Wafer batch clamping and transferring equipment

Abstract

The invention provides wafer batch clamping and transferring equipment which comprises a driving mechanism and a clamping mechanism, the driving mechanism comprises a lifting mechanism and a rotating mechanism, and the clamping mechanism comprises a first clamping component and a second clamping component. The rotating mechanism drives one end of the first clamping component and one end of the second clamping component to get close to each other so as to clamp a plurality of wafers supported by the wafer basket in batches; the lifting mechanism drives the rotating mechanism to move back and forth in the height direction so that the first clamping component and the second clamping component can be lifted, and the rotating mechanism drives the first clamping component and the second clamping component to turn over to the other end so that protruding parts on the two sides of the wafer basket can be clamped through the first clamping component and the second clamping component. According to the invention, clamping and transferring of the wafer basket and independent batch clamping and transferring of the wafers can be realized respectively, the transfer efficiency is high under the scene that only batch clamping and transferring of the wafers are needed, and the structure is simple.

Images