Coated turret with bias input

Abstract

The application discloses a coated rotary frame with bias input, which adopts a "ball" structure instead of bearing sliding, because the "ball" structure does not need precision and allows a certain deformation amount, so that the rotary frame can keep normal rotation operation in a relatively high temperature environment; secondly, through the setting of the rotary frame lining plate assembly, the influence of temperature on the "ball" structure can be indirectly reduced; and a "labyrinth" channel structure is formed at the matching position between the upper lining plate and the lower lining plate, so that the sputtering particles need to change the direction for three times or more times to reach the surface of important parts, which can directly protect the insulating part between the rotary frame system and the vacuum chamber, and ensures the stability of the bias system; furthermore, through the combined structure of the contact conductive rod, the conductive rod connecting seat and the compression spring, the contact conductive rod can keep good sliding contact with the revolute gear without interruption, so that the negative electric field is uninterruptedly conducted to the rotary frame product, the deposition rate of sputtering is improved, and the production capacity is improved.

Description

Technical Field

[0001] This invention belongs to the technical field of vacuum coating equipment, specifically relating to a coating turntable with bias input. Background Technology

[0002] In magnetron sputtering coating equipment in the vacuum coating industry, when a substrate or product (hereinafter referred to as the product) needs to be coated, it is generally placed on a rotating workpiece holder, simply called a "rotary holder". Magnetron sputtering coating processes generally require relatively high temperatures to preheat the product and reduce the attraction of the film layer. However, when the temperature reaches around 300℃, the limitations of the precision bearing structure can cause deformation due to high temperature, leading to jamming and loss of bearing sliding function. This can cause the entire rotating holder structure to collapse and stop rotating, and in severe cases, the rotating holder may become stuck, resulting in product scrap. Furthermore, magnetron sputtering coating processes typically require a bias system to improve the deposition rate and control the angle at which sputtered ions reach the product surface, thereby improving product yield and production capacity. If the bias system has poor contact with the rotating holder or if sputtered particles contaminate the insulating components, arcing can occur in the rotating holder, leading to instability in the bias system. This is counterproductive, negatively impacting product yield and production capacity. Summary of the Invention

[0003] The problem to be solved by the present invention is to provide a coating turntable with bias input, which can not only operate stably in a relatively high temperature environment, but also improve the deposition rate of coating, thereby improving product yield and production capacity.

[0004] To solve the above-mentioned technical problems, the present invention provides a coating rotating frame with bias input, which is disposed in a vacuum cavity and includes a rotating frame system body, a rotating frame liner assembly and a bias system;

[0005] The main body of the rotating frame system includes a revolution support, a rotation rod, a revolution drive mechanism, and a rotation drive mechanism. The revolution support is a rotating structure, and multiple rotation rods are evenly arranged along the circumference of the revolution support. Each rotation rod is rotatably connected to the revolution support. The revolution drive mechanism includes a power input component, an input gear, and a revolution gear. The power input component is fixed to the vacuum chamber and is connected to the input gear, enabling it to drive the input gear to rotate. The input gear meshes with the revolution gear, and the revolution gear is coaxially fixed to the revolution support. On the frame, the orbital support can revolve around its own axis; the rotation drive mechanism includes a fixed gear fixing seat, a load-bearing fixed gear, and a rotating gear. The fixed gear fixing seat is fixed on the vacuum cavity, and the load-bearing fixed gear is fixed on the fixed gear fixing seat; the orbital gear is rotatably disposed above the load-bearing fixed gear, and the orbital gear and the fixed gear are arranged coaxially; the rotating gear meshes with the load-bearing fixed gear, and the rotating gear is coaxially fixed on the rotating hanging rod, which can rotate around its own axis; multiple orbital ball bearings are provided between the orbital gear and the load-bearing fixed gear;

[0006] The rotating frame liner assembly includes an upper liner, a lower liner, and a ceramic insulator support. The upper liner is suspended above the planetary gear and supported and fixed by the ceramic insulator support. The lower liner is fixed to the vacuum cavity and disposed in the inner ring of the load-bearing fixed gear. A "maze-like" channel structure is formed at the mating point between the lower liner and the upper liner.

[0007] The bias system includes a bias input component and a bias contact component. The bias input component is fixed on the vacuum chamber and connected to the bias contact component. The bias contact component is fixed on the load-bearing fixed gear and abuts against the inner ring wall of the revolution gear.

[0008] As a preferred embodiment of the present invention, the upper surface of the load-bearing fixed gear is provided with an annular groove for accommodating and guiding the orbiting balls, and the lower surface of the orbiting gear is provided with a circular groove for rolling contact with the orbiting balls; the groove wall surface of the circular groove is an arc surface that mates with the orbiting balls; the number of orbiting balls is 2 / 3 to 3 / 4 of the number of the annular grooves.

