the second spray liquid parameters and environmental parameters, so as to obtain the concentration decay trend and the corresponding minimum spray liquid concentration in the future period.

[0038] The adjustment unit adjusts the operating parameters under the operating mode based on the minimum spray liquid concentration and the concentration decay trend to obtain the target operating parameters;

[0039] The purification unit is used to purify the waste gas to be treated based on the target operating parameters to obtain purified waste gas.

[0040] Thirdly, an electronic device is provided, which includes a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus;

[0041] Memory, used to store computer programs;

[0042] When a processor executes a program stored in memory, it implements any of the steps described in the first aspect above.

[0043] Fourthly, a computer-readable storage medium is provided, wherein a computer program is stored therein, and when executed by a processor, the computer program implements the steps of any of the methods described in the first aspect above.

[0044] This application provides a multi-stage spray purification method for treating exhaust gas from a phosphine plant. The method includes: acquiring operating parameters of the annular spray main pipeline, exhaust gas parameters, spray liquid parameters, and environmental parameters; determining the operating modes of the three-waste spray unit and the emergency exhaust spray unit based on the operating parameters and exhaust gas parameters; using a trained prediction model to predict the operating parameters, exhaust gas parameters, first spray liquid parameters and / or second spray liquid parameters, and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods; adjusting the operating parameters under the operating mode based on the minimum spray liquid concentration and the concentration decay trend to obtain target operating parameters; and purifying the exhaust gas based on the target operating parameters to obtain purified exhaust gas. Through a coupling calculation mechanism between the pollution load coefficient and the equipment risk value, a dynamic mode coefficient is generated to drive the adaptive switching of the three-stage operating modes—when the pollution load is low, an independent operating mode is used to precisely isolate high-risk exhaust gas; under normal operating conditions, a parallel mode is activated to achieve collaborative purification of the two units; and in the event of a sudden accident, an emergency mode is automatically switched to activate redundant modules. The ST-GCN prediction model based on physical constraints constructs a full-chain topology network for waste gas treatment. In independent, parallel, and emergency modes, the concentration decay prediction accuracy exceeds 85%, reducing the error by 60% compared to traditional methods, and generating cascaded concentration curves for the next 4 hours. The closed-loop optimized purification system uses the minimum spray liquid concentration as a hard constraint, employing the PSO algorithm to balance the goals of maximizing purification efficiency and minimizing energy consumption in real time, combined with a flow-concentration dual-factor compensation mechanism to eliminate inter-module deviations. Field tests have verified that this solution can reduce reagent consumption by 33%, electricity costs by 18%, and equipment downtime rate by 75%. The response time to high-risk accidents such as explosions is reduced to 37 seconds, ultimately achieving an industry breakthrough of 99.2% purification efficiency and zero major safety accidents, providing a governance paradigm for the chemical industry that combines economy and safety. Attached Figure Description

[0045] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0046] Figure 1 A system architecture diagram of a multi-stage spray purification method for treating exhaust gas from a phosphine plant, provided in an embodiment of this application;

[0047] Figure 2 A schematic flow diagram of a multi-stage spray purification method for treating exhaust gas from a phosphine plant, provided in an embodiment of this application;

[0048] Figure 3 This is a schematic diagram of the structure of the waste spraying unit provided in the embodiments of this application;

[0049] Figure 4 This is a schematic diagram of the structure of the emergency exhaust spray unit provided in the embodiments of this application;

[0050] Figure 5 This is a schematic diagram of the structure of a multi-stage spray purification device for treating exhaust gas from a phosphine plant, provided in an embodiment of this application.

[0051] Figure 6 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0052] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0053] The multi-stage spray purification method for treating exhaust gas from a phosphine plant provided in this application embodiment can be applied to... Figure 1 In the system architecture shown, such as Figure 1 As shown, the purification system may include: a purification system and a server comprising a waste spray unit and an emergency exhaust spray unit respectively connected to the annular spray main pipe.

[0054] The purification system is used to acquire the operating parameters of the main annular spray pipe, the exhaust gas parameters, the spray liquid parameters, and the environmental parameters, and send each parameter to the processor.

[0055] The server is used to receive the operating parameters of the annular spray main pipeline, the waste gas parameters, the spray liquid parameters, and the environmental parameters sent by the purification system, and to execute the multi-stage spray purification method for treating waste gas from a phosphine plant provided in this application.

[0056] Combination Figure 3 As shown, the waste gas scrubbing unit in the purification system consists of a primary scrubbing module, a secondary scrubbing module, and a tertiary scrubbing module. The scrubbing liquid (sodium hypochlorite solution) is pumped into each scrubbing module. Waste gas from the preparation unit enters each scrubbing module, where the scrubbing liquid reacts with the waste gas. The scrubbing liquid is then returned to the underground storage tank. The concentration of the scrubbing liquid is monitored, and it is replaced promptly when the concentration is low. The waste gas from each scrubbing module is discharged after passing through a liquid-sealed tank to meet emission standards. The oxidized salt solution (the expired scrubbing liquid) is transported to the subsequent treatment unit.

[0057] Understandably, each level of the spray module is equipped with a corresponding spray tower.

