A thermal fluid controlled polishing pad surface topography modification apparatus and real-time modification method

Abstract

The application provides a polishing pad surface topography trimming device and real-time trimming method of thermal fluid control, and relates to the field of precision machining equipment.The device comprises a thermal fluid circulation control system, a polishing disc and a polishing pad.The polishing pad is fixed to the surface of the polishing disc, and the polishing disc is provided with a fluid cavity.The thermal fluid circulation control system is connected with the fluid cavity and is used for providing the thermal fluid with controllable parameters into the fluid cavity, so that the polishing disc is deformed, and then the surface topography of the polishing pad is adjusted, wherein the parameters of the thermal fluid include at least one of temperature and pressure.By adjusting the parameters of the thermal fluid entering the fluid cavity in the polishing disc, the real-time trimming of the surface topography of the polishing pad is realized, the production efficiency is significantly improved, the material loss problem of mechanical trimming is solved, the thermal fluid trimming is different from the mechanical trimming, the polishing pad surface can produce new topography without removing the material, and no additional material loss is generated in the trimming stage.

Description

Technical Field

[0001] This invention relates to the field of precision machining equipment technology, and in particular to a heat-fluid-controlled polishing pad surface morphology trimming device and a real-time trimming method. Background Technology

[0002] In the manufacturing of high-precision workpieces such as semiconductor wafers and optical components, chemical mechanical polishing (CMP) is a crucial process for achieving global surface planarization. The polishing pad, as a key consumable in the polishing process, directly affects the material removal rate and final surface contour accuracy of the workpiece. As the polishing process progresses, the surface of the polishing pad will change its morphology due to wear, requiring periodic finishing to restore its performance.

[0003] Polishing pad surface finishing is an important means of improving the surface contour accuracy of planar components during continuous polishing, and it is usually achieved through machining methods. Common polishing pad surface finishing techniques include diamond turning tool finishing and diamond shot grinding finishing, which involve using diamond turning tools or diamond shot to perform metal cutting on the surface contour of the polishing pad (i.e., polishing pad surface contour finishing). Diamond turning tool finishing refers to: mounting a turning tool on the feed slide of the finishing spindle of the polishing machine, placing the polishing pad on the rotary table, and then the rotary table driving the polishing pad to rotate at high speed. The turning tool moves along the radial line of the polishing pad under the drive of the slide, realizing the turning of the polishing pad surface, i.e., finishing. Diamond shot grinding finishing refers to: mounting diamond shot on the spindle of the finishing spindle, the spindle rotating at high speed, the rotary table driving the polishing pad to adjust its angle and position, and the finishing spindle slide driving the diamond shot to adjust its position along the radial line of the polishing pad. The surface finishing of the polishing pad is achieved through the relative contact between the high-speed rotating shot and the polishing pad.

[0004] The applicant has discovered that the existing technology has at least the following technical problems: Firstly, the material loss during mechanical dressing of the polishing pad surface is high. During continuous polishing, the surface material of the polishing pad is constantly lost, leading to changes in its microstructure and affecting the machining accuracy and material removal rate of planar components. Therefore, frequent dressing of the polishing pad surface is required during production. The principle of mechanical dressing is to remove material; each mechanical dressing of the polishing pad surface exacerbates material loss, thus affecting the lifespan of the polishing pad. Secondly, the dressing efficiency of mechanical dressing of the polishing pad surface is low. Mechanical dressing of the polishing pad surface, whether by turning or diamond pellets, consumes a significant amount of time. For example, mechanical dressing of a 1200 mm diameter polishing pad takes approximately 1-3 hours. Furthermore, due to the large amount of chips remaining after dressing, time is required to clean the processing area of ​​the polishing machine. Each dressing operation requires at least one day of downtime for the polishing machine, impacting processing efficiency. Summary of the Invention

[0005] The purpose of this invention is to provide a heat-fluid-controlled polishing pad surface morphology trimming device and a real-time trimming method to solve the technical problems of high material loss and low repair efficiency in the mechanical trimming of polishing pad surfaces in the prior art. The various technical effects of the preferred solutions among the many technical solutions provided by this invention are detailed below.