[0009] As a preferred embodiment of the present invention, the "maze-like" channel structure is implemented in the following manner: the upper liner has a downwardly extending upper cylinder in the middle, with openings at both the upper and lower ends; the lower liner has an upwardly extending lower cylinder on its outer side, with an opening at the upper end and a closed lower end; the inner wall of the lower cylinder has a radially extending annular horizontal plate; the lower end of the upper cylinder is coaxially inserted into the lower cylinder, the inner diameter of the lower cylinder is larger than the outer diameter of the upper cylinder, the annular horizontal plate is located directly below the upper cylinder and is separate from the lower end of the upper cylinder, and the upper end of the lower cylinder is separate from the lower surface of the upper liner.

[0010] As a preferred embodiment of the present invention, the ceramic insulator support is provided in multiple ways, and the multiple ceramic insulator supports are respectively installed on the radially outer upper surface and the radially inner upper surface of the revolution gear, and are evenly distributed along the circumferential direction to form two rings.

[0011] In a preferred embodiment of the present invention, the revolution gear has a plurality of mounting holes evenly arranged along its circumference for mounting the rotating rod. A rotation connecting assembly is mounted on the mounting holes. The rotation connecting assembly includes a rotation shaft, rotating balls, and a ball bearing holder. The ball bearing holder is fixed to the revolution gear by screws and mates with the mounting holes. The rotation shaft passes through the ball bearing holder from top to bottom. The upper end of the rotation shaft is fixedly connected to the rotating rod, and the lower end of the rotation shaft is fixedly connected to the revolution gear. At least one annular guide rail is formed between the middle part of the rotation shaft and the inner cavity of the ball bearing holder. A plurality of rotating balls are provided in the annular guide rail. The number of rotating balls is 2 / 3 to 3 / 4 of the number of balls filling one annular guide rail.

[0012] As a preferred embodiment of the present invention, the ball bearing fixing seat is composed of an outer mounting base, an inner bushing, and a top dust cover; the rotating shaft has a shoulder in the middle, and the annular guide rail has two rings, one ring of the annular guide rail is disposed between the lower end face of the shoulder and the bottom surface of the inner cavity of the inner bushing, and the other ring of the annular guide rail is disposed on the upper end face of the shoulder; the lower end face of the shoulder, the upper end face of the shoulder, and the bottom surface of the inner cavity of the inner bushing corresponding to the annular guide rail are all arc surfaces that cooperate with the rotating ball bearing.

[0013] As a preferred embodiment of the present invention, a fixed gear insulating seat is provided between the load-bearing fixed gear and the fixed gear fixing seat; the load-bearing fixed gear is fixed on the fixed gear fixing seat by screws, and the screws are fitted with insulating sleeves.

[0014] As a preferred embodiment of the present invention, the orbital support includes orbital support rods and an upper orbital flange. A plurality of orbital support rods are evenly arranged in the circumferential direction of the upper orbital flange. The upper end of the orbital support rod is fixedly connected to the upper orbital flange, and the lower end of the orbital support rod is fixedly connected to the orbital gear.

[0015] In a preferred embodiment of the present invention, the bias input assembly includes a bias input shaft, a fixed flange, a first input shaft insulating sleeve, a second input shaft insulating sleeve, an input shaft dust cover, and a bias input protective cover. The fixed flange is externally fixed to the vacuum chamber. The inner hole of the fixed flange is fixedly connected to one end of the first input shaft insulating sleeve, and the other end of the first input shaft insulating sleeve is fixedly connected to the inner hole of the second input shaft insulating sleeve. The outer side of the second input shaft insulating sleeve is fixedly connected to the input shaft dust cover. The bias input shaft sequentially passes through the first input shaft insulating sleeve, the second input shaft insulating sleeve, and the input shaft dust cover. A flexible conductive element is connected to the vacuum end of the bias input shaft, and a protective cover is connected to the atmospheric end of the bias input shaft. The bias input protective cover is described above, and the atmospheric end of the bias input shaft is used to connect to the negative terminal of the bias power supply; the bias contact assembly includes a contact conductive rod, a conductive rod connecting seat, a compression spring, and a protective cover; the conductive rod connecting seat is fixed on the load-bearing fixed gear, the contact conductive rod is slidably disposed on the conductive rod connecting seat, one end of the contact conductive rod is connected to the flexible conductive element, the other end of the contact conductive rod is the contact end, a compression spring is provided between the contact conductive rod and the conductive rod connecting seat, and the contact end of the contact conductive rod abuts against the inner ring wall of the revolving gear under the elastic force of the compression spring; the protective cover is disposed above the flexible conductive element, the contact conductive rod, the conductive rod connecting seat, and the compression spring.

[0016] As a preferred embodiment of the present invention, the flexible conductive element is made of copper; the conductive rod is made of brass.

[0017] The coating turntable with bias input implemented in this invention has the following advantages compared with the prior art:

[0018] (1) The coating frame with bias input in this embodiment of the invention adopts a "ball" structure instead of bearing sliding. Because the "ball" structure does not need to be precise and allows a certain amount of deformation, the frame can maintain normal rotation operation in a relatively high temperature environment. The equipment operation test results: the equipment temperature is about 350℃, and it runs smoothly in a vacuum environment for 1 hour without jamming.

