A heated water scrubber tail gas treater

Abstract

The application discloses a kind of heated water washing tail gas treater, it is related to tail gas processing technical field.The application includes through mixer, the top of the through mixer is fixedly installed with air inlet pipe, the circumferential side of the through mixer is fixedly installed with multiple nitrogen input pipe and air input pipe that are uniformly distributed, the bottom of the through mixer is fixedly installed with heating cavity, the bottom end of the air inlet pipe extends to the inside of the heating cavity, the bottom of the heating cavity is fixedly installed with horizontally arranged gas-liquid circulation pipe.The application is provided with drooping pipe, so that the input CDA is sprayed out through drooping pipe and each annular gas outlet pipe, mixed with gas to be treated, the gas outlet of CDA is away from the gas outlet of gas to be treated, by isolating CDA and gas to be treated first, then mixed, the main mixing area of the two avoids the gas outlet of gas to be treated, further prevents powder from accumulating around the air inlet pipe, effectively reduces powder blockage, and is suitable for long-time high-load operation.

Description

Technical Field

[0001] This invention relates to the field of exhaust gas treatment technology, and specifically to a heated water-washing exhaust gas processor. Background Technology

[0002] Semiconductor manufacturing generates harmful exhaust gases, which, if directly emitted, will pollute the atmosphere. Therefore, exhaust gases need to be treated to prevent them from damaging the environment and harming others. Currently, common methods for treating semiconductor manufacturing exhaust gases include dry adsorption and heated water washing. Compared to the former (which requires frequent replacement of the adsorbent), the water washing system has a longer maintenance cycle. The core value of heated water washing exhaust gas treatment equipment in the semiconductor industry lies in its ability to efficiently decompose difficult-to-treat gases and perform water washing purification, combining advantages such as high treatment efficiency and low maintenance costs.

[0003] Existing semiconductor exhaust gas treatment water washing systems typically input the gas to be treated into a mixer at the inlet, where it is uniformly mixed with CDA and nitrogen before being fed into a heating chamber for oxidation-reduction, converting it into chemically stable gases, dust, or water-soluble gases requiring secondary treatment. However, direct mixing in the mixer beforehand can cause blockage at the inlet. Furthermore, using a single spray structure for cooling water washing afterward results in insufficient purification of the treated exhaust gas, necessitating multiple water washing cycles. Therefore, a heated water washing exhaust gas processor is proposed. Summary of the Invention

[0004] The purpose of this invention is to address the problems of existing semiconductor exhaust gas treatment water washing systems, which mix the gas directly in the mixer beforehand, causing blockage of the inlet mixer, and the use of a single spray structure for cooling water washing, resulting in insufficient purification of the treated exhaust gas and requiring repeated water washing. This invention provides a heated water washing exhaust gas processor.

[0005] To achieve the above objectives, the present invention specifically adopts the following technical solution: A heated water-washing exhaust gas processor includes a flow mixer. An inlet pipe is fixedly installed at the top of the flow mixer. Multiple uniformly distributed nitrogen and air inlet pipes are fixedly installed around the periphery of the flow mixer. A heating chamber is fixedly installed at the bottom of the flow mixer. The bottom end of the inlet pipe extends into the interior of the heating chamber. A horizontally arranged gas-liquid circulation pipe is fixedly installed at the bottom of the heating chamber. A vertically arranged spray tower is fixedly installed at one end of the gas-liquid circulation pipe. An exhaust pipe is fixedly installed at the top of the spray tower. A first cooling chamber is provided inside the gas-liquid circulation pipe near the spray tower. The interior of the spray tower is arranged from bottom to top with a series of... The second and third cooling chambers are provided. A circulating water tank is provided at the bottom of the gas-liquid circulation pipe. A return pipe is fixedly installed at the top of the circulating water tank. The return pipe is fixedly installed at the bottom of the gas-liquid circulation pipe. A circulating pump is provided on one side of the circulating water tank. A three-way control valve is fixedly installed at the water inlet of the circulating pump. One end of the three-way control valve is connected to the inside of the circulating water tank. A water supply pipe is fixedly installed at the water outlet of the circulating pump. Three branch pipes are fixedly installed from bottom to top on one side of the water supply pipe. One end of the three branch pipes extends into the inside of the first, second, and third cooling chambers, respectively, and each is fixedly equipped with a spray plate.