[0006] To achieve the above objectives, the present invention provides the following technical solution: The present invention provides a heat fluid controlled polishing pad surface morphology trimming device, comprising a heat fluid circulation control system, a polishing disc, and a polishing pad, wherein, The polishing pad is fixed to the surface of the polishing disk, and a fluid cavity is provided inside the polishing disk; The hot fluid circulation control system is connected to the fluid cavity and is used to provide a parameter-controllable hot fluid to the fluid cavity to cause the polishing disk to deform, thereby adjusting the surface morphology of the polishing pad. The parameters of the hot fluid include at least one of temperature and pressure.

[0007] Preferably, the hot fluid circulation control system includes a water chiller, a first hot fluid pipeline, and a second hot fluid pipeline, wherein: The water chiller contains a hot fluid, and the temperature of the hot fluid inside the water chiller is adjustable; The two ends of the first hot fluid pipeline are connected to the outlet of the water chiller and the inlet of the fluid cavity, respectively, and the two ends of the second hot fluid pipeline are connected to the outlet of the fluid cavity and the inlet of the water chiller, respectively, thereby providing circulating hot fluid to the fluid cavity.

[0008] Preferably, the hot fluid circulation control system further includes a pressure regulating device, which is disposed on the first hot fluid pipeline and / or the second hot fluid pipeline, and is used to regulate the pressure of the circulating hot fluid.

[0009] Preferably, the pressure regulating device includes a pressure regulating valve one and a pressure regulating valve two. The pressure regulating valve one is disposed on the hot fluid pipeline one and is used to regulate the pressure of the hot fluid in the hot fluid pipeline one; the pressure regulating valve two is disposed on the hot fluid pipeline two and is used to regulate the pressure of the hot fluid in the hot fluid pipeline two.

[0010] Preferably, the polishing disc includes a disc body, a top cover, and a base, wherein: The polishing pad is fixed to the upper surface of the disc body, and the number of disc bodies is one or two or more; The top cover is fixed to the lower part of the disc body, and the bottom support is fixedly connected to the top cover, forming the fluid cavity; The base is provided with a fluid inlet and a fluid outlet that are connected to the fluid cavity. The fluid inlet and the fluid outlet are connected to the hot fluid circulation control system, thereby forming a circulation path for the flow of heating fluid.

[0011] Preferably, the heat-fluid-controlled polishing pad surface morphology trimming device further includes a turntable and a rotary joint, wherein: The turntable is fixedly connected to the bottom of the polishing disc, and the rotary joint is located at the bottom of the turntable and connected to the first hot fluid pipeline and the second hot fluid pipeline.

[0012] The present invention also provides a method for real-time surface morphology trimming of a polishing pad controlled by a thermal fluid, characterized in that, based on the above-mentioned thermal fluid controlled surface morphology trimming device for polishing pads, the trimming method includes: Using the aforementioned hot fluid circulation control system, at least one parameter of the hot fluid flowing into the fluid cavity is adjusted, thereby causing the polishing disk to undergo a preset deformation, and thus adjusting the surface morphology of the polishing pad. The parameters of the thermal fluid include at least one of temperature and pressure.

[0013] Preferably, the trimming method further includes: After polishing the workpiece using the polishing pad with adjusted surface morphology, the processing effect of the workpiece is detected. Based on the difference between the processing effect and the preset index, the parameters of the heat fluid are fed back and iteratively adjusted until the processing effect of the workpiece meets the preset index.

[0014] Preferably, before the polishing pad is morphologically modified, the surface morphology of the polishing pad is machined using a diamond turning tool or diamond pellets, and the surface of the polishing pad is grooved using a milling cutter.

[0015] Preferably, when the pressure of the hot fluid is constant, the shaping effect of the hot fluid at different temperatures on the polishing pad is determined according to the radial distance and longitudinal deformation curve of the polishing pad surface. In this case, the longitudinal deformation ΔZ of the polishing pad surface is described by the following polynomial equation:

[0016] Where e is a mathematical constant, one of the irrational numbers in mathematics, with an approximate value of 2.71828, t represents the temperature of the hot fluid, and ρ represents the radial distance between the set position of the polishing disk and the center of the polishing disk. When the temperature of the hot fluid is constant, the shaping effect of the hot fluid at different pressures on the polishing disc is determined according to the curve of the radial distance of the polishing pad surface and the fluid pressure deformation curve of the polishing disc surface contour.