[0019] (2) The coating turntable with bias input in the embodiment of the present invention can indirectly reduce the influence of temperature on the "ball" structure by setting the turntable liner assembly, so that the "ball" structure can withstand higher temperatures; and a "maze" channel structure is formed at the joint between the upper liner and the lower liner. This "maze" channel structure makes the sputtered particles need to change direction three or more times before reaching the surface of important parts. It can directly protect the insulation between the turntable system and the vacuum chamber. The insulation will not be contaminated by the sputtered particles diffusing, which would cause the negative electric field of the bias system to be conducted to the vacuum chamber instead of the turntable product, thus ensuring the stability of the bias system.

[0020] (3) The coating turntable with bias input in this embodiment of the invention uses a combination structure of contact conductive rod, conductive rod connecting seat and compression spring to enable the contact conductive rod to maintain good sliding contact with the inner ring wall of the revolution gear without interruption, so that the negative electric field of the bias system is continuously conducted to the turntable product, thereby enabling sputtered ions to be accurately deposited on the product with negative electric field under negative electric field, improving the sputtering deposition rate and increasing production capacity; and due to the good contact of the bias input structure, arcing caused by poor contact is reduced, thereby achieving the purpose of improving product yield. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below.

[0022] Figure 1 This is an isometric view of a coating turntable with bias input according to an embodiment of the present invention;

[0023] Figure 2 This is an isometric view of the coating turntable with bias input according to an embodiment of the present invention;

[0024] Figure 3 This is a front view of the coating turntable with bias input according to an embodiment of the present invention;

[0025] Figure 4 It is at Figure 3 A cross-sectional view along direction AA in the structure shown;

[0026] Figure 5 It is at Figure 4 A magnified view of region B in the structure shown;

[0027] Figure 6 It is at Figure 4 A magnified view of region C in the structure shown;

[0028] Figure 7 This is a schematic diagram of a "maze-like" passageway structure;

[0029] Figure 8This is a schematic diagram of the self-rotating connection component.

[0030] Marked in the image:

[0031] The main body of the rotating frame system is 10; the revolution bracket is 11; the revolution support rod is 111; the revolution upper flange is 112; the rotation hanging rod is 12; the revolution drive mechanism is 13; the power input component is 131; the input gear is 132; the revolution gear is 133; the circular groove is 134; the rotation drive mechanism is 14; the fixed gear fixing seat is 141; the load-bearing fixed gear is 142; the rotation gear is 143; the annular groove is 144; the fixed gear insulating seat is 145; the screw is 146; the insulating sleeve is 147; and the revolution ball bearing is 15.

[0032] 20. Rotary frame liner assembly; 21. Upper liner; 22. Lower liner; 23. Ceramic insulator support post; 24. "Maze-like" channel structure; 25. Upper cylinder; 26. Lower cylinder; 27. Annular horizontal plate;

[0033] Bias system 30; bias input assembly 31; bias input shaft 311; fixed flange 312; first input shaft insulating sleeve 313; second input shaft insulating sleeve 314; input shaft dust cover 315; bias input protective cover 316; bias contact assembly 32; contact conductive rod 321; conductive rod connecting seat 322; compression spring 323; protective cover 324; flexible conductive element 33;

[0034] Rotation connection assembly 40; rotation shaft 41; circular guide rail 411; shaft shoulder 412; rotation ball 42; ball fixing seat 43; hanging rod fixing pin 44; external mounting seat 431; internal bushing 432; top dust cover 433; mounting plate 434. Detailed Implementation

[0035] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., used to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] like Figures 1 to 8 As shown, a preferred embodiment of the present invention provides a coating gantry with bias input, which is disposed in a vacuum chamber and includes a gantry system body 10, a gantry liner assembly 20 and a bias system 30.

[0038] like Figure 1 and Figure 2 As shown, the main body 10 of the rotating frame system includes a revolution support 11, a rotation hanging rod 12, a revolution drive mechanism 13, and a rotation drive mechanism 14. The revolution support 11 is a rotating body structure, and a plurality of rotation hanging rods 12 are evenly arranged in the circumferential direction of the revolution support 11. Each rotation hanging rod 12 is rotatably connected to the revolution support 11. The revolution drive mechanism 13 is connected to the revolution support 11 and can drive the revolution support 11 to rotate around its own axis. The rotation drive mechanism 14 is connected to the rotation hanging rod 12 and can drive the rotation hanging rod 12 to rotate around its own axis.

