Five-axis linkage type complex curved surface high-efficiency high-precision machining device and method

Abstract

The application belongs to the technical field of laser processing, and particularly relates to a five-axis linkage type complex curved surface high-efficiency high-precision processing device and method; the device comprises a double-sided gantry, a five-axis movement module, a scanning galvanometer module, a carrier table and an optical path system; the positions of a workpiece to be processed on the carrier table and the scanning galvanometer module are adjusted by driving motors of a Z-axis servo motor, an X-axis servo motor, a C-axis pitching movement module motor, a Y-axis servo motor and an A-axis rotating module according to five data, so that laser emitted by the scanning galvanometer module can irradiate to a processing point according to a processing track to process a microstructure unit; the application can efficiently and precisely process periodic array micro-nano structures on a complex surface by using superfast laser; meanwhile, the processing device has beam splitting and beam shaping functions.

Description

Technical Field

[0001] This invention belongs to the field of laser processing technology, and in particular relates to a five-axis linkage complex surface high-efficiency and high-precision processing device and method. Background Technology

[0002] As modern electromagnetic functional devices develop towards lightweight and integrated designs, the demand for fabricating periodic electromagnetic micro / nano structures on complex curved surfaces (such as composite layered structures like aircraft radomes and radar deflectors) is becoming increasingly prominent. The number of micro / nano structural units on the surface of such structures typically reaches tens or even hundreds of thousands. Furthermore, the fabrication process must be performed on only one material, avoiding damage to the other. This places extremely high demands on the fabrication equipment and methods.

[0003] Existing solutions, such as the design of the dual-swivel head five-axis linkage laser processing machine tool and the method for calibrating nine inherent parameters proposed in CN112475591B, have solved to some extent the problem of insufficient accuracy and efficiency of existing five-axis linkage laser processing machine tools in complex curved surface operations. However, they are complex in structure and require the calibration of nine inherent parameters, which involves complicated calculations.

[0004] In addition, in the field of laser processing, it is usually necessary to shape the original laser beam emitted by the laser to obtain specific processing effects. A beam shaping module is a well-known device in this field, used to process the spatial characteristics of the laser beam (such as spot shape and size) to meet basic processing requirements. However, currently, five-axis laser processing machine tools generally lack beam adjustment functions other than beam shaping, resulting in limited functionality.

[0005] Therefore, there is an urgent need to develop an ultrafast laser processing system and method with multiple functions to meet the stringent requirements of aerospace and other fields for the manufacture of large curved electromagnetic functional structures. Summary of the Invention

[0006] In view of this, the present invention aims to provide a five-axis linkage complex surface high-efficiency and high-precision processing device and method, which can use ultrafast lasers to process periodic array micro-nano structures on complex surfaces with high efficiency and high precision; at the same time, the processing device has beam splitting and beam shaping functions, and can simultaneously achieve precise control of the distance between the DOE beam splitting element and the galvanometer, and uniform distribution of the split laser energy.

[0007] To achieve the above objectives, the technical solution created by this invention is implemented as follows:

[0008] A five-axis linkage high-efficiency and high-precision machining device for complex curved surfaces includes a laser, a laser optical path system, and a scanning galvanometer system 105. The scanning galvanometer system 105 deflects the laser beam emitted by the laser to a predetermined position on the machining plane. The laser optical path system is optically coupled between the laser and the scanning galvanometer system 105 to guide the laser beam from the laser to the scanning galvanometer system 105. It also includes a double-sided gantry 101, a Z-axis motion module 102, a crossbeam 103, an X-axis motion module 104, a scanning galvanometer system 105, a C-axis pitch motion module 106, a base 109, a Y-axis motion module 110, a stage 111, and an A-axis rotation module 112. The base 109 is equipped with a double-sided gantry 101. The side gantry 101 has Z-axis motion modules 102 on the front ends of the two columns. A crossbeam 103 is provided on the sliding end of the Z-axis motion module 102. An X-axis motion module 104 is provided on the crossbeam 103. A C-axis pitch motion module 106 is provided on the sliding end of the X-axis motion module 104. A scanning galvanometer system 105 is connected to the C-axis pitch motion module 106. The scanning galvanometer system 105 can perform pitch and rotation motion under the drive of the C-axis pitch motion module 106. A Y-axis motion module 110 is provided on the base 109. A stage 111 is connected to the Y-axis motion module 110 through an A-axis rotation module 112, and the A-axis rotation module 112 can drive the stage 111 to perform rotational motion.

[0009] The laser optical path system includes, in sequence, the following components along the laser transmission direction:

[0010] A beam guiding device for receiving and guiding the laser beam emitted by the laser;

[0011] An optical path shaping component, located downstream of the beam guiding device, is used to shape the laser beam;

[0012] And a diffraction optical beam splitting module, located downstream of the optical path shaping component, is used to split the shaped laser beam into multiple processing laser beams and guide them to the scanning galvanometer system 105.

[0013] The Y-axis motion module 110, Z-axis motion module 102, and X-axis motion module 104 are all lead screw and guide rail modules.

[0014] The A-axis rotation module 112 includes a drive motor and a bearing. The drive motor is fixed to the moving end of the Y-axis motion module 110. The stage 111 is rotatably mounted on the moving end of the Y-axis motion module 110 via the bearing, and the bearing is connected to the output shaft of the drive motor and is driven to rotate by the output shaft of the drive motor.

[0015] The Y-axis motion module 110 is covered with a soft dust cover with an opening. The stage 111 is placed in the opening, and the drive motor of the A-axis rotation module 112 is located inside the soft dust cover.

[0016] The C-axis pitch motion module 106 includes a connecting plate, a gantry frame, and a motor. The connecting plate is a bent plate, with one end located on the back of the crossbeam 103 and fixed to the X-axis moving support plate of the X-axis motion module 104. The other end is located on the front end of the crossbeam 103, and a gantry frame is fixed on it. The gantry frame is equipped with a motor, and the output shaft of the motor is connected to the housing of the scanning galvanometer system 105, so that the scanning galvanometer system 105 can perform pitch and rotation motion under the drive of the motor.

[0017] A five-axis linkage high-efficiency and high-precision machining device for complex curved surfaces also includes a focusing unit, which comprises a focusing laser, a pentagonal prism 301, and an emission system mainly composed of a filter 302, a first reflecting mirror 303, and a first focusing objective lens 304, and a receiving system mainly composed of a filter 302, a second reflecting mirror 305, a second focusing objective lens 306, a slit 307, and a photodetector 308. The laser emitted by the focusing laser is processed by the filter 302 and then incident on the first reflecting mirror 303. The laser reflected by the first reflecting mirror 303 enters the first focusing objective lens 304 and is then focused... The beam focused by the focal objective 304 is incident on the pentagonal prism 301 on one side. The beam passing through the pentagonal prism 301 illuminates the workpiece 309 located on the stage 111, forming a light spot. At the same time, the laser beam exported by the scanning galvanometer system 105 also illuminates the workpiece 309, forming a light spot. The two parts of the light pass through the pentagonal prism 301 on the other side and are then incident on the second focusing objective 306. After being focused by the second focusing objective 306, the beam is incident on the second reflecting mirror 305. The beam reflected by the second reflecting mirror 305 enters the filter 302. The beam processed by the filter 302 enters the photodetector 308 through the slit 307.

[0018] The focusing laser, the emitting system, and the pentaangular prism 301 corresponding to the emitting system are fixed to the front end of the housing of the scanning galvanometer system 105 by the bracket 108, and the receiving system and the pentaangular prism 301 corresponding to the receiving system are fixed to the rear end of the housing of the scanning galvanometer system 105 by the bracket.