[0058] Furthermore, the first-stage spray module adopts counter-current contact (exhaust gas from bottom to top, spray liquid from top to bottom), utilizing the concentration difference between high-concentration exhaust gas and spray liquid to enhance mass transfer; the second-stage and third-stage spray modules adopt cross-flow contact (exhaust gas flows horizontally, spray liquid is sprayed vertically), extending the gas-liquid contact path and reducing fluid resistance.

[0059] Horizontal baffles are installed in the spray towers corresponding to each level of spray modules to make the exhaust gas flow in an S-shape. At the same time, spray pipes are arranged above the baffles to form a turbulent flow area where gas and liquid collide, which can increase the mass transfer area by more than 30%.

[0060] The nozzles in the primary spray module are solid cone nozzles (orifice diameter 0.8~1.2mm), producing droplets with a particle size of 500~800μm, which are suitable for the rapid neutralization of large flow and high concentration of waste gas;

[0061] The nozzles in the secondary and tertiary spray modules are hollow cone nozzles (orifice diameter 0.5~0.8mm) with droplet diameter of 200~500μm, which increases the specific surface area and enhances the absorption of trace pollutants.

[0062] Combination Figure 4 As shown, the emergency exhaust spray unit in the purification system consists of a primary exhaust module, a secondary exhaust module, and a tertiary exhaust module. The spray solution (sodium hypochlorite solution) for each spray module is pumped into the exhaust module. Emergency exhaust gas from the workshop enters each exhaust module, where the spray solution reacts with the exhaust gas. The spray solution then flows back to the underground storage tank. The concentration of the spray solution is monitored, and it is replenished promptly when the concentration is low. The emergency exhaust gas from each exhaust module is discharged after passing through a liquid-sealed tank to meet emission standards. The oxidized salt solution (the expired spray solution) is then transported to the subsequent treatment unit.

[0063] Understandably, each level of the exhaust module is equipped with a corresponding spray tower.

[0064] The spray towers corresponding to the primary, secondary, and tertiary exhaust modules are equipped with swirl blade assemblies (such as axial spiral blades). When the emergency exhaust gas passes through, a rotating flow field is generated. After the spray liquid is atomized, it forms a spiral contact trajectory with the rotating airflow, extending the contact time to 1.5 times that of the traditional design.

[0065] In some embodiments, the swirl blade angle is designed to be 45°~60°, which can increase the gas-liquid contact time in the spray tower from 1.2s to 1.8s, making it suitable for primary tower treatment of high-concentration waste gas.

[0066] The main annular spray pipe is made of PP-Halar coated steel pipe and is arranged around the perimeter of the spray tower group (a cluster of spray towers consisting of waste gas spray units and emergency exhaust spray units), forming a closed loop. The diameter of the main annular spray pipe is calculated based on the maximum design flow rate (waste gas spray unit + emergency exhaust spray unit).

[0067] A total of 5 electrically operated switching valves (V4~V8) are provided. These are electrically operated switching valves (with positioners), with a response time of <3s, a sealing rating of IP67, and support for remote control and local manual operation.

[0068] The inlet of the spray tower T1 corresponding to the primary spray module is connected to the upstream of the annular spray main pipeline through the electric switching valve V4. The outlet of the spray tower T1 is connected to one side of the electric switching valve V8 through a branch pipe, and is connected to the middle of the annular spray main pipeline through this valve.

[0069] The outlet of spray tower T1 is also connected to the inlet of spray tower T2, which corresponds to the secondary spray module, through a branch pipe; the outlet of spray tower T2 is connected to the inlet of spray tower T3, which corresponds to the tertiary spray module, through a branch pipe; and the outlet of spray tower T3 is connected to the downstream of the annular spray main pipeline through a branch pipe and an electric switching valve V6.

[0070] The inlet of the spray tower E1 corresponding to the primary exhaust module is connected to the upstream of the annular spray main pipeline through the electric switching valve V5. The outlet of the spray tower E1 is connected to the other side of the electric switching valve V8 through the branch pipe, and is connected to the middle section of the annular spray main pipeline through the electric switching valve V8.

[0071] In other words, the inlets of spray tower T1 and spray tower E1 are "parallel and diverted" upstream of the annular spray main pipeline, and their outlets are merged through electric switching valve V8 and connected to the middle section of the annular spray main pipeline, providing a basis for the "parallel enhancement mode".

[0072] The outlet of spray tower E1 is also connected to the inlet of spray tower E2 corresponding to the secondary exhaust module through a branch pipe; the outlet of spray tower E2 is connected to the inlet of spray tower E3 corresponding to the tertiary exhaust module through a branch pipe; the outlet of spray tower T3 is connected to the downstream of the annular spray main pipeline through a branch pipe and electric switching valve V7.

[0073] In summary, the main annular spray pipeline is divided into an upstream section (installation area of ​​electric switching valves V4 and V5), a middle section (installation area of ​​electric switching valve V8), and a downstream section (installation area of ​​electric switching valves V6 and V7). The three sections are connected by flanges to form a closed loop, and the total length is determined according to the layout of the tower group (generally 15~20m).

[0074] The downstream section is connected to the exhaust manifold (DN200) and finally discharged through the liquid seal tank to meet emission standards, ensuring that the exhaust gas in all modes is treated in a closed loop through the annular spray main pipeline.

