Vacuum counter-winding plasma cleaning machine

Abstract

The application relates to the technical field of plasma cleaning, in particular to a vacuum roll-to-roll plasma cleaning machine. The machine comprises a machine shell, a material cavity and a cleaning cavity are arranged in the machine shell, a feeding roller and a collecting roller are rotatably arranged in the material cavity, a film is wound on the outer sides of the feeding roller and the collecting roller, and the film extends into the cleaning cavity. Dust is gathered in the recesses through the rotation of the screw rod and the recesses of the feeding belt, so that the dust is prevented from being adsorbed on the side wall of the film, the cleanliness and the surface quality of the film are improved, the film is continuously rubbed by the push frame, the film is ensured to be always tight, the film is prevented from being wrinkled or deviated during the conveying process, the uniformity and the stability of the plasma cleaning are improved, the film is continuously and alternately forced by the push frame, the stress on the two sides of the film is uniform and continuously changed, a slight vibration effect is formed, the dust particles adsorbed on the film surface by static electricity are effectively eliminated, the dust migration efficiency is improved, and continuous self-cleaning is realized.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning technology, and in particular to a vacuum roll-to-roll plasma cleaning machine. Background Technology

[0002] In the field of modern precision manufacturing, the cleanliness of the surface of thin film materials directly affects the performance and yield of products. Especially in high-end manufacturing processes such as semiconductors, display panels and optical films, the requirements for removing surface contaminants are extremely stringent. Traditional cleaning methods are difficult to completely remove organic contaminants and particulate impurities at the micron or even nanometer scale. Plasma cleaning technology, with its dual action of physical bombardment and chemical reaction of highly active particles on contaminants, has achieved efficient and non-destructive removal of surface contaminants and has become the mainstream surface treatment method in this field. However, existing vacuum roll-to-roll plasma cleaners are prone to secondary dust adhesion on the film surface during continuous operation. Especially during plasma cleaning, airflow disturbance and electrostatic adsorption cause the cleaned film to be contaminated again, which seriously affects the consistency and stability of the cleaning effect. In addition, existing equipment relies on single negative pressure suction to collect dust, which is difficult to effectively capture fine particles that escape with the airflow, causing dust to circulate and accumulate in the cavity, thus affecting the stability of the cleaning effect and possibly causing scratches or contamination on the film surface. Summary of the Invention

[0003] The purpose of this invention is to solve the problems in the background art by proposing a vacuum roll-to-roll plasma cleaning machine.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A vacuum roll-to-roll plasma cleaner includes a housing. The housing has a material chamber and a cleaning chamber inside. A feeding roller and a receiving roller are rotatably installed inside the material chamber. A thin film is wound around the outer side of both the feeding roller and the receiving roller. The thin film extends into the cleaning chamber. A plurality of evenly distributed electrode plates are fixedly installed inside the cleaning chamber. The thin film is located between every two adjacent electrode plates. A feeding assembly is movably mounted on the outside of the electrode plate. The feeding assembly includes several feeding rollers and feeding belts. The feeding rollers and feeding belts are located at the top and bottom of the electrode plate and are arranged alternately. The film is located on the outside of the feeding rollers and feeding belts. A dust collection box is fixedly mounted at the bottom of the cleaning chamber. The feeding belt is movably mounted inside the dust collection box. The top of the dust collection box is integrally formed with several evenly distributed inclined plates, each of which corresponds to a feeding belt and is located above the feeding belt. A dust removal assembly is movably installed between the feeding belt and the inclined plates. The dust removal assembly includes a screw rod, a swing frame, and several push frames. The screw rod is rotatably installed on the top of the feeding belt, the push frames are slidably installed below the inclined plates, and the swing frames are rotatably installed below the inclined plates.

[0005] Preferably, a drive motor is fixedly installed on the outer side of the housing, and the output end of the drive motor is fixedly connected to the receiving roller. An air extraction port is provided on the side wall of the housing, and a dustproof plate is provided between the air extraction port and the cleaning chamber. The dustproof plate is fixedly installed on the inner side of the housing. A water inlet pipe and a water outlet pipe are fixedly connected to the side wall of the electrode plate. Both the water inlet pipe and the water outlet pipe are fixedly connected to an external water tank. The feeding roller is rotatably installed inside the cleaning chamber.