[0019] The diffraction optical beam splitting module of the optical path system includes a DOE beam splitting element 201, a rotating wheel 202, and a beam splitting element support 204. The middle part of the rotating wheel 202 and the beam splitting element support 204 are connected by the same rotating shaft 203. The beam splitting element support 204 is provided with a beam splitting element through hole. The rotating wheel 202 is provided with multiple through holes around the rotating shaft 203 for installing different DOE beam splitting elements 201. Different DOE beam splitting elements 201 are fixed in the corresponding through holes. When the rotating wheel 202 rotates, the corresponding DOE beam splitting element 201 corresponds to the beam splitting element through hole on the beam splitting element support 204.

[0020] The diffraction optics beam splitting module and the optical path shaping module are integrated in the same lens barrel, which is fixed on the gantry frame of the C-axis pitch motion module 106.

[0021] A five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces includes the following:

[0022] Step 1, Determine the initial point: The center point of the laser spot formed when the scanning galvanometer system 105 is in its original position before processing and it irradiates the workpiece to be processed is recorded as the initial point A0.

[0023] Step 2, construct the following coordinate system:

[0024] Establish a three-dimensional coordinate system with the Z-axis vertex of the workpiece as the origin, and the coordinate axes as the X-axis, Y-axis, and Z-axis, respectively. Then, translate the origin O downward along the Z-axis to the machining point A. n On the cross-section of the workpiece to be processed, point O' is formed. The coordinate axes X' and Y' are established with point O' as the origin, where the X' axis is parallel to the X axis and the Y' axis is parallel to the Y axis.

[0025] Step 3: Based on the following five data points (ae), control the corresponding Z-axis servo motor, X-axis servo motor, and C-axis pitch motion module 106 motors to adjust the position of the scanning galvanometer system 105, and control the corresponding Y-axis servo motor and A-axis rotation module 112 drive motors to adjust the position of the workpiece to be processed on the stage 111, so that the laser beam exported by the scanning galvanometer system 105 can sequentially irradiate each processing point on the workpiece to be processed according to the processing trajectory to process the microstructure units.

[0026] a. Process the nth processing point A n At that time, the drive motor of the A-axis rotation module 112 needs to drive the stage 111 to rotate by an angle change. in In processing A n The angle by which the drive motor of the A-axis rotation module 112 drives the stage 111 to rotate. n is an integer between 1 and N, where N is the total number of processing points. In processing A n-1 The angle by which the drive motor of the A-axis rotation module 112 drives the stage 111 to rotate.

[0027] α n is ∠X'O'A n ,β n For ∠O'A n F n F n For the outer surface of the workpiece to be processed, A n The normal of the point K n The intersection of the backward extension of the projection in the X'O'Y' plane and the Y' axis;

[0028] α n-1 is ∠X'O'A n-1 ,β n-1 For ∠O'A n-1 F n-1 ;F n-1 For the complex surface of the workpiece to be processed, i.e., the outer surface, A n-1 The normal of the point K n-1 The intersection of the backward extension of the projection onto the X'O'Y' plane and the Y' axis, when n=1, α n-1 and β n-1 The initial point A0 is replaced with A from step two. n The points are ∠X'O'A0 and ∠O'A0F0 in the X'O'Y' plane obtained after the point; F0 is the intersection of the backward extension of the projection of the normal K0 passing through point A0 on the complex surface of the workpiece to be processed, i.e. the outer surface, with the Y' axis;

[0029] b. When machining the nth machining point, the motor of the C-axis pitch motion module 106 needs to drive the scanning galvanometer system 105 to rotate by an angle change Δθ. n ;Δθ n =θ n -θ n-1 ;θ n In processing A n The C-axis pitch motion module 106 drives the scanning galvanometer system 105 to rotate at the angle of A. n The line Z' drawn from the point parallel to the Z-axis intersects the normal line K. n The angle between them is θ n , through A n-1 The line Z' drawn from the point parallel to the Z-axis intersects the normal line K. n-1 The angle between them is θ n-1 When n = 1, θ N-1 Initial value;

[0030] c. When machining the nth machining point, the servo motor of the Y-axis motion module 110 needs to drive the displacement change ΔX of the stage 111. n ,

[0031] Where: X n For processing A n The servo motor of the Y-axis motion module 110 needs to drive the displacement of the stage 111.

[0032] X n-1 For processing A n-1 The servo motor of the Y-axis motion module 110 needs to drive the displacement of the stage 111. When n=1, the longitudinal horizontal displacement compensation is e×[cos(θ)] n-1 )-cos(θ n-2 )] is 0;

[0033] r n Processing point A n The corresponding line segment O'A n The length, r n-1 Processing point A n-1 The corresponding line segment O'A n-1 The length of r when n=1 n-1 The initial value is to replace the initial point A0 with A in step two. n The length of the line segment O'A0 obtained after the point; e is the vertical distance between the pitch rotation center point 1051 of the scanning galvanometer module 105 and the rotation axis 3092 of the workpiece to be processed; K is the height difference in the Z-axis direction between the pitch rotation center point 1051 and the z-axis vertex 3091 of the workpiece to be processed.

[0034] d. When machining the nth machining point, the servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103, and the displacement change is as follows. Where Y n For processing A n The servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103 by a certain displacement. Y n-1 For processing A n-1 The servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103 by a certain displacement.

[0035] e. When machining the nth machining point, the displacement change ΔZ required by the servo motor of the Z-axis motion module 102 to drive the crossbeam 103 to move. n ,in:

[0036] ΔZ n =Z n -Z n-1 =[-Z n -K×cos(θ n )]-e×[sin(θ n )-sin(θ n-1 )]

[0037] -{[-Z n-1 -K×cos(θ n-1 )]-e×[sin(θ n-1 )-sin(θ n-2 )]};where Z n For processing A n The servo motor of the Z-axis motion module 102 needs to drive the crossbeam 103 to move by a certain displacement. n =[-Z n -K×cos(θ n )]-e×[sin(θ n )-sin(θ n-1 )], Z n-1 For processing A n-1 The servo motor of the Z-axis motion module 102 needs to drive the crossbeam 103 to move by a certain displacement. n-1 ={[-Z n-1 -K×cos(θ n-1 )]-e×[sin(θ n-1 )-sin(θ n-2 When n=1, the vertical displacement compensation is e×[sin(θ)]. n-1 )-sin(θ n-2 )] is 0.

[0038] The position of each processing point on the workpiece to be processed is determined by coordinate information, which is obtained according to the following steps:

[0039] Step 1: Import the workpiece model data into Gallop software. In Gallop software, establish two mutually perpendicular planes as the reference for the direction of the parameter space coordinate axes. Based on this reference, establish the parameter space coordinate axes (u, v) with the Z-axis vertex of the workpiece model as the origin.

[0040] Step 2: Divide the workpiece model into equal parts in the parameter space of the coordinate axes, and establish a plane that passes through the division point and is perpendicular to the plane containing the (u, v) coordinate axis. The tangent point of each plane to the free surface outside the workpiece model is the center point of the corresponding microstructure unit to be processed.

[0041] Step 3: Import the obtained center point coordinate file into Python 3.10 software. Within the software, construct a mathematical model of the NURBS curve interpolation algorithm to identify the imported points and perform point interpolation between every two points to achieve a smooth transition between points.

[0042] Step 4: Export the coordinate file of all points, including the center point and all interpolation points received by the software in Step 3, using Python 3.10 software. Each point is a processing point to be processed, thus obtaining the coordinate file of all processing points.

[0043] The processing points are distributed in an array, and the processing points are connected in sequence to form a processing trajectory. Since the workpiece is a non-rotating body, the processing trajectory is a non-smooth spiral line, which spirals down from the z-axis of the workpiece.

