Machine vision-based reduction furnace shell crack detection system and method

Abstract

The present application relates to the technical field of polysilicon production, and particularly relates to a reduction furnace cylinder crack detection system and method based on machine vision, comprising a water mist spraying mechanism and a detection mechanism, the water mist spraying mechanism comprises a plurality of pairs of atomizing nozzles for spraying water mist on the inner wall of the furnace cylinder body; the detection mechanism comprises a plurality of pairs of camera assemblies for recording images of the cracks on the inner wall of the furnace cylinder body after spraying; the detection mechanism further comprises a central rotating rod for driving the camera assemblies to rotate along the inner wall of the furnace cylinder body, the camera assemblies comprise a furnace top detection camera and a plurality of furnace body detection cameras, the furnace top detection camera is connected to the upper end of the central rotating rod through an inclined connecting rod, and the plurality of furnace body detection cameras are vertically and uniformly connected to one side of the central rotating rod through a plurality of connecting plates; a plurality of light sources are further arranged on the side of the central rotating rod close to the camera assemblies, and the present application conveniently and efficiently realizes the function of comprehensive and accurate crack detection.

Description

Technical Field

[0001] This invention relates to the technical field of polycrystalline silicon production, and in particular to a machine vision-based system and method for detecting cracks in reduction furnace cylinders. Background Technology

[0002] Currently, the main production method for electronic-grade polysilicon is the modified Siemens process, which produces polysilicon rods through chemical vapor deposition. The core equipment is the reduction furnace. During long-term operation, the furnace cylinder inevitably develops small cracks, requiring timely repair to prevent further expansion and leakage. Currently, the furnace cylinder is inspected manually by visual sampling. This method is prone to contamination, and manual inspection is inefficient and prone to missing cracks.

[0003] A 360° panoramic stitching detection system and method for well shafts based on machine vision is disclosed in existing patent publication number CN115619782B. The system includes controlling a lift to move along the inside of the well shaft via a program; capturing 360° images of the well shaft's inner wall using multiple high-speed cameras, with each camera capturing an image at a set time interval; horizontally stitching the images captured at the same time based on feature points to obtain several horizontally stitched images; and vertically stitching these horizontally stitched images based on feature points to obtain a panoramic image. The inner wall of the well shaft is marked with several evenly distributed feature points, each with horizontal and vertical values. The similarity between the panoramic image and a detection standard image is calculated, and an alarm signal is generated when the similarity is less than the standard value.

[0004] In the above technical solution, multiple high-speed cameras are used to take 360-degree pictures of the inner wall of the well to obtain several images of the well, so as to promptly identify potential safety hazards. However, the cost of using multiple high-speed cameras for comprehensive shooting is too high. Moreover, if there are some small cracks on the inner wall of the well that are not easy to observe, it is difficult to accurately and clearly detect these small cracks by simply taking pictures with cameras, resulting in inaccurate detection results.

[0005] Therefore, it is necessary to provide a machine vision-based system and method for detecting cracks in a furnace cylinder, which can achieve efficient and comprehensive crack detection. Summary of the Invention

[0006] The purpose of this invention is to provide a machine vision-based system and method for detecting cracks in a furnace cylinder, in order to solve the problems mentioned in the background art.

[0007] To address the aforementioned technical problems, this invention provides the following technical solution: a machine vision-based reduction furnace cylinder crack detection system, comprising a water mist spraying mechanism and a detection mechanism. The water mist spraying mechanism includes several atomizing nozzles that spray water mist onto the inner wall of the furnace cylinder. The detection mechanism includes several camera components that record images of cracks in the inner wall of the furnace cylinder after spraying. The detection mechanism also includes a central rotating rod that drives the camera assembly to rotate along the inner wall of the furnace cylinder.

[0008] In one embodiment, the camera assembly includes a furnace top detection camera and a plurality of furnace body detection cameras. The furnace top detection camera is connected to the upper end of the central rotating rod via an inclined connecting rod, and the plurality of furnace body detection cameras are vertically and evenly connected to one side of the central rotating rod via a plurality of connecting plates. Several light sources are also provided on the side of the central rotating rod near the camera assembly.

