An arc striking device for an ion multi-arc target

Abstract

The application relates to the field of vacuum coating equipment, in particular to an arc striking device of an ion multi-arc target, which comprises two mounting seats, a guide seat, a limiting rod piece, an adapter and an arc striking needle; the two mounting seats are respectively arranged at the two ends of a mounting hole arranged on the ion multi-arc target; the guide seat is arranged in the mounting hole and abuts against the two mounting seats at the two ends; the limiting rod piece penetrates the mounting seat and the guide seat in sequence and can move along the central axis direction of the mounting hole; one end of the adapter is arranged on the limiting rod piece, and the other end movably abuts against the guide seat; when the limiting rod piece moves along the central axis direction of the mounting hole, the limiting rod piece can be driven to rotate; the arc striking needle is connected to the end of the limiting rod piece, and the end of the arc striking needle is used for abutting against the target material or rotating to deviate from the surface of the target material. The film layer of the arc target during work can reduce the pollution of the arc striking needle, thereby increasing the working stability and safety of the arc target.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment, and in particular to an arc-initiating device for an ion multi-arc target. Background Technology

[0002] In current vacuum coating equipment, multi-arc ion targets are commonly used as evaporation sources for coating. Multi-arc ion targets mainly apply a high-current negative voltage to the surface of the target material, using the metal evaporation source (target material) as the cathode. An arc discharge is generated by striking the target surface with an arc-starting target. The arc discharge between the target and the anode shell causes the target material to evaporate and ionize, forming a spatial plasma, which is then used to deposit a coating on the workpiece.

[0003] In existing ion multi-arc targets, during coating operations, the arc-igniting needle is always directly above the target material. Therefore, the film layer inevitably contaminates the arc-igniting needle, especially when coating oxide or nitride films. These compounds are insulating, and when they adhere to the arc-igniting needle, their conductivity is significantly reduced, preventing continued arc ignition. Furthermore, when the arc-igniting needle strikes the target material, its insulation prevents conductivity, thus hindering arc discharge. This causes the ion multi-arc target to malfunction, impacting coating equipment production. It necessitates venting the vacuum chamber and opening the door to polish and clean the arc-igniting needle, significantly reducing production efficiency, lowering yield, and wasting production time.

[0004] For example, Chinese patent document "CN220317936U" discloses a pneumatic arc-ignition device for multi-arc cathodes. Addressing the issue of easy contamination of the arc-ignition needle surface, it employs a rotatable arc-ignition needle. During normal use, the arc-ignition needle is positioned directly above the target material. After use, the needle can be deflected away from the target material, thus preventing contamination. While this arc-ignition device can deflect the arc-ignition needle, the rotary cylinder it uses is typically large. Furthermore, as it is a complete device, its application on multi-arc ion targets is inconvenient. Additionally, because the rotation angle of the rotary cylinder is fixed, if the connection part of the arc-ignition needle becomes loose or other issues affect positioning, the deflection of the arc-ignition needle will malfunction, impacting its performance. Summary of the Invention

[0005] Based on this, it is necessary to provide an arc-starting device for an ion multi-arc target to address the aforementioned technical problems. When the ion multi-arc target is working, the target material generates a large number of film particles that move forward. At this time, the arc-starting needle is located to the side and below the target material, making it less likely for the film particles generated by the target material to adhere to the arc-starting needle. This reduces the contamination of the arc-starting needle by the film layer during the operation of the arc target, thereby increasing the working stability and safety of the arc target. Since the guide seat is constrained by two mounting seats, the relative angle between the mounting seats and the guide seat can be adjusted. Therefore, by adjusting the two, the position of the arc-starting needle can always be kept accurate.