[0044] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0045] This invention proposes a mechanical structure for a five-axis linkage laser processing machine tool; its structure is simple and it also has beam splitting and beam shaping functions.

[0046] The five-axis linkage laser processing machine tool proposed in this invention can more easily realize five-axis coordinate transformation, which is beneficial for the machine tool to process complex curves and surfaces; at the same time, this invention is conducive to improving the positioning accuracy of the laser focus, which can further improve the processing accuracy of the laser processing machine tool. Attached Figure Description

[0047] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments and descriptions of the invention are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0048] Figure 1 This is a schematic diagram of the structure of the present invention.

[0049] Figure 2 This is a schematic diagram of the diffraction optical beam splitter module of the present invention.

[0050] Figure 3 This is a schematic diagram of the focus detection unit of the present invention.

[0051] Figure 4 A schematic diagram of device coordinates constructed using the method described in this invention.

[0052] Figure 5 This is a schematic diagram illustrating part of the method described in this invention.

[0053] In the diagram: 101. Double-sided gantry frame; 102. Z-axis motion module; 103. Crossbeam; 104. X-axis motion module; 105. Scanning galvanometer module; 1051. Pitch rotation center point; 106. C-axis pitch motion module; 107. Distance sensor; 108. Bracket; 109. Base; 110. Y-axis motion module; 111. Stage; 112. A-axis rotation module; 113. Stage displacement compensation. Plate; 201, Diffractive Optical DOE beam splitter; 202, Rotating wheel; 203, Rotating shaft; 204, Beam splitter support; 301, Pentagonal prism; 302, Filter; 303, First reflecting mirror; 304, First focusing objective lens; 305, Second reflecting mirror; 306, Second focusing objective lens; 307, Slit; 308, Photodetector; 309, Workpiece; 3091, Z-axis vertex; 3092, Rotation axis. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and do not constitute a limitation thereof. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the invention. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the invention are not shown or described in the specification. This is to avoid obscuring the core parts of the invention with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0055] It should be noted that, unless otherwise specified, the embodiments and features described in this invention can be combined to form various implementations. Furthermore, the order of the steps or actions in the method description can be changed or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various orders in the specification and drawings are merely for the clear description of a particular embodiment and do not imply a mandatory order, unless otherwise stated that a particular order must be followed.

[0056] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this invention. The term "based on" should be understood as "at least partially based on." Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more, and the term "including" means "including but not limited to." Various embodiments of the present invention may exist in the form of a range; it should be understood that the description in the form of a range is merely for convenience and brevity and should not be construed as a rigid limitation on the scope of the invention; therefore, it should be considered that the range description has specifically disclosed all possible sub-ranges and single numerical values ​​within that range; for example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges, such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., and single numbers within the range, such as 1, 2, 3, 4, 5, and 6, regardless of the range. Furthermore, whenever a numerical range is referred to herein, it means including any referenced number (fraction or integer) within the range referred to.

[0057] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0058] The invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0059] Example 1

[0060] A five-axis linkage high-efficiency and high-precision machining device for complex curved surfaces, such as Figure 1As shown, the system includes a laser, a laser optical path system, a scanning galvanometer system 105, a double-sided gantry 101, a Z-axis motion module 102, a crossbeam 103, an X-axis motion module 104, a C-axis pitch motion module 106, a base 109, a Y-axis motion module 110, a stage 111, and an A-axis rotation module 112. The scanning galvanometer system 105 deflects the laser beam emitted by the laser to a predetermined position on the processing plane, i.e., the processing point of the workpiece. The laser optical path system is optically coupled between the laser and the scanning galvanometer system 105, guiding the laser beam from the laser to the scanning galvanometer system 105. The base 109 is equipped with a double-sided gantry 101. Z-axis motion modules 102 are respectively provided on the front ends of the two side columns of the gantry 101. A crossbeam 103 is provided on the sliding end of the Z-axis motion module 102, and an X-axis motion module 104 is provided on the crossbeam 103. A C-axis pitch motion module 106 is provided on the sliding end of the X-axis motion module 104. A scanning galvanometer system 105 is connected to the C-axis pitch motion module 106, allowing the scanning galvanometer system 105 to perform pitch and rotation motion under the drive of the C-axis pitch motion module 106. A Y-axis motion module 110 is provided on the base 109, and a stage 111 is connected to the Y-axis motion module 110 via an A-axis rotation module 112; the A-axis rotation module 112 can drive the stage 111 to rotate. Specifically, the material of the two side columns of the double-sided gantry 101 can be marble. The crossbeam 103 can be titanium alloy.

[0061] The Z-axis motion module 102 includes a Z-axis base, a Z-axis servo motor, a Z-axis lead screw guide rail, a Z-axis ball screw, and a Z-axis moving support plate. The Z-axis servo motor, Z-axis lead screw guide rail, and Z-axis ball screw are all mounted on the Z-axis base. The Z-axis base is fixed to the columns of the double-sided gantry frame 101 by screws, thereby enabling the Z-axis motion module 102 to be assembled on the columns of the double-sided gantry frame 101. The output shaft of the Z-axis servo motor is connected to the Z-axis ball screw located inside the Z-axis lead screw guide rail. The moving nut of the Z-axis ball screw is fixedly connected to the Z-axis moving support plate, which can slide along the Z-axis lead screw guide rail. The two ends of the crossbeam 103 are respectively fixed to the corresponding Z-axis moving support plates. When the Z-axis motion module 102 is working, the Z-axis servo motor drives the Z-axis ball screw to rotate. The rotating Z-axis ball screw drives the Z-axis moving plate to move on the Z-axis screw guide rail, so that the crossbeam 103 can move up and down under the drive of the two Z-axis moving plates.

[0062] The Z-axis lead screw guide is a V-type ball guide with a precision grade of P2, and the Z-axis servo motor is a Siemens servo motor. Closed-loop control of the dual Z-axis servo motors is achieved through feedback from the motor encoder and the grating ruler. The grating ruler has a resolution of 0.1μm and a maximum stroke of 1.5m. The motor output shaft is connected to a precision ball screw, namely the Z-axis ball screw (40mm in diameter, 10mm in lead, and C3 precision grade).

[0063] By controlling the Z-axis servo motors of the Z-axis motion modules 102 on both sides of the double-sided gantry 101 to drive the Z-axis moving tray to move at the same speed and in the same direction, the displacement of both sides of the crossbeam 103 is kept in the same direction and with the same moving distance, thereby maintaining the stability of the scanning galvanometer system 105.

[0064] The Y-axis motion module 110 includes a Y-axis base, a Y-axis servo motor, a Y-axis lead screw guide rail, a Y-axis ball screw, and a Y-axis movable support plate. The Y-axis servo motor, the Y-axis lead screw guide rail, and the Y-axis ball screw are all mounted on the Y-axis base. The Y-axis base is fixed to the base 109 with screws, thereby enabling the Y-axis motion module 110 to be assembled on the base 109. The output shaft of the Y-axis servo motor is connected to the Y-axis ball screw located inside the Y-axis lead screw guide rail. The movable nut of the Y-axis ball screw is fixedly connected to the Y-axis movable support plate, which can slide along the Y-axis lead screw guide rail. The stage 111 is connected to the Y-axis movable support plate through the A-axis rotation module 112. When the Y-axis motion module 110 is working, the Y-axis servo motor drives the Y-axis ball screw to rotate. The rotating Y-axis ball screw drives the Y-axis moving plate, which in turn causes the stage 111 to move along the Y-axis ball screw guide rail under the action of the Y-axis moving plate. The maximum stroke of the Y-axis servo motor is 1m.

