一种新型的高洁净缓存升降机

By designing a high-cleanliness buffer lift, combined with FFU and exhaust hood, a large-board flow buffer is realized in a dust-free environment, solving the problem of lift congestion in semiconductor production and improving production efficiency.

CN120964677BActive Publication Date: 2026-07-17HUATIAN TECH (JIANGSU) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUATIAN TECH (JIANGSU) CO LTD
Filing Date
2025-09-28
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In semiconductor board-level packaging production, automated conveyor lines cannot achieve dust-free transport. The elevators between overhead and ground lines are prone to congestion when the load of the process equipment changes, affecting the efficiency of large board transport.

Method used

Design a high-cleanliness buffer lift that integrates the lift with the buffer rack into a whole. The top of the shell is equipped with an FFU and the side wall exhaust hoods to realize the large plate circulation buffer in a dust-free environment. The buffer and transmission path are intelligently scheduled through the control system.

Benefits of technology

The implementation of large-panel flow buffering in a cleanroom environment solves the congestion problem when the load of the process equipment changes, significantly reduces waiting time for materials, and improves production efficiency.

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Abstract

本申请属于半导体行业生产设备制造技术领域,具体为一种新型的高洁净缓存升降机,包括控制系统、支架、外壳、缓存架,缓存架设于支架的侧壁上,支架和缓存架组成的整体通过外壳密闭包裹,外壳的侧壁上在背向缓存架的一侧设有进出料口,支架上通过驱动装置设有升降台,升降台上设有移动台和与移动台配合的顶升装置,移动台上设有抓取器,移动台的移动方向平行于支架与缓存架之间的连接线段,升降台上在移动台的移动方向的两侧均设有传送带,传送带的传送方向平行于移动台的移动方向,外壳上在支架的正上方设有FFU,外壳的侧壁上在对应缓存架处设置抽风罩,控制系统信号连接升降台、移动台、驱动传送带的驱动装置。
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