An electronic grade ultra-pure water process optimization method

Abstract

The application relates to the field of water purification, in particular to an electronic-grade ultrapure water process optimization system, which comprises the following steps: S1, pretreatment, suspended solids, organic matter, oxidizing substances and the like in initial water are intercepted through pretreatment of the raw water, so that water with low carbonate and bicarbonate is obtained; S2, RO water treatment, the pretreated water is further treated through a reverse osmosis system to remove bacteria, viruses, colloids, organic matter and the like in the water; S3, special EDI treatment, the water treated through the RO water treatment is treated through continuous electric desalting technology to remove silicon dioxide and boron ions in the water; and S4, fine treatment, the water treated through the special EDI treatment is further treated to remove metal cations, anions, silicon ions and boron ions in the water, so that the terminal outlet water meets the water requirement, and the application improves the problem that the water quality produced in a high-salt area in a traditional mode cannot meet the requirement, and can improve the water quality.

Description

Technical Field

[0001] This application relates to the field of water purification, and in particular to a method for optimizing the process of electronic-grade ultrapure water. Background Technology

[0002] Electronic-grade ultrapure water refers to water with a resistivity of 18.2 MΩ·cm (25 ℃). Apart from water molecules, ultrapure water contains almost no viruses, macro-elements, bacteria, gases, or organic matter. It is currently widely used in the production and preparation of fine products in industries such as photovoltaics, semiconductors, integrated circuits, pharmaceuticals, and scientific research, including product cleaning, reagent dilution, photolithography, and cooling. The usage is large, and the requirements for water quality are extremely high.

[0003] Chinese patent CN119612812A discloses an electronic-grade ultrapure water preparation system and process. The disclosed process steps, in sequence, are: raw water, multi-media filter, ultrafiltration, two-stage RO reverse osmosis system, special EDI system, fine treatment system for removing silica and boron, polishing mixed bed, and terminal filter. However, traditional multi-media filters + ultrafiltration can only retain most suspended solids and colloids, but cannot remove oxidizing substances in the water, nor can they reduce carbonates and bicarbonates. This easily leads to calcium and magnesium scaling in the downstream RO reverse osmosis system, affecting RO permeate flux, reducing permeate volume and quality. Furthermore, to achieve better desalination, the pH value of the water needs to be adjusted before desalination. Therefore, this electronic-grade ultrapure water preparation system and process are only suitable for areas with medium or lower salinity in raw water, and the ultrapure water quality can meet the requirements of US Standard 1.1 and below (metal ions less than 0.1 μg / l, anions 0.1 μg / l and above, dissolved silicon SiO2 < 5 μg / l), but cannot meet the requirements of US Standard 1.3 for metal ion cations ≤ 0.001 μg / l, anions ≤ 0.05 μg / l, dissolved oxygen ≤ 10 μg / l, dissolved silicon SiO2 < 0.5 μg / l, and boron ≤ 0.05 μg / l.

[0004] In high-salinity areas, the raw water has high hardness and extremely high silica and boron content. Using traditional processes to produce electronic-grade ultrapure water results in unstable water quality and easy membrane scaling. Therefore, it is necessary to improve existing processes to meet the high requirements for both influent and product water quality. Summary of the Invention

[0005] In order to improve the quality of produced water, this application provides a method for optimizing the electronic-grade ultrapure water process.

[0006] This application provides a method for optimizing the electronic-grade ultrapure water process, employing the following technical solution: An optimization method for electronic-grade ultrapure water process includes the following steps: S1. Pretreatment: By pretreating the raw water, suspended solids, organic matter and oxidizing substances in the raw water are initially removed to obtain water with low carbonate and bicarbonate content. S2 and RO water treatment further treat pre-treated water through a reverse osmosis system to remove bacteria, viruses, colloids and organic matter from the water; S3, Special EDI treatment, uses continuous electro-desalination technology to treat water after RO water treatment, removing silica and boron ions from the water; S4. Fine treatment: The water that has undergone special EDI treatment is further treated to remove metal cations, anions, silicon ions and boron ions from the water, so that the final water effluent meets the water use requirements.

[0007] In one specific implementation scheme, in step S1, the raw water is first filtered through a quartz sand filter, then the filtered water is acidified to adjust the pH value to 7, and then the adjusted water is sprayed through a decarbonation tower and water tank to decarbonize the carbonate and bicarbonate ions in the water into carbon dioxide and blown out. The decarbonized water enters the water tank and is then filtered by an activated carbon filter to reduce the scaling of calcium carbonate and magnesium carbonate in the water.

[0008] In one specific implementation scheme, in step S1, the activated carbon filter is filled with fruit shell activated carbon with an adsorption iodine value greater than 800 mg / g. The activated carbon filter adsorbs organic matter and oxidizing substances in the water, thereby reducing downstream microbial contamination and reducing the amount of reducing agent required.

[0009] In one specific implementation scheme, step S2 includes a first-stage reverse osmosis process. The water treated in step S1 is sent to a security process filter for filtration. Then, scale inhibitors and reducing agents are added to the water, and the mixture is sent to the first-stage reverse osmosis unit for further treatment. The water treated by the first-stage reverse osmosis unit is then sent to the next process for further treatment.