[0039] In this embodiment, as Figure 2 As shown, the revolution drive mechanism 13 includes a power input component 131 (specifically powered by a motor), an input gear 132, and a revolution gear 133. The power input component 131 is fixed to the vacuum chamber and is connected to the input gear 132, enabling the input gear 132 to rotate. The input gear 132 meshes with the revolution gear 133, which is coaxially fixed to the revolution support 11. During operation, the power input component 131 provides power, causing the input gear 132 to rotate. The input gear 132 then drives the revolution gear 133 to revolve around its own axis, thereby realizing the revolution of the revolution support 11. The transmission ratio between the input gear 132 and the revolution gear 133 is greater than 1, meaning the rotational speed of the revolution gear 133 is lower than that of the input gear 132. The revolution gear 133 serves to reduce speed and increase torque.

[0040] To achieve the goal of driving the self-rotating suspension rod 12 to rotate around its own axis under the same power input component 131, such as Figure 2 and Figure 5 As shown, the self-rotation drive mechanism 14 includes a fixed gear fixing seat 141, a load-bearing fixed gear 142, and a self-rotating gear 143. The fixed gear fixing seat 141 is fixed on the vacuum chamber, and the load-bearing fixed gear 142 is fixed on the fixed gear fixing seat 141. The upper surface of the load-bearing fixed gear 142 is provided with an annular groove 144, and a plurality of orbiting balls 15 are provided in the annular groove 144. The orbiting gear 133 is rotatably disposed above the load-bearing fixed gear 142, and the orbiting gear 133 is coaxially arranged with the fixed gear. The lower surface of the orbiting gear 133 is provided with a circular groove 134 that rolls in contact with the orbiting balls 15. The self-rotating gear 143 meshes with the load-bearing fixed gear 142, and the self-rotating gear 143 is coaxially fixed on the self-rotating hanging rod 12.

[0041] It is understandable that the load-bearing fixed gear 142 is in a fixed state, serving as a basic component for support and transmission. By designing an annular groove 144 on the load-bearing fixed gear 142, it is used to accommodate and guide the orbiting balls 15. The balls roll within the annular groove 144, converting sliding friction into rolling friction, significantly reducing friction and improving transmission efficiency. At the same time, there is no need for precise contact between the orbiting balls 15 and between the orbiting balls 15 and the annular groove 144, providing a certain amount of room for movement to accommodate expansion or contraction caused by temperature changes.

[0042] Because the planetary gear 133 contacts and slides on the planetary ball 15, the resistance is small and the rotation is smooth. Furthermore, by providing a circular groove 134 on the lower surface of the planetary gear 133, the planetary gear 133 is prevented from deviating from the planetary ball 15 during movement, thereby ensuring the stability and accuracy of the transmission of the planetary gear 133.

[0043] Since the self-rotating gear 143 is fixed on the self-rotating hanging rod 12, the self-rotating gear 143 can revolve and rotate together with the revolution gear 133. When the self-rotating gear 143 meshes with the load-bearing fixed gear 142, the self-rotating gear 143 will be driven to rotate, thus realizing planetary rotation. Since the product is fixed on the self-rotating hanging rod 12, the product also achieves planetary rotation (also known as revolution and rotation) in the end, so that the film can be evenly coated on all surfaces of the product.

[0044] Furthermore, a ball bearing structure is also used at the connection between the self-rotating hanging rod 12 and the revolution gear 133. Its principle is the same as that of the revolution ball bearing 15 in the main body 10 of the rotating frame system, serving both rolling contact and load-bearing functions. In specific implementation, such as... Figure 5 and Figure 8As shown, the planetary gear 133 has a plurality of mounting holes evenly arranged in the circumferential direction for mounting the rotating rod 12. A rotating connection assembly 40 is installed in the mounting holes. The rotating connection assembly 40 includes a rotating shaft 41, rotating balls 42, and a ball fixing seat 43. The ball fixing seat 43 is fixed to the planetary gear 133 by screws and cooperates with the mounting holes. The rotating shaft 41 passes through the ball fixing seat 43 from top to bottom. The upper end of the rotating shaft 41 is fixedly connected to the rotating rod 12 by a rod fixing pin 44. The lower end of the rotating shaft 41 is fixedly connected to the rotating gear 143. At least one annular guide rail 411 is formed between the middle part of the rotating shaft 41 and the inner cavity of the ball fixing seat 43. A plurality of rotating balls 42 are provided in the annular guide rail 411.

[0045] Understandably, the self-rotating gear 143 rotates due to the rotation of the planetary gear 133. The self-rotating gear 143, the self-rotating shaft 41, and the self-rotating rod 12 are fixed in sequence. The self-rotating rod 12 rotates stably under the rolling contact of the self-rotating balls 42, with low resistance and smooth rotation. Furthermore, the ball bearing fixing seat 43 fixes the self-rotating balls 42 on at least one circular guide rail 411, preventing the self-rotating balls 42 from deviating from the circular guide rail 411 during movement, thereby ensuring the stability and accuracy of the transmission of the self-rotating rod 12. It should also be noted that the self-rotating connection assembly 40 is a modular design, which can be easily and quickly installed on the planetary gear 133, improving assembly and maintenance efficiency.