[0009] In one embodiment, the furnace top detection camera and several furnace body detection cameras are all equipped with explosion-proof covers.

[0010] In one embodiment, the water mist spraying mechanism further includes a rotating shaft, and a plurality of atomizing nozzles are disposed on the rotating shaft, the atomizing nozzles being connected to an ultrapure water supply system.

[0011] In one embodiment, the lower end of the furnace cylinder body is provided with a plurality of limiting support mechanisms to support it, and the lower end of the central rotating rod is provided with a rotary platform, which is located inside the limiting support mechanisms.

[0012] In one embodiment, the rotary platform includes a rotary table and a fixed base. The central rotating rod is fixed to the upper end of the rotary table. A guide cover is slidably fitted on the outer side of the rotary table. A chassis is fixedly connected to the lower end of the guide cover. The chassis is rotatably connected to the upper end of the fixed base. The limiting support mechanism is fixed to the upper side of the fixed base.

[0013] In one embodiment, the guide cover has guide grooves on its four sides, and a slider is slidably fitted in the guide groove. The slider is fixed to the four sides of the rotary table. The upper end of the guide cover has a through hole. The upper end of the fixed seat is rotatably connected to a screw. The screw passes through the rotary table and is threadedly connected to it. The interior of the central rotating rod has an adaptive vertical groove.

[0014] In one embodiment, the atomizing nozzle is fixed to the other side of the central rotating rod via a hollow through rod.

[0015] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: The present invention sprays water mist onto the inner wall of the furnace cylinder through a water mist spraying mechanism. If there are cracks in the inner wall, due to the capillary effect, the water mist will gather at the cracks to form water droplets, producing a convex lens effect. When the camera component is used for observation, it is equivalent to magnifying the cracks, making it easier to observe them. By combining the camera component with the above-mentioned convex lens effect, high-quality, high-contrast images can be obtained. Moreover, this effect can be achieved using only water spraying, making the operation simple and convenient, and the cost low. Attached Figure Description

[0016] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0017] In the attached diagram: Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a cross-sectional schematic diagram of the present invention; Figure 3 This is a partial three-dimensional schematic diagram of the present invention; Figure 4 This is a three-dimensional schematic diagram of the rotary table of the present invention; In the diagram: 1. Rotary platform; 101. Rotary disk; 102. Guide cover; 103. Guide groove; 104. Slider; 105. Chassis; 106. Screw; 107. Gear 1; 108. Gear 2; 2. Center pivot; 3. Furnace top inspection camera; 301. Furnace body inspection camera; 302. Inclined connecting rod; 303. Connecting plate; 304. Light source; 4. Atomizing nozzle; 401. Hollow through rod; 5. Limiting support mechanism; 501. Support platform; 502. Support rod; 6. Furnace barrel body; 7. Fixture; 8. Motor component one; 801. Motor component two. Detailed Implementation

[0018] The following disclosure provides many different embodiments or examples for implementing different structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this application, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0019] Please see Figure 1-4 This invention provides a technical solution: a machine vision-based system and method for detecting cracks in a furnace cylinder, comprising a water mist spraying mechanism and a detection mechanism. The water mist spraying mechanism includes several atomizing nozzles 4 that spray water mist onto the inner wall of the furnace cylinder body 6; The testing facility includes a camera assembly that records images of cracks in the inner wall of the furnace cylinder body 6 after spraying. The testing mechanism also includes a central rotating rod 2 that drives the camera assembly to rotate along the inner wall of the furnace body 6.