[0010] In one specific implementation scheme, step S2 further includes a secondary reverse osmosis process, in which water treated by the primary reverse osmosis process is transported to the secondary reverse osmosis unit, and alkali is added to the water transported to the secondary reverse osmosis unit to adjust the pH value. The mixture is then transported to the secondary reverse osmosis unit for further treatment, and the treated water is then transported to the next process for further treatment.

[0011] In one specific implementation, in step S3, the water treated in step S2 is sent to a primary TOC device for further treatment to remove TOC from the water to 20 ppb. The water is then sent to an EDI module for further treatment to remove silicon and boron ions from the water, so that the removal rate of silicon dioxide and boron is greater than 99%.

[0012] In one specific implementation scheme, in step S4, the water treated by special EDI is sequentially transported to a mixed bed and anion bed for further treatment. Then, the treated water is sequentially transported to a terminal plate heat exchanger, a secondary TOC device, a two-stage polishing mixed bed, a degassing membrane device, a terminal precision filter, and a terminal ultrafiltration device for further treatment, so that the treated water meets the water use standards, and then the treated water is transported to the point of use.

[0013] In one specific implementation scheme, in step S4, the water treated by the mixed bed, anion bed and two-stage polishing mixed bed has the following concentrations: metal ion cations ≤ 0.001 μg / l, anions ≤ 0.01 μg / l, dissolved oxygen ≤ 1 μg / l, dissolved silicon SiO2 < 0.5 μg / l, and boron ≤ 0.01 μg / l.

[0014] In one specific implementation scheme, in step S4, the dissolved oxygen in the water treated by the degassing membrane, terminal filter and terminal ultrafiltration device is ≤1μg / L, and the product water particles meet the requirement of >0.05μm particles ≤500 / L.

[0015] In one specific implementation scheme, the decarbonization tower includes a tower body, a spraying device, a packing layer, an air inlet device, and a demisting mechanism. The demisting mechanism, spraying mechanism, and packing layer are installed sequentially from top to bottom in the tower body. An air outlet is provided at the upper end of the tower body. A liquid inlet pipe for connecting to the spraying device is installed on the side wall of the tower body at the location of the spraying device. An air inlet is provided on the side wall of the tower body below the packing layer. The air outlet of the air inlet device is connected to the air inlet. The spraying device includes a rotating mechanism, a spraying mechanism, and a water vapor collection mechanism. The spraying mechanism includes a spray head, a cleaning component, and a driving component. The spray head is installed on the liquid inlet pipe. The cleaning component is installed on the spray head and is used to clean the spray head. The driving component is installed in the tower body and is connected to the cleaning component. The rotating mechanism is also installed in the tower body and is connected to the spraying mechanism. The water vapor collection mechanism is installed on the spraying mechanism.

[0016] In summary, this application includes at least one of the following beneficial effects: 1. This application, by setting up a pretreatment step, can retain most of the suspended solids, organic matter, and oxidizing substances, reduce the carbonate and bicarbonate in the water, and prevent calcium and magnesium scaling, thereby improving the quality of the produced water.

[0017] 2. This application uses a mixed bed, anion bed and two-stage polishing mixed bed to operate in series, thereby removing trace amounts of boron from the water, so that the effluent anions and cations can meet the US standard 1.3 water quality requirements.

[0018] 3. By setting up a decarbonation tower and water tank to further treat the raw water after it has been treated by the quartz sand filter, carbonates and bicarbonates are converted into carbon dioxide. Carbon dioxide is removed from the water by spraying and blowing through the decarbonation tower, which can effectively prevent calcium carbonate and magnesium carbonate from forming scale. This avoids chemical scaling after the filtered water enters the RO membrane and reduces the operating flux of the RO membrane. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the process optimization system for electronic-grade ultrapure water in high-salinity areas, as described in this application.

[0020] Figure 2 This is a schematic diagram of the decarbonization tower in this application.

[0021] Figure 3 This is a schematic diagram of the internal structure of the decarbonization tower in an embodiment of this application.

[0022] Figure 4 This is a schematic diagram of the spraying mechanism in the embodiments of this application.

[0023] Figure 5 This is a schematic diagram of the unblocking component in an embodiment of this application.

[0024] Figure 6 This is a cross-sectional view of the spray head in an embodiment of this application.

[0025] Figure 7 This is a schematic diagram of the deflection slot configuration in an embodiment of this application.

[0026] Figure 8 This is a schematic diagram of the unblocking rod in an embodiment of this application.

[0027] Figure 9 This is a schematic diagram of the structure of the primary dosing device in the embodiments of this application.

[0028] Figure 10 This is a schematic diagram of the stirring mechanism in the embodiments of this application.

[0029] Figure 11 This is a schematic diagram of the foam removal mechanism in the embodiments of this application.