[0065] The X-axis motion module 104 includes an X-axis servo motor, an X-axis ball screw, an X-axis ball screw guide rail, an X-axis base, and an X-axis movable support plate. The X-axis servo motor, X-axis ball screw guide rail, and X-axis ball screw are all mounted on the X-axis base. The X-axis base is fixed to the back of the crossbeam 103 by screws, thereby enabling the X-axis motion module 104 to be mounted on the crossbeam 103. The output shaft of the X-axis servo motor is connected to the X-axis ball screw located inside the X-axis ball screw guide rail. The movable nut of the X-axis ball screw is fixedly connected to the X-axis movable support plate, which can slide along the X-axis ball screw guide rail. The C-axis pitch motion module 106 is connected to the X-axis movable support plate. When the X-axis motion module 104 is working, the X-axis servo motor drives the X-axis ball screw to rotate. The rotating X-axis ball screw drives the X-axis moving support plate, which in turn causes the C-axis pitch motion module 106 to translate along the X-axis ball screw guide rail under the drive of the X-axis moving support plate. The high-precision slide rail—the X-axis ball screw guide rail—embedded in the crossbeam 103 enables the lateral movement. Combined with the cross-type cooling channel, it ensures the temperature control of the galvanometer with an accuracy of ±0.5℃. The X-axis servo motor is driven by a linear motor with a maximum stroke of 1m and a repeatability of ±5μm, supporting the scanning galvanometer system 105.

[0066] The A-axis rotation module 112 includes a drive motor and bearings. The drive motor is fixed to the Y-axis moving plate of the Y-axis motion module 110. The stage 111 is rotatably mounted on the Y-axis moving plate via bearings, and the bearings are connected to the output shaft of the drive motor, rotating under the drive motor's output shaft. This allows the stage 111 to rotate 360° under the drive of the drive motor. Simultaneously, a stage displacement compensation plate 113 is connected to the stage 111 to provide support and compensation when the workpiece 309 is large.

[0067] The Y-axis motion module 110 is covered with a flexible dust cover with an opening. The stage 111 is placed in the opening, and the drive motor of the A-axis rotation module 112 is located inside the flexible dust cover. Because the flexible dust cover is made of elastic material, when the stage 111 moves along the Y-axis lead screw guide, it can expand the opening on the flexible dust cover, so that the flexible dust cover will not affect the movement of the stage 111. When the stage 111 moves in the opposite direction, the opening will spring back to its original shape.

[0068] The C-axis pitch motion module 106 includes a connecting plate, a gantry frame, and a motor. The connecting plate is a bent plate, with one end located on the back of the crossbeam 103 and fixed to the X-axis moving support plate of the X-axis motion module 104. The other end is located on the front end of the crossbeam 103, and a gantry frame is fixed on it. The gantry frame is equipped with a motor, the output shaft of which is connected to the housing of the scanning galvanometer system 105, and can drive the scanning galvanometer system 105 to perform pitch and rotation motion with a swing range of ±90°.

[0069] A five-axis linkage high-efficiency and high-precision machining device for complex curved surfaces also includes a focus detection unit, such as... Figure 3 As shown, the focusing unit includes a focusing laser, a pentaangular prism 301 (the main function of the pentaangular prism 301 is to reduce the incident angle of the oblique beam and adjust the system sensitivity to a reasonable range), and a transmitting system mainly composed of a filter 302, a first reflecting mirror 303, and a first focusing objective lens 304, and a receiving system mainly composed of a filter 302, a second reflecting mirror 305, a second focusing objective lens 306, a slit 307, and a photodetector 308. The laser emitted by the focusing laser is processed by the filter 302 and then incident on the first reflecting mirror 303. After being reflected by the first reflecting mirror 303, the laser enters the first focusing objective lens 308. 04. The light beam focused by the first focusing objective lens 304 is incident on the pentagonal prism 301 on one side. The light beam passing through the pentagonal prism 301 hits the workpiece 309 located on the stage 111 to form a light spot. At the same time, the laser beam emitted by the scanning galvanometer system 105 also hits the workpiece 309 to form a light spot. The two parts of the light pass through the pentagonal prism 301 on the other side and are incident on the second focusing objective lens 306. After being focused by the second focusing objective lens 306, the light beam is incident on the second reflecting mirror 305. The light beam reflected by the second reflecting mirror 305 enters the filter 302. The light beam processed by the filter 302 enters the photodetector 308 through the slit 307.

[0070] In use, the scanning galvanometer system 105 is adjusted according to the signal measured by the photoelectric receiver 308, thereby changing the position of the emitted laser focus relative to the workpiece surface until the laser beam is accurately focused on the workpiece surface.

[0071] The focusing laser, the emitting system, and the pentaangular prism 301 corresponding to the emitting system are fixed to the front end of the housing of the scanning galvanometer system 105 by the bracket 108, and the receiving system and the pentaangular prism 301 corresponding to the receiving system are fixed to the rear end of the housing of the scanning galvanometer system 105 by the bracket.

[0072] The scanning galvanometer system 105 includes a square housing, and an X-axis galvanometer unit and a Y-axis galvanometer unit are provided inside the square housing. The X-axis galvanometer unit includes an X-axis galvanometer motor and an X-axis reflector fixed on its rotor; the Y-axis galvanometer unit includes a Y-axis galvanometer motor and a Y-axis reflector fixed on its rotor.

[0073] The square outer shell is provided with a laser inlet and a laser outlet. The laser beam enters through the laser inlet, is reflected sequentially by the X-axis reflector and the Y-axis reflector, and then exits through the laser outlet.

[0074] The scanning galvanometer system 105 also includes a driver control board integrated on a square housing. The driver control board is electrically connected to the X-axis galvanometer motor and the Y-axis galvanometer motor and is used to drive their movement.

[0075] An F-Theta lens is also installed below the laser emission port to focus the emitted laser beam onto the processing plane.

[0076] The base 109 is made of marble; the crossbeam 103 is made of titanium alloy.

[0077] A five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces includes the following:

[0078] Step 1, Determine the initial point: The center point of the laser spot formed when the scanning galvanometer system 105 is in its original position before processing and it irradiates the workpiece to be processed is recorded as the initial point A0.

[0079] Step two, in order to determine the five data points of ae, the following coordinate system needs to be constructed:

[0080] Establish a three-dimensional coordinate system with the Z-axis vertex of the workpiece (i.e., the highest point of the workpiece) as the origin, and the coordinate axes as the X-axis, Y-axis, and Z-axis, respectively. Then, translate the origin O downwards along the Z-axis to the machining point A. n On the cross-section of the workpiece to be processed, point O' is formed. The coordinate axes X' and Y' are established with point O' as the origin, where the X' axis is parallel to the X axis and the Y' axis is parallel to the Y axis.

[0081] Step 3: Based on the following five data points (ae), control the corresponding Z-axis servo motor, X-axis servo motor, and C-axis pitch motion module 106 motors to adjust the position of the scanning galvanometer system 105. Control the corresponding Y-axis servo motor and A-axis rotation module 112 drive motors to adjust the position of the workpiece to be processed on the stage 111. This ensures that the laser emitted by the scanning galvanometer system 105 can sequentially irradiate each processing point on the workpiece according to the processing trajectory along the normal of the corresponding processing point to process the microstructure units. This ensures that the laser focus point moves along the predetermined processing trajectory to complete the processing.