[0075] Furthermore, the connection between each branch pipe and the main ring sprinkler pipe adopts a "gradual expansion / gradual contraction" transition section (such as DN150→DN200) to avoid pressure loss caused by local turbulence (control single valve pressure drop ≤50Pa).

[0076] Through the above connection method, five electric switching valves can precisely control the on / off relationship between the two units and the main annular spray pipe.

[0077] Three operating modes can be achieved through five electrically operated switching valves: independent mode, parallel mode, and emergency mode.

[0078] The independent mode consists of a primary spray module, a secondary spray module, and a tertiary spray module operating in series; or, a primary exhaust module, a secondary exhaust module, and a tertiary exhaust module operating in series.

[0079] The independent mode is achieved by opening electric switching valves V4 and V6, and closing electric switching valves V5, V7 and V8 to enable the first-stage, second-stage and third-stage spray modules to operate in series.

[0080] Alternatively, by opening electric switching valves V5 and V7 and closing electric switching valves V4, V6, and V8, the primary exhaust module, secondary exhaust module, and tertiary exhaust module can be connected in series.

[0081] In parallel mode, the primary spray module and the primary exhaust module operate in parallel, while the secondary and tertiary spray modules operate in series with the primary spray module, respectively; the secondary and tertiary exhaust modules operate in series with the primary exhaust module, respectively.

[0082] The parallel operation mode is achieved by opening electric switching valves V4, V5, and V8, and closing electric switching valves V6 and V7 to enable the primary spray module and the primary exhaust module to operate in parallel; the secondary spray module and the tertiary spray module operate in series with the primary spray module; and the secondary exhaust module and the tertiary exhaust module operate in series with the primary exhaust module.

[0083] The emergency mode consists of a primary exhaust module, a secondary exhaust module, a secondary sprinkler module, and a tertiary sprinkler module operating in series.

[0084] The emergency mode is achieved by opening the electric switching valve V7, closing the electric switching valve V6, and adjusting other electric switching valves according to actual needs to realize the series operation of the primary exhaust module, secondary exhaust module, secondary sprinkler module and tertiary sprinkler module.

[0085] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application. Furthermore, the embodiments and features in the embodiments of this application can be combined with each other without conflict.

[0086] Figure 2 This is a schematic flow diagram of a multi-stage spray purification method for treating exhaust gas from a phosphine plant, provided as an embodiment of this application. Figure 2 As shown, the method may include:

[0087] Step S210: Obtain the operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters.

[0088] The spray liquid parameters may include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit.

[0089] Step S220: Based on the operating parameters and exhaust gas parameters, determine the operating mode of the three waste spray unit and the emergency exhaust spray unit.

[0090] Among them, A, the exhaust gas parameters can include exhaust gas concentration. Fluctuation rate of exhaust gas flow and the complexity of pollutant components .

[0091] The following formula is used to determine the concentration of exhaust gas. Fluctuation rate of exhaust gas flow and the complexity of pollutant components The pollution load factor L is obtained through calculation.

[0092]

[0093] in, The standard value for the concentration of exhaust gas is set. When the exhaust gas to be treated contains more than three pollutants, K=1.2, otherwise it is 1.

[0094] B. Operating parameters may include the pressure fluctuation values ​​of the annular spray main pipeline over a historical period. Response delay of each electric switching valve and pump set current deviation ;

[0095] The normalization formula is used to convert the operational health index H of each level of spray module or exhaust module into the 0-1 range;

[0096]

[0097] in, The maximum pressure that the configured annular spray main pipe can withstand. For the maximum response delay of the configured electric switching valve, The maximum deviation of the configured pump set current.

[0098] Among them, the closer H is to 1, the more stable the operation of each level of spray module or each level of exhaust module.

[0099] Subsequently, based on the operational health index, the probability of any deviation from the normal range in each level of the sprinkler module or exhaust module is determined. ;

[0100]

[0101] in, This refers to the operational health index of either the Class I sprinkler module or the Class I exhaust module. The critical health threshold configured for the i-level sprinkler module or the i-level exhaust module, where r is the sensitivity coefficient.

[0102] Based on the probability of anomalies, determine the risk value S of each level of sprinkler module or each level of exhaust module;

[0103]

[0104] Where n is the number of spray modules in the i-th level spray module or the i-th level exhaust module in any mode.

[0105] Calculate the risk value and pollution load factor to determine the model coefficients;

[0106] The calculation method is as follows:

[0107] Where M is the mode coefficient, For load weighting, Risk weights.

[0108] The operating mode is determined based on the numerical range of the mode coefficients;

[0109] Specifically, when the mode coefficient is less than the configured first preset coefficient, the operating mode is: independent mode; in independent mode, when the exhaust gas concentration (phosphine concentration) exceeds the safety threshold, or when the oxygen concentration is greater than the safety threshold, or when the temperature rise rate exceeds the safety rate, or when impurities (flammable impurities such as silane and arsine) are present, the first-stage exhaust module, the second-stage exhaust module and the third-stage exhaust module are started in series; otherwise, the first-stage spray module, the second-stage spray module and the third-stage spray module are started in series.

[0110] When the mode coefficient is not less than the first preset coefficient and less than the configured second preset coefficient, the operating mode is: parallel mode.

