Oxide dust removal device for single crystal furnace

Abstract

The invention provides an oxide dust removal device for a single crystal furnace, and relates to the technical field of filtering dust removal. The device comprises a dust removal tank, an anode mechanism is arranged in the dust removal tank and grounded, a cathode mechanism is arranged in the dust removal tank and connected with a high-voltage power supply device, the anode mechanism comprises a plurality of tubular anode tubes, vibration modules are arranged on the anode tubes, the cathode mechanism comprises a plurality of cathode wires located in the anode tubes, and the cathode wires are connected with the anode tubes. The dust removal tank is communicated with an exhaust pipe and a single crystal furnace main evacuation pipeline which are located on the two sides of the anode pipe, a vacuum pump is arranged on the exhaust pipe, the interior of the dust removal tank is in an inert gas environment, and the pressure does not exceed 6 torr. A filter bag is not used, and oxide dust in gas is separated from gas flow through electrostatic force.

Description

Technical Field

[0001] This invention relates to the field of filtration and dust removal technology, specifically to a dust removal device for oxides in a single crystal furnace. Background Technology

[0002] In the monocrystalline silicon rod pulling industry, a certain pressure needs to be maintained inside the monocrystalline furnace according to the requirements of the monocrystalline silicon pulling process. The pressure is usually controlled by a vacuum pump. At the same time, a certain amount of oxides are generated during the pulling process. Currently, these oxides are mainly filtered and collected centrally using polytetrafluoroethylene bag filter tanks.

[0003] Existing oxide filter tanks are basically simple harmonic baghouse dust collectors, which achieve dust removal by periodically vibrating the filter bags to allow oxides to fall to the bottom of the tank. Testing has shown that the filter bags themselves generate a resistance of approximately 3 Torr inside the filter tank. Furthermore, as the furnace operates for longer periods, the oxide vibration effect deteriorates, the resistance increases, and the vacuum pump load also increases, which does not meet current energy-saving and consumption-reducing requirements. Long-term vibration and pulling of the filter bags will reduce their lifespan. In addition, there is a risk of oxides burning the filter bags, affecting the filtration efficiency. Summary of the Invention

[0004] The purpose of this invention is to develop a single-crystal furnace oxide dust removal device that avoids the use of filter bags and utilizes electrostatic force to separate oxide dust in the gas from the airflow.

[0005] This invention is achieved through the following technical solution:

[0006] A dust removal device for oxides in a single crystal furnace, comprising:

[0007] Dust collection tank;

[0008] The anode mechanism is located inside the dust collection tank and is grounded;

[0009] The cathode mechanism is located inside the dust collection tank and connected to the high-voltage power supply device;

[0010] The anode mechanism includes multiple tubular anode tubes, each equipped with a vibration module. The cathode mechanism includes multiple cathode wires located within the multiple anode tubes. The dust collection tank is connected to exhaust pipes located on both sides of the anode tubes and the main evacuation pipe of the single crystal furnace. A vacuum pump is installed on the exhaust pipes. The dust collection tank is in an inert gas environment with a pressure not exceeding 6 Torr.

[0011] Optionally, the cathode mechanism includes an upper cathode frame and a lower cathode frame disposed above and below the anode tube, the cathode wire is electrically connected between the upper cathode frame and the lower cathode frame, the top of the dust collector is provided with a connecting electrode electrically connected to the upper cathode frame, the cathode wire and the anode tube are in a coaxial state, and multiple cathode wires and the anode tube are arranged in a matrix evenly.

[0012] Optionally, the anode mechanism includes an upper tube group and a lower tube group. The upper tube group includes two parallel upper tube plates, and multiple upper anode tubes are disposed between the two upper tube plates. The lower tube group includes two parallel lower tube plates, and multiple lower anode tubes are disposed between the two lower tube plates. The number and positional relationship of the multiple upper anode tubes and the lower anode tubes correspond to the cathode line.

[0013] Optionally, the upper cathode frame is located above the upper tube plate at the top of the upper tube assembly, and insulators are connected between the lower cathode frame and the dust collector, as well as between the upper cathode frame and the upper tube plate at the top of the upper tube assembly.

[0014] Optionally, multiple guide components are provided between the upper tube assembly and the lower tube assembly. The multiple guide components are located between the upper tube plate at the bottom of the upper tube assembly and the lower tube plate at the top of the lower tube assembly, and the vibration module is located on the lower tube plate at the bottom of the lower tube assembly.

[0015] Optionally, the edge of the upper tube plate at the top of the upper tube assembly is provided with a leveling flange that connects to the inner wall of the dust collector.

[0016] Optionally, the anode tube is arranged vertically, and the exhaust pipe and the main evacuation pipe of the single crystal furnace are respectively connected to the top and bottom of the side wall of the dust collector, and the bottom of the dust collector is also provided with a dust removal port.