[0017] The hot fluid controlled polishing pad surface morphology trimming device and real-time trimming method provided by this invention have the following advantages compared with the prior art: By adjusting the parameters of the hot fluid entering the fluid cavity of the polishing pad, the low efficiency problem of mechanical trimming of the polishing pad is solved. By adjusting the hot fluid and pressure, real-time trimming of the polishing pad surface morphology is achieved, significantly improving production efficiency. Morphology adjustment can be performed online and in real time without machine downtime. The trimming process is fast, greatly reducing equipment non-productive time. It solves the material loss problem of mechanical trimming. Hot fluid trimming is different from mechanical trimming. It can produce a new morphology on the polishing pad surface without removing the material. No additional material loss is generated during the trimming stage, which is beneficial to improving the service life of the polishing pad. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of a heat-fluid-controlled polishing pad surface morphology trimming device. Figure 2 This is a schematic diagram of the mating structure of the polishing disc and polishing pad; Figure 3 This is a schematic diagram of the structure in which hot fluid flows within the polishing disc; Figure 4 This is a schematic diagram of the hot fluid conditioning process on the surface of the polishing pad; Figure 5 It is a curve showing the relationship between the radial distance on the surface of the polishing pad and the longitudinal deformation of the surface of the polishing pad; Figure 6 It is the curve of radial distance on the surface of the polishing pad versus fluid pressure deformation of the surface profile of the polishing pad.

[0020] In the diagram: 1. Polishing pad; 2. Polishing disc; 3. Turntable; 4. Rotary joint; 5. Hot fluid pipeline one; 6. Pressure gauge one; 7. Pressure regulating valve one; 8. Heating switch; 9. Water chiller; 10. Temperature display screen; 11. Cooling switch; 12. Pressure gauge two; 13. Pressure regulating valve two; 14. Hot fluid pipeline two; 15. Alloy aluminum disc; 16. Cast iron disc; 17. Top cover; 18. Base support; 19. Fluid chamber. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be described in detail below. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0022] In the description of this invention, it should be understood that the terms "center," "length," "width," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and "side," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0023] This invention provides a heat-fluid-controlled polishing pad surface morphology trimming device that eliminates the need for mechanical trimming, has high trimming efficiency, and does not generate additional material loss during the trimming stage, thus improving the service life of the polishing pad.

[0024] The following is combined with Figures 1-6 The technical solution provided by this invention will be described in more detail below.

[0025] Example 1: See Figures 1-6 As shown, the hot fluid controlled polishing pad surface morphology trimming device provided by the present invention includes a hot fluid circulation control system, a polishing disk 2 and a polishing pad 1, wherein the polishing pad 1 is fixed to the surface of the polishing disk 2, and a fluid cavity 19 is provided inside the polishing disk 2; the hot fluid circulation control system is connected to the fluid cavity 19 and is used to provide a hot fluid with controllable parameters to the fluid cavity 19, so as to cause the polishing disk 2 to deform, thereby adjusting the surface morphology of the polishing pad 1, wherein the parameters of the hot fluid include at least one of temperature and pressure.

[0026] In this embodiment, by adjusting the parameters of the hot fluid entering the fluid cavity 19 of the polishing pad 2, the low efficiency problem of mechanical dressing of the polishing pad 1 is solved. By adjusting the temperature and pressure of the hot fluid, real-time dressing of the surface morphology of the polishing pad 1 is achieved, which significantly improves production efficiency. The morphology adjustment can be performed online and in real time without stopping the machine. The dressing process is fast and greatly reduces the non-productive time of the equipment. It also solves the material loss problem of mechanical dressing. Hot fluid dressing is different from mechanical dressing. It can produce a new morphology on the surface of the polishing pad 1 without removing the material. There is no additional material loss during the dressing stage, which is conducive to improving the service life of the polishing pad 1.