[0082] In other words: Processing the nth processing point A nAt this time, the drive motor of the A-axis rotation module 112 drives the stage 111 to rotate, causing the rotation angle of the stage 111 to change as data a. The motor of the C-axis pitch motion module 106 drives the scanning galvanometer system 105 to rotate, causing the rotation angle of the scanning galvanometer system 105 to change as data b. The Y-axis servo motor of the Y-axis motion module 110 drives the stage 111 to move, causing the displacement of the stage 111 along the Y-axis lead screw guide to change as data c. The X-axis servo motor of the X-axis motion module 104 drives the scanning galvanometer system 105 to move along the crossbeam 103, causing the displacement of the scanning galvanometer system 105 along the crossbeam 103 to change as data d. The Z-axis servo motor of the Z-axis motion module 102 drives the crossbeam 103 to move along the Z-axis lead screw guide, causing the displacement of the crossbeam 103 along the Z-axis lead screw guide to change as data e. At this time, the laser emitted by the scanning galvanometer system 105 can irradiate the nth processing point A on the workpiece to be processed. n Microstructural units are fabricated at the location;

[0083] The software code for the device, written in C language, is required to recognize the coordinate files of the machining points, the microstructure unit pattern to be machined (galvanometer marking pattern), and the machining trajectory formed by the machining points. It should also be able to determine the position of the machining points on the workpiece based on the coordinates of the machining points, establish the coordinate system corresponding to each machining point according to step two, calculate the following five data points (ae), and finally generate instructions based on the five data points (ae) to control the five-axis linkage complex surface high-efficiency and high-precision machining device to perform five-axis motion (i.e., control the Z-axis servo motor, X-axis servo motor, C-axis pitch motion module 106 motor, Y-axis servo motor, and A-axis rotation module 112 drive motor).

[0084] a. Process the nth processing point A n At that time, the drive motor of the A-axis rotation module 112 needs to drive the stage 111 to rotate by an angle change. That is, the change in the orientation and rotation angle of the workpiece to be processed. in In processing A n The angle required for the workpiece to be processed to rotate at a given point is the angle by which the drive motor of the A-axis rotation module 112 drives the stage 111 to rotate. n is an integer between 1 and N, where N is the total number of processing points. In processing A n-1 At point (n-1 processing point), the drive motor of the A-axis rotation module 112 drives the stage 111 to rotate by an angle.

[0085] α n Processing point A n ∠X'O'A in the corresponding X'O'Y' planen (i.e., point O' and point A) n The angle between the line connecting the points and the X' axis, with OZ as the axis of rotation, is positive when rotating counterclockwise, which is the direction from O'X' to O'Y', and negative when rotating from O'X' to O'Y.

[0086] β n Processing point A n ∠O'A in the corresponding X'O'Y' plane n F n (i.e., point O' and point A) n The line segment O'A connecting the points n With A n and F n Line segment A of the connecting line n F n (the angle between them)

[0087] F n For the complex surface of the workpiece to be processed, i.e., the outer surface, A n The normal of the point K n The intersection of the backward extension of the projection onto the X'O'Y' plane and the Y' axis is shown in the diagram as negative (O'A). n Switch to F n A n (Clockwise) is clockwise, and counterclockwise is counterclockwise;

[0088] α n-1 To process point A n-1 Replace with A from step two n ∠X'O'A in the X'O'Y' plane after establishing the coordinate system n-1 ,β n-1 For ∠O'A n-1 F n-1 ;F n-1 For the complex surface of the workpiece to be processed, i.e., the outer surface, A n-1 The normal of the point K n-1 The intersection of the backward extension of the projection onto the X'O'Y' plane and the Y' axis, when n=1, α n-1 and β n-1 The initial point A0 is replaced with A from step two. n After establishing the coordinate system, ∠X'O'A0 and ∠O'A0F0 are defined in the X'O'Y' plane; F0 is the intersection of the backward extension of the projection of the normal K0 passing through point A0 on the complex surface of the workpiece to be processed (i.e., the outer surface) with the Y' axis.

[0089] b. When machining the nth machining point, the motor of the C-axis pitch motion module 106 needs to drive the scanning galvanometer system 105 to rotate by an angle change Δθ. n That is, the pitch angle change Δθ of the scanning galvanometer system 105n =θ n -θ n-1 ;θ n In processing A n The rotation angle θ of the scanning galvanometer system 105 driven by the motor of the C-axis pitch motion module 106 at a given point. n For ∠K n A n Z', where A passes through n Draw a line Z' parallel to the Z-axis from point K. The line Z' parallel to the normal line K is perpendicular to the normal line K. n The angle between them is θ n (θ n For A n normal K n The acute angle between Z and Z' (take positive), θ n-1 In processing A n-1 The angle of rotation of the scanning galvanometer system 105 driven by the motor of the C-axis pitch motion module 106 at point A, i.e., through A n-1 Draw a line Z' parallel to the Z-axis from point K. The line Z' parallel to the normal line K is perpendicular to the normal line K. n-1 The angle between them is θ n-1 When n = 1, θ n-1 The initial value is 0; that is, at the initial position, the motor of the C-axis pitch motion module 106 does not need to drive the scanning galvanometer system 105 to rotate.

[0090] c. When machining the nth machining point, the Y-axis servo motor of the Y-axis motion module 110 needs to drive the stage 111 to move along the Y-axis lead screw guide rail, causing a displacement change ΔX. n That is, the longitudinal horizontal displacement change ΔX of the stage 111 n (The displacement change of the stage 111 moving along the Y-axis lead screw guide under the drive of the Y-axis servo motor of the Y-axis motion module 110);

[0091]

[0092] Where: X n For processing A n The Y-axis servo motor of the Y-axis motion module 110 needs to drive the stage 111 to move along the Y-axis lead screw guide rail by a certain displacement.

[0093] X n-1 For processing A n-1 The Y-axis servo motor of the Y-axis motion module 110 needs to drive the stage 111 to move along the Y-axis lead screw guide by a displacement, wherein:

[0094]

[0095] When n=1, the longitudinal horizontal displacement compensation is e×[cos(θ)] n-1 )-cos(θ n-2 The value of )] is 0; n≥2 is required, if when n=1, the longitudinal horizontal displacement compensation is e×[cos(θ n-1 )-cos(θ n-2 )] is 0;

[0096] r n Processing point A n The corresponding line segment O'A n The length, r n-1 Processing point A n-1 The corresponding line segment O'A n-1 The length of r when n=1 n-1 The initial value is to replace the initial point A0 with A in step two. n The length of O'A0 after the coordinate system is established; e is the vertical distance between the pitch rotation center point 1051 of the scanning galvanometer module 105 and the rotation axis 3092 of the workpiece to be processed; K is the height difference in the Z-axis direction between the pitch rotation center point 1051 and the z-axis vertex 3091 of the workpiece to be processed.

[0097] d. When machining the nth machining point, the X-axis servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103 by the displacement change ΔY. n That is, the change in lateral horizontal displacement of the scanning galvanometer system 105. Where Y n For processing A n The X-axis servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103 by a certain displacement. Y n-1 For processing A n-1 The X-axis servo motor of the X-axis motion module 104 needs to drive the scanning galvanometer system 105 to move along the crossbeam 103 by a certain displacement.