[0030] Explanation of reference numerals in the attached figures: 1. Raw water tank; 2. Plate heat exchanger; 3. Quartz sand filter; 4. Decarbonization tower and water tank; 41. Tower body; 411. Air outlet; 412. Liquid inlet pipe; 413. Liquid delivery pipe; 42. Spraying device; 421. Rotating mechanism; 4211. Rotary motor; 4212. Drive rod; 4213. Drive gear; 4214. Transmission gear; 422. Spraying mechanism; 4221. Conduit; 4222. Spray head; 4223. Nozzle; 4224. Mounting joint; 42241. Deflection groove; 42 25. Unblocking assembly; 42251. Unblocking rod; 42252. Unblocking head; 42253. Unblocking spring; 42254. Guide rod; 4226. Push rod; 4227. Push block; 4228. Push spring; 4229. Top block; 423. Water vapor collection mechanism; 4231. Demisting ring; 4232. Demisting plate; 43. Packing layer; 44. Air inlet device; 441. Blower; 45. Demisting mechanism; 5. Activated carbon filter; 6. Filter water tank; 7. Primary booster pump; 8. Safety process device; 9. Primary dosing device; 91. Dosing tank; 911. Filter screen; 912. Conveying pipe; 92. Stirring mechanism; 921. Stirring motor; 922. Stirring rod; 923. Stirring blade; 93. Defoaming mechanism; 931. Defoaming cover; 932. Scraper; 933. Defoaming assembly; 9331. Defoaming drive wheel; 9332. Defoaming transmission wheel; 9333. Defoaming timing belt; 934. Transmission assembly; 9341. Drive gear ring; 9342. Defoaming gear; 94. Conveying mechanism; 941. Conveying pump ; 10. First-stage reverse osmosis unit; 11. First-stage product water tank; 12. Second-stage high-pressure pump; 13. Second-stage chemical dosing unit; 14. Second-stage reverse osmosis unit; 15. Second-stage product water tank; 16. First-stage TOC unit; 17. Special EDI module; 18. EDI product water tank; 19. Mixed bed; 20. Anion exchange bed; 21. UPW water tank; 22. Terminal plate heat exchanger; 23. Second-stage TOC unit; 24. Two-stage polishing mixed bed; 25. Degassed membrane unit; 26. Terminal precision filter; 27. Terminal ultrafiltration unit. Detailed Implementation

[0031] The present application will be further described in detail below with reference to the accompanying drawings.

[0032] This application discloses a method for optimizing an electronic-grade ultrapure water process, referring to... Figure 1 It includes the following steps: S1. Pretreatment: First, raw water from high-salinity areas is transported to raw water tank 1 for storage. Then, a raw water pump located on one side of raw water tank 1 transports the water from raw water tank 1 to plate heat exchanger 2 for treatment. Next, the water treated by plate heat exchanger 2 is filtered through quartz sand filter 3. Then, acid is added to the filtered water to adjust the pH value to 7. Then, the adjusted water is sprayed through decarbonation tower and water tank 4 to decarbonize, converting carbonate and bicarbonate ions in the water into carbon dioxide and blowing it out. The decarbonized water enters the water tank of the decarbonation tower, and then the activated carbon feed water pump located at activated carbon filter 5 transports the water to activated carbon filter 5 for filtration treatment to reduce calcium carbonate and magnesium carbonate scaling in the water. This reduces the formation of calcium and magnesium scale when the filtered water enters the subsequent RO treatment, thereby reducing the RO permeate flux, permeate water volume and permeate water quality. The filtered water is then transported to filter water tank 6. Before RO treatment, carbonate and bicarbonate ions are significantly reduced, effectively preventing calcium carbonate and magnesium carbonate from adhering to the RO membrane and forming scale. This also greatly reduces the amount of scale inhibitor needed for the RO feed water. Pretreatment of the raw water removes suspended solids, organic matter, and oxidizing substances, resulting in water with low carbonate and bicarbonate levels. The quartz sand filter 3, raw water pump, and activated carbon feed pump are all existing technologies in this field and will not be elaborated upon here.

[0033] The activated carbon filter 5 is filled with fruit shell activated carbon, which has an adsorption iodine value greater than 800 mg / g. The activated carbon filter 5 adsorbs organic matter and oxidizing substances in the water, mitigating downstream microbial contamination and reducing the amount of reducing agent required. The activated carbon filter 5 is existing technology in this field and will not be described in detail here.

[0034] S2, RO water treatment, includes primary and secondary reverse osmosis. Water treated in step S1 is pumped by a primary booster pump 7 to a security process unit 8 for filtration. The filtered water is then pumped by a primary high-pressure pump to the primary reverse osmosis unit 10. Simultaneously, scale inhibitors and reducing agents are added to the water pumped to the primary reverse osmosis unit 10 via a primary chemical dosing device 9. The mixture is then pumped to the primary reverse osmosis unit 10 for further treatment. The water treated by the primary reverse osmosis unit 10 is then pumped to the primary product water tank 11 for subsequent treatment in the secondary reverse osmosis stage. The primary booster pump 7, security process unit 8, primary high-pressure pump, and primary reverse osmosis unit 10 are all existing technologies in the field and will not be described in detail here.

[0035] Water from the primary product tank 11 is pumped to the secondary reverse osmosis unit 14 via the secondary high-pressure pump 12. Simultaneously, alkali is added to the water pumped to the secondary reverse osmosis unit 14 via the secondary chemical dosing device 13 to adjust the pH value. The mixture is then pumped to the secondary reverse osmosis unit 14 for treatment. The treated water is then pumped to the secondary product tank 15 and subsequently to the next processing stage. Both the secondary high-pressure pump 12 and the secondary reverse osmosis unit 14 are existing technologies in the field and will not be described in detail here.

[0036] The pretreated water is further treated by a reverse osmosis system to remove bacteria, viruses, colloids, organic matter, etc., and to perform primary desalination. The water in the secondary product water tank 15 has a conductivity that allows for further treatment in the TOC device 16, reducing the TOC to 20 ppb. The desalinated water is then transported to a special EDI module 17 for further treatment, removing silica and boron ions to achieve a removal rate of over 99%. The treated water is then stored in an EDI product water tank 18. Both the EDI product water tank 18 and the secondary product water tank 15 are nitrogen-sealed to prevent air from entering and affecting the product water quality. Continuous electro-desalination technology is then used to further treat the RO-treated water, removing silica and boron ions. The EDI booster pump, the primary TOC device 16, and the special EDI module 17 are all existing technologies in the field and will not be described in detail here.