[0027] Specifically, the hot fluid circulation control system acts as an actuator to achieve precise control of fluid parameters. In this embodiment, the system includes a water chiller 9 as a temperature control unit, which functions to heat or cool the hot fluid (e.g., deionized water, ethylene glycol aqueous solution, or other engineering fluids with good thermal conductivity) according to the instructions of the control system, so that it reaches and stabilizes at the target temperature.

[0028] As an alternative implementation, see [link to implementation details]. Figures 1-3 As shown, the hot fluid circulation control system of this embodiment includes a water chiller 9, a hot fluid pipeline 5, and a hot fluid pipeline 14. The function of the water chiller 9 is to heat or cool the hot fluid (e.g., deionized water, ethylene glycol aqueous solution, or other engineering fluids with good thermal conductivity) according to the instructions of the control system, so as to make it reach and stabilize at the target temperature.

[0029] The water chiller 9 contains a hot fluid, and the temperature of the hot fluid inside the water chiller 9 is adjustable. The two ends of the hot fluid pipeline 15 are connected to the outlet of the water chiller 9 and the inlet of the fluid chamber 19, respectively. The two ends of the hot fluid pipeline 2 14 are connected to the outlet of the fluid chamber 19 and the inlet of the water chiller 9, respectively, thereby providing the fluid chamber 19 with circulating hot fluid.

[0030] The water chiller 9 (also known as a water cooler or industrial chiller) is a mature, existing piece of equipment. Its control of fluid temperature (usually water or a water-based solution) is a closed-loop automatic control system. Its core lies in precisely controlling the rate at which the refrigeration system removes heat from the fluid, stabilizing its temperature at the set target value. The core of the water chiller 9 is a vapor compression refrigeration cycle, mainly consisting of a compressor, condenser, expansion valve (throttling device), and evaporator. Low-temperature, low-pressure liquid refrigerant flows into the evaporator. The fluid requiring cooling (a refrigerant, such as water) flows through the evaporator tube bundle (or plates). The refrigerant absorbs heat from the fluid and boils, vaporizing into low-temperature, low-pressure vapor. This process lowers the fluid's temperature. The low-temperature, low-pressure refrigerant vapor is drawn into the compressor and compressed into high-temperature, high-pressure vapor. The high-temperature, high-pressure refrigerant vapor enters the condenser. The cooling medium (air for air-cooled systems, water for water-cooled systems) carries away its heat, causing it to condense into a high-pressure, room-temperature liquid. High-pressure liquid refrigerant flows through the expansion valve (or capillary tube or other throttling device), where the pressure drops sharply and the temperature also drops rapidly, turning into low-temperature, low-pressure liquid wet vapor, which then re-enters the evaporator to begin a new cycle.

[0031] The temperature of the hot fluid is adjusted based on the existing water chiller 9. During operation, the temperature change is set by the heating switch 8 and the cooling switch 11, and the temperature display screen 10 displays the real-time temperature of the hot fluid, thus facilitating the adjustment of the hot fluid temperature.

[0032] As an alternative implementation, see [link to implementation details]. Figure 1 As shown, the surface morphology trimming device for the polishing pad 1 controlled by hot fluid also includes a turntable 3 and a rotary joint 4, wherein: the turntable 3 is fixedly connected to the bottom of the polishing disc 2, the rotary joint 4 is located at the bottom of the turntable 3 and is connected to the first hot fluid pipeline 5 and the second hot fluid pipeline 14.

[0033] The rotary joint 4 serves to establish a reliable fluid channel between the static piping system and the high-speed rotating polishing disc 2, ensuring that the fluid can flow in and out smoothly.

[0034] The turntable 3 is a mature component in this field. The rotation of the turntable 3 drives the polishing disc 2 and the polishing pad 1 to rotate, thereby polishing the workpiece.

[0035] As an optional implementation, the hot fluid circulation control system further includes a pressure regulating device, which is disposed on hot fluid line 5 and / or hot fluid line 14, for regulating the pressure of the circulating hot fluid. The function of the pressure regulating device is to regulate the pressure of the hot fluid flowing through the fluid chamber 19.