[0111] When the mode coefficient is not less than the second preset coefficient, the operating mode is: emergency mode.

[0112] In some embodiments, the first preset coefficient is generally set to 1.2; the second preset coefficient is generally set to 2.1.

[0113] Step S230: Using the trained prediction model, predict the operating parameters, exhaust gas parameters, first spray liquid parameters and / or second spray liquid parameters and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods.

[0114] Specifically, A. When the operating mode is independent, a trained prediction model is used to predict the operating parameters, exhaust gas parameters, first spray liquid parameters (spray liquid parameters corresponding to the first-stage, second-stage, and third-stage spray modules), and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration in the future period.

[0115] Alternatively, a trained prediction model can be used to predict operating parameters, exhaust gas parameters, second spray liquid parameters (spray liquid parameters corresponding to the first-stage exhaust module, second-stage exhaust module, and third-stage exhaust module), and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods.

[0116] a1. For example: Operating parameters may include: the flow rate of the spray liquid from the main annular spray pipe to the waste spray unit and the network pressure, the valve opening degree and pump power of the first / second / third stage spray modules (only activated module data, non-running modules are not included);

[0117] The exhaust gas parameters may include: the concentration, flow rate and temperature of the exhaust gas entering the three waste spray unit (excluding the exhaust gas branch data of the emergency exhaust spray unit).

[0118] The parameters of the first spray liquid can include: real-time data of the first, second and third spray modules (pH value, current spray liquid concentration, liquid level, replenishment rate); because when operating in independent mode, all spray modules need to undertake the purification task step by step (such as first-level coarse treatment, second-level fine treatment, and third-level deep treatment), and their concentration decay has a significant cascading effect (the decrease in the first-level concentration directly affects the second-level treatment load).

[0119] a2. For example, environmental parameters may include the ambient temperature, humidity and wind speed around the waste spray unit (ignoring the environmental data of the emergency exhaust spray unit).

[0120] The prediction model outputs the concentration decay trend of each spray module (e.g., the concentration of the first-stage spray module changes from 80% to 70% after 1 hour, and the second-stage spray module changes from 75% to 68%) and the minimum spray liquid concentration of the entire process (e.g., the concentration of the third-stage spray module drops to 55% after 4 hours).

[0121] It should be noted that the handling method for the independent operation of the emergency exhaust sprinkler unit is the same as above.

[0122] Operating parameters may include: spray fluid flow rate from the main annular spray pipe to the emergency exhaust spray unit, pipeline pressure, fan frequency and valve status of the primary / secondary / tertiary exhaust modules;

[0123] Exhaust gas parameters may include: the instantaneous concentration and diffusion rate of the accident exhaust gas from the accident source;

[0124] The second spray liquid parameters may include: real-time data of the primary, secondary and tertiary exhaust modules (such as adsorbent concentration and spray liquid circulation volume); the spray liquid of each exhaust module needs to be dynamically adjusted according to the exhaust gas diffusion path (the primary module is close to the leak point and has the highest concentration requirement).

[0125] Environmental parameters may include: atmospheric pressure and wind speed around the emergency exhaust spray unit (which affect the diffusion rate of exhaust gas).

[0126] The prediction model outputs the concentration decay trend of each exhaust module (e.g., the concentration of the first-level exhaust module changes from 90% to 60% within 2 hours due to direct exposure to high-concentration exhaust gas) and the minimum spray liquid concentration (e.g., the concentration of the third-level module drops to 50% after 3 hours).

[0127] If it is predicted that the concentration in the primary exhaust module will drop rapidly below the threshold, its backup chemical tank should be activated in advance to prevent the exhaust gas from being discharged without being fully purified.

[0128] B. When the operation mode is parallel mode, the trained prediction model is used to predict the operating parameters, exhaust gas parameters, first spray liquid parameters (spray liquid parameters corresponding to the first-stage, second-stage, and third-stage spray modules), second spray liquid parameters (spray liquid parameters corresponding to the first-stage, second-stage, and third-stage exhaust modules), and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration in the future period.

[0129] For example, operating parameters may include: the flow distribution ratio of the two units in the main ring spray pipe, the pump current of the two units, and the valve opening degree (e.g., the waste spray unit is opened at 60%, and the emergency exhaust spray unit is opened at 40%).

[0130] Exhaust gas parameters may include: total exhaust gas flow rate and its distribution ratio in the two units (e.g., 60% enters the three waste spray unit and 40% enters the emergency exhaust spray unit), and the component ratio of each pollutant in the mixed exhaust gas (the differences in the treatment objects of the two units need to be distinguished).

[0131] The parameters of the spray fluid may include: the first spray fluid parameters (the first / second / third stage spray modules of the three waste spray unit) and the second spray fluid parameters (the first / second / third stage exhaust modules of the emergency exhaust spray unit).

[0132] The concentrations of the spray liquid in the two units have mutual influence: if the concentration of the primary spray module in the three-waste spray unit decreases, it will lead to a decrease in the load of the exhaust gas entering the emergency exhaust spray unit, which will indirectly slow down the decay of its spray liquid.

[0133] Environmental parameters may include: environmental data of the common area of ​​the two units (such as the overall temperature of the workshop and the ventilation volume).

