一种晶舟夹持机构
By designing a clamping mechanism suitable for quartz and silicon carbide crystal boats, and combining it with detection and image acquisition devices, the problem of low efficiency in automated handling of different types of crystal boats was solved, achieving efficient and safe crystal boat handling.
CN120977941BActive Publication Date: 2026-07-17JIANGSU DAODA INTELLIGENT TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU DAODA INTELLIGENT TECH CO LTD
- Filing Date
- 2025-07-09
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing technologies are difficult to apply to the automated handling of crystal boats of different types and sizes, resulting in low handling efficiency and easy damage to crystal boats or wafers.
Method used
A crystal boat clamping mechanism was designed, employing first and second grippers suitable for quartz and silicon carbide crystal boats respectively. Combined with a clamping detection device, a gripper opening detection device, and an image acquisition device, it enables precise clamping and handling of different types of crystal boats.
Benefits of technology
It improves the efficiency of crystal boat handling, is applicable to crystal boats of different types and sizes, reduces the risk of damage, and expands the scope of application.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN120977941B_ABST
Abstract
本发明涉及半导体器件专用设备技术领域，提供一种晶舟夹持机构，包括第一夹爪和第二夹爪，所述第一夹爪和所述第二夹爪受驱动相互接近或远离，以对物品进行夹持或释放，所述第一夹爪和所述第二夹爪均包括第一支架和第二支架，所述第一支架适于夹持第一类晶舟，所述第二支架适于夹持第二类晶舟。本发明能够提高晶舟的搬运效率，并且能够夹持不同类型和尺寸的晶舟，适用范围广。
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