[0006] Furthermore, each of the nitrogen input pipes has a suspension pipe fixedly installed at one end of the pipe that flows through the mixer. The bottom ends of the multiple suspension pipes are fixedly installed with the same circulating pipe. Multiple evenly distributed jet pipes are fixedly installed on the inner sidewall of the circulating pipe, and the jet pipes all face the bottom end of the air inlet pipe.

[0007] Furthermore, each of the air input pipes has a vertically installed pendant pipe at one end located inside the mixer, and the bottom end of each pendant pipe extends into the interior of the heating chamber and has multiple evenly distributed annular air outlet pipes fixedly installed from top to bottom.

[0008] Furthermore, a one-way air valve and a recovery water valve are fixedly installed at the bottom of the first cooling chamber, the second cooling chamber, and the third cooling chamber. An air collection plate is fixedly installed at the bottom of each one-way air valve, and a recovery pipe is fixedly installed at the bottom of each recovery water valve.

[0009] Furthermore, a vortex box is fixedly installed inside the first cooling chamber, the second cooling chamber, and the third cooling chamber. The bottom of the vortex box has an air inlet that communicates with the top of the one-way air valve. The inside of the vortex box has a volute flow channel and a guide flow channel that communicate with the air inlet. The bottom inner wall of the guide flow channel has a drain port that communicates with the recovery water valve. A receiving plate that communicates with the guide flow channel is fixedly installed on the top of the vortex box. The receiving plate is located directly below the spray plate.

[0010] Furthermore, a support frame is fixedly installed on the bottom inner wall of the circulating water tank, and an inner box is fixedly installed on the top of the support frame. Two drain control valves are fixedly installed on one side of the circulating water tank. One end of the three-way control valve and the two drain control valves extends into the interior of the inner box. A vertically arranged retainer is fixedly installed inside the inner box, and a liquid level sensor is fixedly installed inside the retainer. Two drain pumps are provided on one side of the circulating water tank. The inlet ends of the two drain pumps are respectively connected to the two drain control valves. The outlet ends of the two drain pumps are fixedly installed with the same drain pipe. An emergency water tank is provided on one side of the circulating water tank, and one end of the drain pipe is connected to the interior of the emergency water tank.

[0011] Furthermore, an overflow pipe is fixedly installed on one side of the top of the circulating water tank, and the two ends of the overflow pipe are respectively connected to the interior of the inner tank and the emergency water tank. A water pumping pipe is fixedly installed on the other end of the three-way control valve, and one end of the water pumping pipe is connected to the interior of the emergency water tank.

[0012] Furthermore, a partition is provided between the circulating water tank and the inner tank, a leakage detection strip is fixedly installed on the bottom inner wall of the partition, and an overflow port connected to the partition is provided on the top inner wall of the inner tank.