[0046] For example, such as Figure 8As shown, the ball bearing fixing seat 43 is composed of an outer mounting seat 431, an inner bushing 432, and a top dust cover 433; the rotating shaft 41 has a shoulder 412 in the middle, and the annular guide rail 411 has two rings, one ring of the annular guide rail 411 is located between the lower end face of the shoulder 412 and the bottom surface of the inner cavity of the inner bushing 432, and the other ring of the annular guide rail 411 is located on the upper end face of the shoulder 412. The external mounting base 431 mates with the mounting hole, and its outer side is provided with a mounting plate 434 for screw installation. The internal bushing 432 is disposed inside the external mounting base 431 and is used to mate with the middle shoulder 412 of the rotating shaft 41. The upper end of the internal bushing 432 allows the middle shoulder 412 of the rotating shaft 41 to enter, while the lower end of the internal bushing 432 only allows part of the shaft to extend out and serves as the base to support the rotating shaft 41. The top dust cover 433 is placed on the upper end of the external mounting base 431, so that the internal bushing 432 is within the space formed by the external mounting base 431 and the top dust cover 433, thereby preventing the rotating ball bearing 42 placed inside the internal bushing 432 from being contaminated by dust or other particles. The design of the two circular guide rails 411 optimizes the axial and radial load distribution of the rotating shaft 41. The circular guide rail 411 between the lower end face of the shoulder 412 and the inner bushing 432 forms an axial bearing surface, in which the rotating balls 42 mainly bear the axial and radial loads. The circular guide rail 411 on the upper end face of the shoulder 412 forms a radial positioning part, in which the rotating balls 42 mainly bear the radial loads.

[0047] For example, considering that the number of balls in the "ball bearing" structure cannot be too many or too few, because too many balls will cause space congestion and may cause jamming when the temperature is high; too few balls will result in excessive space gaps, which may lead to unevenness and ultimately affect the smoothness of operation; therefore, in order to achieve the best effect in terms of the number of balls, the number of the orbiting balls 15 is 2 / 3 to 3 / 4 of the number of balls filling one circle of the annular groove 144; and the number of the rotating balls 42 is 2 / 3 to 3 / 4 of the number of balls filling one circle of the annular guide rail 411.

[0048] For example, the groove wall of the circular groove 134 is an arc surface that mates with the revolving ball 15; the lower end face of the shoulder 412 corresponding to the annular guide rail 411, the upper end face of the shoulder 412, and the bottom surface of the inner cavity of the inner bushing 432 are all arc surfaces that mate with the rotating ball 42. The arc surface design helps to fit closely with the surface of the ball, ensuring that the ball can roll smoothly, reducing friction and wear, while ensuring the accuracy of the movement.

[0049] For example, such as Figure 5As shown, a fixed gear insulating seat 145 is provided between the load-bearing fixed gear 142 and the fixed gear fixing seat 141 to separate the fixed gear fixing seat 141 and the load-bearing fixed gear 142, ensuring that the rotating frame system is insulated from the vacuum chamber. In this embodiment, five fixed gear fixing seats 141 are welded to the vacuum chamber and are evenly distributed along the circumference at the lower part of the load-bearing fixed gear 142, which serve to bear the load and insulate the rotating frame system from the vacuum chamber. Furthermore, the load-bearing fixed gear 142 is fixed to the fixed gear fixing seat 141 by screws 146, and the screws 146 are fitted with insulating sleeves 147.

[0050] For example, such as Figure 1 and Figure 2 As shown, the orbital support 11 includes orbital support rods 111 and an upper orbital flange 112. Multiple orbital support rods 111 are evenly arranged along the circumference of the upper orbital flange 112. The upper end of each orbital support rod 111 is fixedly connected to the upper orbital flange 112, and the lower end of each orbital support rod 111 is fixedly connected to the orbital gear 133. Thus, the orbital gear 133, the orbital support rods 111, and the upper orbital flange 112 together form a stable integrated structure, enabling the product to rotate stably on the integrated rotating frame system.

[0051] For example, there are 12 rotating rods 12 in this embodiment (also called 12 axes), but other numbers of axes can be designed according to the size and shape of the product, such as 8 axes, 10 axes and 14 axes; there are 3 orbital support rods 111 in this embodiment, but other numbers can be designed according to the size and shape of the product, as long as the stability of the overall structure is ensured.

[0052] In summary, the coating turntable with bias input in this embodiment of the invention uses a "ball" structure instead of a bearing for sliding. Because the "ball" structure does not require precision and allows for a certain amount of deformation, the turntable can maintain normal rotation and operation in a relatively high-temperature environment. The equipment's operation test results are as follows: the equipment operates smoothly without jamming for 1 hour in a vacuum environment at a temperature of about 350°C.

[0053] like Figure 1 and Figure 7 As shown, the rotating frame liner assembly 20 includes an upper liner 21, a lower liner 22, and a ceramic insulator support 23. The upper liner 21 is suspended above the revolution gear 133 and supported and fixed by the ceramic insulator support 23. The lower liner 22 is fixed on the vacuum cavity and disposed in the inner ring of the load-bearing fixed gear 142. A "maze-like" channel structure 24 is formed at the mating point between the lower liner 22 and the upper liner 21.