[0036] Specifically, as an optional implementation method, see [link to documentation]. Figure 1As shown, the pressure regulating device includes a pressure regulating valve 7 and a pressure regulating valve 13. Pressure regulating valve 7 is installed on hot fluid pipeline 5 and is used to regulate the pressure of the hot fluid in hot fluid pipeline 5. Pressure regulating valve 13 is installed on hot fluid pipeline 14 and is used to regulate the pressure of the hot fluid in hot fluid pipeline 14. A pressure gauge 6 is also installed on hot fluid pipeline 5, and a pressure gauge 12 is installed on hot fluid pipeline 14 to display the pressure of the hot fluid.

[0037] Pressure regulating valve 7 and pressure regulating valve 13 can be electrically operated or manually set constant pressure valves. Their function is to maintain the pressure of the fluid circuit at a relatively constant reference value during temperature-based control processes, so as to eliminate the influence of pressure fluctuations on thermally induced deformation and ensure the singularity of the control variable. Alternatively, they can adjust the pressure of the hot fluid when the temperature is constant.

[0038] See Figure 1 As shown, the flow sequence of the hot fluid is as follows: the hot fluid flows out of the water chiller 9, passes through the pressure regulating valve 7 and the pressure gauge 6, flows into the rotary joint 4 through the hot fluid pipeline 5, then flows into the interior of the polishing disc 2, then flows into the rotary joint 4, then passes through the hot fluid pipeline 14, flows into the pressure regulating valve 13 and the pressure gauge 12, and flows back to the water chiller 9, forming a hot fluid circulation.

[0039] The fluid cavity 19 in this embodiment is formed by the following structure: See Figure 2 and Figure 3 As shown, the polishing disc 2 includes a disc body, a top cover 17, and a bottom support 18, wherein: the polishing pad 1 is fixed to the upper surface of the disc body, and the disc body has one or more layers; the top cover 17 is fixed to the lower part of the disc body, and the bottom support 18 is fixedly connected to the top cover 17 and surrounds a fluid cavity 19; the bottom support 18 has a fluid inlet and a fluid outlet that communicate with the fluid cavity 19, and the fluid inlet and fluid outlet are connected to the hot fluid circulation control system, thereby forming a circulation path for the flow of hot fluid.

[0040] Polishing pad 1 is a consumable that comes into direct contact with the workpiece to be processed. It is usually made of polymer materials such as polyurethane or metal materials such as tin. The accuracy of its surface morphology directly determines the polishing quality.

[0041] Among them, see Figure 3 In this embodiment, the disc body has a two-layer structure (but is not limited to two layers), comprising an aluminum alloy disc 15 and a cast iron disc 16, which are rigidly fixedly connected. The materials of the aluminum alloy disc 15, the cast iron disc 16, and the top cover 17 can be freely combined; they can be the same material or different types of materials. The fluid cavity formed by the top cover 17 and the base 18 can be of any shape, such as a radial shape or a circulating water tank shape.

[0042] The polishing disc 2, serving as the main structure supporting the polishing pad 1 and enabling deformation, is typically made of a metallic material (such as stainless steel or aluminum alloy) with good thermal conductivity and structural stability. In this embodiment, the upper surface of the disc is used to fix the polishing pad 1. The top cover 17 and the bottom support 18 are fixed to the lower part of the disc by bolts, welding, or other sealing methods, together forming a sealed internal space, namely the fluid cavity 19. The bottom support 18 is machined with a fluid inlet and a fluid outlet, which are respectively connected to the corresponding channels of the rotary joint 4, forming the channels for fluid to enter and exit the fluid cavity 19.

[0043] The trimming principle in this embodiment is as follows: Figure 3 As shown, the fluid cavity 19 generates a thermal fluid pressure Fp under the action of the thermal fluid, and the thermal fluid pressure acts on the bottom surface of the disk. The thermal field of the thermal fluid will cause thermal stress Fa to be generated inside the composite material disk composed of polishing pad 1, aluminum alloy disk 15, and cast iron disk 16. The combined action of thermal fluid pressure Fp and thermal stress Fa will cause the surface morphology of polishing pad 1 to change.

