一种校准交流信号传感器的装置及方法
By integrating a radio frequency conduction module, a signal processing module, and a shielded grounding module, and combining frequency adaptation and nonlinear calibration, the problems of high cost, weak anti-interference, and power limitation of AC signal sensors are solved, achieving low-cost and high-precision calibration results, which are suitable for semiconductor equipment and power systems.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENGJISHENG SEMICON TECH (BEIJING) CO LTD
- Filing Date
- 2025-10-13
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing technology, the external calibration components of AC signal sensors are costly, have weak anti-interference capabilities, cannot withstand radio frequency power higher than 15kW, and have high system complexity, which leads to increased R&D and design costs and measurement results that are easily affected by electromagnetic interference.
By combining a radio frequency conduction module, a signal processing module, and a shielding grounding module, and by establishing a standard impedance channel, calculating the actual current and voltage values, constructing an electromagnetic shielding environment, and combining frequency adaptation and nonlinear calibration modules, multi-band adaptation and parameter fitting are achieved.
It reduces R&D costs, improves anti-interference capabilities, breaks through power limitations, supports high-power measurements, and improves measurement accuracy and calibration efficiency, making it suitable for semiconductor equipment and power systems.
Smart Images
Figure CN120972070B_ABST