[0134] The prediction model outputs the concentration decay trend of each module in the dual-unit system, as well as the lowest spray concentration of the entire purification system (the lowest value in the dual-unit system is taken as the global early warning threshold).

[0135] C. When the operation mode is emergency mode, the trained prediction model is used to predict the operating parameters, exhaust gas parameters, first spray liquid parameters (spray liquid parameters corresponding to the second and third spray modules), second spray liquid parameters (spray liquid parameters corresponding to the first and second exhaust modules), and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration in the future period.

[0136] For example, operating parameters may include: spray liquid flow rate to the secondary / tertiary spray module, pipeline pressure, and maximum fan power of the primary / secondary exhaust module (usually operating at full load in emergency situations).

[0137] Exhaust gas parameters may include: exhaust gas concentration (which may be higher than the conventional value) and impact flow rate (such as instantaneous peak value);

[0138] Spray fluid parameters may include:

[0139] First spray liquid parameters: concentration, pH value, and replenishment rate of the second and third spray modules (because the second module needs to take over the original treatment load of the first module, its concentration decay rate will be significantly accelerated).

[0140] Second spray liquid parameters: concentration of primary and secondary exhaust modules, and remaining adsorbent (in case of emergency, priority should be given to ensuring its adsorption efficiency to avoid direct leakage of exhaust gas).

[0141] Environmental parameters may include: environmental data (such as workshop ventilation volume and external wind speed).

[0142] The prediction model outputs the concentration decay trend of the secondary / tertiary spray modules and the primary / secondary exhaust modules, as well as the minimum spray liquid concentration (e.g., the concentration of the tertiary spray module drops to 45% after 4 hours, which is the minimum value of the purification system).

[0143] Furthermore, to achieve accurate predictions under different modes, the prediction model incorporates a built-in pattern recognition module:

[0144] Specifically, the pattern recognition module automatically determines the current operating mode (independent mode / parallel mode / emergency mode) by the valve status of the main ring spray pipeline and the module operation signal (such as "the valve of the first-level spray module of the three waste spray unit is closed").

[0145] Predictive models may include:

[0146] The purification system is abstracted as a physical network graph G=(V,E), where:

[0147] Node V includes, but is not limited to: spray modules at all levels (level 1 / level 2 / level 3), exhaust modules, waste gas sources, and environmental monitoring points.

[0148] Side E describes the flow direction from the exhaust gas source to each module, the impact of the valve opening of the annular spray main pipeline on each module, and the feedback path of environmental parameters.

[0149] Spatiotemporal convolutional graph neural network (ST-GCN) is used to capture the dynamic correlation between parameters.

[0150] The process by which the predictive model predicts operating parameters, exhaust gas parameters, first spray liquid parameters and / or second spray liquid parameters, and environmental parameters may include:

[0151] 1. For continuous parameters (such as concentration and flow rate), a spatiotemporal tensor is constructed using a time window slicing method, with each time window set to a length of 5 minutes. Discrete parameters (such as valve status and operating mode) are encoded using one-heat encoding and then mapped to a high-dimensional vector representation through an embedding layer.

[0152] Based on the adjacency matrix of physical topology, spatial aggregation of parameters of each node is performed (e.g., the third-level sprinkler module receives the state transmission from the second-level sprinkler module).

[0153] 2. Extract statistical correlations between parameters using ST-GCN;

[0154] The statistical correlation between parameters is extracted using ST-GCN, and theoretical constraints are calculated by combining chemical mechanisms and causal graphs. For example, Henry's law is applied to constrain the relationship between spray concentration and exhaust gas absorption efficiency.

[0155] A gating mechanism is introduced to balance the weights of data-driven and knowledge-guided approaches, ensuring that the model maintains good predictive performance under different operating conditions.

[0156] 3. Based on specific conditions (mode code corresponding to the operating mode, corresponding operating parameters, environmental parameters and exhaust gas parameters), output the spray liquid concentration decay curve for future periods, including node prediction and 95% confidence interval, as well as the predicted minimum spray liquid concentration and its occurrence time.

[0157] In some embodiments, a correction factor is determined based on the pipeline pressure. ; ;in, The maximum pressure that the configured annular spray main pipe can withstand. The pressure sensitivity coefficient is usually taken as 0.8, which means that for every 10% increase in pressure over the design value, the concentration consumption rate increases by 8%. The minimum spray liquid concentration is corrected according to the correction coefficient to obtain the corrected minimum spray liquid concentration.

[0158] In some embodiments, the average flow rate of multiple spray towers in the operating mode is determined based on the spray liquid flow rate corresponding to the multiple spray towers. For any spray tower, when the percentage difference between the spray liquid flow rate and the average flow rate in that spray tower and the average flow rate is greater than a preset percentage (e.g., 15%), a correction factor is added to the output layer of the trained prediction model. The correction factor is determined based on the spray liquid flow rate and the current spray liquid concentration of each spray tower in the operating mode. It can be represented as: Where Q is the average flow rate and C is the average spray solution concentration. This represents the spray liquid flow rate of the i-th spray tower corresponding to the given operating mode. This represents the current spray liquid concentration of the i-th spray tower corresponding to the given operating mode. For traffic weight, Concentration weighting.

[0159] Step S240: Based on the lowest spray liquid concentration and concentration decay trend, adjust the operating parameters in the operating mode to obtain the target operating parameters.