[0037] If the silicon and boron ion content of the water treated by the special EDI module is not up to standard, it will be sent back to the filter tank 6 and wait to be sent back to the RO water treatment step. The water with the unqualified silicon and boron ion content will be treated again according to the above steps.

[0038] S4. Fine treatment: Water from EDI product water tank 18 is sequentially transported to mixed bed 19 and anion bed 20 for treatment via MB water pump. Then, the treated water is transported to UPW water tank 21. The water from UPW water tank 21 is then sequentially transported to terminal plate heat exchanger 22, secondary TOC device 23, two-stage polishing mixed bed 24, and degassing membrane device 25 for treatment via UPW terminal booster pump. The treated water is then sequentially transported to terminal precision filter 26 and terminal ultrafiltration device 27 for treatment via UPW terminal ultrafiltration, thereby bringing the water to the UPW electronic grade US standard 1.3 ultrapure water point (US standard 1.3 requirements are resistivity 18.2 MΩ*cm, metal ion cation ≤0.001μg / l, anion ≤0.02μg / l, dissolved oxygen ≤1μg / l, dissolved silicon SiO2 <0.5μg / l, boron ≤0.01μg / l). Among them, the MB water pump, mixed bed 19, anion bed 20, terminal plate heat exchanger 22, secondary TOC device 23, two-stage polishing mixed bed 24, degassing membrane device 25, terminal precision filter 26 and terminal ultrafiltration device 27 are all existing technologies in the field, and will not be described in detail here.

[0039] After treatment by a multi-stage resin bed consisting of mixed bed 19, anion bed 20, and a two-stage polishing mixed bed 24 (all resins are Rohm and Haas semiconductor-grade, uniform particle size resins; the anion bed 20 uses UP7530 chelating resin with high boron and silicon removal properties, which can form stable complexes with borate ions, thus removing trace amounts of boron from the water), the effluent from the resin bed meets the trace level US standard 1.3 water quality requirements, namely, metal ion cations ≤0.001 μg / l, anions ≤0.01 μg / l, dissolved oxygen ≤1 μg / l, dissolved silicon SiO2 <0.5 μg / l, and boron ≤0.01 μg / l. After treatment by the degassed membrane, terminal filter, and terminal ultrafiltration device 27, the dissolved oxygen in the water is ≤1 μg / l, and the particle size distribution of the product water meets the requirement of >0.05 μm particles ≤500 / L, satisfying the US standard 1.3.

[0040] The terminal plate heat exchanger 22 maintains the terminal water supply temperature at 23±1℃ through a temperature control valve system. The secondary TOC device 23 can remove TOC to 1ppb. The temperature control valve system is existing technology in this field and will not be described in detail here.

[0041] The degassing membrane unit 25 is equipped with a chemical degassing membrane, nitrogen inlet, cooling water tank, and vacuum pump. The degassing membrane process water and nitrogen inlet flow counter-currently. The vacuum pump removes dissolved oxygen and carbon dioxide from the water. The vacuum pump operates continuously, requiring a cooling water tank and chilled water circulation for cooling. After passing through the degassing membrane unit 25, the dissolved oxygen in the ultrapure water can reach 1 μg / L, meeting and exceeding the US standard 1.3 requirement.

[0042] The permeate from the degassing membrane unit 25 is boosted by the UPW terminal booster pump to a 0.05μm terminal filter and then filtered by the terminal ultrafiltration unit 27 before being delivered to the UPW 1.3 ultrapure water point. The permeate particles meet the requirement of >0.05μm particles ≤100 particles / L.

[0043] The water, after undergoing special EDI treatment, is further treated to remove metal cations, anions, silicon ions, and boron ions, so that the final effluent meets the water use requirements.

[0044] For water that does not meet US standards after being treated by the terminal ultrafiltration device 27, it is transported to the decarbonation tower and water tank 4 or the secondary reverse osmosis device 14 according to the content of various ions in the water, and the water is treated again according to the above steps, so as to remove carbonate and bicarbonate ions in the water or to desalinate the water, so that the final treated water can meet the water use standards.

[0045] If the dissolved oxygen content and particulate matter in the water delivered to the point of use after treatment by the terminal ultrafiltration device 27 do not meet the standards, the water will be returned to the UPW water tank 21 and then treated in the same manner as described above to meet the water use standards.

[0046] Reference Figure 1 and Figure 2 This application embodiment also provides a decarbonization tower, including a tower body 41, a spray device 42, a packing layer 43, and an air inlet device 44. The top of the tower body 41 is provided with an air outlet 411, the bottom of the tower body 41 is provided with an air inlet and a liquid outlet, and the upper side wall of the tower body 41 is provided with a liquid inlet. A liquid inlet pipe 412 is detachably installed at the liquid inlet of the tower body 41. The spray device 42 and the packing layer 43 are arranged sequentially from top to bottom inside the tower body 41, and the packing layer 43 is located between the liquid inlet pipe 412 and the air inlet. The air inlet device 44 is arranged on one side of the tower body 41, and the air outlet of the air inlet device 44 is connected to the air inlet of the tower body 41.