[0006] This invention provides an arc-initiating device for an ion multi-arc target, comprising:

[0007] Two mounting bases are respectively installed at both ends of the mounting holes opened on the ion multi-arc target;

[0008] The guide seat is located inside the mounting hole, and its two ends abut against the two mounting seats respectively;

[0009] A limiting rod passes through the mounting base and the guide base in sequence, and the limiting rod can move along the central axis of the mounting hole;

[0010] The adapter has one end mounted on the limiting rod and the other end movably abutting against the guide seat. When the limiting rod moves along the central axis of the mounting hole, it can drive the limiting rod to rotate.

[0011] An arc-initiating needle is connected to the end of the limiting rod, and the end of the arc-initiating needle is used to abut against the target material or rotate away from the surface of the target material.

[0012] In one embodiment, a first inclined surface is provided at the junction of the inner wall of the mounting hole and the end, and a plurality of first limiting blocks are provided on the first inclined surface. The plurality of first limiting blocks are arranged in a circular array, and one side of the first limiting block is an inclined surface and the other side is a vertical surface.

[0013] In one embodiment, the mounting base includes an inner sleeve, an external threaded tube, a triangular collar, and a bearing; the inner sleeve is fitted into the inner ring of the bearing, the external threaded tube is sleeved on the outer ring of the bearing, the inner ring of the triangular collar is annular and fits against the upper half of the outer ring of the external threaded tube, the inclined outer ring portion of the triangular collar faces the first inclined surface, one end of the external threaded tube is used to be installed in the mounting hole, and the other end of the external threaded tube is movably connected to the triangular collar along the central axis.

[0014] In one embodiment, the inclined outer ring portion of the triangular collar is provided with a plurality of second limiting blocks, which are arranged in a circular array and are arranged in the opposite direction to the first limiting block.

[0015] In one embodiment, the outer surface of the externally threaded pipe is provided with a first mounting groove, and the inner ring of the triangular collar is provided with a second mounting groove. The first mounting groove and the second mounting groove are located on the same plane, and the opposite sides of the first mounting groove and the second mounting groove are both set as open. A limit ring is provided between the first mounting groove and the second mounting groove, and the limit ring is elastic.

[0016] In one embodiment, the guide seat includes a fixed disc, a spiral plate, and a connecting plate; the two fixed discs abut against one end of the two externally threaded tubes respectively, the spiral plate is disposed between the two fixed discs, and the two ends of the spiral plate are respectively connected to the two fixed discs through the two connecting plates.

[0017] In one embodiment, the limiting rod includes an outer insert rod and an inner insert rod; the outer insert rod passes through the two inner parts along the central axis, the axial section of the outer insert rod is set to a non-circular structure, the two inner insert rods are respectively located at both ends of the outer insert rod, and the central axes of the three coincide.

[0018] In one embodiment, a limiting opening is formed on the surface of the outer insertion rod, and the adapter includes a folding plate and a fastener; the folding plate passes through the limiting opening, and both ends of the folding plate are bent in the same direction. A first cut and a second cut are respectively formed on the surface of both ends of the folding plate. The first cut and the second cut are in opposite positions on the folding plate. The fastener is installed on the outer insertion rod, and one end of the fastener abuts against the folding plate.

[0019] In one embodiment, the surfaces of the first cut and the second cut are provided with mounting openings, a rotating shaft is installed in the mounting opening, a rotating wheel is sleeved on the rotating shaft, and the rotating wheel abuts against the surface of the spiral plate.

[0020] In one embodiment, the arc-initiating needle includes a bent portion, an abutting portion, and a limiting sleeve; one end of the bent portion is connected to the inner insertion rod, and the other end is connected to the abutting portion; the abutting portion is bent toward the target material at the end away from the bent portion; the limiting sleeve is elastic and is fitted at the connection between the two ends of the bent portion.