[0044] Example 2: See Figure 4 This embodiment provides a real-time surface morphology adjustment method for a polishing pad 1 controlled by a thermal fluid. Based on the aforementioned surface morphology adjustment device for a polishing pad 1 controlled by a thermal fluid, the adjustment method includes: using a thermal fluid circulation control system to adjust at least one parameter of the thermal fluid flowing into the fluid cavity 19, thereby causing a preset deformation of the polishing disk 2, and thus adjusting the surface morphology of the polishing pad 1; wherein, the parameters of the thermal fluid include at least one of temperature and pressure.

[0045] As an alternative implementation, see [link to implementation details]. Figure 4 The finishing method also includes: after polishing the workpiece using a polishing pad 1 with adjusted surface morphology, detecting the workpiece's processing effect; based on the difference between the processing effect and the preset index, feeding back and iteratively adjusting the parameters of the heat fluid until the workpiece's processing effect meets the preset index.

[0046] As an optional implementation, before the polishing pad 1 is morphologically modified, the surface morphology of the polishing pad 1 is machined using a diamond turning tool or a diamond pellet, and the surface of the polishing pad 1 is grooved using a milling cutter.

[0047] Specifically, the process for real-time surface morphology trimming of polishing pad 1 controlled by thermal fluid is as follows: Figure 4 As shown, the first stage is the initial finishing stage: the surface morphology of polishing pad 1 is machined using a diamond turning tool or diamond pellets, and the surface of polishing pad 1 is grooved using a milling cutter. Then comes the hot fluid parameter adjustment stage: the temperature is set using the heating switch 8 and cooling switch 11 of the water chiller 9, and the pressure parameter of the hot fluid is set using pressure gauge 6, i.e., the parameter t is set. i pi Then, the planar optical element is polished. After processing, the surface accuracy of the optical element is inspected. If the accuracy does not meet the technical specifications, the parameter t is readjusted. i p i That is, the temperature and pressure parameters of the hot fluid are used to reprocess the optical components until the processing accuracy meets the requirements. The real-time surface morphology trimming method of the hot fluid-controlled polishing pad 1 can adjust the parameters at any time according to the processing results, achieving a real-time adjustment effect.

[0048] Based on actual tests, under different values ​​of the temperature parameter t and pressure parameter p of the heat fluid, the real-time surface morphology of polishing pad 1 after heat fluid conditioning is as follows: Figure 5 and Figure 6 As shown, by changing the temperature and pressure parameters, the surface morphology of polishing pad 1 underwent different changes.

[0049] To shape the polishing pad 1, as an optional implementation, when the pressure of the hot fluid is constant, the shaping results of the polishing disk 2 by the hot fluid at different temperatures are determined according to the radial distance and longitudinal deformation curve of the polishing pad 1 surface, see [reference needed]. Figure 5 As shown.

[0050] In this embodiment, to facilitate the implementation of the method, a control unit is provided. The control unit is used to adjust the fluid flowing into the fluid cavity 19 inside the polishing disk 2 to the target value so that the polishing disk 2 produces a preset deformation, thereby shaping the surface of the polishing pad 1 to the target surface morphology. The control unit is also used to compare the actual surface morphology with the preset ideal workpiece morphology and to correct the parameters of the hot fluid based on the difference obtained from the comparison.

[0051] The control unit is based on a pre-defined quantitative model, which can be a mathematical expression or a set of data. This model precisely describes the functional relationship between the longitudinal deformation ΔZ of the polishing pad 1 surface at different radial positions, which is the output quantity, and the thermal fluid parameter (temperature t in this embodiment), which is the input quantity. It is understood that this model can be pre-established through finite element analysis simulation modeling or extensive experimental calibration. The process of establishing the model through experimental calibration typically includes: measuring the contour line of the polishing pad 1 surface along the diameter direction using a high-precision profilometer or laser displacement sensor at different fluid temperatures t, recording a series of data points (ρ, ΔZ), and performing curve fitting on these data points to obtain the deformation function ΔZ(ρ) at different temperatures.