[0054] In this embodiment, as Figure 7As shown, the "maze-like" channel structure 24 is implemented in the following way: the upper liner 21 is suspended above the revolving gear 133 and supported and fixed by the ceramic insulator support 23; the lower liner 22 is fixed on the vacuum cavity and disposed in the inner ring of the load-bearing fixed gear 142; the upper liner 21 has a downwardly extending upper cylinder 25 in the middle, and the upper and lower ends of the upper cylinder 25 are open; the lower liner 22 has an upwardly extending lower cylinder on its outer side. The lower cylinder 26 has an open upper end and a closed lower end, and its inner wall is provided with a radially extending annular horizontal plate 27. The lower end of the upper cylinder 25 is coaxially inserted into the lower cylinder 26. The inner diameter of the lower cylinder 26 is larger than the outer diameter of the upper cylinder 25. The annular horizontal plate 27 is located directly below the upper cylinder 25 and is separated from the lower end of the upper cylinder 25. The upper end of the lower cylinder 26 is separated from the lower surface of the upper liner 21.

[0055] In a vacuum environment, where there are fewer particles, heat transfer relies solely on infrared radiation. Essentially, in a vacuum, most of the heat is radiated linearly. Therefore, the "maze-like" channel structure 24 formed at the joint between the upper liner 21 and the lower liner 22 effectively blocks most of the heat. The upper liner 21 is then fixed using ceramic insulator supports 23, effectively "suspending" it above the rotating gear 133. Consequently, the heat from the liner does not transfer to the rotating gear 133 and the ball bearings, resulting in low temperatures for these components. This allows the coated rotor to operate stably in high-temperature environments. It should also be noted that the ceramic insulator support 23 is a standard component, and its ceramic material offers advantages such as low outgassing in a vacuum environment, high-temperature resistance, and good insulation, making it well-suited for the application scenarios described in this invention.

[0056] For example, such as Figure 1 As shown, multiple ceramic insulator supports 23 are provided. The multiple ceramic insulator supports 23 are respectively installed on the radially outer upper surface and the radially inner upper surface of the planetary gear 133, and are evenly distributed along the circumference to form two rings, so as to ensure that the upper liner 21 rotates stably with the planetary gear 133.

[0057] For example, since the rotating frame liner assembly 20 needs to have a certain strength to prevent high-temperature deformation, the lower liner 22 and the upper liner 21 are preferably made of stainless steel plates of 2mm or more, or titanium plates of 1mm or more, or other heat-resistant materials.

[0058] Therefore, the coating turntable with bias input in this embodiment of the invention, through the setting of the turntable liner assembly 20, can indirectly reduce the influence of temperature on the "ball" structure, enabling the "ball" structure to withstand higher temperatures; furthermore, the mating area between the upper liner 21 and the lower liner 22 forms a "maze-like" channel structure 24, which requires sputtered particles to change direction three or more times before reaching the surface of important parts. This directly protects the insulation between the turntable system and the vacuum chamber, preventing the insulation from being contaminated by sputtered particles diffracting, thus ensuring that the negative electric field of the bias system 30 is conducted to the vacuum chamber instead of the turntable product, thus guaranteeing the stability of the bias system 30; at the same time, it reduces the maintenance cost of the turntable system and the frequency of parts replacement.

[0059] like Figure 2 and Figure 6 As shown, the bias system 30 includes a bias input component 31 and a bias contact component 32. The bias input component 31 is fixed to the vacuum chamber and connected to the bias contact component 32. The bias contact component 32 is fixed to the load-bearing fixed gear 142 and abuts against the inner ring wall of the planetary gear 133. The function of the bias system 30 is to continuously conduct the negative electric field of the bias power supply to the rotating product, thereby allowing sputtered ions to be precisely deposited onto the negatively charged product under the negative electric field, thus improving the deposition rate of the coating and increasing production capacity.

[0060] For example, such as Figure 6 As shown, the bias input assembly 31 includes a bias input shaft 311, a fixed flange 312, a first input shaft insulating sleeve 313, a second input shaft insulating sleeve 314, an input shaft dustproof seat 315, and a bias input protective cover 316. The outside of the fixed flange 312 is fixed to the vacuum chamber. The inner hole of the fixed flange 312 is fixedly connected to one end of the first input shaft insulating sleeve 313. The other end of the first input shaft insulating sleeve 313 is fixedly connected to the inner hole of the second input shaft insulating sleeve 314. The outside of the second input shaft insulating sleeve 314 is fixedly connected to the input shaft dustproof seat 315. The bias input shaft 311 passes through the first input shaft insulating sleeve 313, the second input shaft insulating sleeve 314, and the input shaft dustproof seat 315 in sequence. A flexible conductive element 33 is connected to the vacuum end of the bias input shaft 311. The bias input protective cover 316 is connected to the atmospheric end of the bias input shaft 311. The atmospheric end of the bias input shaft 311 is used to connect to the negative terminal of the bias power supply.