[0160] Specifically, the operating parameters such as the spray liquid flow rate of the main annular spray pipe, the valve opening of each spray module, the pump power, and the replenishment volume (the amount of spray liquid replenished to the main annular spray pipe per unit time) are encoded, and a multi-objective function is set with the goal of maximizing purification efficiency or minimizing energy consumption.

[0161] Meanwhile, the predicted minimum spray concentration and concentration decay trend are used as constraints to ensure that after the operating parameters are adjusted, the spray concentration is not lower than the safety threshold and the concentration decay trend is controllable.

[0162] The Particle Swarm Optimization (PSO) algorithm is employed. The particle swarm positions (representing different combinations of operating parameters) and velocities are initialized. The particle positions are iteratively updated, and the fitness value of each particle is calculated based on the objective function and constraints to find the global optimum. During iteration, if the parameter combination corresponding to a particle causes the spray concentration to violate a safety threshold, or if the concentration decay trend exceeds an acceptable range, the fitness value of that particle is reduced, guiding the algorithm towards a better solution.

[0163] After the algorithm converges to the optimal solution, the corresponding combination of operating parameters is used as the target operating parameters and sent to the purification system for execution. Simultaneously, the operating status of the purification system is continuously monitored, and the actual concentration of the spray liquid and its decay trend are fed back to the algorithm. If any deviation occurs, the algorithm is restarted for parameter optimization, achieving dynamic adjustment.

[0164] Target operating parameters may include: target spray fluid flow rate, target opening degree of valves in each spray module, target pump power, and target replenishment volume.

[0165] In some embodiments, the decay rate is determined based on the minimum spray concentration and the current spray concentration; the replenishment volume adjustment coefficient is determined based on the decay rate; and the replenishment volume of the spray solution configured for future periods is adjusted using the replenishment volume adjustment coefficient to obtain the target replenishment volume.

[0166] In some embodiments, based on the minimum spray liquid concentration and the attenuation trend, the operating parameters in the operating mode are adjusted to obtain the target operating parameters, including: determining the attenuation rate based on the minimum spray liquid concentration and the current spray liquid concentration; the degree of deviation between the attenuation rate and the reference rate can determine whether to increase or decrease the replenishment volume; then, based on the attenuation rate, a flow rate adjustment coefficient is determined; and the spray liquid flow rate is adjusted based on the flow rate adjustment coefficient to determine the target spray liquid flow rate.

[0167] This approach improves the purification system's responsiveness to complex operating conditions; achieves a balance between purification efficiency and energy consumption; enhances the system's intelligence level by combining predictive models with optimization algorithms; and supports closed-loop feedback control, thereby improving the system's stability and robustness.

[0168] Step S250: Purify the waste gas to be treated based on the target operating parameters to obtain purified waste gas.

[0169] This application provides a multi-stage spray purification method for treating exhaust gas from a phosphine plant. The method includes: acquiring operating parameters of the annular spray main pipeline, exhaust gas parameters, spray liquid parameters, and environmental parameters; determining the operating modes of the three-waste spray unit and the emergency exhaust spray unit based on the operating parameters and exhaust gas parameters; using a trained prediction model to predict the operating parameters, exhaust gas parameters, first spray liquid parameters and / or second spray liquid parameters, and environmental parameters to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods; adjusting the operating parameters under the operating mode based on the minimum spray liquid concentration and the concentration decay trend to obtain target operating parameters; and purifying the exhaust gas based on the target operating parameters to obtain purified exhaust gas. Through a coupling calculation mechanism between the pollution load coefficient and the equipment risk value, a dynamic mode coefficient is generated to drive the adaptive switching of the three-stage operating modes—when the pollution load is low, an independent operating mode is used to precisely isolate high-risk exhaust gas; under normal operating conditions, a parallel mode is activated to achieve collaborative purification of the two units; and in the event of a sudden accident, an emergency mode is automatically switched to activate redundant modules. The ST-GCN prediction model based on physical constraints constructs a full-chain topology network for waste gas treatment. In independent, parallel, and emergency modes, the concentration decay prediction accuracy exceeds 85%, reducing the error by 60% compared to traditional methods, and generating cascaded concentration curves for the next 4 hours. The closed-loop optimized purification system uses the minimum spray liquid concentration as a hard constraint, employing the PSO algorithm to balance the goals of maximizing purification efficiency and minimizing energy consumption in real time, combined with a flow-concentration dual-factor compensation mechanism to eliminate inter-module deviations. Field tests have verified that this solution can reduce reagent consumption by 33%, electricity costs by 18%, and equipment downtime rate by 75%. The response time to high-risk accidents such as explosions is reduced to 37 seconds, ultimately achieving an industry breakthrough of 99.2% purification efficiency and zero major safety accidents, providing a governance paradigm for the chemical industry that combines economy and safety.

[0170] Corresponding to the above method, this application also provides a multi-stage spray purification device for treating exhaust gas from a phosphine plant, such as... Figure 5 As shown, the device includes:

[0171] The acquisition unit 510 is used to acquire the operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit.

[0172] The determining unit 520 is used to determine the operating mode of the three waste spraying unit and the emergency exhaust spraying unit based on the operating parameters and the exhaust gas parameters.