[0098]

[0099] e. When machining the nth machining point, the displacement change ΔZ of the Z-axis servo motor of the Z-axis motion module 102 that needs to drive the crossbeam 103 to move along the Z-axis lead screw guide rail is as follows: n That is, the change in vertical displacement of beam 103, ΔZ n =Z n -Z n-1 =[-Z n -K×cos(θ n )]-

[0100] e×[sin(θ n)-sin(θ n-1 )]-{[-Z n-1 -K×cos(θ n-1 )]-

[0101] e×[sin(θ N-1 )-sin(θ n-2 )]};where Z n For processing A n The Z-axis servo motor of the Z-axis motion module 102 needs to drive the crossbeam 103 to move along the Z-axis lead screw guide by a certain displacement. n =[-Z n -K×cos(θ n )]-e×[sin(θ n )-sin(θ n-1 )], Z n-1 For processing A n-1 The Z-axis servo motor of the Z-axis motion module 102 needs to drive the crossbeam 103 to move along the Z-axis lead screw guide by a certain displacement; where:

[0102] Z n-1 ={[-Z n-1 -K×cos(θ n-1 )]-

[0103] e×[sin(θ n-1 )-sin(θ n-2 )]};Requires n≥2, if when n=1, the vertical displacement compensation is e×[sin(θ n-1 )-sin(θ n-2 The value is 0. The initial position in the Z direction is the workpiece vertex (i.e., the highest point of the workpiece), so the following data is in terms of displacement. The Z-axis coordinate should be expressed as a negative number, so a negative sign is added before the displacement.

[0104] After the laser emitted by the scanning galvanometer system 105 irradiates the corresponding processing point, the device software code written in C language controls the laser to process the microstructure unit pattern on the workpiece at the corresponding position. When processing at each new processing point, the device software code in C language can control the angle adjustment of the microstructure unit pattern processed by the laser. That is, the orientation of the microstructure unit pattern processed at each processing point is different. Therefore, the orientation of the microstructure unit pattern processed by the laser must be adjusted each time. The change in the rotation angle of the microstructure unit pattern is that each microstructure unit rotates along its centroid, i.e., processing point A. n Perform rotational angular change Δγ n =γ n -γ n-1 γ nThe angle of rotation of the microstructure unit to be processed around its centroid point according to the orientation required for the processing pattern at the next processing point is compared with the standard orientation (x is the horizontal direction, the plane in which the direction vector is located is parallel to the horizontal plane X'O'Y', y is the vertical direction, pointing to the vertex of the workpiece). Counterclockwise is positive and clockwise is negative.

[0105] The position of each processing point on the workpiece to be processed is determined by coordinate information, which is obtained according to the following steps:

[0106] Step 1: Import the workpiece model data into Gallop software. Within Gallop, establish two mutually perpendicular planes as references for the directions of the parametric space coordinate axes. These two planes intersect the freeform surfaces of the workpiece model's outer surface. Based on these references, establish parametric space coordinate axes (u, v) with the Z-axis vertex of the workpiece model as the origin. Here, the coordinate system corresponding to the coordinate axes refers to the three-dimensional coordinate system established for the workpiece in Gallop software based on cylindrical coordinates, providing a coordinate system for visual 3D modeling.

[0107] Step 2: Divide the workpiece model into equal parts in the parameter space of the coordinate axes (the division distance is determined according to the period of the microstructure unit; for the freeform workpiece model, division is equivalent to meshing). At each division point, establish a plane that passes through the division point and is perpendicular to the plane containing the (u, v) coordinate axis. The tangent points of each plane to the freeform surface outside the workpiece model are the center points of the corresponding microstructure units to be processed.

[0108] Step 3: Import the obtained center point coordinate file into Python 3.10 software. Within the software, construct a mathematical model of the NURBS curve interpolation algorithm to identify the imported points and perform point interpolation between every two points to achieve a smooth transition between points.

[0109] Step 4: Export the coordinate file of all points, including the center point and all interpolation points received by the software in Step 3, using Python 3.10 software. Each point is a processing point to be processed, thus obtaining the coordinate file of all processing points.

[0110] The processing points are the centroids of the microstructure units to be processed at each processing point, and the processing points are distributed in an array. The processing points are connected in sequence to form a processing trajectory. Since the workpiece is a non-rotating body, the processing trajectory is a non-smooth spiral line that spirals down from the z-axis of the workpiece.

[0111] Example 2

[0112] Same as Example 1, except that:

[0113] The laser optical path system includes, in sequence, the following components along the laser transmission direction:

[0114] A beam guiding device for receiving and guiding the laser beam emitted by the laser;

[0115] An optical path shaping component, located downstream of the beam guiding device, is used to shape the laser beam;

[0116] And a diffraction optical beam splitting module, located downstream of the optical path shaping component, is used to split the shaped laser beam into multiple processing laser beams and guide them to the scanning galvanometer system 105.

[0117] The beam guiding device consists of two reflectors. The laser is fixed on the base 109. The first reflector is located at the bottom of the front end of one of the columns of the double-sided gantry 101. It can receive and reflect the laser emitted by the laser to the second reflector. The second reflector is mounted on the crossbeam 103 by a bracket and reflects the laser to the scanning galvanometer system 105.

[0118] like Figure 2 As shown, the diffraction optical beam splitting module of the optical path system includes a DOE beam splitting element 201, a rotating wheel 202, and a beam splitting element support 204. The middle part of the rotating wheel 202 and the beam splitting element support 204 are connected by the same rotating shaft 203. The beam splitting element support 204 is provided with beam splitting element through holes. The rotating wheel 202 is provided with multiple through holes around the rotating shaft 203 for installing different DOE beam splitting elements 201. Different DOE beam splitting elements 201 are fixed in the corresponding through holes. When the rotating wheel 202 rotates, the different through holes correspond to the beam splitting element through holes on the beam splitting element support 204. In use, the rotating wheel 202 is controlled to rotate by electric drive. DOE beam splitting elements 201 with different beam splitting capabilities are selected as needed, so that they correspond to the beam splitting element through holes on the beam splitting element support 204. When the rotating wheel 202 is fixed, the laser beam shaped by the optical path shaping module is incident on the DOE beam splitting element 201. After being split by the DOE beam splitting element 201, the laser beam is incident on the scanning galvanometer system 105.

[0119] Based on the principle of the Dammann grating, a DOE beam splitter 201 with the ability to split 2 and 4 beams uniformly is constructed. Combined with a multi-beam beam splitter system, different beam splitting conditions can be achieved by rotating a coaxial wheel 202. The coaxial wheel 202 can be fixed on a high-precision linear displacement platform and placed inside the mirror tube. By controlling the linear displacement platform, the distance between the DOE beam splitter 201 and the scanning galvanometer system 105 can be adjusted to achieve uniform distribution of split laser energy.

[0120] After the picosecond laser is output as a light source, it passes through the laser optical path system, where the DOE beam splitter 201 splits the single light source into beams. The scanning galvanometer system 105 can deflect multiple processing laser beams together to a predetermined position on the processing plane. The parallel multiple beams simultaneously illuminate different positions of the mirror surface of the same galvanometer unit of the scanning galvanometer system 105. When the mirror surface in the scanning galvanometer system 105 rotates, the angle of the entire mirror surface changes. The multiple parallel beams illuminating different positions of the mirror surface will be reflected with the exact same amount of angle change. The reflected multiple beams still maintain a parallel relationship, and their relative positional relationship scanned on the working plane is fixed. The rotation of the galvanometer will simultaneously and equally move the spot positions of the parallel multiple beams on the working plane, but the spacing and relative direction between them remain unchanged.

[0121] The scanning galvanometer system 105 can simultaneously control multiple split laser beams, allowing the exported laser beams to process in parallel, creating multiple identical patterns on the workpiece in a single scan, thereby greatly improving production efficiency.

[0122] The diffraction optics beam splitting module and the optical path shaping module are integrated in the same lens barrel, which is fixed on the gantry frame of the C-axis pitch motion module 106.

[0123] Because the beam is split by a diffraction optical beam splitting module, each laser beam exported by the scanning galvanometer system 105 has its corresponding processing trajectory. Only one laser beam needs to be operated according to its corresponding processing trajectory using the method of Example 1, while the other beams exported by the scanning galvanometer system 105 are processed in parallel.