[0047] Reference Figure 3 The packing layer 43 is filled with large particles of inert material (not shown in the figure). Water containing carbon dioxide enters the tower body 41 from the inlet, flows downward through the packing layer 43, and forms a liquid film or droplets on the surface of the inert material in the packing layer 43. Then it comes into full contact with the air entering from the bottom of the tower body 41, thereby removing carbon dioxide from the water.

[0048] Reference Figure 3 and Figure 4The spraying device 42 includes a rotating mechanism 421, a spraying mechanism 422, and a water vapor collection mechanism 423. The inlet pipe 412 is horizontally positioned, with one end located outside the tower body 41 and the other end extending into the tower body 41 at its axial position. A delivery pipe 413 is rotatably mounted on the side wall of the end of the inlet pipe 412 inside the tower body 41. The delivery pipe 413 is vertically downward and connected to the inlet pipe 412. The spraying mechanism 422 is installed at the lower end of the delivery pipe 413 and is located above the packing layer 43. The rotating mechanism 421 includes a rotary motor 4211, a drive rod 4212, a drive gear 4213, and a transmission gear 4214. The rotary motor 4211 is fixedly mounted on the side wall of the tower body 41 and located below the liquid inlet pipe 412. The drive rod 4212 is rotatably mounted horizontally below the liquid inlet pipe 412 located inside the tower body 41, with one end extending to the liquid delivery pipe 413 and the other end passing through the side wall of the tower body 41 and connected to the output shaft of the drive motor. The drive gear 4213 is coaxially mounted on the end of the drive rod 4212 near the liquid delivery pipe 413, and the transmission gear 4214 is coaxially mounted on the liquid delivery pipe 413, with the drive gear 4213 meshing with the transmission gear 4214.

[0049] Reference Figure 4 and Figure 5 The spraying mechanism 422 includes a conduit 4221 and a spray head 4222. In this embodiment, three conduits 4221 are provided. All three conduits 4221 are installed on the side wall of the lower end of the liquid delivery pipe 413, and the three conduits 4221 are arranged at equal intervals around the circumference of the liquid delivery pipe 413. Several spray heads 4222 are provided. Two spray heads 4222 are corresponding to each conduit 4221. The two spray heads 4222 on each conduit 4221 are arranged along the length of the conduit 4221. The nozzles 4223 provided at the end of the spray head 4222 face the packing layer 43. The side wall of the spray head 4222 is provided with an inlet connector and an outlet connector respectively. The inlet connector and the outlet connector are located on the same straight line and are located on both sides of the axis of the spray head 4222. Among the two spray heads 4222 on the same conduit 4221, the inlet connector of the spray head 4222 closer to the liquid delivery pipe 413 is connected to the liquid delivery pipe 413, and the outlet connector of the spray head 4222 is connected to the inlet connector of the other spray head 4222. The outlet connector of the other spray head 4222 is closed.

[0050] Reference Figure 5 and Figure 6The spray mechanism 422 is also equipped with a blockage-clearing component 4225. The blockage-clearing component 4225 includes a blockage-clearing rod 42251, a blockage-clearing head 42252, and a blockage-clearing spring 42253. The upper end of the spray head 4222 is fixedly installed with an installation connector 4224. The upper end of the installation connector 4224 is open and communicates with the conduit 4221. The blockage-clearing head 42252 is slidably installed in the installation connector 4224 along the axial direction of the spray head 4222. One end of the blockage-clearing head 42252 extends out of the installation connector 4224 and into the conduit 4221. The blockage-clearing spring 42253 is installed in the installation connector 4224. One end of the blockage-clearing spring 42253 abuts against the inner wall of the open end of the installation connector 4224, and the other end abuts against the end of the blockage-clearing head 42252 located in the installation connector 4224. The unblocking rod 42251 is arranged along the axial direction of the spray head 4222, and one end of the unblocking rod 42251 is rotatably installed at the end of the unblocking head 42252 located in the mounting joint 4224. The other end of the unblocking rod 42251 passes through the mounting joint 4224 and extends to the nozzle 4223 of the spray head 4222. The end of the unblocking rod 42251 near the nozzle 4223 is conical and is used to remove the blockage at the nozzle 4223.

[0051] Reference Figure 7 and Figure 8 The mounting connector 4224 has a groove on its inner wall near the spray head 4222 for sliding and rotating the unblocking rod 42251. A deflection groove 42241, spiral in shape, is formed on the inner wall of the groove. A guide rod 42254 is fixedly installed on the side wall of the portion of the unblocking rod 42251 located within the groove. The guide rod 42254 extends into the deflection groove 42241 and slidably connects to it.

[0052] Reference Figure 4 and Figure 5 The spraying mechanism 422 also includes a driving component for moving the unblocking rod 42251. The driving component includes a push rod 4226, a push block 4227, a push spring 4228, and a top block 4229. The push rod 4226 is slidably installed inside the conduit 4221 along the length of the conduit 4221, and the push rod 4226 is located above the unblocking head 42252. One end of the push rod 4226 extends outward from the end of the conduit 4221. The push block 4227 is fixedly installed on the bottom wall of the push rod 4226, and the push block 4227 is used to press down the unblocking head 42252. The push spring 4228 is installed inside the conduit 4221 near one end of the liquid delivery pipe 413, and one end of the push spring 4228 abuts against the inner wall of the conduit 4221, and the other end abuts against the end of the push rod 4226. The top block 4229 is installed on the inner wall of the tower body 41, and the top block 4229 is used to push the push rod 4226.