[0006] Preferably, the dust collection box has several evenly distributed support arc plates fixedly installed inside, and the support arc plates correspond one-to-one with the feeding belt. The feeding belt is movably sleeved on the outside of the support arc plates. Two rotating rods are rotatably installed inside the support arc plates. A gear is fixedly installed on the side wall of the rotating rod. The inner side of the feeding belt has a toothed surface. The gear meshes with the toothed surface. A motor is fixedly installed on the side wall of the dust collection box. A belt drive mechanism is provided between one of the rotating rods and the screw rod. The other rotating rod is fixedly connected to the output end of the motor.

[0007] Preferably, a top rod is slidably installed below the inclined plate, and a top block is integrally formed on the top of the top rod. The top block is located inside the push frame, and inclined surfaces two are provided on both sides of the top block. Inclined surface one is provided on the inner side of the push frame, and inclined surfaces two and inclined surfaces one abut against each other.

[0008] Preferably, the sidewall of the screw rod abuts against the feeding belt, the sidewall of the screw rod is provided with two spiral plates that are distributed in a mirror image, the bottom of the top rod is conical, and the bottom of the top rod abuts against the spiral plates on the sidewall of the screw rod.

[0009] Preferably, a spring is provided between the top rod and the dust collection box, a support rod is integrally formed inside the dust collection box, the pusher is slidably installed on the outside of the support rod, and the side wall of the pusher abuts against the film.

[0010] Preferably, two baffles are slidably installed on the outer sides of both ends of the feeding belt, and two slide bars are slidably installed on the side walls of the pushers on both sides. A slide rod is integrally formed on the side wall of the slide bar, and the slide rod is slidably installed on the side wall of the baffle. A spring is provided between the side wall of the baffle and the dust collection box, and the slide bar and the spiral plate on the side wall of the spiral rod abut against each other.

[0011] Preferably, the side wall of the swing frame is integrally formed with a support rod and a slide rod II. The slide rod II is slidably installed on the side wall of the slide bar, the support rod is movably installed on the side wall of the dust collection box, and a brush is fixedly installed at the bottom of the swing frame. The two sides of the brush abut against the spiral rod and the feeding belt, respectively.

[0012] Compared with existing technologies, the beneficial effects of this invention are as follows: 1. By rotating the screw and creating a recess in the feeding belt, dust accumulates in the recess and moves towards both ends of the dust collection box under the guidance of the screw plate. This prevents dust from contacting the film and instead adsorbs onto the sidewalls of the film, improving the cleanliness and surface quality of the film and ensuring the stability of subsequent film processing.

[0013] 2. By continuously pressing the film on both sides with the pusher, the film is kept taut at all times, which effectively prevents the film from wrinkling or shifting due to loosening during transportation. At the same time, it improves the uniformity and stability of plasma cleaning, ensures full coverage of the cleaning area, and further improves the surface treatment quality of the film.

[0014] 3. By applying continuous and alternating force to the film through the pusher, the force on both sides of the film is uniform and continuously varied, forming a micro-vibration effect. This effectively eliminates the micro-dust particles electrostatically adsorbed on the film surface and enhances the efficiency of dust migration to the recesses of the feed belt, thus achieving continuous self-cleaning.

[0015] 4. By using the baffles on both sides to resist the film, the film is kept in the center position at all times, which effectively prevents the film from shifting laterally during transportation, ensures the stability of the film's running trajectory, and further improves the accuracy and consistency of plasma cleaning.

[0016] 5. The reciprocating oscillation of the brushes allows for continuous dust removal and cleaning of the screw rod while intercepting dust, effectively preventing dust accumulation on the feed belt and screw rod surface. This further ensures that the film is free from dust interference during plasma cleaning, guaranteeing the stability of cleaning quality. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the back structure of the casing of the present invention; Figure 3 This is a schematic diagram of the cleaning chamber in this invention; Figure 4 This is a schematic diagram of the structure of the back of the cleaning chamber in this invention; Figure 5 This is a schematic diagram of the electrode plate structure in this invention; Figure 6 This is a schematic diagram of the feeding assembly in this invention; Figure 7 This is a schematic diagram of the installation of the feeding belt in this invention; Figure 8 For the present invention Figure 7 Enlarged structural diagram at point A; Figure 9 This is a cross-sectional view of the internal structure of the dust collection box in this invention; Figure 10 This is a schematic diagram of the dust removal component in this invention; Figure 11 This is a schematic diagram showing the disassembly of the feeding belt in this invention; Figure 12 This is a schematic diagram showing the disassembly of the pusher and top block in this invention; Figure 13 This is a disassembly diagram of the stop bar and slide bar in this invention.