[0124] Example 3

[0125] Same as Example 1, except that:

[0126] The signal received by the photoelectric receiver 308 is input to the control unit for processing. The control unit determines whether the focal spot of the focusing laser on the workpiece 309 is completely consistent with the focal spot of the incident light at the center of the optical axis of the F-Theta lens of the scanning galvanometer system 105. If they are completely consistent, it indicates focus; otherwise, it indicates defocus. The focusing unit is based on the principle of triangulation. According to the signal received by the photoelectric receiver 308, it adjusts the height of the F-Theta lens of the scanning galvanometer system 105 in the vertical direction (i.e., the Z-axis guide rail direction of the Z-axis motion module 102) to focus the laser emitted from the scanning galvanometer system 105. If the control unit receives a defocus signal (positive / negative), the focal spot is defocused. Focusing can be achieved by mounting the F-Theta lens on a linear reciprocating motion mechanism driven by a voice coil motor or piezoelectric ceramic inside the housing of the scanning galvanometer system 105, thereby dynamically adjusting the vertical position of the laser focus and achieving focusing. This focusing method has a fast response speed and high adjustment accuracy, which can effectively compensate for the focus shift caused by uneven workpiece surface or clamping error, ensuring that the laser processing is always in the best focusing state, thus improving processing accuracy and quality stability.

[0127] The beam shaping components introduced into the optical path system, in sequence according to the optical path transmission direction, include a polarization controller, a zoom system, and a beam shaper. The zoom system can achieve 1 to 8x zoom, and also relies on a high-precision linear displacement platform to achieve high-precision displacement adjustment.

[0128] The beam shaper is a round flat-top beam shaper, a square flat-top beam shaper, or a linear beam shaper.

[0129] The polarization controller optimizes the polarization state of light to maximize the diffraction efficiency of the beam shaper;

[0130] The zoom system is used to enlarge the initial spot size generated by the laser. On the one hand, it can meet the requirements of subsequent beam shaping and beam splitting for the incident spot size. On the other hand, the intensity distribution from the center to the edge of the spot will be more uniform after beam expansion, which is beneficial to the efficient processing of the electromagnetic array structure and the control of material damage in this invention. After passing through the zoom system, the beam exits to the beam shaper. The beam shaping can achieve precise control of the incident beam shaping. According to different needs, one of three options can be selected. After shaping, the beam arrives at the scanning galvanometer system 105.

[0131] A beam homogenization system can be constructed using a rotating diffuser / vibrating fiber to eliminate speckle caused by laser coherence. A wavefront correction system can be constructed using a deformable mirror (DM) with a Hartmann sensor to compensate for atmospheric turbulence / optical aberrations and correct phase aberrations in real time. A polarization control unit can be constructed using a waveplate / polarization beam splitter (PBS) to regulate the absorption characteristics of polarization matching materials. An adaptive focusing system can be constructed using an electric zoom lens / liquid crystal lens to achieve dynamic adjustment of the depth of focus.

[0132] Example 4

[0133] Similar to Example 1, the difference is that focus detection is achieved through distance sensor 107. In this case, it is only necessary to install distance sensor 107 on bracket 108. Using triangulation, the vertical distance between the light emission point of scanning galvanometer system 105 and the measured surface of workpiece is calculated through distance sensor 107, and it is determined whether the distance meets the focal length of light emitted by scanning galvanometer system 105.

[0134] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this invention can be achieved, and this is not limited herein.

[0135] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A method for high-efficiency, high-precision machining of complex curved surfaces using a five-axis linkage complex curved surface high-efficiency, high-precision machining device, characterized in that, The five-axis linkage complex curved surface high-efficiency and high-precision machining device includes a scanning galvanometer system (105), a Z-axis motion module (102), an X-axis motion module (104), a C-axis pitch motion module (106), a Y-axis motion module (110), a stage (111), and an A-axis rotation module (112). The scanning galvanometer system (105) is connected to the C-axis pitch motion module (106). The scanning galvanometer system (105) can perform pitch and rotation motion under the drive of the C-axis pitch motion module (106). The Y-axis motion module (110) is provided in the middle of the base (109). The stage (111) is connected to the Y-axis motion module (110) through the A-axis rotation module (112). The A-axis rotation module (112) can drive the stage (111) to perform rotational motion. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces includes the following: Step 1, Determine the initial point: The center point of the light spot formed by the laser emitted by the scanning galvanometer system (105) when it is in its original position before processing and irradiates the outer surface of the workpiece to be processed is recorded as the initial point A0. Step 2, construct the following coordinate system: Establish a three-dimensional coordinate system with the Z-axis vertex of the workpiece as the origin, and the coordinate axes as the X-axis, Y-axis, and Z-axis, respectively. Then, translate the origin O downward along the Z-axis to the machining point A. n On the cross-section of the workpiece to be processed, point O' is formed. The coordinate axes X' and Y' are established with point O' as the origin, where the X' axis is parallel to the X axis and the Y' axis is parallel to the Y axis. Step 3: Based on the following five data points (ae), control the servo motors of the corresponding Z-axis motion module (102), X-axis motion module (104), and C-axis pitch motion module (106) to adjust the position of the scanning galvanometer system (105). Control the servo motors of the corresponding Y-axis motion module (110) and A-axis rotation module (112) to adjust the position of the workpiece to be processed on the stage (111), so that the laser beam exported by the scanning galvanometer system (105) can sequentially irradiate each processing point on the workpiece to be processed according to the processing trajectory to process the microstructure units. a. Process the nth processing point A n At that time, the drive motor of the A-axis rotation module (112) needs to drive the stage (111) to rotate by an angle change. , ;in In processing A n The A-axis rotation module (112) drives the stage (111) to rotate by an angle. n is an integer between 1 and N, where N is the total number of processing points. In processing A n-1 The drive motor of the A-axis rotation module (112) drives the stage (111) to rotate by an angle. = ; is ∠X'O'A n , For ∠O'A n F n F n For the outer surface of the workpiece to be processed, A n The normal of the point K n The intersection of the backward extension of the projection in the X'O'Y' plane and the Y' axis; is ∠X'O'A n-1 , For ∠O'A n-1 F n-1 ;F n-1 For the complex surface of the workpiece to be processed, i.e., the outer surface, A n-1 The normal of the point K n-1 The intersection of the backward extension of the projection onto the X'O'Y' plane and the Y' axis, when n=1, and The initial point A0 is replaced with A from step two. n The points are ∠X'O'A0 and ∠O'A0F0 in the X'O'Y' plane obtained after the point; F0 is the intersection of the backward extension of the projection of the normal K0 passing through point A0 on the complex surface of the workpiece to be processed, i.e. the outer surface, with the Y' axis; b. When machining the nth machining point, the motor of the C-axis pitch motion module (106) needs to drive the scanning galvanometer system (105) to rotate by an angle change. ; In processing A n The angle of rotation of the scanning galvanometer system (105) driven by the motor of the C-axis pitch motion module (106) at point A n The line Z' drawn from the point parallel to the Z-axis intersects the normal line K. n The included angle between them is , through A n-1 The line Z' drawn from the point parallel to the Z-axis intersects the normal line K. n-1 The included angle between them is ; When n=1, Initial value; c. When machining the nth machining point, the servo motor of the Y-axis motion module (110) needs to drive the displacement change of the stage (111). , ; in: For processing A n The servo motor of the Y-axis motion module (110) needs to drive the displacement of the stage (111). = ; For processing A n-1 The servo motor of the Y-axis motion module (110) needs to drive the displacement of the stage (111). Longitudinal horizontal displacement compensation when n=1 =0; Processing point A n The corresponding line segment O'A n Length, Processing point A n-1 The corresponding line segment O'A n-1 The length of n when n=1 The initial value is to replace the initial point A0 with A in step two. n The length of the line segment O'A0 obtained after the point; e is the vertical distance between the pitch rotation center point (1051) of the scanning galvanometer module (105) and the rotation axis (3092) of the workpiece to be processed; K is the height difference in the Z-axis direction between the pitch rotation center point (1051) and the z-axis vertex (3091) of the workpiece to be processed. d. When machining the nth machining point, the servo motor of the X-axis motion module (104) needs to drive the scanning galvanometer system (105) to move along the crossbeam (103) by the displacement change. , ;in For processing A n The servo motor of the X-axis motion module (104) needs to drive the scanning galvanometer system (105) to move along the crossbeam (103) by a certain displacement. , For processing A n-1 The servo motor of the X-axis motion module (104) needs to drive the scanning galvanometer system (105) to move along the crossbeam (103) by a certain displacement; ; e. When machining the nth machining point, the servo motor of the Z-axis motion module (102) needs to drive the crossbeam (103) to move by the displacement change. ,in: ;in For processing A n The servo motor of the Z-axis motion module (102) needs to drive the crossbeam (103) to move by a displacement, wherein: = , For processing A n-1 The servo motor of the Z-axis motion module (102) needs to drive the crossbeam (103) to move by a certain displacement. = Vertical displacement compensation when n=1 It is 0.

2. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The position of each processing point on the workpiece to be processed is determined by the coordinate information of the processing point, which is obtained according to the following steps: Step 1: Import the workpiece model data into Gallop software. In Gallop software, establish two mutually perpendicular planes as the reference for the direction of the parameter space coordinate axes. Based on this reference, establish the parameter space coordinate axes (u, v) with the Z-axis vertex of the workpiece model as the origin. Step 2: Divide the workpiece model into equal parts in the parameter space of the coordinate axes, and establish a plane that passes through the division point and is perpendicular to the plane containing the (u, v) coordinate axis. The tangent point of each plane to the free surface outside the workpiece model is the center point of the corresponding microstructure unit to be processed. Step 3: Import the obtained center point coordinate file into Python 3.10 software. Within the software, construct a mathematical model of the NURBS curve interpolation algorithm to identify the imported points and perform point interpolation between every two points to achieve a smooth transition between points. Step 4: Export the coordinate file of all points, including the center point and all interpolation points received by the software in Step 3, using Python 3.10 software. Each point is a processing point to be processed, thus obtaining the coordinate file of all processing points.

3. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 2, characterized in that, The processing points are distributed in an array, and the processing points are connected in sequence to form a processing trajectory. Since the workpiece is a non-rotating body, the processing trajectory is a non-smooth spiral line, which spirals down from the z-axis of the workpiece.

4. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The five-axis linkage complex curved surface high-efficiency and high-precision processing device also includes a laser, a laser optical path system, a double-sided gantry (101), a crossbeam (103), and a base (109). The scanning galvanometer system (105) is used to deflect the laser beam emitted by the laser to a predetermined position on the workpiece to be processed. The laser optical path system is optically coupled between the laser and the scanning galvanometer system (105) to guide the laser beam from the laser to the scanning galvanometer system (105). The base (109) is provided with a double-sided gantry (101). The front ends of the two columns of the double-sided gantry (101) are respectively provided with Z-axis motion modules (102). The sliding end of the Z-axis motion module (102) is provided with a crossbeam (103). The crossbeam (103) is provided with an X-axis motion module (104). The sliding end of the X-axis motion module (104) is provided with a C-axis pitch motion module (106).

5. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 4, characterized in that, The laser optical path system includes, in sequence, the following components along the laser transmission direction: A beam guiding device for receiving and guiding the laser beam emitted by the laser; An optical path shaping component, located downstream of the beam guiding device, is used to shape the laser beam; And a diffraction optical beam splitting module, located downstream of the optical path shaping component, is used to split the shaped laser beam into multiple processing laser beams and guide them to the scanning galvanometer system (105).

6. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The Y-axis motion module (110), Z-axis motion module (102) and X-axis motion module (104) are all lead screw guide rail modules.

7. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The A-axis rotation module (112) includes a drive motor and a bearing. The drive motor is fixed to the moving end of the Y-axis motion module (110). The stage (111) is rotatably mounted on the moving end of the Y-axis motion module (110) via the bearing. The bearing is connected to the output shaft of the drive motor and is driven to rotate by the output shaft of the drive motor.

8. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The Y-axis motion module (110) is covered with a soft dust cover with an opening. The stage (111) is placed in the opening, and the drive motor of the A-axis rotation module (112) is located inside the soft dust cover.

9. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The C-axis pitch motion module (106) includes a connecting plate, a gantry frame, and a motor; wherein the connecting plate is a bent plate, one end of which is located on the back of the crossbeam (103) and fixed to the moving end of the X-axis motion module (104), and the other end is located on the front end of the crossbeam (103), and a gantry frame is fixed on it. The gantry frame is equipped with a motor, and the output shaft of the motor is connected to the scanning galvanometer system (105), so that the scanning galvanometer system (105) can perform pitch and rotation motion under the drive of the motor.

10. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 1, characterized in that, The five-axis linkage complex curved surface high-efficiency and high-precision processing device also includes a focusing unit, which includes a focusing laser, a pentagonal prism (301), and a transmitting system mainly composed of a filter (302), a first reflecting mirror (303), and a first focusing objective (304), and a receiving system mainly composed of a filter (302), a second reflecting mirror (305), a second focusing objective (306), a slit (307), and a photoelectric receiver (308). The laser emitted by the focusing laser is processed by the filter (302) and then incident on the first reflecting mirror (303). The laser reflected by the first reflecting mirror (303) enters the first focusing objective (304) and passes through the first focusing objective (308). 304) The focused beam is incident on a pentagonal prism (301) on one side. The beam passing through the pentagonal prism (301) illuminates the workpiece (309) on the stage (111) to form a light spot. At the same time, the laser beam exported by the scanning galvanometer system (105) also illuminates the workpiece (309) to form a light spot. The two parts of the light pass through the pentagonal prism (301) on the other side and are incident on the second focusing objective (306). After being focused by the second focusing objective (306), the beam is incident on the second reflecting mirror (305). The beam reflected by the second reflecting mirror (305) enters the filter (302). The beam processed by the filter (302) enters the photodetector (308) through the slit (307).

11. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 10, characterized in that, The focusing laser, the emitting system and the pentaangular prism (301) corresponding to the emitting system are fixed to the front end of the scanning galvanometer system (105) by a bracket (108), and the receiving system and the pentaangular prism (301) corresponding to the receiving system are fixed to the rear end of the scanning galvanometer system (105) by a bracket.

12. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 5, characterized in that, The diffraction optical beam splitting module of the laser optical path system includes a DOE beam splitting element (201), a rotating wheel (202), and a beam splitting element support (204). The rotating wheel (202) and the beam splitting element support (204) are connected by the same rotating shaft (203). The beam splitting element support (204) is provided with beam splitting element through holes. The rotating wheel (202) is provided with multiple through holes around the rotating shaft (203) for installing different DOE beam splitting elements (201). Different DOE beam splitting elements (201) are fixed in the corresponding through holes. When the rotating wheel (202) rotates, different DOE beam splitting elements (201) correspond to the beam splitting element through holes on the beam splitting element support (204).

13. The five-axis linkage ultrafast laser high-efficiency and high-precision machining method for complex curved surfaces according to claim 12, characterized in that, The diffraction optics beam splitting module and the optical path shaping component are integrated in the same lens barrel, which is fixed on the gantry of the C-axis pitch motion module (106).

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