[0053] Reference Figure 4 and Figure 5 The drive rod 4212 is driven to rotate by the rotary motor 4211. The drive rod 4212 drives the liquid delivery pipe 413 to rotate through the drive gear 4213 and the transmission gear 4214. This drives the conduit 4221 to rotate, which in turn drives the spray head 4222 on the conduit 4221 to rotate around the liquid delivery pipe 413. This allows water to be delivered to the spray head 4222 through the inlet pipe 412 and the delivery pipe 413, and then sprayed onto the filling layer by the spray head 4222. When the conduit 4221 drives the spray head 4222 to rotate to the top block 4229, the top block 4229 pushes the push rod 4226, causing the push rod 4226 to drive the push block 4227 to press down the unclogging head 42252 and compress the push spring 4228. This causes the unclogging head 42252 to compress the unclogging spring 42253 and drive the unclogging rod 42251 to move downwards, so that the unclogging rod 42251 moves towards the nozzle 4223. At the same time, the guide rod 42254 on the unclogging rod 42251 slides along the deflection groove 42241, thereby driving the unclogging rod 42251 to rotate. This allows the conical end of the unclogging rod 42251 to rotate and extend out of the nozzle 4223, thereby intermittently cleaning the nozzle 4223 and reducing the occurrence of clogging in the nozzle 4223.

[0054] When the nozzle 4223 is severely clogged, the force applied to the blockage by the unblocking rod 42251 moving along its axis is insufficient to clean the sticky blockage at the nozzle 4223. In this application, the unblocking rod 42251 is intermittently driven to rotate and extend out of the nozzle 4223. This allows the unblocking rod 42251 to apply a thrust along its axis to the blockage at the nozzle 4223, as well as a frictional force around its circumference. This dual force helps to clear the blockage more effectively.

[0055] Reference Figure 3 The water vapor collection mechanism 423 includes a demister ring 4231, which is fixedly installed on the liquid delivery pipe 413 and located above the conduit 4221. Several demister plates 4232 are fixedly installed inside the demister ring 4231. Each demister plate 4232 is bent, and a bent flow channel is formed between every two demister plates 4232 for airflow. When the airflow passes through the bent flow channel, water droplets in the airflow adhere to the demister plates 4232, thereby reducing the high water content in the gas discharged during decarbonization and preventing water waste.

[0056] Reference Figure 3Inside the decarbonization tower, above the spray mechanism 422, there is also a demisting mechanism 45. The demisting mechanism 45 includes a demister, which is fixedly installed on the inner wall of the tower body 41 and located above the spray mechanism 422. The demister further removes water droplets from the airflow. The demister is existing technology in the field and will not be described in detail here.

[0057] Reference Figure 2 The air inlet device 44 includes a blower 441, which is located on one side of the tower body 41 and the air outlet of the blower 441 is connected to the air inlet on the tower body 41. The blower 441 introduces external air into the tower body 41, thereby facilitating the decarbonization treatment of water entering the filling layer.

[0058] The working principle of this embodiment is as follows: Water filtered by a quartz filter is delivered to the tower body 41 through the inlet pipe 412, and then delivered to the spray head 4222 through the delivery pipe 413. The spray head 4222 sprays the water onto the packing layer. At the same time, the spraying mechanism 422 is driven to rotate by the rotating mechanism 421, causing the spray head 4222 to rotate around the delivery pipe 413, thereby ensuring that the water is sprayed evenly onto the packing layer. Simultaneously, external air is introduced into the tower through the air inlet device 44 to fully contact the water in the packing layer, thereby removing carbon dioxide from the water. The airflow then passes sequentially through the water vapor collection mechanism 423 and the demisting mechanism 45, adsorbing water droplets in the airflow, thus keeping the discharged gas dry.

[0059] Reference Figure 9 and Figure 10 In this embodiment, a primary dosing device 9 and a secondary dosing device 13 are also provided. The primary dosing device 9 and the secondary dosing device 13 have the same structure. Here, the primary dosing device 9 is used as an example for description. The primary dosing device 9 includes a dosing tank 91, a stirring mechanism 92, a conveying mechanism 94, a defoaming mechanism 93, and a stirring tank 95. The dosing tank 91 is set at the water inlet of the primary reverse osmosis device 10. The upper end of the dosing tank 91 is provided with a detachable top cover. The top cover is provided with a dosing port and a water inlet pipe. The stirring tank 95 is fixedly installed inside the dosing tank 91, and the stirring tank 95 and the dosing tank 91 are coaxial. The diameter of the stirring tank 95 is smaller than the diameter of the dosing tank 91. The lower end of the dosing tank 91 is provided with a conveying pipe 912 for conveying the liquid medicine in the tank. The conveying pipe 912 also passes through the dosing tank 91 and communicates with the stirring tank 95. A filter screen 911 is detachably installed at the upper end of the mixing tank 95. The filter screen 911 is located between the outer wall of the mixing tank 95 and the inner wall of the dosing tank 91. Reference Figure 9 and Figure 10The stirring mechanism 92 includes a stirring motor 921, a stirring rod 922, and stirring blades 923. The stirring motor 921 is vertically fixed on the top cover of the dosing tank 91. One end of the stirring rod 922 is coaxially mounted on the output shaft of the stirring motor 921, and the stirring rod 922 is vertically positioned. The lower end of the stirring rod 922 passes through the top cover of the dosing tank 91 and extends into the dosing tank 91. Several stirring blades 923 are provided, and all of the stirring blades 923 are fixedly mounted on the side wall of the stirring rod 922. The stirring motor 921 drives the stirring rod 922 to rotate, causing the stirring rod 922 to stir the liquid medicine in the dosing tank 91.