[0021] In the above-mentioned arc-ignition device for the multi-arc ion target, two mounting seats are first rotatably installed at both ends of the mounting hole. At this time, the guide seat is restricted between the two mounting seats, and the limiting rod is located inside the mounting hole. One end of the adapter is fixed to the limiting rod, and the other end is snapped onto the guide seat. When an arc-ignition operation is required, the external drive unit drives the limiting rod to move along the central axis of the mounting hole. At this time, the limiting rod moves along the central axis, and during the movement, it is affected by the snapping cooperation between the adapter and the guide seat. The limiting rod will also rotate during the movement along the central axis, so that the arc-ignition needle can strike the target surface when igniting the arc, and can rotate away from the target surface after ignition. This device uses a swing-type arc-ignition mechanism. When the arc-ignition needle strikes the target, it is directly above the target. After ignition, it is positioned to the side and below the target. Therefore, when the ion multi-arc target is working, the target generates a large number of film particles that move forward. At this time, the arc-ignition needle is positioned to the side and below the target, making it less likely for the film particles generated by the target to adhere to the needle. This reduces the contamination of the arc-ignition needle by the film layer during the operation of the arc target, thereby increasing the working stability and safety of the arc target. It also improves the stability of the coating equipment, reduces the frequency of maintenance, and increases the equipment's capacity and yield. Since the guide seat is constrained by two mounting seats, the relative angle between the mounting seats and the guide seat is adjustable. Therefore, by adjusting the two, the position of the arc-ignition needle can always be kept accurate. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the overall structure of the ion multi-arc target provided by the present invention;

[0024] Figure 2 This is a cross-sectional structural schematic diagram of the arc-initiating device provided by the present invention;

[0025] Figure 3 A schematic diagram showing the position of the arc-initiating needle in different states provided by the present invention;

[0026] Figure 4 This is a schematic diagram of the mounting hole provided by the present invention;

[0027] Figure 5 This is a structural schematic diagram of the guide seat and limiting rod provided by the present invention;

[0028] Figure 6A partial structural schematic diagram of the externally threaded pipe and triangular collar provided by the present invention;

[0029] Figure 7 A schematic diagram of the limiting rod and arc-inducing pin provided by the present invention;

[0030] Figure 8 This is a schematic diagram of the adapter provided by the present invention.

[0031] Figure label:

[0032] 10. Ion multi-arc target; 11. Mounting hole; 12. First inclined surface; 13. First limiting block; 20. Target material; 100. Mounting base; 110. Inner fitting; 120. External threaded tube; 121. First mounting groove; 130. Triangular collar; 131. Second limiting block; 132. Second mounting groove; 140. Bearing; 150. Limiting ring; 200. Guide seat; 210. Fixed plate; 220. Spiral 230. Plate; 300. Connecting plate; 310. Limiting rod; 311. Limiting port; 320. Inner rod; 400. Adapter; 410. Folding plate; 411. First cut; 412. Second cut; 413. Mounting port; 420. Fastener; 430. Rotating shaft; 440. Rotating wheel; 500. Arc-starting pin; 510. Bending part; 520. Abutment part; 530. Limiting sleeve. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] The following is combined Figures 1 to 8 This invention describes an arc-initiating device for an ion multi-arc target 10.

[0035] like Figures 1 to 3As shown, in one embodiment, an arc-initiating device for an ion multi-arc target 10 includes two mounting seats 100, a guide seat 200, a limiting rod 300, an adapter 400, and an arc-initiating needle 500. The two mounting seats 100 are respectively installed at both ends of a mounting hole 11 opened on the ion multi-arc target 10. The guide seat 200 is located inside the mounting hole 11, and its two ends abut against the two mounting seats 100 respectively. The limiting rod 300 passes through the mounting seat 100 and the guide seat in sequence. 200, the limiting rod 300 can move along the central axis of the mounting hole 11; one end of the adapter 400 is installed on the limiting rod 300, and the other end is movably abutted against the guide seat 200. When the limiting rod 300 moves along the central axis of the mounting hole 11, it can drive the limiting rod 300 to rotate; the arc-initiating needle 500 is connected to the end of the limiting rod 300, and the end of the arc-initiating needle 500 is used to abut against the target material 20, or rotate away from the surface of the target material 20.