[0020] Preferably, water mist is first sprayed evenly onto the inner wall of the furnace body 6 through several atomizing nozzles 4 of the water mist spraying mechanism. After standing for a certain period of time, the water mist gathers at the cracks to form water droplets with a convex lens effect, while at the crack-free areas, the water droplets formed by the water mist are not affected by capillary effect and slide down along the inner wall of the furnace body 6 due to gravity, thus easily identifying the corresponding cracks. Next, the operator suspends the furnace body 6 on the outside of the central rotating rod 2, aligning the central axis of the furnace body 6 with the axis of the central rotating rod 2. The camera assembly is then activated and the central rotating rod 2 is controlled to rotate, recording 360-degree images of the inner wall of the furnace body 6 and transmitting them to the detection platform. The detection platform stitches the images and displays them flat. Cracks in the inner wall of the furnace body 6 are detected through image recognition. Preferably, in order to further distinguish cracks, in this embodiment, before the water mist spraying mechanism operates, that is, when the inner wall of the furnace body 6 is kept dry, an image of the initial state of the inner wall is first taken and recorded. Then, after processing through the steps of the above embodiment, an image recording the condition of the inner wall of the furnace body 6 after spraying is obtained, and then compared and analyzed with the initial state image, so as to more conveniently detect and distinguish the existence and location of cracks, and further improve work efficiency. This application uses a water mist spraying mechanism to spray water mist onto the inner wall of the furnace body 6. If there are small cracks in the inner wall, due to the capillary effect, these cracks can generate a sufficiently large capillary force to adhere to the droplets. That is, the water mist will gather at the cracks to form water droplets. At this time, the location of the cracks in the inner wall of the furnace body 6 can be determined by adsorbing the droplets in the small cracks. Furthermore, the water droplets will produce a convex lens effect at the cracks. When the camera component is used for observation, it is equivalent to magnifying the cracks, making it easier to observe the existence and location of the cracks. This effect can be achieved simply by spraying water. The operation is simple and convenient, and the cost is low. It should be noted that since droplets can interfere with light, causing it to refract or scatter, it is impossible to accurately show the specific shape of the tiny cracks. However, this does not affect the fact that the cracks themselves can be identified by the adsorbed droplets. It is important to note that when performing the above steps, the temperature of the inner wall must be maintained at or above the dew point of the environment to prevent humid air from condensing on the wall surface and affecting the shooting results.

[0021] The camera assembly includes a furnace top detection camera 3 and several furnace body detection cameras 301. The furnace top detection camera 3 is connected to the upper end of the central rotating rod 2 via an inclined connecting rod 302. The several furnace body detection cameras 301 are vertically and evenly connected to one side of the central rotating rod 2 via several connecting plates 303. Several light sources 304 are also provided on the side of the central rotating rod 2 near the camera assembly.

[0022] Preferably, a furnace body detection camera 301 is provided to take pictures of the inner wall of the furnace body 360 degrees when the central rotating rod 2 rotates; similarly, a furnace top detection camera 3 is provided to take pictures of the furnace top 360 degrees, and a tilting connecting rod 302 and a connecting plate 303 are provided to adjust the position of the camera assembly, so as to facilitate the determination of the initial position of the camera assembly corresponding to the inner wall of the furnace body 6. Preferably, several groups of furnace body detection cameras 301 are evenly arranged vertically along the central rotating rod 2 to completely cover the furnace body and improve the comprehensiveness of the detection. Preferably, the detection platform is based on existing technology in the field, used to receive and process photos taken by the furnace body detection camera 301 and the furnace top detection camera 3, and to stitch the photos together for flat display.

[0023] Preferably, a light source 304 is also provided on one side of the central rotating rod 2. The light source 304 is correspondingly set with the furnace body detection camera 301. When the furnace body detection camera 301 takes pictures, the light source 304 can provide supplementary light. Moreover, the convex lens formed by the droplets at the crack can also converge the light source 304. The two work together to help obtain high-quality, high-contrast images.

[0024] The furnace top detection camera 3 and several furnace body detection cameras 301 are all equipped with explosion-proof covers.

[0025] Preferably, an explosion-proof cover is provided to prevent components from exploding due to harmful gases, thereby improving safety.

[0026] The water mist spraying mechanism also includes a rotating shaft, on which several atomizing nozzles 4 are mounted, and the atomizing nozzles 4 are connected to the ultrapure water supply system.