[0018] In the diagram: 1. Machine casing; 11. Material chamber; 12. Cleaning chamber; 121. Air extraction port; 122. Dustproof plate; 13. Membrane; 131. Feeding roller; 132. Receiving roller; 133. Feeding roller; 134. Drive motor; 14. Electrode plate; 141. Water inlet pipe; 142. Drain pipe; 21. Dust collection box; 211. Inclined plate; 212. Motor; 213. Feeding belt; 214. Screw rod; 215. Support rod; 216. 217. Supporting arc plate; 218. Rotating rod; 219. Dust outlet; 220. Push frame; 221. Top rod; 222. Top block; 223. Spring 1; 224. Inclined surface 1; 225. Inclined surface 2; 23. Stop bar; 231. Sliding bar; 232. Spring 2; 233. Sliding rod 1; 24. Swing frame; 241. Brush; 242. Support rod; 243. Sliding rod 2; 311. Tooth surface; 312. Gear 1; 313. Belt drive mechanism. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0021] Reference Figure 1 - Figure 13As shown, a vacuum roll-to-roll plasma cleaner includes a housing 1. The housing 1 has a material chamber 11 and a cleaning chamber 12 inside. A feeding roller 131 and a receiving roller 132 are rotatably installed inside the material chamber 11. A thin film 13 is wound around the outer side of both the feeding roller 131 and the receiving roller 132. The thin film 13 extends into the cleaning chamber 12. A plurality of evenly distributed electrode plates 14 are fixedly installed inside the cleaning chamber 12. The thin film 13 is located between every two adjacent electrode plates 14. A feeding assembly is movably mounted on the outer side of the electrode plate 14. The feeding assembly includes several feeding rollers 133 and feeding belts 213. The feeding rollers 133 and feeding belts 213 are located at the top and bottom of the electrode plate 14 and are arranged alternately. The film 13 is located on the outer side of the feeding rollers 133 and feeding belts 213. A dust collection box 21 is fixedly mounted on the bottom of the cleaning chamber 12. The feeding belt 213 is movably mounted inside the dust collection box 21. The top of the dust collection box 21 is integrally formed with several evenly distributed inclined plates 211. The inclined plates 211 correspond one-to-one with the feeding belt 213 and are located above the feeding belt 213. A dust removal assembly is movably installed between the feeding belt 213 and the inclined plates 211. The dust removal assembly includes a screw rod 214, a swing frame 24 and several push frames 22. The screw rod 214 is rotatably installed on the top of the feeding belt 213, the push frames 22 are slidably installed below the inclined plates 211, and the swing frame 24 is rotatably installed below the inclined plates 211.

[0022] The bottom of the dust collection box 21 is inclined, and a dust discharge port 218 is opened at the lowest end of the bottom of the dust collection box 21.

[0023] like Figures 1-6 As shown, a drive motor 134 is fixedly installed on the outer side of the housing 1. The output end of the drive motor 134 is fixedly connected to the receiving roller 132. An air extraction port 121 is opened on the side wall of the housing 1. A dustproof plate 122 is provided between the air extraction port 121 and the cleaning chamber 12. The dustproof plate 122 is fixedly installed on the inner side of the housing 1. A water inlet pipe 141 and a drain pipe 142 are fixedly connected to the side wall of the electrode plate 14. Both the water inlet pipe 141 and the drain pipe 142 are fixedly connected to an external water tank. The feeding roller 133 is rotatably installed inside the cleaning chamber 12.