[0052] Figure 5This quantitative relationship is illustrated schematically in the form of a curve graph. The multiple curves plotted in the graph correspond to specific fluid temperatures, such as t=16°C, t=18°C, t=20°C, etc., intuitively reflecting how temperature changes cause the entire deformation curve to undergo regular shifts or shape changes. Figure 5 The horizontal axis represents the radial distance of the polishing pad 1 surface, that is, the radial distance between the target position of the polishing pad 1 and the center of the polishing pad 1 circle, and the vertical axis represents the longitudinal deformation of the polishing pad 1 surface.

[0053] This quantitative model can be a set of polynomial equations. For example, when the fluid pressure is constant, for different target temperatures t, the relationship between the deformation ΔZ (unit: micrometers μm) and the radial distance ρ (unit: millimeters mm) can be described by a fourth-order polynomial: ΔZ(t,ρ)=a(t) ρ^4+b(t) ρ^3+c(t) ρ^2+d(t)ρ+e(t), where the coefficients a, b, c, d, and e are functions that vary with temperature t.

[0054] The control unit's memory stores a set of specific coefficient values ​​for multiple discrete temperature points (e.g., every 1°C from 15°C to 25°C). For example:

[0055] Where e is a mathematical constant, one of the irrational numbers in mathematics, with an approximate value of 2.71828, t represents the temperature of the hot fluid, and ρ represents the radial distance between the set position of polishing disk 2 and the center of polishing disk 2.

[0056] In this embodiment, when the temperature of the hot fluid is constant, the finishing results of the polishing pad 1 surface by hot fluids at different pressures are based on the radial distance of the polishing pad 1 surface and the fluid pressure deformation curve of the polishing pad 1 surface contour. See [link to documentation]. Figure 6 As shown.

[0057] Figure 6 The horizontal axis represents the radial distance of the polishing pad 1 surface, that is, the radial distance between the target position of the polishing pad 1 and the center of the polishing pad 1 circle, and the vertical axis represents the longitudinal deformation of the surface profile of the polishing pad 1 when subjected to the corresponding fluid pressure.

[0058] In this method, the surface morphology of the polishing pad 1 is modified by adjusting the temperature and pressure parameters of the hot fluid. Specifically, the surface morphology of the polishing pad 1 refers to the deformation of the polishing pad 1 in the longitudinal direction (ideally, the polishing surface of the polishing pad 1 is a horizontal plane). No mechanical modification is required, which reduces material loss and improves modification efficiency.

[0059] Furthermore, this embodiment provides the following: when the pressure of the hot fluid is constant, the surface finishing results of the polishing pad 1 at different temperatures are based on the radial distance and longitudinal deformation curves of the polishing pad 1 surface; when the temperature of the hot fluid is constant, the surface finishing results of the polishing pad 1 at different pressures are based on the radial distance and fluid pressure deformation curves of the polishing pad 1 surface contour. In specific finishing operations, these charts can be used as a reference, providing data support for the surface morphology finishing of the polishing pad 1.

[0060] The specific features, structures, or characteristics described in this specification may be combined in any suitable manner in one or more embodiments or examples.

[0061] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0062] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A heat-fluid-controlled polishing pad surface morphology trimming device, characterized in that, Includes a thermal fluid circulation control system, a polishing disc, and a polishing pad, among which, The polishing pad is fixed to the surface of the polishing disk, and a fluid cavity is provided inside the polishing disk; The hot fluid circulation control system is connected to the fluid cavity and is used to provide a parameter-controllable hot fluid to the fluid cavity to cause the polishing disk to deform, thereby adjusting the surface morphology of the polishing pad. The parameters of the hot fluid include at least one of temperature and pressure. The polishing disc includes a disc body, a top cover, and a base, wherein: The polishing pad is fixed to the upper surface of the disc body, and the number of disc bodies is one or two or more; The top cover is fixed to the lower part of the disc body, and the bottom support is fixedly connected to the top cover and encloses the fluid cavity, which is a sealed internal space.