[0027] Preferably, the atomizing nozzle 4 is connected to the ultrapure water supply system. The atomizing nozzle 4 atomizes the ultrapure water. When the rotating shaft rotates, the ultrapure water is atomized and sprayed onto the inner wall of the furnace body 6.

[0028] The lower end of the furnace cylinder body 6 is provided with several limiting support mechanisms 5 to support it, and the lower end of the central rotating rod 2 is provided with a rotating platform 1, which is located inside the limiting support mechanism 5.

[0029] Preferably, a plurality of limiting support mechanisms 5 are provided to position and support the furnace cylinder body 6. The limiting support mechanism 5 includes a support rod 502 and a support platform 501 to provide stable support for the furnace cylinder body 6; and a rotating platform 1 is provided at the center, thereby driving the central rotating rod 2 to rotate 360 ​​degrees.

[0030] The rotary platform 1 includes a rotary table 101 and a fixed base 7. The central rotating rod 2 is fixed to the upper end of the rotary table 101. A guide cover 102 is slidably fitted on the outer side of the rotary table 101. A chassis 105 is fixedly connected to the lower end of the guide cover 102. The chassis 105 is rotatably connected to the upper end of the fixed base 7. The limiting support mechanism 5 is fixed to the upper side of the fixed base 7.

[0031] Optionally, to further improve the versatility of the inspection and facilitate adaptable inspection of furnace cylinder bodies 6 of various heights and sizes, the rotary table 101 is designed to be height-adjustable. Specifically, the rotary table 101 is driven to rise and fall by a linear drive mechanism, which in turn drives the central rotating rod 2 and the camera assembly to adjust their height positions, thus improving versatility. After the height position is adjusted, the rotary table 101 is rotated by the chassis 105 and the guide cover 102, enabling 360-degree inspection of inner wall cracks. Optionally, a gear 107 is fixedly connected to the lower end of the chassis 105 and meshes with a gear 108. The gear 108 is driven to rotate by a motor component 801. Preferably, the linear drive mechanism includes, but is not limited to, cylinder assemblies, hydraulic cylinder assemblies, or electric telescopic rods.

[0032] The guide cover 102 has guide grooves 103 on its four sides. A slider 104 is slidably fitted in the guide grooves 103. The slider 104 is fixed to the four sides of the rotary table 101. A through hole is opened at the upper end of the guide cover 102. A screw 106 is rotatably connected to the upper end of the fixed seat 7. The screw 106 passes through the rotary table 101 and is threadedly connected to it. An adaptive vertical groove is opened inside the central rotating rod 2. The screw 106 passes through the gear 107 and the chassis 105 and is clearance-fitted with them, so as not to affect the rotation of the gear 107 and the chassis 105.

[0033] Optionally, when it is necessary to drive the rotary table 101 to rise or fall, the screw 106 is driven to rotate by the motor component 8. The screw 106 is threadedly connected to the rotary table 101 and, under the guiding action of the slider 104 sliding along the guide groove 103, the rotary table 101 can be driven to rise or fall along the guide cover 102 to adjust the height of the central rotating rod 2. Preferably, an adaptive vertical groove is provided inside the central rotating rod 2 to accommodate the screw 106, thereby further increasing the lifting range of the central rotating rod 2 and avoiding the overall equipment height increase caused by using other linear drive mechanisms.

[0034] The atomizing nozzle 4 is fixed to the other side of the central rotating rod 2 via the hollow through rod 401.

[0035] Optionally, to improve the overall convenience of inspection, the atomizing nozzle 4 is set directly on the upper side of the central rotating rod 2, away from the camera assembly. The atomizing nozzle 4 is activated first to spray the inner wall 360 degrees, and then the camera assembly is activated to record 360-degree images. Both share the same central rotating rod 2, which is highly practical, improves the utilization rate of the components, and eliminates the need for workers to hoist the furnace body 6 to the outside of the central rotating rod 2 for inspection after spraying, saving transportation time, saving time and effort, and improving work efficiency.