[0060] Reference Figure 10 and Figure 11 The defoaming mechanism 93 includes a defoaming cover 931, a scraper 932, a defoaming assembly 933, and a transmission assembly 934. The defoaming cover 931 is fixedly installed on the side wall of the stirring rod 922 and is located inside the dosing tank 91. The defoaming assembly 933 includes a defoaming drive wheel 9331, a defoaming transmission wheel 9332, and a defoaming timing belt 9333. The defoaming drive wheel 9331 is rotatably installed on the inner top wall of one end of the defoaming cover 931, and the defoaming transmission wheel 9332 is rotatably installed on the inner top wall of the other end of the defoaming cover 931. The rotation axes of the defoaming drive wheel 9331 and the defoaming transmission wheel 9332 are both in the vertical direction. The defoaming timing belt 9333 connects the defoaming drive wheel 9331 and the defoaming transmission wheel 9332. The scraper 932 is an L-shaped plate. The upper end of the vertical section of the scraper 932 is installed on the foam scraping timing belt 9333, and the horizontal section of the scraper 932 is located at the liquid surface of the medicine in the dosing tank 91.

[0061] Reference Figure 11 The transmission assembly 934 includes a drive gear ring 9341 and a skimmer gear 9342. The drive gear ring 9341 is fixedly installed on the inner wall of the dosing tank 91, and the skimmer gear 9342 is coaxially installed on the skimmer drive wheel 9331, and the drive gear ring 9341 meshes with the skimmer gear 9342.

[0062] Reference Figure 9 and Figure 10 The conveying mechanism 94 includes a conveying pump 941, which is fixedly installed on one side of the dosing tank 91. The inlet of the conveying pump 941 is connected to the conveying pipe 912 on the dosing tank 91, and the outlet of the conveying pump 941 is connected to the inlet of the first-stage reverse osmosis device 10.

[0063] The working principle of this embodiment is as follows: The stirring rod 922 is driven by a motor to rotate, and the stirring blade 923 stirs the medicine liquid in the dosing tank 91. At the same time, for the foam generated during the stirring process, the stirring rod 922 drives the removal cover 931 to rotate synchronously, so that the removal cover 931 drives the skimmer gear 9342 to move along the inner ring of the drive gear ring 9341, thereby driving the skimmer gear 9342 to rotate, so that the skimmer gear 9342 drives the skimmer drive wheel 9331 to rotate, so that the skimmer drive wheel 9331 drives the skimmer transmission wheel 9332 to rotate through the skimmer timing belt 9333, so that the skimmer timing belt 9333 drives the scraper 932 to push the foam on the liquid surface toward the filter screen 911 on the inner wall of the dosing tank 91, thereby removing the foam floating on the surface of the medicine liquid.

[0064] The stirred solution of the medicine, which meets the corresponding concentration, is delivered to the first-stage reverse osmosis unit 10 by the transfer pump 941.

[0065] The above are preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be included within the scope of protection of this application.