[0036] In the above-mentioned arc-initiating device for the multi-arc ion target 10, the two mounting seats 100 are first rotatably installed at both ends of the mounting hole 11. At this time, the guide seat 200 is restricted between the two mounting seats 100, and the limiting rod 300 is located inside the mounting hole 11. One end of the adapter 400 is fixed on the limiting rod 300, and the other end is snapped onto the guide seat 200. When an arc-initiating operation is required, the external driving component drives the limiting rod 300 to move along the central axis of the mounting hole 11. At this time, the limiting rod 300 moves along the central axis, and during the movement, it is affected by the snapping engagement between the adapter 400 and the guide seat 200. The limiting rod 300 will also rotate during the movement along the central axis, so that the arc-initiating needle 500 can strike the surface of the target material 20 when initiating the arc, and can rotate away from the surface of the target material 20 after initiating the arc. The device uses a swing-type arc-initiating mechanism. When the arc-initiating needle 500 strikes the target material 20, the arc-initiating needle 500 is directly above the target material 20. After arc initiation, the arc-initiating needle 500 is located to the side and below the target material 20. Therefore, when the ion multi-arc target 10 is working, the target material 20 will generate a large number of film particles that move forward. At this time, the arc-initiating needle 500 is located to the side and below the target material 20, so the film particles generated by the target material 20 are less likely to adhere to the arc-initiating needle 500. This reduces the contamination of the arc-initiating needle 500 by the film layer when the arc target is working, thereby increasing the working stability and safety of the arc target. At the same time, it also improves the stability of the coating equipment, reduces the frequency of maintenance, and increases the production capacity and yield of the equipment. Since the guide seat 200 is confined within two mounting seats 100, the relative angle between the mounting seats 100 and the guide seat 200 is adjustable. Therefore, by adjusting the two, the position of the arc-initiating needle 500 can always be kept accurate.

[0037] like Figure 4As shown, in one embodiment, a first inclined surface 12 is provided at the junction of the inner wall of the mounting hole 11 and the end, and a plurality of first limiting blocks 13 are provided on the first inclined surface 12. The plurality of first limiting blocks 13 are arranged in a circular array, and one side of the first limiting block 13 is an inclined surface and the other side is a vertical surface.

[0038] Specifically, the first limiting block 13 is arranged in a ring structure and has three surfaces: one surface is in contact with the first inclined surface 12, one surface is perpendicular to the first inclined surface 12 (i.e., the vertical surface mentioned above), and the other surface is inclined to the first inclined surface 12 (i.e., the inclined surface mentioned above). This structural combination allows the structure installed at the mounting hole 11 to engage with the first limiting block 13 after rotation, preventing loosening due to various problems later.

[0039] like Figure 5 As shown, in one embodiment, the mounting base 100 includes an inner sleeve 110, an external threaded tube 120, a triangular collar 130, and a bearing 140. The inner sleeve 110 is fitted into the inner ring of the bearing 140, the external threaded tube 120 is sleeved on the outer ring of the bearing 140, the inner ring of the triangular collar 130 is an annular surface and fits against the upper half of the outer ring of the external threaded tube 120, the inclined outer ring portion of the triangular collar 130 faces the first inclined surface 12, one end of the external threaded tube 120 is used to install in the mounting hole 11, and the other end of the external threaded tube 120 is movably connected to the triangular collar 130 along the central axis direction.

[0040] Specifically, the inner fitting 110 is used to insert the limiting rod 300. The inner fitting 110 and the external threaded tube 120 are rotatably connected by the bearing 140. The external threaded tube 120 is threaded into the mounting hole 11. The triangular collar 130 set on the outer ring of the external threaded tube 120 is used to abut against the first inclined surface 12, so that the two are engaged with each other to form a limit and prevent the external threaded tube 120 from reversing.