[0013] The beneficial effects of this invention are as follows: 1. The present invention sets up a circulation pipe so that after nitrogen is input through the nitrogen input pipe, it will be rectified by entering the circulation pipe through each suspension pipe, and then sprayed obliquely upward through each jet pipe to the bottom of the heating chamber. At the same time as the nitrogen is input, the nitrogen is used to flush the outlet of the inlet pipe and its surrounding area to prevent the powder in the gas to be treated from accumulating around the inlet pipe. 2. By setting up a drooping pipe, the input CDA is ejected through the drooping pipe and each annular outlet pipe, and mixed with the gas to be treated. The outlet of CDA is far away from the outlet of the gas to be treated. By isolating CDA and the gas to be treated first and then mixing them, the main mixing area of ​​the two avoids the outlet of the gas to be treated, further preventing powder from accumulating around the inlet pipe, effectively reducing powder blockage, and making it suitable for long-term high-load operation. 3. By setting a one-way air valve and a recovery water valve, the cooling chamber water spray system can not only directly spray and wash the air, but also close the recovery water valve, so that the cooling water sprayed by the spray plate accumulates inside each cooling chamber, and the gas flows directly into the cooling water through the one-way air valve for water bath washing, realizing dual washing of air by first water bath and then spraying, thus improving the washing effect. 4. By setting up a vortex box, the present invention allows the cooling water sprayed in the cooling chamber to be received by the receiving plate at the bottom of the spray plate and flow into the volute flow channel and the guide flow channel. The volute flow channel and the guide flow channel greatly increase the flow path of the gas inside the cooling chamber, so that after the gas enters the air inlet through the gas collection plate and the one-way gas valve, it fully contacts the cooling water in the volute flow channel and the guide flow channel, further improving the gas washing effect. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the three-dimensional structure of the mixer through which the present invention flows; Figure 3 This is the present invention. Figure 2 Schematic diagram of the structure at point A in the middle; Figure 4 This is a schematic diagram of the internal three-dimensional structure of the third cooling chamber of the present invention; Figure 5 This is a schematic diagram of the internal three-dimensional structure of the vortex box of the present invention; Figure 6 This is a first-view three-dimensional structural diagram of the combination of the circulating water tank and the emergency water tank of the present invention; Figure 7 This is a second-view three-dimensional structural diagram of the combination of the circulating water tank and the emergency water tank of the present invention; Figure 8 This is a schematic diagram of the internal three-dimensional structure of the circulating water tank of the present invention; Reference numerals: 1. Flowing through mixer; 2. Inlet pipe; 3. Nitrogen input pipe; 4. Air input pipe; 5. Heating chamber; 6. Gas-liquid circulation pipe; 7. Spray tower; 8. Exhaust pipe; 9. First cooling chamber; 10. Second cooling chamber; 11. Third cooling chamber; 12. Circulating water tank; 13. Return pipe; 14. Circulating pump; 15. Three-way control valve; 16. Water supply pipe; 17. Diverter pipe; 18. Spray plate; 19. Suspension pipe; 20. Circulation pipe; 21. Jet pipe; 22. Drooping pipe; 23. Annular outlet pipe; 24. 25. One-way air valve; 26. Air collection plate; 27. Water recovery valve; 28. Recovery pipe; 29. ​​Vortex box; 2001. Air inlet; 21. Spiral flow channel; 22. Air guide channel; 23. Drain outlet; 24. Receiver plate; 35. Inner box; 36. Overflow outlet; 37. Support bracket; 38. Retainer; 39. Liquid level sensor; 40. Drain pump; 41. Drain control valve; 32. Drain pipe; 43. Emergency water tank; 44. Overflow pipe; 55. Pumping pipe; 66. Chamber; 77. Leakage detection strip. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0017] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0018] In the description of the embodiments of the present invention, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0019] like Figures 1 to 8 As shown, a heated water-washed exhaust gas processor includes a stream flowing through a mixer 1, such as... Figure 1 , Figure 2 As shown, an air inlet pipe 2 is fixedly installed at the top of the mixer 1, and multiple evenly distributed nitrogen inlet pipes 3 and air inlet pipes 4 are fixedly installed around the mixer 1. A heating chamber 5 is fixedly installed at the bottom of the mixer 1, and the bottom end of the air inlet pipe 2 extends into the interior of the heating chamber 5. A suspension pipe 19 is fixedly installed at the end of each nitrogen inlet pipe 3 that flows through the interior of the mixer 1. The bottom ends of multiple suspension pipes 19 are fixedly installed with the same circulating pipe 20. Figure 3 As shown, multiple evenly distributed jet pipes 21 are fixedly installed on the inner ring sidewall of the circulation pipe 20, and all jet pipes 21 face the bottom end of the air intake pipe 2.

[0020] More specifically, when the heated water-washed exhaust gas processor is in use, the gas to be treated enters the mixer 1 through the inlet pipe 2, and nitrogen is introduced into the interior of each nitrogen inlet pipe 3. CDA compressed dry air is introduced into the air inlet pipe 4. The gas to be treated, CDA and nitrogen enter the heating chamber 5 at the same time. By setting the circulation pipe 20, the nitrogen is input through the nitrogen inlet pipe 3 and then enters the circulation pipe 20 through each suspension pipe 19 for rectification. Then it is sprayed obliquely upward through each jet pipe 21 to the bottom of the heating chamber 5. At the same time as the nitrogen is input, the nitrogen is used to flush the outlet of the inlet pipe 2 and its surroundings to prevent the powder in the gas to be treated from accumulating around the inlet pipe 2.