[0017] Optionally, the bottom of the dust collection tank is equipped with an automatic oxidation system that allows air to be introduced into the tank.

[0018] Optionally, the dust collection tank includes a top cover, an upper tank body, a middle tank body, a lower tank body, and a bottom tank body connected sequentially from top to bottom. The upper tank body, the middle tank body, the lower tank body, and the bottom tank body are each provided with multiple installation and cleaning ports on their side walls for installation and daily cleaning, which can be opened and closed. The top cover is also provided with an inspection port that can be opened and closed.

[0019] Optionally, the dust collector is equipped with a skid-mounted platform at the bottom, an electrical control cabinet is mounted on the skid-mounted platform, the vacuum pump is located on the side of the skid-mounted platform, and both the vacuum pump and the bottom of the skid-mounted platform are equipped with universal casters with brakes.

[0020] The beneficial effects of this invention are:

[0021] This invention changes the traditional method of oxide dust removal in single crystal furnaces. It uses electrostatic force to separate oxide dust from the gas flow, replacing the traditional filter bag filtration. This eliminates the problems of increasing vacuum resistance and vacuum pump load, and avoids the issues of filter bag damage caused by vibration and oxide burning, which affect the filtration effect. The airflow is filtered through multiple anode tubes, resulting in low vacuum pump pressure and reduced power consumption. The anode tubes are divided into upper and lower sections. The lower section can vibrate to shake off dust, while the upper section can still collect dust during this process, reducing or avoiding the impact of vibration on dust removal. The automatic oxidation system can burn the oxides at the bottom of the dust collector, preventing unburned oxides from flashing and exploding at high temperatures during cleaning. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a structural diagram of the present invention;

[0024] Figure 2 This is a diagram of the internal structure of the dust collector.

[0025] Figure 3 This is a 3D structural diagram of the dust collector.

[0026] Figure 4 This is a three-dimensional structural diagram of the inside of the dust collector.

[0027] Attached reference numerals: 1. Vacuum pump; 2. Dust collector; 3. Skid-mounted platform; 4. Electrical control cabinet; 5. Main evacuation pipe for single crystal furnace; 6. Exhaust pipe; 7. Top cover; 8. Upper tank; 9. Middle tank; 10. Automatic oxidation system; 11. Lower tank; 12. Ash removal port; 13. Bottom tank; 14. Installation and cleaning port; 15. Lower cathode frame; 16. Inspection port; 17. Connecting electrode; 18. Upper cathode frame; 19. Cathode wire; 20. Upper anode tube; 21. Lower anode tube; 22. Vibration module; 23. Guide assembly; 24. Insulator; 25. Leveling flange. Detailed Implementation

[0028] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0029] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0030] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0031] like Figures 1-4 As shown, the present invention discloses a dust removal device for oxides in a single crystal furnace, including a skid-mounted platform 3, on which a dust removal tank 2 and an electrical control cabinet 4 are provided.

[0032] The electrical control cabinet 4 is equipped with high-voltage constant current power supply, high-voltage connection line, PLC, touch screen and other control components, which are used to provide cathode high-voltage power supply and control the setting of working parameters of dust removal device, and also have Internet of Things control function and remote monitoring function.

[0033] The bottom of the dust collector 2 is equipped with a dust removal port 12. The bottom of the side wall of the dust collector 2 is connected to the main evacuation pipe 5 of the single crystal furnace. The top of the side wall of the dust collector 2 is connected to an exhaust pipe 6. The side of the skid-mounted platform 3 is equipped with a vacuum pump 1 connected to the exhaust pipe 6. Both the vacuum pump 1 and the bottom of the skid-mounted platform 3 are equipped with universal pulleys with brakes.

[0034] The dust collector 2 is equipped with an anode mechanism and a cathode mechanism. The anode mechanism includes multiple tubular anode tubes, and the cathode mechanism includes multiple cathode wires 19 located inside the multiple anode tubes. The anode tubes are grounded, and the cathode wires 19 are connected to a high-voltage power supply device to provide corona voltage for the electric field during operation.

[0035] Specifically, the anode mechanism includes an upper tube assembly and a lower tube assembly. The upper tube assembly includes two upper tube plates whose shapes are adapted to the inner wall of the dust collector 2. The two upper tube plates are parallel to each other and horizontally arranged. Between the two upper tube plates, there are multiple upper anode tubes 20 arranged in a matrix. The upper anode tubes 20 are arranged perpendicular to the upper tube plates, and both ends of the upper anode tubes 20 pass through the two upper tube plates respectively.

[0036] The lower tube assembly includes two lower tube plates whose shapes are adapted to the inner wall of the dust collector 2. The two lower tube plates are parallel to each other and horizontally arranged. Between the two lower tube plates, there are multiple lower anode tubes 21 arranged in a matrix. The lower anode tubes 21 are arranged perpendicular to the lower tube plates, and both ends of the lower anode tubes 21 pass through the two lower tube plates respectively.