[0041] In one embodiment, the inclined outer ring portion of the triangular collar 130 is provided with a plurality of second limiting blocks 131, which are arranged in a circular array and are arranged in the opposite direction to the first limiting block 13.

[0042] Specifically, the triangular collar 130 also has three surfaces: one surface fits against the external threaded pipe 120, one surface is parallel to the end face of the mounting port 413, and the last surface faces the first inclined surface 12. Multiple second limiting blocks 131 arranged in a ring array are provided on this surface.

[0043] It should be noted that the structure of the second limiting block 131 is the same as that of the first limiting block 13. The difference between the two is that the inclined surface of the second limiting block 131 faces the opposite direction to the inclined surface of the first limiting block 13, which is used to achieve mutual engagement between the two.

[0044] like Figure 6As shown, in one embodiment, the outer surface of the externally threaded pipe 120 is provided with a first mounting groove 121, and the inner ring of the triangular collar 130 is provided with a second mounting groove 132. The first mounting groove 121 and the second mounting groove 132 are located on the same plane, and the opposite sides of the first mounting groove 121 and the second mounting groove 132 are both set as open. A limiting ring 150 is provided between the first mounting groove 121 and the second mounting groove 132, and the limiting ring 150 is elastic.

[0045] Specifically, since the limiting ring 150 is elastic and the openings of the first mounting groove 121 and the second mounting groove 132 are both open, the triangular collar 130 can be pulled to cause relative movement between the triangular collar 130 and the external threaded tube 120. After the external threaded tube 120 is rotated to a certain depth, the triangular collar 130 can be pulled back. At this time, the second limiting block 131 can be tightly attached to the first limiting block 13, thus completing the engagement.

[0046] In one embodiment, the guide seat 200 includes a fixed plate 210, a spiral plate 220, and a connecting plate 230; the two fixed plates 210 respectively abut against one end of the two external threaded tubes 120, the spiral plate 220 is disposed between the two fixed plates 210, and the two ends of the spiral plate 220 are respectively connected to the two fixed plates 210 through the two connecting plates 230.

[0047] Specifically, the surface of the fixed plate 210 can be provided with limiting teeth, and the end of the external threaded tube 120 can be provided with a limiting groove corresponding to the limiting groove, and the two are engaged with each other to form a fixed structure.

[0048] like Figure 7 As shown, in one embodiment, the limiting rod 300 includes an outer insert rod 310 and an inner insert rod 320; the outer insert rod 310 passes through the two inner sleeves 110 along the central axis direction, and the axial section of the outer insert rod 310 is set as a non-circular structure; the two inner insert rods 320 are located at the two ends of the outer insert rod 310 respectively, and the central axes of the three coincide.

[0049] Specifically, the outer insertion rod 310 has a limiting opening 311 on its surface, and the adapter 400 includes a folding plate 410 and a fastener 420. The folding plate 410 passes through the limiting opening 311, and both ends of the folding plate 410 are bent in the same direction. The surfaces of both ends of the folding plate 410 are respectively provided with a first cut 411 and a second cut 412. The first cut 411 and the second cut 412 are in opposite positions on the folding plate 410. The fastener 420 is installed on the outer insertion rod 310, and one end of the fastener 420 abuts against the folding plate 410.

[0050] like Figure 8As shown, in one embodiment, the surfaces of the first cut 411 and the second cut 412 are provided with mounting openings 413, a rotating shaft 430 is installed in the mounting opening 413, a rotating wheel 440 is sleeved on the rotating shaft 430, and the rotating wheel 440 abuts against the surface of the spiral plate 220.

[0051] Specifically, the arc-initiating needle 500 includes a bending portion 510, an abutment portion 520, and a limiting sleeve 530; one end of the bending portion 510 is connected to the inner insertion rod 320, and the other end is connected to the abutment portion 520. The end of the abutment portion 520 away from the bending portion 510 is bent toward the target material 20. The limiting sleeve 530 is elastic and is fitted at the connection between the two ends of the bending portion 510.