[0021] like Figure 2 As shown, specifically, each end of the air input pipe 4 that flows through the inside of the mixer 1 is fixedly equipped with a vertically arranged pendant pipe 22. The bottom end of each pendant pipe 22 extends into the interior of the heating chamber 5 and is fixedly equipped with multiple evenly distributed annular air outlet pipes 23 from top to bottom.

[0022] More specifically, by setting up the drooping pipe 22, the CDA input from the air input pipe 4 is input to the bottom through the drooping pipe 22 and sprayed out through each annular air outlet pipe 23 to mix with the gas to be treated. The air outlet of CDA inside the heating chamber 5 is far away from the air outlet of the gas to be treated. By isolating CDA and the gas to be treated first and then mixing them, the main mixing area of ​​the two avoids the air outlet of the gas to be treated, further preventing powder from accumulating around the air inlet pipe 2, effectively reducing powder blockage, and making it suitable for long-term high-load operation.

[0023] like Figure 1 As shown, specifically, a horizontally arranged gas-liquid circulation pipe 6 is fixedly installed at the bottom of the heating chamber 5. A vertically arranged spray tower 7 is fixedly installed at one end of the gas-liquid circulation pipe 6. An exhaust pipe 8 is fixedly installed at the top of the spray tower 7. A first cooling chamber 9 is arranged inside the gas-liquid circulation pipe 6 near the spray tower 7. A second cooling chamber 10 and a third cooling chamber 11 are arranged sequentially from bottom to top inside the spray tower 7. A circulating water tank 12 is arranged at the bottom of the gas-liquid circulation pipe 6. A return pipe 13 is fixedly installed at the top of the circulating water tank 12. The return pipe 13 is fixedly installed at the bottom of the gas-liquid circulation pipe 6. Figure 6 , Figure 7 As shown, a circulation pump 14 is installed on one side of the circulating water tank 12. A three-way control valve 15 is fixedly installed at the inlet end of the circulation pump 14. One end of the three-way control valve 15 is connected to the interior of the circulating water tank 12. A water supply pipe 16 is fixedly installed at the outlet end of the circulation pump 14. Three diversion pipes 17 are fixedly installed on one side of the water supply pipe 16 from bottom to top, such as... Figure 4 As shown, one end of each of the three branch pipes 17 extends into the interior of the first cooling chamber 9, the second cooling chamber 10, and the third cooling chamber 11, and each is fixedly equipped with a spray plate 18.

[0024] In this embodiment, the number, location, and type of air intake pipes 2 can be customized. A pressure detector is installed inside the air intake pipe 2. The nitrogen input pipe 3 and air input pipe 4 integrate pressure regulating valves, pressure switches, solenoid valves, flow meters, and manual valves. A temperature sensor is installed inside the heating chamber 5. A pressure detector and a temperature sensor are installed inside the exhaust pipe 8. Each water spray system is equipped with a solenoid valve, a flow switch, a flow meter, and a manual valve. The circulating water tank 12 is connected to an external cooling water source and filtration system through a filter network to recover powder and water-soluble gas solutions.

[0025] More specifically, by setting up a heating chamber 5 and a spray tower 7, the mixed gas is heated to a high temperature in the heating chamber 5, causing a violent oxidation-reduction reaction. This converts poorly soluble or difficult-to-treat gases, such as silanes and phosphines, into chemically stable gases, dust, or water-soluble gases requiring secondary treatment, such as silicon dioxide and phosphoric acid. The treated harmless high-temperature gas or water-soluble gas is then fed into the spray tower 7 through the gas-liquid circulation pipe 6. At this time, the circulation pump 14 draws cooling water from the circulating water tank 12 and simultaneously feeds it into the first cooling chamber 9, the second cooling chamber 10, and the third cooling chamber 11 through the water supply pipe 16 and the diversion pipe 17. The gas is then sprayed by the spray plate 18. After being cooled and treated by the water spray system in the cooling chamber, the gas is discharged to the central treatment system through the exhaust pipe 8. Some of the dust generated by the gas treatment flows into the gas-liquid circulation pipe 6 after being sprayed with water, and then flows back to the circulating water tank 12 through the return pipe 13, completing the gas treatment and cooling water return circulation.