[0037] The number and position of multiple upper anode tubes 20 and multiple lower anode tubes 21 correspond. The multiple upper anode tubes 20 and multiple lower anode tubes 21 are coaxial, and the length of the lower anode tubes 21 is longer than that of the upper anode tubes 20. Multiple guide components 23 are provided between the upper tube group and the lower tube group. The guide components 23 position the upper tube group and the lower tube group and allow them to move only along the axial direction of the upper anode tubes 20 and the lower anode tubes 21. The multiple guide components 23 are located between the upper tube plate at the bottom of the upper tube group and the lower tube plate at the top of the lower tube group. The multiple guide components 23 are arranged at equal intervals in the circumferential direction. The guide components 23 include a cylindrical part and a rod part that are coaxially slidably connected. The cylindrical part and the rod part are set perpendicular to the upper tube plate and the lower tube plate, and the cylindrical part and the rod part are respectively set on the upper tube plate or the lower tube plate.

[0038] The upper tube plate at the top of the upper tube assembly is provided with a leveling flange 25 that connects to the inner wall of the dust collector 2. Since the upper tube assembly and the lower tube assembly are connected as one unit through the guide assembly 23, the vertical state of the upper anode tube 20 and the lower anode tube 21 can be adjusted by adjusting the levelness of the leveling flange 25.

[0039] A vibration module 22 is provided on the lower tube plate at the bottom of the lower tube assembly. The vibration module 22 can cause the lower tube assembly to vibrate. The vibration module 22 can be a vibration motor.

[0040] The cathode mechanism includes a lower cathode frame 15 located at the bottom of the lower tube assembly and an upper cathode frame 18 located at the top of the upper tube assembly. Insulators 24 are respectively installed between the lower cathode frame 15 and the dust collector 2, and between the upper cathode frame 18 and the upper tube plate at the top of the upper tube assembly. Multiple cathode wires 19 are electrically connected between the upper cathode frame 18 and the lower cathode frame 15. The number and position of the multiple cathode wires 19 correspond to the multiple upper anode tubes 20 or lower anode tubes 21. The multiple cathode wires 19 coaxially pass through the multiple upper anode tubes 20 and lower anode tubes 21. A connecting electrode 17 electrically connected to the upper cathode frame 18 is provided at the top of the dust collector 2.

[0041] The dust collection tank 2 includes a top cover 7, an upper tank body 8, a middle tank body 9, a lower tank body 11, and a bottom tank body 13 connected sequentially from top to bottom. The side walls of the upper tank body 8, the middle tank body 9, the lower tank body 11, and the bottom tank body 13 are provided with multiple installation and cleaning ports 14 for installation and daily cleaning, which can be opened and closed. The connecting electrode 17 is located on the top of the top cover 7, and the top of the top cover 7 is also provided with an inspection port 16 that can be opened and closed.

[0042] The exhaust pipe 6 is connected to the upper tank 8, the main evacuation pipe 5 of the single crystal furnace is connected to the bottom tank 13, the ash removal port 12 is located on the side wall of the bottom tank 13, the lower tube plate at the bottom of the lower tube group is located at the top of the bottom tank 13, and an automatic oxidation system 10 is also provided on the side wall of the bottom tank 13. The bottom tank 13 mainly bears the function of collecting and cleaning oxides. The automatic oxidation system 10 allows air to enter the interior of the oxides accumulated at the bottom of the bottom tank 13, causing the oxides to burn and reducing the risk of flash explosion when cleaning oxide ash in a high-temperature environment.

[0043] When the single crystal furnace is running, the vacuum pump 1 starts working simultaneously, drawing airflow from the single crystal furnace until the pressure inside the furnace is kept constant at the process requirement value. At this time, the oxides inside the furnace enter the dust removal device along with the argon protective gas flow. The airflow enters the dust removal tank 2 through the main evacuation pipe 5 of the single crystal furnace. The dust removal tank 2 is in a high vacuum (not exceeding 6 Torr pressure) and low inert gas (argon) density environment. The airflow in the dust removal tank 2 flows from bottom to top through the lower anode tube 21 and the upper anode tube 20 until it is discharged from the dust removal tank 2 through the exhaust pipe 6. The cathode is connected to a high voltage direct current to maintain an electrostatic field sufficient to corona discharge the gas. When the dust-laden gas passes through the electric field, the electrons generated by the corona discharge charge the dust particles. The charged particles move towards the anode under the action of the electric field and are deposited on the anode tube. The electrostatic force is used to separate the oxide dust in the gas from the airflow, thereby achieving the purpose of dust gas separation. The dust mainly adheres to the inner wall of the lower anode tube 21, and the upper anode tube 20 can be used to capture the dust that escapes from the lower anode tube 21.