[0024] The drive motor 134 drives the take-up roller 132 to rotate, so that the take-up roller 132 winds up the film 13 inside the cleaning chamber 12, and at the same time pulls the film 13 wound on the outside of the unloading roller 131 into the interior of the cleaning chamber 12. The external water tank forms a water-cooled circulation to dissipate heat inside the electrode plate 14 through the water inlet pipe 141 and the water outlet pipe 142, ensuring that the temperature inside the cleaning chamber 12 remains stable and preventing the film 13 from deforming due to high temperature.

[0025] like Figure 7 and Figures 9-11As shown, several evenly distributed support arc plates 216 are fixedly installed inside the dust collection box 21. The support arc plates 216 and the feeding belt 213 correspond one-to-one. The feeding belt 213 is movably sleeved on the outside of the support arc plates 216. Two rotating rods 217 are rotatably installed inside the support arc plates 216. Gear 312 is fixedly installed on the side wall of the rotating rod 217. Tooth surface 311 is opened on the inner side of the feeding belt 213. Gear 312 and tooth surface 311 mesh. Motor 212 is fixedly installed on the side wall of the dust collection box 21. A belt drive mechanism 313 is provided between one of the rotating rods 217 and the screw rod 214. The other rotating rod 217 is fixedly connected to the output end of the motor 212. The side wall of the screw rod 214 abuts against the feeding belt 213. Two spiral plates are provided on the side wall of the screw rod 214 in a mirror distribution.

[0026] During the plasma cleaning process of the film 13, the motor 212 starts and drives one of the rotating rods 217 to rotate. This rotating rod 217 drives the feeding belt 213 to transport the film 13 via gear 312 and tooth surface 311. The feeding belt 213 drives the other rotating rod 217 to rotate, which in turn drives the screw rod 214 to rotate via belt drive mechanism 313. The side of the feeding belt 213 that contacts the film 13 protrudes outwards. The side of the feeding belt 213 that is in contact with the screw rod 214 is recessed inward, so that the dust in the plasma cleaning process falls above the feeding belt 213. Through the rotation of the screw rod 214 and the recess of the feeding belt 213, the dust accumulates in the recess of the feeding belt 213 and moves to both ends of the dust collection box 21 with the guidance of the screw plate, avoiding contact between the dust and the film 13 and adsorbing it on the side wall of the film 13, improving the cleanliness and surface quality of the film 13, and ensuring the stability of the subsequent processing of the film 13.

[0027] like Figures 7-10 and Figure 12 As shown, a top rod 221 is slidably installed below the inclined plate 211. A top block 222 is integrally formed on the top of the top rod 221. The top block 222 is located inside the pusher 22. Inclined surfaces 225 are provided on both sides of the top block 222. An inclined surface 224 is provided on the inner side of the pusher 22. The inclined surfaces 225 and 224 abut against each other. The bottom of the top rod 221 is conical. The bottom of the top rod 221 abuts against the spiral plate on the side wall of the spiral rod 214. A spring 223 is provided between the top rod 221 and the dust collection box 21. A support rod 215 is integrally formed inside the dust collection box 21. The pusher 22 is slidably installed on the outside of the support rod 215. The side wall of the pusher 22 abuts against the membrane 13.

[0028] During the rotation of the screw rod 214, the push rod 221 slides back and forth through the contact between the screw plate on the side wall of the screw rod 214 and the spring 223. The push block 222 slides back and forth with the push rod 221. When the push rod 221 slides upward, the push block 222 slides upward and contacts the inclined surface 224 away from the inclined plate 211 through one side of the inclined surface 225, causing the pusher 22 to move away from the inclined plate 211 and contact the membrane 13 on one side. At this time, the membrane 13 is further tightened due to the contact. When the push rod 221 slides downward, the push block 222 slides downward and contacts the inclined surface 224 near the inclined plate 211 through the other side of the inclined surface 225, causing the pusher 22 to move towards the inclined plate 211. The pusher moves in the direction of 11 and contacts the film 13 on the other side. At this time, the film 13 is further tightened due to the contact. The pusher 22 continuously contacts the films 13 on both sides to ensure that the film 13 always remains taut. This effectively prevents the film 13 from wrinkling or shifting due to slack during the conveying process. At the same time, it improves the uniformity and stability of plasma cleaning, ensures full coverage of the cleaning area, and further improves the surface treatment quality of the film 13. The pusher 22 continuously applies alternating force to the film 13, so that the force on both sides of the film 13 is uniform and continuously changing, forming a micro-vibration effect. This effectively eliminates the micro-dust particles electrostatically adsorbed on the surface of the film 13 and enhances the efficiency of dust migration to the recess of the feed belt 213, achieving continuous self-cleaning.