[0061] Understandably, the negative terminal of the bias power supply is connected to the bias input shaft 311 (which can be made of copper or other materials with good conductivity), and then the fixing flange 312 is fixed to the vacuum chamber. The bias input shaft 311 is insulated from the vacuum chamber by the first input shaft insulating sleeve 313 and the second input shaft insulating sleeve 314. The input shaft dust cover 315 prevents sputtered particles from contaminating the surface insulation layer between the bias input shaft 311 and the first and second input shaft insulating sleeves 313 and 314, preventing insulation failure from the vacuum chamber. Furthermore, a bias input protective cover 316 is connected to the atmospheric end of the bias input shaft 311 to prevent exposure of the negative terminal of the bias power supply, increasing safety. The above constitutes the bias input component 31 of the bias system 30, which is connected to the bias contact component 32 of the bias system 30 via a flexible conductive element 33.

[0062] For example, such as Figure 6 As shown, the bias contact assembly 32 includes a contact conductive rod 321, a conductive rod connecting seat 322, a compression spring 323, and a protective cover 324. The conductive rod connecting seat 322 is fixed on the load-bearing fixed gear 142. The contact conductive rod 321 is slidably disposed on the conductive rod connecting seat 322. One end of the contact conductive rod 321 is connected to the flexible conductive element 33, and the other end of the contact conductive rod 321 is the contact end. A compression spring 323 is provided between the contact conductive rod 321 and the conductive rod connecting seat 322. Under the elastic force of the compression spring 323, the contact end of the contact conductive rod 321 abuts against the inner ring wall of the revolving gear 133. The protective cover 324 covers the flexible conductive element 33, the contact conductive rod 321, the conductive rod connecting seat 322, and the compression spring 323.

[0063] Understandably, the combination of the contact conductive rod 321, the conductive rod connecting seat 322, and the compression spring 323 forms the bias contact assembly 32 of the bias system 30. This allows the contact conductive rod 321 to maintain uninterrupted sliding contact with the inner ring wall of the revolving gear 133, ensuring the uninterrupted conduction of the negative electric field of the bias system 30 to the rotating product. This allows sputtered ions to be precisely deposited onto the negatively charged product under the negative electric field, thereby increasing the sputtering deposition rate and production capacity. Furthermore, the good contact of the bias input structure reduces arcing caused by poor contact, thus improving product yield. In addition, the protective cover 324 protects all components within its coverage area, preventing debris from falling into the bias contact assembly 32 and preventing contamination from sputtered particles.

[0064] Furthermore, the flexible conductive element 33 is preferably made of copper, and its specific structural form can be a copper sheet or a copper braided strip to ensure good conductivity and flexibility; the conductive rod is preferably made of brass to ensure good conductivity and wear resistance.

[0065] In the description of this invention, it should be understood that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" used in this invention should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0066] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the claims of the present invention are still within the scope of the present invention.

Claims

1. A coating rotating frame with bias input, disposed within a vacuum chamber, characterized in that, Includes the main body of the rotating frame system, the rotating frame liner assembly, and the biasing system; The main body of the rotating frame system includes a revolution support, a rotation rod, a revolution drive mechanism, and a rotation drive mechanism. The revolution support is a rotating structure, and multiple rotation rods are evenly arranged along the circumference of the revolution support. Each rotation rod is rotatably connected to the revolution support. The revolution drive mechanism includes a power input component, an input gear, and a revolution gear. The power input component is fixed to the vacuum chamber and is connected to the input gear, enabling it to drive the input gear to rotate. The input gear meshes with the revolution gear, and the revolution gear is coaxially fixed to the revolution support. On the frame, the orbital support can revolve around its own axis; the rotation drive mechanism includes a fixed gear fixing seat, a load-bearing fixed gear, and a rotating gear. The fixed gear fixing seat is fixed on the vacuum cavity, and the load-bearing fixed gear is fixed on the fixed gear fixing seat; the orbital gear is rotatably disposed above the load-bearing fixed gear, and the orbital gear and the fixed gear are arranged coaxially; the rotating gear meshes with the load-bearing fixed gear, and the rotating gear is coaxially fixed on the rotating hanging rod, which can rotate around its own axis; multiple orbital ball bearings are provided between the orbital gear and the load-bearing fixed gear; The rotating frame liner assembly includes an upper liner, a lower liner, and ceramic insulator supports. Multiple ceramic insulator supports are provided, each mounted on the radially outer upper surface and radially inner upper surface of the planetary gear, and evenly distributed along the circumference to form two concentric rings. The upper liner is suspended above the planetary gear and supported and fixed by the ceramic insulator supports. The lower liner is fixed to the vacuum cavity and disposed within the inner ring of the load-bearing stationary gear. A labyrinthine channel structure is formed at the mating point between the lower liner and the upper liner. The bias system includes a bias input component and a bias contact component. The bias input component is fixed on the vacuum chamber and connected to the bias contact component. The bias contact component is fixed on the load-bearing fixed gear and abuts against the inner ring wall of the planetary gear. The "maze-like" channel structure is achieved in the following way: the upper liner has a downwardly extending upper cylinder in the middle, with openings at both the top and bottom; the lower liner has an upwardly extending lower cylinder on its outer side, with an opening at the top and a closed bottom; the inner wall of the lower cylinder has a radially extending annular horizontal plate; the lower end of the upper cylinder is coaxially inserted into the lower cylinder, the inner diameter of the lower cylinder is larger than the outer diameter of the upper cylinder, the annular horizontal plate is located directly below the upper cylinder and is separate from the lower end of the upper cylinder, and the upper end of the lower cylinder is separate from the lower surface of the upper liner; The planetary gear has multiple mounting holes evenly arranged along its circumference for mounting the rotating rod. A rotating connection assembly is mounted on each mounting hole. The rotating connection assembly includes a rotating shaft, rotating balls, and a ball bearing holder. The ball bearing holder is fixed to the planetary gear with screws and mates with the mounting holes. The rotating shaft passes through the ball bearing holder from top to bottom. The upper end of the rotating shaft is fixedly connected to the rotating rod, and the lower end is fixedly connected to the planetary gear. At least one annular guide rail is formed between the middle of the rotating shaft and the inner cavity of the ball bearing holder. Multiple rotating balls are arranged within the annular guide rail. The number of rotating balls is 2 / 3 to 3 / 4 of the number of balls filling one annular guide rail. An insulating seat for the fixed gear is provided between the load-bearing fixed gear and the fixed gear fixing seat; the load-bearing fixed gear is fixed on the fixed gear fixing seat by screws, and the screws are fitted with insulating sleeves.