Claims

1. A method for optimizing an electronic-grade ultrapure water process, characterized in that: Includes the following steps, S1. Pretreatment: By pretreating the raw water, suspended solids, organic matter and oxidizing substances in the raw water are initially removed to obtain water with low carbonate and bicarbonate content. The specific steps are as follows: First, the raw water is filtered through a quartz sand filter (3). Then, the filtered water is acidified to adjust the pH value to 7. Next, the adjusted water is sprayed through a decarbonation tower and a water tank (4) to decarbonize the carbonate and bicarbonate ions in the water, converting them into carbon dioxide and blowing them out. The decarbonized water enters the water tank and is then filtered by an activated carbon filter (5) to reduce the scaling of calcium carbonate and magnesium carbonate in the water. The decarbonation tower includes a tower body (41) and a spray device (42). A useful device is installed on the side wall of the tower body (41) at the spray device (42). A liquid inlet pipe (412) connected to the spray device (42) is rotatably mounted on the side wall of one end of the liquid inlet pipe (412) located inside the tower body (41). The spray device (42) includes a rotating mechanism (421) and a spraying mechanism (422). The spraying mechanism (422) includes a conduit (4221), a spray head (4222), a blockage removal component (4225), and a driving component. The conduit (4221) is mounted on the side wall of the lower end of the liquid inlet pipe (413). The spray head (4222) is mounted on the conduit (4221). The blockage removal component (4225) is mounted on the spray head (4222), and the blockage removal component (4225) is used to intermittently clean the spray head (422). 2) The unblocking assembly (4225) includes an unblocking rod (42251), an unblocking head (42252), and an unblocking spring (42253). An installation connector (4224) is fixedly installed on the upper end of the spray head (4222). The upper end of the installation connector (4224) is open and communicates with the conduit (4221). The unblocking head (42252) is slidably installed in the installation connector (4224) along the axial direction of the spray head (4222), with one end of the unblocking head (42252) extending outward from the installation connector (4224) and into the conduit (4221). The unblocking spring (42253) is installed inside the installation connector (4224), and one end of the unblocking spring (42253) extends outward from the installation connector (4224) and into the conduit (4221). The cleaning rod (42251) abuts against the inner wall of the opening end of the mounting joint (4224), and the other end abuts against the end of the cleaning head (42252) located inside the mounting joint (4224). The cleaning rod (42251) is arranged along the axial direction of the spray head (4222), and one end of the cleaning rod (42251) is rotatably mounted on the end of the cleaning head (42252) located inside the mounting joint (4224). The other end of the cleaning rod (42251) passes through the mounting joint (4224) and extends to the nozzle (4223) of the spray head (4222). The end of the cleaning rod (42251) near the nozzle (4223) is conical. The spray mechanism (422) also includes a driving member for pushing the cleaning rod (42251) to move.The driving component includes a push rod (4226), a push block (4227), a push spring (4228), and a top block (4229). The push rod (4226) is slidably installed inside the conduit (4221) along the length of the conduit (4221), and the push rod (4226) is located above the unblocking head (42252). One end of the push rod (4226) extends out of the end of the conduit (4221). The push block (4227) is fixedly installed on the push rod (4226). On the bottom wall, a push block (4227) is used to press down the plugging head (42252), a push spring (4228) is installed inside the conduit (4221) near one end of the liquid delivery pipe (413), one end of the push spring (4228) abuts against the inner wall of the conduit (4221), and the other end abuts against the end of the push rod (4226). A top block (4229) is installed on the inner wall of the tower body (41), and the top block (4229) is used to push the push rod (4226); S2 and RO water treatment further treat pre-treated water through a reverse osmosis system to remove bacteria, viruses, colloids and organic matter from the water; S3. Special EDI treatment: The water after RO water treatment is treated by continuous electro-desalination technology to remove silica and boron ions from the water. The water after step S2 is sent to the first-stage TOC device (16) for further treatment to remove TOC to 20ppb. Then the water after removal is sent to the EDI module for further treatment to remove silica and boron ions, so that the removal rate of silica and boron is greater than 99%. S4. Fine treatment: The water that has undergone special EDI treatment is further treated to remove metal cations, anions, silicon ions and boron ions from the water, so that the final water effluent meets the water use requirements.

2. The method for optimizing an electronic-grade ultrapure water process according to claim 1, characterized in that: In step S1, the activated carbon filter (5) is filled with fruit shell activated carbon with an adsorption iodine value greater than 800 mg / g. The activated carbon filter (5) adsorbs organic matter and oxidizing substances in the water, thereby reducing downstream microbial contamination and reducing the amount of reducing agent added.

3. The method for optimizing an electronic-grade ultrapure water process according to claim 1, characterized in that: In step S2, a first-stage reverse osmosis process is included. The water treated in step S1 is sent to a security process device (8) for filtration. Then, scale inhibitors and reducing agents are added to the water, and the mixture is sent to a first-stage reverse osmosis device (10) for treatment. The water treated by the first-stage reverse osmosis device (10) is then sent to a subsequent process for further treatment.

4. The method for optimizing an electronic-grade ultrapure water process according to claim 3, characterized in that: Step S2 also includes secondary reverse osmosis, in which water treated by primary reverse osmosis is transported to secondary reverse osmosis unit (14), and alkali is added to the water transported to secondary reverse osmosis unit (14) to adjust the pH value. Then the mixed solution is transported to secondary reverse osmosis unit (14) for treatment, and then the treated water is transported to the next process for further treatment.

5. The method for optimizing an electronic-grade ultrapure water process according to claim 1, characterized in that: In step S4, the water treated by special EDI is sequentially transported to a mixed bed (19) and an anion bed (20) for further treatment. Then, the treated water is sequentially transported to a terminal plate heat exchanger (22), a secondary TOC device (23), a two-stage polishing mixed bed (24), a degassing membrane device (25), a terminal precision filter (26), and a terminal ultrafiltration device (27) for further treatment, so that the treated water meets the water use standards, and the treated water is then transported to the point of use.

6. The method for optimizing an electronic-grade ultrapure water process according to claim 5, characterized in that: In step S4, the water treated by the mixed bed (19), anion bed (20) and two-stage polishing mixed bed (24) contains metal ion cations ≤0.001μg / l, anions ≤0.01μg / l, dissolved oxygen ≤1μg / l, dissolved silicon SiO2 <0.5μg / l, and boron ≤0.01μg / l.

7. The method for optimizing an electronic-grade ultrapure water process according to claim 5, characterized in that: In step S4, the dissolved oxygen in the water after treatment by the degassing membrane, terminal filter and terminal ultrafiltration device (27) is ≤1μg / l, and the particle size of the produced water meets the requirement of >0.05μm particles ≤500 / L.

8. The method for optimizing an electronic-grade ultrapure water process according to claim 1, characterized in that: The decarbonization tower also includes a packing layer (43), an air inlet device (44), and a demisting mechanism (45). The demisting mechanism (45), the spraying mechanism (422), and the packing layer (43) are installed in the tower body (41) from top to bottom. An air outlet (411) is provided at the upper end of the tower body (41). An air inlet is provided on the side wall of the tower body (41) below the packing layer (43). The air outlet of the air inlet device (44) is connected to the air inlet. The spraying device (42) also includes a water vapor collection mechanism (423), which is installed on the spraying mechanism (422).

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