[0029] like Figure 10 , Figure 12 and Figure 13 As shown, two baffles 23 are slidably installed on the outer sides of both ends of the feeding belt 213, and two slide bars 231 are slidably installed on the side walls of the pushers 22 on both sides. The side wall of the slide bar 231 is integrally formed with a slide rod 233. The slide rod 233 is slidably installed on the side wall of the baffle 23. A spring 232 is provided between the side wall of the baffle 23 and the dust collection box 21. The slide bar 231 and the spiral plate on the side wall of the spiral rod 214 abut against each other.

[0030] When the pusher 22 moves away from the inclined plate 211, it drives the slide bar 231 to move, causing the side wall of the slide bar 231 to abut against the spiral plate on the side wall of the spiral rod 214. At this time, the spiral rod 214 drives the slide bar 231 to move towards both sides of the feeding belt 213. The slide bar 231 drives the stop bar 23 to slide, and the stop bar 23 compresses the second spring 232. When the pusher 22 moves towards the inclined plate 211, the slide bar 231 moves away from the spiral rod 214, causing the second spring 232 to be released. At this time, the stop bars 23 at both ends of the feeding belt 213 move towards the film 13 and abut against the film 13. Through the abutment of the film 13 by the stop bars 23 on both sides, the film 13 is always in the center position, effectively preventing the film 13 from shifting laterally during the conveying process, ensuring the stability of the film 13's running trajectory, and further improving the accuracy and consistency of plasma cleaning.

[0031] like Figures 8-9 and Figure 13 As shown, the side wall of the swing frame 24 is integrally formed with a support rod 242 and a slide rod 243. The slide rod 243 is slidably installed on the side wall of the slide bar 231, and the support rod 242 is movably installed on the side wall of the dust collection box 21. A brush 241 is fixedly installed at the bottom of the swing frame 24. The two sides of the brush 241 abut against the spiral rod 214 and the feeding belt 213, respectively.

[0032] During the reciprocating movement of the slide bar 231, the slide bar 231 drives the swing frame 24 to reciprocate. When the slide bar 231 moves towards the stop bar 23, the swing frame 24 drives the brush 241 to swing towards the spiral rod 214, causing the brush 241 to throw dust towards the spiral rod 214 and abut against the spiral plate on the side wall of the spiral rod 214 and the side wall of the feed belt 213. At this time, the brush 241 cleans the spiral plate on the side wall of the spiral rod 214. When the slide bar 231 moves away from the stop bar 23, the swing frame... 24 drives the brush 241 to swing away from the screw rod 214, causing the brush 241 to squeeze and bend the feed belt 213. At this time, the brush 241 intercepts the dust on the outer surface of the feed belt 213. Through the reciprocating swing of the brush 241, the brush 241 intercepts the dust while continuously removing dust and cleaning the screw rod 214, effectively preventing dust from accumulating on the surface of the feed belt 213 and the screw rod 214, further ensuring that the film 13 is free from dust interference during the plasma cleaning process and ensuring the stability of the cleaning quality.