[0173] The prediction unit 530 is used to use a trained prediction model to predict the operating parameters, the exhaust gas parameters, the first spray liquid parameters and / or the second spray liquid parameters and environmental parameters, so as to obtain the concentration decay trend and the corresponding minimum spray liquid concentration in the future period.

[0174] The adjustment unit 540 adjusts the operating parameters of the operating mode based on the minimum spray liquid concentration and the concentration decay trend to obtain the target operating parameters;

[0175] Purification unit 550 is used to purify the waste gas to be treated based on the target operating parameters to obtain purified waste gas.

[0176] The functions of each unit in the multi-stage spray purification device for treating exhaust gas from a phosphine plant provided in the above embodiments of this application can be achieved through the above-described methods and steps. Therefore, the specific working process and beneficial effects of each unit in the multi-stage spray purification device for treating exhaust gas from a phosphine plant provided in the embodiments of this application will not be repeated here.

[0177] This application also provides an electronic device, such as... Figure 6 As shown, it includes a processor 610, a communication interface 620, a memory 630, and a communication bus 640, wherein the processor 610, the communication interface 620, and the memory 630 communicate with each other through the communication bus 640.

[0178] Memory 630 is used to store computer programs;

[0179] When the processor 610 executes the program stored in the memory 630, it performs the following steps:

[0180] The operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters are obtained; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit;

[0181] Based on the operating parameters and the exhaust gas parameters, the operating modes of the three waste spray unit and the emergency exhaust spray unit are determined;

[0182] Using a trained prediction model, the operating parameters, the exhaust gas parameters, the first spray liquid parameters and / or the second spray liquid parameters and environmental parameters are predicted to obtain the concentration decay trend and the corresponding minimum spray liquid concentration for future periods.

[0183] Based on the minimum spray concentration and the concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters;

[0184] The waste gas to be treated is purified based on the target operating parameters to obtain purified waste gas.

[0185] The communication bus mentioned above can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. This communication bus can be divided into address bus, data bus, control bus, etc. For ease of illustration, only one thick line is used to represent it in the diagram, but this does not mean that there is only one bus or one type of bus.

[0186] The communication interface is used for communication between the aforementioned electronic devices and other devices.

[0187] The memory may include random access memory (RAM) or non-volatile memory (NVM), such as at least one disk storage device. Optionally, the memory may also be at least one storage device located remotely from the aforementioned processor.

[0188] The processors mentioned above can be general-purpose processors, including central processing units (CPUs), network processors (NPs), etc.; they can also be digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0189] The implementation methods and beneficial effects of the various components of the electronic device in the above embodiments for solving the problem can be found in [reference needed]. Figure 2 The steps in the illustrated embodiments are used to implement the electronic device. Therefore, the specific working process and beneficial effects of the electronic device provided in this application will not be repeated here.

[0190] In another embodiment provided in this application, a computer-readable storage medium is also provided, which stores instructions that, when executed on a computer, cause the computer to perform a multi-stage spray purification method for treating exhaust gas from a phosphine plant as described in any of the above embodiments.

[0191] In another embodiment provided in this application, a computer program product containing instructions is also provided, which, when run on a computer, causes the computer to execute a multi-stage spray purification method for treating exhaust gas from a phosphine plant as described in any of the above embodiments.

[0192] Those skilled in the art will understand that the embodiments in this application can be provided as methods, systems, or computer program products. Therefore, the embodiments in this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the embodiments in this application can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0193] This application describes embodiments of methods, apparatus (systems), and computer program products according to embodiments of this application with reference to flowchart illustrations and / or block diagrams. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0194] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0195] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0196] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected," "coupled," or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0197] Although preferred embodiments have been described in this application, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the embodiments in this application are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments in this application.

[0198] Obviously, those skilled in the art can make various modifications and variations to the embodiments of this application without departing from the spirit and scope of the embodiments of this application. Therefore, if these modifications and variations to the embodiments of this application fall within the scope of the embodiments of this application and their equivalents, then these modifications and variations are also intended to be included in the embodiments of this application.

Claims

1. A multi-stage spray purification method for treating exhaust gas from a phosphine plant, characterized in that, The method, applied to a purification system comprising a waste gas spray unit and an emergency exhaust spray unit respectively connected to a main annular spray duct, includes: The operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters are obtained; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit; Based on the operating parameters and the exhaust gas parameters, the operating modes of the three waste spray unit and the emergency exhaust spray unit are determined; Using a trained prediction model, the operating parameters, exhaust gas parameters, first spray liquid parameters, second spray liquid parameters, and environmental parameters are predicted to obtain the spray liquid concentration decay trend and the corresponding minimum spray liquid concentration for future periods. The process of this prediction model predicting the operating parameters, exhaust gas parameters, first spray liquid parameters, second spray liquid parameters, and environmental parameters includes: For continuous parameters, a time window slicing method is used to construct a spatiotemporal tensor, with each time window set to a length of 5 minutes; discrete parameters are encoded using one-hot encoding and then mapped to a high-dimensional vector representation through an embedding layer; spatial aggregation of parameters for each node is performed based on the adjacency matrix of the physical topology. ST-GCN was used to extract statistical correlations between parameters; By using the mode code corresponding to the operating mode, the corresponding operating parameters, environmental parameters and exhaust gas parameters, the system outputs the spray liquid concentration decay trend for future periods, as well as predicts the minimum spray liquid concentration. Based on the minimum spray concentration and the spray concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters; The waste gas to be treated is purified based on the target operating parameters to obtain purified waste gas.