[0026] like Figure 4 As shown, specifically, a one-way air valve 24 and a water recovery valve 26 are fixedly installed at the bottom of the first cooling chamber 9, the second cooling chamber 10 and the third cooling chamber 11. A gas collection plate 25 is fixedly installed at the bottom of the one-way air valve 24 and a water recovery pipe 27 is fixedly installed at the bottom of the water recovery valve 26.

[0027] More specifically, by setting a one-way air valve 24 and a recovery water valve 26, the cooling chamber water spray system can not only directly spray and wash the air, but also close the recovery water valve 26, so that the cooling water sprayed by the spray plate 18 accumulates inside each cooling chamber, and the gas flows directly into the cooling water through the one-way air valve 24 for water bath washing, realizing dual washing of air by first water bath and then spraying, thus improving the washing effect.

[0028] like Figure 4 , Figure 5As shown, specifically, a vortex box 28 is fixedly installed inside the first cooling chamber 9, the second cooling chamber 10, and the third cooling chamber 11. The bottom of the vortex box 28 is provided with an air inlet 2801 that is connected to the top of the one-way air valve 24. The inside of the vortex box 28 is provided with a spiral flow channel 2802 and a guide flow channel 2803 that are connected to the air inlet 2801. The bottom inner wall of the guide flow channel 2803 is provided with a drain port 2804 that is connected to the recovery water valve 26. The top of the vortex box 28 is fixedly installed with a receiving plate 29 that is connected to the guide flow channel 2803. The receiving plate 29 is located directly below the spray plate 18.

[0029] More specifically, by setting up the vortex box 28, when the sprayed cooling water accumulates in the cooling chamber, it is received by the receiving plate 29 at the bottom of the spray plate 18 and flows into the volute flow channel 2802 and the guide flow channel 2803. The volute flow channel 2802 and the guide flow channel 2803 greatly increase the flow path of the gas inside the cooling chamber, so that after the gas enters the air inlet 2801 through the gas collection plate 25 and the one-way gas valve 24, it fully contacts the cooling water in the volute flow channel 2802 and the guide flow channel 2803, further improving the gas washing effect.

[0030] like Figure 7 , Figure 8 As shown, specifically, a support frame 31 is fixedly installed on the bottom inner wall of the circulating water tank 12, and an inner tank 30 is fixedly installed on the top of the support frame 31. Two drain control valves 35 are fixedly installed on one side of the circulating water tank 12. One end of the three-way control valve 15 and the two drain control valves 35 extends into the interior of the inner tank 30. A vertically arranged retainer 32 is fixedly installed inside the inner tank 30. A liquid level sensor 33 is fixedly installed inside the retainer 32. Two drain pumps 34 are provided on one side of the circulating water tank 12. The inlet ends of the two drain pumps 34 are respectively connected to the two drain control valves 35. The outlet ends of the two drain pumps 34 are fixedly installed with the same drain pipe 36. An emergency water tank 37 is provided on one side of the circulating water tank 12. One end of the drain pipe 36 is connected to the interior of the emergency water tank 37.

[0031] In this embodiment, a PVC check valve is provided at the outlet end of the drainage pump 34.

[0032] More specifically, by setting up a drain pump 34, cooling water is stored inside the inner tank 30, and the liquid level is monitored in real time by a liquid level sensor 33. The storage of cooling water is divided into three safe water levels: low, high, and maximum. The discharge and input of cooling water inside the inner tank 30 are controlled by the water level sensing of the liquid level sensor 33. When the stored water exceeds the safe water level, the drain pump 34 draws out the excess cooling water through the drain control valve 35 and inputs it into the emergency water tank 37 through the drain pipe 36 for temporary storage, thereby reducing the storage pressure inside the inner tank 30. Two drain pumps 34 are used and one is on standby, which effectively prevents the water level inside the inner tank 30 from overflowing due to excessively high water level and ensures that the water pressure is within the safe threshold.

