一种锥度测量工装及装配误差的优化方法
By using taper measurement fixtures and assembly error optimization methods, multiple sets of measuring components are used to measure the taper of the connecting shaft and assembly hole in different spatial coordinate systems. This solves the problem of large matching error between the spindle and the tool head, and achieves high-precision taper calculation and improved production efficiency.
CN121089633BActive Publication Date: 2026-07-17JIANGSU JCA ELECTRONICS TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU JCA ELECTRONICS TECH CO LTD
- Filing Date
- 2025-09-19
- Publication Date
- 2026-07-17
Smart Images
Figure CN121089633B_ABST
Abstract
本发明公开了一种锥度测量工装及装配误差的优化方法，涉及晶圆加工技术领域。该锥度测量工装包括底座和测量机构，底座被配置为支撑主轴，主轴的一端设置有连接轴，底座上设置有测量支架和测量轴，以测量孔的轴线为X轴建立第一空间坐标系，以测量轴的轴线为X轴建立第二空间坐标系；测量机构包括两组测量组件，一个测量机构设置于测量孔的内壁，以测量连接轴的外周面对应点在第一空间坐标系内的坐标，另一个测量机构设置于测量轴的外周，以测量装配孔的内壁对应点在第二空间坐标系内的坐标。该锥度测量工装能够提高锥度测量的精度，若合格，则直接装配，若不合格，则进行研磨，从而降低了装配误差，提高了生产效率和良率。
Need to check novelty before this filing date? Find Prior Art