2. The method as described in claim 1, characterized in that, The operating modes include: independent mode, parallel mode, and emergency mode.

3. The method as described in claim 2, characterized in that, The waste spraying unit includes a primary spraying module, a secondary spraying module, and a tertiary spraying module; the emergency exhaust spraying unit includes a primary exhaust module, a secondary exhaust module, and a tertiary exhaust module. The independent mode is that the primary spray module, the secondary spray module, and the tertiary spray module operate in series; or, the primary exhaust module, the secondary exhaust module, and the tertiary exhaust module operate in series. The parallel operation mode is that the primary spray module and the primary exhaust module operate in parallel, and the secondary spray module and the tertiary spray module operate in series with the primary spray module; the secondary exhaust module and the tertiary exhaust module operate in series with the primary exhaust module. The emergency mode is that the primary exhaust module, the secondary exhaust module, the secondary sprinkler module, and the tertiary sprinkler module operate in series.

4. The method as described in claim 1, characterized in that, The first and second spray liquid parameters both include the current spray liquid concentration and spray liquid flow rate, wherein the spray liquid flow rate characterizes the rate at which the liquid circulates in the spray tower per unit time; the operating mode includes multiple independently operating spray towers in the three waste spray unit and / or emergency exhaust spray unit; Before obtaining the future spray concentration decay trend and the corresponding minimum spray concentration, the method further includes: The average flow rate of the multiple spray towers in the operating mode is determined based on the spray liquid flow rate corresponding to the multiple spray towers. For any spray tower, when the percentage difference between the spray liquid flow rate and the average flow rate in the spray tower and the average flow rate is greater than a preset percentage, a correction factor is added to the output layer of the trained prediction model; the correction factor is determined based on the spray liquid flow rate of each spray tower in the operating mode and the current spray liquid concentration.

5. The method as described in claim 4, characterized in that, The target operating parameters include: target fluid replenishment volume; Based on the minimum spray concentration and the spray concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters, including: The decay rate is determined based on the minimum spray concentration and the current spray concentration; Based on the decay rate, determine the replenishment volume adjustment coefficient; The replenishment volume of the spray solution configured for future periods is adjusted using the replenishment volume adjustment coefficient to obtain the target replenishment volume.

6. The method as described in claim 4, characterized in that, The target operating parameters include: target spray fluid flow rate; Based on the minimum spray concentration and the spray concentration decay trend, the operating parameters under the operating mode are adjusted to obtain the target operating parameters, including: The decay rate is determined based on the minimum spray concentration and the current spray concentration; Based on the attenuation rate, determine the flow adjustment coefficient; The spray liquid flow rate is adjusted based on the flow rate adjustment coefficient to determine the target spray liquid flow rate.

7. A multi-stage spray purification device for treating exhaust gas from a phosphine plant, characterized in that, An apparatus for use in a purification system comprising a waste gas spray unit and an emergency exhaust spray unit respectively connected to a main annular spray duct, the apparatus comprising: The acquisition unit is used to acquire the operating parameters of the annular spray main pipeline, the waste gas parameters of the waste gas to be treated, the spray liquid parameters, and the environmental parameters; the spray liquid parameters include the first spray liquid parameters corresponding to the three waste spray unit and the second spray liquid parameters corresponding to the emergency exhaust spray unit; The determining unit is used to determine the operating mode of the three waste spraying unit and the emergency exhaust spraying unit based on the operating parameters and the exhaust gas parameters; The prediction unit is used to use a trained prediction model to predict the operating parameters, the exhaust gas parameters, the first spray liquid parameters, the second spray liquid parameters, and the environmental parameters, to obtain the spray liquid concentration decay trend and the corresponding minimum spray liquid concentration for future periods. The process of the prediction model predicting the operating parameters, exhaust gas parameters, the first spray liquid parameters, the second spray liquid parameters, and the environmental parameters includes: For continuous parameters, a time window slicing method is used to construct a spatiotemporal tensor, with each time window set to a length of 5 minutes; discrete parameters are encoded using one-hot encoding and then mapped to a high-dimensional vector representation through an embedding layer; spatial aggregation of parameters for each node is performed based on the adjacency matrix of the physical topology. ST-GCN was used to extract statistical correlations between parameters; By using the mode code corresponding to the operating mode, the corresponding operating parameters, environmental parameters and exhaust gas parameters, the system outputs the spray liquid concentration decay trend for future periods, as well as predicts the minimum spray liquid concentration. The adjustment unit adjusts the operating parameters under the operating mode based on the minimum spray liquid concentration and the spray liquid concentration decay trend to obtain the target operating parameters; The purification unit is used to purify the waste gas to be treated based on the target operating parameters to obtain purified waste gas.

8. An electronic device, characterized in that, The electronic device includes a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus; Memory, used to store computer programs; A processor, when executing a program stored in memory, implements the method of any one of claims 1-6.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the method described in any one of claims 1-6.