2. The heat-fluid-controlled polishing pad surface morphology trimming device according to claim 1, characterized in that, The hot fluid circulation control system includes a water chiller, hot fluid pipeline one, and hot fluid pipeline two, wherein: The water chiller contains a hot fluid, and the temperature of the hot fluid inside the water chiller is adjustable; The two ends of the first hot fluid pipeline are connected to the outlet of the water chiller and the inlet of the fluid cavity, respectively, and the two ends of the second hot fluid pipeline are connected to the outlet of the fluid cavity and the inlet of the water chiller, respectively, thereby providing circulating hot fluid to the fluid cavity.

3. The heat-fluid-controlled polishing pad surface morphology trimming device according to claim 2, characterized in that, The hot fluid circulation control system further includes a pressure regulating device, which is installed on the first hot fluid pipeline and / or the second hot fluid pipeline, and is used to regulate the pressure of the circulating hot fluid.

4. The heat-fluid-controlled polishing pad surface morphology trimming device according to claim 3, characterized in that, The pressure regulating device includes a pressure regulating valve one and a pressure regulating valve two. The pressure regulating valve one is disposed on the hot fluid pipeline one and is used to regulate the pressure of the hot fluid in the hot fluid pipeline one. The pressure regulating valve two is disposed on the hot fluid pipeline two and is used to regulate the pressure of the hot fluid in the hot fluid pipeline two.

5. The heat-fluid-controlled polishing pad surface morphology trimming device according to claim 1, characterized in that, The base is provided with a fluid inlet and a fluid outlet that are connected to the fluid cavity. The fluid inlet and the fluid outlet are connected to the hot fluid circulation control system, thereby forming a circulation path for the flow of heating fluid.

6. The heat-fluid-controlled polishing pad surface morphology trimming device according to claim 2, characterized in that, The heat-fluid-controlled polishing pad surface morphology trimming device further includes a turntable and a rotary joint, wherein: The turntable is fixedly connected to the bottom of the polishing disc, and the rotary joint is located at the bottom of the turntable and connected to the first hot fluid pipeline and the second hot fluid pipeline.

7. A method for real-time surface morphology trimming of a polishing pad controlled by thermal fluid, characterized in that, Based on the thermal fluid-controlled polishing pad surface morphology trimming apparatus according to any one of claims 1-6, the trimming method includes: Using the aforementioned hot fluid circulation control system, at least one parameter of the hot fluid flowing into the fluid cavity is adjusted, thereby causing the polishing disk to undergo a preset deformation, and thus adjusting the surface morphology of the polishing pad. The parameters of the thermal fluid include at least one of temperature and pressure.

8. The method for real-time surface morphology trimming of a polishing pad controlled by thermal fluid according to claim 7, characterized in that, The trimming method also includes: After polishing the workpiece using the polishing pad with adjusted surface morphology, the processing effect of the workpiece is detected. Based on the difference between the processing effect and the preset index, the parameters of the heat fluid are fed back and iteratively adjusted until the processing effect of the workpiece meets the preset index.

9. The method for real-time surface morphology trimming of a polishing pad controlled by thermal fluid according to claim 7, characterized in that, Before the polishing pad is morphologically modified, the surface morphology of the polishing pad is machined using a diamond turning tool or diamond pellets, and the surface of the polishing pad is grooved using a milling cutter.

10. The method for real-time surface morphology trimming of a polishing pad controlled by thermal fluid according to claim 7, characterized in that, When the pressure of the hot fluid is constant, the effect of the hot fluid at different temperatures on the deformation of the polishing pad is determined according to the curve of radial distance and longitudinal deformation of the polishing pad surface. At this time, the longitudinal deformation ΔZ of the polishing pad surface is described by the following polynomial equation: Where e is a mathematical constant, one of the irrational numbers in mathematics, with an approximate value of 2.71828, t represents the temperature of the hot fluid, and ρ represents the radial distance between the set position of the polishing disk and the center of the polishing disk. When the temperature of the hot fluid is constant, the effect of the hot fluid at different pressures on the deformation of the polishing pad is determined according to the curve of the radial distance of the polishing pad surface and the fluid pressure deformation curve of the polishing pad surface contour.

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