[0033] like Figure 7 As shown, specifically, an overflow pipe 38 is fixedly installed on one side of the top of the circulating water tank 12. The two ends of the overflow pipe 38 are connected to the interior of the inner tank 30 and the emergency water tank 37, respectively. A water pumping pipe 39 is fixedly installed on the other end of the three-way control valve 15. One end of the water pumping pipe 39 is connected to the interior of the emergency water tank 37.

[0034] More specifically, by setting an overflow pipe 38, when the two drainage pumps 34 are running simultaneously but still cannot quickly and effectively reduce the water level inside the inner tank 30 to below the safe water level, the excess cooling water will overflow directly into the emergency water tank 37 through the overflow pipe 38 to achieve emergency discharge. The circulation pump 14 can be directly connected to the inside of the emergency water tank 37 through the switching of the three-way control valve 15, thereby drawing out the cooling water inside the emergency water tank 37 and putting it into the circulation system.

[0035] like Figure 8 As shown, specifically, a partition 40 is provided between the circulating water tank 12 and the inner tank 30. A leakage detection strip 41 is fixedly installed on the bottom inner wall of the partition 40, and an overflow port 3001 connected to the partition 40 is opened on the top inner wall of the inner tank 30.

[0036] In this embodiment, the overflow port 3001 is higher than the overflow pipe 38 and located at the top of the inner box 30.

[0037] More specifically, by setting an overflow port 3001, the leakage detection band 41 located at the bottom of the diaphragm 40 can detect in a timely manner whether there is an internal leak inside the diaphragm 40, and monitor the leakage of the inner box 30 in real time. When the circulation system fails, the two drain pumps 34 and the overflow pipe 38 cannot completely drain the abnormally increased cooling water inside the inner box 30. The cooling water overflows from the overflow port 3001 into the diaphragm 40, and is then detected by the leakage detection band 41. The heated water washing exhaust gas processor is immediately shut down for inspection to avoid production accidents.