[0052] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. An arc-initiating device for an ion multi-arc target, characterized in that, include: Two mounting bases are respectively installed at both ends of a mounting hole opened on an ion multi-arc target; a first inclined surface is provided at the junction of the inner wall of the mounting hole and the end of the mounting hole; the mounting base includes an inner sleeve, an external threaded tube, a triangular collar, and a bearing; the inner sleeve is embedded in the inner ring of the bearing, the external threaded tube is sleeved on the outer ring of the bearing, the inner ring of the triangular collar is annular and fits against the upper half of the outer ring of the external threaded tube, the inclined outer ring portion of the triangular collar faces the first inclined surface, one end of the external threaded tube is used to be installed in the mounting hole, and the other end of the external threaded tube is movably connected to the triangular collar along the central axis direction; A guide seat is located inside the mounting hole, and its two ends abut against the two mounting seats respectively; the guide seat includes a fixed plate, a spiral plate and a connecting plate; the two fixed plates abut against one end of the two external threaded tubes respectively, the spiral plate is disposed between the two fixed plates, and the two ends of the spiral plate are respectively connected to the two fixed plates through the two connecting plates; A limiting rod passes through the mounting base and the guide base in sequence, and the limiting rod can move along the central axis of the mounting hole; the limiting rod includes an outer insert rod and an inner insert rod; the outer insert rod passes through the two inner parts along the central axis, and the axial section of the outer insert rod is set to a non-circular structure; the two inner insert rods are respectively located at both ends of the outer insert rod, and the central axes of the three coincide. The adapter has one end mounted on the limiting rod and the other end movably abutting against the guide seat. When the limiting rod moves along the central axis of the mounting hole, it can drive the limiting rod to rotate. The outer insert rod has a limiting opening on its surface. The adapter includes a folding plate and a fastener. The folding plate passes through the limiting opening, and both ends of the folding plate are bent in the same direction. The surfaces of both ends of the folding plate have a first cut and a second cut, respectively. The first cut and the second cut are in opposite positions on the folding plate. The fastener is installed on the outer insert rod, and one end of the fastener abuts against the folding plate. The surfaces of the first cut and the second cut have mounting openings. A rotating shaft is installed in the mounting opening, and a rotating wheel is sleeved on the rotating shaft. The rotating wheel abuts against the surface of the spiral plate. An arc-initiating needle is connected to the end of the limiting rod, and the end of the arc-initiating needle is used to abut against the target material or rotate away from the surface of the target material.

2. The arc-initiating device for the ion multi-arc target according to claim 1, characterized in that, A first inclined surface is provided at the junction of the inner wall of the mounting hole and the end of the mounting hole. Multiple first limiting blocks are provided on the first inclined surface. The multiple first limiting blocks are arranged in a circular array, and one side of the first limiting block is an inclined surface and the other side is a vertical surface.

3. The arc-initiating device for the ion multi-arc target according to claim 2, characterized in that, The inclined outer ring of the triangular collar is provided with a plurality of second limiting blocks, which are arranged in a circular array and are arranged in the opposite direction to the first limiting block.

4. The arc-initiating device for the ion multi-arc target according to claim 1, characterized in that, The outer surface of the externally threaded pipe is provided with a first mounting groove, and the inner ring of the triangular collar is provided with a second mounting groove. The first mounting groove and the second mounting groove are located on the same plane, and the opposite sides of the first mounting groove and the second mounting groove are both set as open. A limit ring is provided between the first mounting groove and the second mounting groove, and the limit ring is elastic.

5. The arc-initiating device for the ion multi-arc target according to claim 1, characterized in that, The arc-initiating needle includes a curved portion, an abutting portion, and a limiting sleeve; one end of the curved portion is connected to the inner insertion rod, and the other end is connected to the abutting portion. The abutting portion is curved toward the target material at the end away from the curved portion. The limiting sleeve is elastic and is fitted at the connection between the two ends of the curved portion.

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