光芯片模场可视化成像方法及系统

By screening the optical chip mode field using spectral, temporal, angular, and polarization state characteristics, and employing wide-field or confocal imaging methods, the problems of accuracy and applicability in optical chip mode field measurement were solved, achieving high-precision two-dimensional and three-dimensional mode field imaging.

CN120970978BActive Publication Date: 2026-07-17PHOTONIC VIEW TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
PHOTONIC VIEW TECHNOLOGY CO LTD
Filing Date
2025-08-22
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies have poor accuracy and limited applicability in measuring the mode field distribution of optical chips. SNOM technology cannot characterize the mode field distribution of any optical chip, especially it cannot measure the mode field distribution at different depths inside a three-dimensional integrated optical circuit chip.

Method used

A method for visualizing the mode field of an optical chip is provided. The method involves exciting the intrinsic radiation of the optical chip under test and screening its spectral characteristics, temporal spectral characteristics, angular spectral characteristics, and polarization state characteristics. The mode field distribution image is then acquired using a wide-field imaging method or a confocal scanning imaging method.

Benefits of technology

It achieves accurate characterization of the mode field of optical chips, has universality, can measure the mode field distribution of two-dimensional and three-dimensional chip structures, and is suitable for mode field imaging at different depths.

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Abstract

本发明提供一种光芯片模场可视化成像方法及系统,包括:提供待测光芯片,将激光耦入待测光芯片,待测光芯片中波导器件的波导材料在激光的作用下激发本征辐射光;对本征辐射光进行特征筛选,以获取具有目标特征的本征辐射光;其中,本征辐射光的特征包括光谱特征、时域谱特征、角谱特征、偏振态特征中至少一种;基于宽场成像法或共聚焦扫描成像法采集经过筛选的具有目标特征的本征辐射光以得到检测图像,将检测图像作为待测光芯片的模场分布图像。本发明的光芯片模场可视化成像方法及系统激发待测光芯片的本征辐射光,并通过对本征辐射光的筛选准确表征激光在波导器件中传播时所形成的模场分布图像,普适性高,且可构建二维 / 三维模场分布图像。
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