[0038] In summary: When this heated water-washing exhaust gas processor is in use, the gas to be treated enters through the inlet pipe 2 and flows through the mixer 1. Nitrogen is introduced into the interior of each nitrogen inlet pipe 3, and CDA compressed dry air is introduced into the air inlet pipe 4. The gas to be treated, CDA, and nitrogen enter the heating chamber 5 simultaneously. By setting up the circulation pipe 20, the nitrogen, after being input through the nitrogen inlet pipe 3, will enter the circulation pipe 20 through each suspension pipe 19 for rectification, and then be sprayed obliquely upward through each jet pipe 21 to the bottom of the heating chamber 5. At the same time as the nitrogen is input, the nitrogen is used to flush the outlet of the inlet pipe 2 and its surroundings to prevent the powder in the gas to be treated from accumulating around the inlet pipe 2. By setting up the pendant pipe 22, the CDA input through the air inlet pipe 4 will pass through the pendant pipe 22. The gas is fed into pipe 22 to the bottom and sprayed out through each annular outlet pipe 23 to mix with the gas to be treated. The outlet of CDA inside the heating chamber 5 is far away from the outlet of the gas to be treated. By isolating CDA and the gas to be treated before mixing, the main mixing area of ​​the two avoids the outlet of the gas to be treated, further preventing powder from accumulating around the inlet pipe 2 and effectively reducing powder blockage. This method is suitable for long-term high-load operation. By setting up the heating chamber 5 and the spray tower 7, the mixed gas is heated to a high temperature in the heating chamber 5, resulting in a violent oxidation-reduction reaction. This converts poorly soluble or difficult-to-treat gases such as silanes and phosphines into chemically stable gases, dust, or water-soluble gases that require secondary treatment, such as silicon dioxide and phosphoric acid. The treated gas is then harmless and heated at high temperature. Gas or water-soluble gas is fed into the spray tower 7 through the gas-liquid circulation pipe 6. At this time, the circulation pump 14 draws cooling water from the circulating water tank 12 and simultaneously feeds it into the first cooling chamber 9, the second cooling chamber 10, and the third cooling chamber 11 through the water supply pipe 16 and the diversion pipe 17. Then, it is sprayed through the spray plate 18. After the gas is cooled and treated by the cooling chamber water spray system, it is discharged to the central treatment system through the exhaust pipe 8. Some of the dust generated by the gas treatment flows into the gas-liquid circulation pipe 6 after water spraying, and then flows back to the circulating water tank 12 through the return pipe 13, completing the gas treatment and cooling water return circulation. By setting a one-way gas valve 24 and a recovery water valve 26, the cooling chamber water spray system can not only directly spray and wash the gas, but also close the recovery water valve 26 to make the spray... The cooling water sprayed by the spray plate 18 accumulates inside each cooling chamber, allowing gas to directly flow into the cooling water via the one-way valve 24 for water bath scrubbing. This achieves dual scrubbing—first water bath, then spray—improving the scrubbing effect. By incorporating a vortex box 28, the sprayed cooling water, while accumulating in the cooling chamber, is received by the receiving plate 29 at the bottom of the spray plate 18 and flows into the volute flow channel 2802 and the guide flow channel 2803. The volute flow channel 2802 and guide flow channel 2803 significantly increase the gas's flow path within the cooling chamber. After passing through the gas collection plate 25 and the one-way valve 24 to the air inlet 2801, the gas fully contacts the cooling water in the volute flow channel 2802 and guide flow channel 2803, further enhancing the scrubbing effect. A drain pump 34 is also included.Cooling water is stored inside the inner tank 30, and the liquid level is monitored in real time by a level sensor 33. The cooling water storage is divided into three safe water levels: low, high, and maximum. The level sensor 33 controls the discharge and input of cooling water inside the inner tank 30. When the water level exceeds the safe water level, the drain pump 34 extracts excess cooling water through the drain control valve 35 and inputs it into the emergency water tank 37 through the drain pipe 36 for temporary storage, reducing the storage pressure inside the inner tank 30. Two drain pumps 34 are used, one in operation and one on standby, effectively preventing the water level inside the inner tank 30 from overflowing due to excessively high water levels and ensuring that the water pressure is within the safe threshold. By setting an overflow pipe 38, when the two drain pumps 34 are running simultaneously but still cannot quickly and effectively reduce the water level inside the inner tank 30 to below the safe water level, the excess cooling water is discharged. The water will overflow directly into the emergency water tank 37 via the overflow pipe 38 for emergency discharge. The circulating pump 14 can be directly connected to the inside of the emergency water tank 37 through the switching of the three-way control valve 15, thereby drawing out the cooling water inside the emergency water tank 37 and putting it into the circulation system. By setting the overflow port 3001, the leakage detection band 41 located at the bottom of the partition 40 can detect in time whether there is an internal leak inside the partition 40, and monitor the leakage of the inner tank 30 in real time. When the circulation system fails, the two drain pumps 34 and the overflow pipe 38 cannot completely drain the abnormally increased cooling water inside the inner tank 30. The cooling water overflows from the overflow port 3001 into the partition 40, and is then detected by the leakage detection band 41. The heated water washing exhaust gas processor is immediately shut down for inspection to avoid production accidents.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.