[0033] The working principle and usage of this invention are explained in detail below: After the drive motor 134 drives the receiving roller 132 to rotate, the electrode plate 14 starts and performs plasma cleaning on the film 13. The external water tank forms a water-cooled circulation inside the electrode plate 14 through the water inlet pipe 141 and the drain pipe 142 to ensure that the temperature inside the cleaning chamber 12 remains stable and to prevent the film 13 from deforming due to high temperature. During the plasma cleaning process of the film 13, the motor 212 drives the feeding belt 213 to transport the film 13 through the rotating rod 217. At the same time, the rotating rod 217 drives the screw rod 214 to rotate through the belt drive mechanism 313. The side of the feeding belt 213 that is in contact with the film 13 protrudes outward, and the feeding belt 213 and the screw rod 214 are in contact. The indentation on the side of the contacting plate causes dust from the plasma cleaning process to fall onto the feed belt 213. Through the rotation of the screw rod 214 and the indentation of the feed belt 213, the dust accumulates in the indentation and moves towards both ends of the dust collection box 21 with the guidance of the screw plate. This prevents the dust from contacting the film 13 and adsorbs onto the sidewall of the film 13, improving the cleanliness and surface quality of the film 13 and ensuring the stability of subsequent processing. During the rotation of the screw rod 214, the push rod 221 drives the top block 222 to slide up and down reciprocally. When the push rod 221 slides upwards, the top block 222 drives the pusher 22 to move away from the inclined plate 211, causing the pusher 22 to move the slide bar 231 and contact one of the contacting plates. The film 13 on one side is further tightened due to the contact. The slide bar 231 and the screw rod 214 come into contact. At this time, the screw rod 214 drives the slide bar 231 to move to both sides of the feeding belt 213. The slide bar 231 drives the stop bar 23 to slide. The stop bar 23 compresses the second spring 232. When the top rod 221 slides downward, the top block 222 drives the pusher 22 to move towards the inclined plate 211, so that the pusher 22 drives the slide bar 231 to move and come into contact with the film 13 on the other side. At this time, the film 13 is further tightened due to the contact. The slide bar 231 moves away from the screw rod 214, and the second spring 232 is released, so that the stop bars 23 at both ends of the feeding belt 213 move towards the film 13 and come into contact with the film 13. The film 13 is then further tightened due to the contact. The slide bar 23 moves away from the screw rod 214, and the second spring 232 is released, so that the stop bars 23 at both ends of the feeding belt 213 move towards the film 13 and come into contact with the film 13. The stop bars 23 on both sides then press against the film 13. The contact force of the pusher 22 keeps the film 13 in a centered position, effectively preventing lateral shift during transport and ensuring the stability of its trajectory. This further improves the precision and consistency of plasma cleaning. The pusher 22 continuously applies pressure to both sides of the film 13, ensuring it remains taut and preventing wrinkles or shifts due to slack during transport. This also improves the uniformity and stability of plasma cleaning, ensuring complete coverage of the cleaning area and further enhancing the surface treatment quality of the film 13. The pusher 22 applies continuous, alternating force to the film 13, resulting in uniform and continuously varying force on both sides, creating a micro-vibration effect that effectively eliminates electrostatically adsorbed dust particles on the film 13 surface.This enhances the efficiency of dust migration to the recessed area of ​​the feed belt 213, achieving continuous self-cleaning. When the slide bar 231 moves towards the baffle bar 23, the swing frame 24 drives the brush 241 to swing towards the spiral rod 214, causing the brush 241 to throw dust onto the spiral rod 214 and clean the spiral plates on the side wall of the spiral rod 214. When the slide bar 231 moves away from the baffle bar 23, the swing frame 24 drives the brush 241 to swing away from the spiral rod 214, causing the brush 241 to squeeze and bend the feed belt 213, intercepting dust on the outer surface of the feed belt 213. Through the reciprocating swing of the brush 241, it intercepts dust while continuously removing dust and cleaning the spiral rod 214, effectively preventing dust accumulation on the surfaces of the feed belt 213 and the spiral rod 214. This further ensures that the film 13 is free from dust interference during plasma cleaning, guaranteeing the stability of the cleaning quality.

[0034] To further clarify, the aforementioned fixed connection should be interpreted broadly unless otherwise explicitly specified and limited. For example, it may be welding, gluing, or integral molding, or other conventional methods well known to those skilled in the art.