[0044] When the dust in the lower anode tube 21 reaches a certain thickness, because the lower tube assembly is floating, the vibration module 22 vibrates, causing the lower tube assembly to vibrate. This causes the oxides in the lower anode tube 21 to fall into the bottom tank 13. During the vibration of the lower tube assembly, the adsorption of the upper anode tube 20 will not be affected. The vibration frequency of the lower tube assembly and the voltage regulation of the high-voltage DC power supply can all be adjusted through the control system and dedicated high-voltage power supply configured on the electrical control cabinet 4.

[0045] After the single crystal furnace stops production, the vacuum pump 1 sends a stop signal, and the oxidation process of the dust removal device starts to run. Oxidation is carried out according to the predetermined oxidation process time. The automatic oxidation system 10 burns the dust in the bottom tank 13, reducing the risk of flash explosion when cleaning oxide ash in a high-temperature environment.

[0046] The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the technical solutions of the present invention. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of the patent of the present invention.

Claims

1. A dust removal device for oxides in a single crystal furnace, characterized in that, include: Dust collection tank; The anode mechanism is located inside the dust collection tank and is grounded; The cathode mechanism is located inside the dust collection tank and connected to the high-voltage power supply device; The anode mechanism includes multiple tubular anode tubes, each equipped with a vibration module. The cathode mechanism includes multiple cathode wires located within the multiple anode tubes. The dust collection tank is connected to exhaust pipes located on both sides of the anode tubes and the main evacuation pipe of the single crystal furnace. A vacuum pump is installed on the exhaust pipes. The dust collection tank is in an inert gas environment with a pressure not exceeding 6 Torr.

2. The oxide dust removal device for a single crystal furnace according to claim 1, characterized in that, The cathode mechanism includes an upper cathode frame and a lower cathode frame located above and below the anode tube, respectively. The cathode wire is electrically connected between the upper cathode frame and the lower cathode frame. The top of the dust collector is provided with a connecting electrode electrically connected to the upper cathode frame. The cathode wire and the anode tube are coaxial, and multiple cathode wires and the anode tube are arranged in a matrix evenly.

3. The oxide dust removal device for a single crystal furnace according to claim 2, characterized in that, The anode mechanism includes an upper tube group and a lower tube group. The upper tube group includes two parallel upper tube plates, and multiple upper anode tubes are arranged between the two upper tube plates. The lower tube group includes two parallel lower tube plates, and multiple lower anode tubes are arranged between the two lower tube plates. The number and positional relationship of the multiple upper anode tubes and the lower anode tubes correspond to the cathode line.

4. The oxide dust removal device for a single crystal furnace according to claim 3, characterized in that, The upper cathode frame is located above the upper tube plate at the top of the upper tube assembly, and insulators are connected between the lower cathode frame and the dust collector, as well as between the upper cathode frame and the upper tube plate at the top of the upper tube assembly.

5. The oxide dust removal device for a single crystal furnace according to claim 3, characterized in that, Multiple guide components are provided between the upper tube group and the lower tube group. The multiple guide components are located between the upper tube plate at the bottom of the upper tube group and the lower tube plate at the top of the lower tube group. The vibration module is located on the lower tube plate at the bottom of the lower tube group.

6. The oxide dust removal device for a single crystal furnace according to claim 5, characterized in that, The upper tube plate at the top of the upper tube assembly is provided with a leveling flange that connects to the inner wall of the dust collector.

7. The oxide dust removal device for a single crystal furnace according to claim 1, characterized in that, The anode tube is arranged vertically, and the exhaust pipe and the main evacuation pipe of the single crystal furnace are respectively connected to the top and bottom of the side wall of the dust collector. The bottom of the dust collector is also provided with a dust removal port.

8. The oxide dust removal device for a single crystal furnace according to claim 7, characterized in that, The bottom of the dust collection tank is equipped with an automatic oxidation system that introduces air into the tank.

9. The oxide dust removal device for a single crystal furnace according to claim 1, characterized in that, The dust collection tank includes a top cover, an upper tank, a middle tank, a lower tank, and a bottom tank connected sequentially from top to bottom. The side walls of the upper tank, the middle tank, the lower tank, and the bottom tank are provided with multiple installation and cleaning ports that can be opened and closed for installation and daily cleaning. The top cover is also provided with an inspection port that can be opened and closed.

10. The oxide dust removal device for a single crystal furnace according to claim 1, characterized in that, The dust collector is equipped with a skid-mounted platform at the bottom, and an electrical control cabinet is installed on the skid-mounted platform. The vacuum pump is located on the side of the skid-mounted platform, and both the vacuum pump and the bottom of the skid-mounted platform are equipped with universal casters with brakes.

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