Claims

1. A heated water-washing exhaust gas processor, characterized in that, The system includes a flow mixer (1), with an air inlet pipe (2) fixedly installed at the top of the flow mixer (1), and multiple uniformly distributed nitrogen input pipes (3) and air input pipes (4) fixedly installed around the flow mixer (1). A heating chamber (5) is fixedly installed at the bottom of the flow mixer (1), with the bottom end of the air inlet pipe (2) extending into the interior of the heating chamber (5). A horizontally arranged gas-liquid circulation pipe (6) is fixedly installed at the bottom of the heating chamber (5), and a vertically arranged spray tower (7) is fixedly installed at one end of the gas-liquid circulation pipe (6). The top end of the spray tower (7) is fixed... An exhaust pipe (8) is installed. The gas-liquid circulation pipe (6) has a first cooling chamber (9) inside one end near the spray tower (7). The spray tower (7) has a second cooling chamber (10) and a third cooling chamber (11) arranged from bottom to top. A circulating water tank (12) is installed at the bottom of the gas-liquid circulation pipe (6). A return pipe (13) is fixedly installed at the top of the circulating water tank (12). The return pipe (13) is fixedly installed at the bottom of the gas-liquid circulation pipe (6). A circulating pump (14) is installed on one side of the circulating water tank (12). The inlet end of the circulating pump (14) is... A three-way control valve (15) is fixedly installed, one end of which is connected to the interior of the circulating water tank (12). A water supply pipe (16) is fixedly installed at the outlet of the circulating pump (14). Three diversion pipes (17) are fixedly installed on one side of the water supply pipe (16) from bottom to top. One end of each of the three diversion pipes (17) extends into the interior of the first cooling chamber (9), the second cooling chamber (10), and the third cooling chamber (11), and each is fixedly equipped with a spray plate (18). The nitrogen input pipe (3) is located inside the mixer (1). Each end is fixedly installed with a suspension pipe (19), and the bottom end of the multiple suspension pipes (19) is fixedly installed with the same circulation pipe (20). Multiple evenly distributed jet pipes (21) are fixedly installed on the inner ring side wall of the circulation pipe (20). The jet pipes (21) are all facing the bottom end of the air inlet pipe (2). The end of the air input pipe (4) located inside the mixer (1) is fixedly installed with a vertically arranged pendant pipe (22). The bottom end of the pendant pipe (22) extends into the interior of the heating chamber (5) and multiple evenly distributed annular air outlet pipes (23) are fixedly installed from top to bottom.

2. The heated water washing exhaust gas processor according to claim 1, characterized in that, The bottom of the first cooling chamber (9), the second cooling chamber (10) and the third cooling chamber (11) are all fixedly installed with a one-way air valve (24) and a recovery water valve (26). The bottom end of the one-way air valve (24) is fixedly installed with an air collection plate (25), and the bottom end of the recovery water valve (26) is fixedly installed with a recovery pipe (27).

3. The heated water-washing exhaust gas processor according to claim 2, characterized in that, The first cooling chamber (9), the second cooling chamber (10) and the third cooling chamber (11) are all fixedly installed with a vortex box (28). The bottom of the vortex box (28) is provided with an air inlet (2801) that is connected to the top of the one-way air valve (24). The inside of the vortex box (28) is provided with a spiral flow channel (2802) and a guide flow channel (2803) that are connected to the air inlet (2801). The bottom inner wall of the guide flow channel (2803) is provided with a drain port (2804) that is connected to the recovery water valve (26). The top of the vortex box (28) is fixedly installed with a receiving plate (29) that is connected to the guide flow channel (2803). The receiving plate (29) is located directly below the spray plate (18).

4. The heated water-washing exhaust gas processor according to claim 1, characterized in that, A support frame (31) is fixedly installed on the bottom inner wall of the circulating water tank (12). An inner box (30) is fixedly installed on the top of the support frame (31). Two drain control valves (35) are fixedly installed on one side of the circulating water tank (12). One end of the three-way control valve (15) and the two drain control valves (35) extends into the interior of the inner box (30). A vertically arranged retainer (32) is fixedly installed inside the inner box (30). A liquid level sensor (33) is fixedly installed inside the retainer (32). Two drain pumps (34) are provided on one side of the circulating water tank (12). The inlet ends of the two drain pumps (34) are respectively connected to the two drain control valves (35). The outlet ends of the two drain pumps (34) are fixedly installed with the same drain pipe (36). An emergency water tank (37) is provided on one side of the circulating water tank (12). One end of the drain pipe (36) is connected to the interior of the emergency water tank (37).

5. A heated water-washing exhaust gas processor according to claim 4, characterized in that, An overflow pipe (38) is fixedly installed on one side of the top of the circulating water tank (12). The two ends of the overflow pipe (38) are respectively connected to the interior of the inner tank (30) and the emergency water tank (37). A water pumping pipe (39) is fixedly installed on the other end of the three-way control valve (15). One end of the water pumping pipe (39) is connected to the interior of the emergency water tank (37).

6. A heated water-washing exhaust gas processor according to claim 4, characterized in that, A partition (40) is provided between the circulating water tank (12) and the inner tank (30). A leakage detection belt (41) is fixedly installed on the bottom inner wall of the partition (40). An overflow port (3001) communicating with the partition (40) is opened on the top inner wall of the inner tank (30).

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