2. The coating turntable with bias input as described in claim 1, characterized in that: The upper surface of the load-bearing fixed gear is provided with an annular groove for accommodating and guiding the orbiting balls, and the lower surface of the orbiting gear is provided with a circular groove that rolls in contact with the orbiting balls; the groove wall of the circular groove is an arc surface that mates with the orbiting balls; the number of orbiting balls is 2 / 3 to 3 / 4 of the number of the annular grooves.

3. The coating turntable with bias input as described in claim 1, characterized in that: The ball bearing holder consists of an outer mounting base, an inner bushing, and a top dust cover; the rotating shaft has a shoulder in the middle, and the annular guide rail has two rings, one ring of the annular guide rail is located between the lower end face of the shoulder and the bottom surface of the inner cavity of the inner bushing, and the other ring of the annular guide rail is located on the upper end face of the shoulder; the lower end face of the shoulder, the upper end face of the shoulder, and the bottom surface of the inner cavity of the inner bushing corresponding to the annular guide rail are all arc surfaces that mate with the rotating ball bearing.

4. The coating turntable with bias input as described in claim 1, characterized in that: The orbital support includes orbital support rods and an upper orbital flange. Multiple orbital support rods are evenly arranged in the circumferential direction of the upper orbital flange. The upper end of each orbital support rod is fixedly connected to the upper orbital flange, and the lower end of each orbital support rod is fixedly connected to the orbital gear.

5. The coating turntable with bias input as described in any one of claims 1 to 4, characterized in that: The bias input assembly includes a bias input shaft, a fixed flange, a first input shaft insulating sleeve, a second input shaft insulating sleeve, an input shaft dust cover, and a bias input protective cover. The fixed flange is externally fixed to the vacuum chamber. The inner hole of the fixed flange is fixedly connected to one end of the first input shaft insulating sleeve. The other end of the first input shaft insulating sleeve is fixedly connected to the inner hole of the second input shaft insulating sleeve. The outer side of the second input shaft insulating sleeve is fixedly connected to the input shaft dust cover. The bias input shaft passes through the first input shaft insulating sleeve, the second input shaft insulating sleeve, and the input shaft dust cover in sequence. A flexible conductive element is connected to the vacuum end of the bias input shaft. The bias input protective cover is connected to the atmospheric end of the bias input shaft. The atmospheric end of the bias input shaft is used to connect to the negative terminal of the bias power supply. The bias contact assembly includes a contact conductive rod, a conductive rod connecting seat, a compression spring, and a protective cover. The conductive rod connecting seat is fixed to the load-bearing fixed gear, and the contact conductive rod is slidably disposed on the conductive rod connecting seat. One end of the contact conductive rod is connected to the flexible conductive element, and the other end of the contact conductive rod is the contact end. A compression spring is provided between the contact conductive rod and the conductive rod connecting seat. Under the elastic force of the compression spring, the contact end of the contact conductive rod abuts against the inner ring wall of the revolving gear. The protective cover covers the flexible conductive element, the contact conductive rod, the conductive rod connecting seat, and the compression spring.

6. The coating turntable with bias input as described in claim 5, characterized in that: The flexible conductive component is made of copper; the conductive rod is made of brass.

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