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A vacuum roll-to-roll plasma cleaner, comprising a housing (1), characterized in that: The housing (1) has a material chamber (11) and a cleaning chamber (12) inside. The material chamber (11) is rotatably mounted with a feeding roller (131) and a receiving roller (132). A film (13) is wound around the outside of the feeding roller (131) and the receiving roller (132). The film (13) extends into the cleaning chamber (12). A number of uniformly distributed electrode plates (14) are fixedly installed inside the cleaning chamber (12). The film (13) is located between every two adjacent electrode plates (14). A feeding assembly is movably installed on the outside of the electrode plate (14). The feeding assembly includes several feeding rollers (133) and a feeding belt (213). The feeding rollers (133) and the feeding belt (213) are located at the top and bottom of the electrode plate (14) and are arranged alternately. The film (13) is located on the outside of the feeding rollers (133) and the feeding belt (213). A dust collection box (21) is fixedly installed at the bottom of the cleaning chamber (12). The feeding belt (213) is movably installed inside the dust collection box (21). The top of the dust collection box (21) is integrally formed with several evenly distributed inclined plates (211). The inclined plates (211) correspond one-to-one with the feeding belt (213) and are located above the feeding belt (213). A dust removal assembly is movably installed between the feeding belt (213) and the inclined plates (211). The dust removal assembly includes a screw rod (214), a swing frame (24) and several push frames (22). The screw rod (214) is rotatably installed on the top of the feeding belt (213). The push frame (22) is slidably installed below the inclined plate (211). The swing frame (24) is rotatably installed below the inclined plate (211). Two baffles (23) are slidably installed on the outer sides of both ends of the feeding belt (213), and two slide bars (231) are slidably installed on the side walls of the pushers (22) on both sides. The side wall of the slide bar (231) is integrally formed with a slide rod (233). The slide rod (233) is slidably installed on the side wall of the baffle (23). A spring (232) is provided between the side wall of the baffle (23) and the dust collection box (21). The slide bar (231) and the spiral plate on the side wall of the spiral rod (214) abut against each other. The side wall of the swing frame (24) is integrally formed with a support rod (242) and a slide rod II (243). The slide rod II (243) is slidably installed on the side wall of the slide bar (231). The support rod (242) is movably installed on the side wall of the dust collection box (21). A brush (241) is fixedly installed at the bottom of the swing frame (24). The two sides of the brush (241) abut against the spiral rod (214) and the feeding belt (213) respectively.

2. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that: A drive motor (134) is fixedly installed on the outer side of the housing (1). The output end of the drive motor (134) is fixedly connected to the receiving roller (132). An air extraction port (121) is opened on the side wall of the housing (1). A dustproof plate (122) is provided between the air extraction port (121) and the cleaning chamber (12). The dustproof plate (122) is fixedly installed on the inner side of the housing (1). A water inlet pipe (141) and a drain pipe (142) are fixedly connected to the side wall of the electrode plate (14). Both the water inlet pipe (141) and the drain pipe (142) are fixedly connected to an external water tank. The feeding roller (133) is rotatably installed inside the cleaning chamber (12).

3. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that: The dust collection box (21) has several evenly distributed support arc plates (216) fixedly installed inside. The support arc plates (216) correspond one-to-one with the feeding belt (213). The feeding belt (213) is movably sleeved on the outside of the support arc plates (216). The support arc plates (216) have two rotating rods (217) rotatably installed inside. The side wall of the rotating rod (217) is fixedly installed with a gear (312). The inner side of the feeding belt (213) has a toothed surface (311). The gear (312) meshes with the toothed surface (311). The side wall of the dust collection box (21) is fixedly installed with a motor (212). One of the rotating rods (217) and the screw rod (214) are provided with a belt drive mechanism (313). The other rotating rod (217) is fixedly connected to the output end of the motor (212).

4. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that: A top rod (221) is slidably installed below the inclined plate (211). A top block (222) is integrally formed on the top of the top rod (221). The top block (222) is located inside the push frame (22). Inclined surfaces two (225) are provided on both sides of the top block (222). Inclined surfaces one (224) are provided on the inner side of the push frame (22). The inclined surfaces two (225) and inclined surfaces one (224) abut against each other.

5. The vacuum roll-to-roll plasma cleaner according to claim 4, characterized in that: The side wall of the auger (214) abuts against the feeding belt (213). The side wall of the auger (214) is provided with two spiral plates that are distributed in a mirror image. The bottom of the top rod (221) is conical. The bottom of the top rod (221) abuts against the spiral plates on the side wall of the auger (214).

6. The vacuum roll-to-roll plasma cleaner according to claim 4, characterized in that: A spring (223) is provided between the top rod (221) and the dust collection box (21). The dust collection box (21) has an integrally formed support rod (215). The pusher (22) is slidably installed on the outside of the support rod (215). The side wall of the pusher (22) abuts against the film (13).

Images