[0036] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection, the internal communication between two components, or the interaction between two components. Those skilled in the art can understand the meaning of the above terms in this application according to the specific circumstances.

[0037] The above provides a detailed description of the machine vision-based reduction furnace cylinder crack detection system and method provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A detection method for a machine vision-based reduction furnace cylinder crack detection system, wherein, The detection system includes a water mist spraying mechanism and a detection mechanism, characterized in that: The water mist spraying mechanism includes several atomizing nozzles (4) that spray water mist onto the inner wall of the furnace body (6). The detection mechanism includes several camera components that record images of cracks in the inner wall of the furnace body (6) after spraying; The detection mechanism also includes a central rotating rod (2) that drives the camera assembly to rotate along the inner wall of the furnace body (6). The detection method includes the following steps: S1. Water mist is evenly sprayed onto the inner wall of the furnace body (6) through several atomizing nozzles (4) of the water mist spraying mechanism; S2. After standing, the water mist gathers at the cracks to form water droplets with a convex lens effect, while in the area without cracks, the water droplets formed by the water mist will slide down the inner wall of the furnace body (6) due to gravity. S3. Hang the furnace body (6) on the outside of the central rotating rod (2) so that the central axis of the furnace body (6) is aligned with the axis of the central rotating rod (2); S4. Start the camera assembly and control the central rotating rod (2) to rotate, record 360-degree images of the inner wall of the furnace body (6), and transmit them to the detection platform. The detection platform stitches the images and displays them flat. S5. Cracks in the inner wall of the furnace body (6) are detected by image recognition.

2. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 1, characterized in that: The camera assembly includes a furnace top detection camera (3) and several furnace body detection cameras (301). The furnace top detection camera (3) is connected to the upper end of the central rotating rod (2) through an inclined connecting rod (302). The several furnace body detection cameras (301) are vertically and evenly connected to one side of the central rotating rod (2) through several connecting plates (303). Several light sources (304) are also provided on the side of the central rotating rod (2) near the camera assembly.

3. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 2, characterized in that: The furnace top detection camera (3) and several furnace body detection cameras (301) are all equipped with explosion-proof covers.

4. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 1, characterized in that: The water mist spraying mechanism also includes a rotating shaft, and a plurality of atomizing nozzles (4) are disposed on the rotating shaft. The atomizing nozzles (4) are connected to the ultrapure water supply system.

5. The detection method of the machine vision-based reduction furnace cylinder crack detection system according to claim 1 or 2, characterized in that: The lower end of the furnace body (6) is provided with several limiting support mechanisms (5) to support it, and the lower end of the central rotating rod (2) is provided with a rotating platform (1), which is located inside the limiting support mechanism (5).

6. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 5, characterized in that: The rotary platform (1) includes a rotary disk (101) and a fixed base (7). The central rotating rod (2) is fixed to the upper end of the rotary disk (101). A guide cover (102) is slidably fitted on the outer side of the rotary disk (101). A chassis (105) is fixedly connected to the lower end of the guide cover (102). The chassis (105) is rotatably connected to the upper end of the fixed base (7). The limiting support mechanism (5) is fixed to the upper side of the fixed base (7).

7. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 6, characterized in that: The guide cover (102) has guide grooves (103) on its four sides. A slider (104) is slidably fitted in the guide groove (103). The slider (104) is fixed to the four sides of the rotary table (101). A through hole is opened at the upper end of the guide cover (102). A screw (106) is rotatably connected to the upper end of the fixed seat (7). The screw (106) passes through the rotary table (101) and is threadedly connected to it. An adaptive vertical groove is opened inside the central rotating rod (2).

8. The detection method of the machine vision-based reduction furnace cylinder crack detection system according to claim 1 or 2, characterized in that: The atomizing nozzle (4) is fixed to the other side of the central rotating rod (2) by a hollow through rod (401).

9. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 1, characterized in that: Before spraying water mist, take pictures of the dry inner wall of the furnace cylinder body (6) to obtain an initial state image; compare and analyze the image after spraying with the initial state image to detect the existence and location of cracks.

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