基于锥形波导探针的近场THz应力测量方法及系统
By using a tapered waveguide probe and the theory of stress birefringence, high spatial resolution internal stress measurement of non-metallic materials was achieved, overcoming the shortcomings of traditional terahertz technology in terms of spatial resolution and detection depth, and meeting the need for fine characterization of regions with dense stress gradient information.
CN121089950BActive Publication Date: 2026-07-17TIANJIN UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TIANJIN UNIV
- Filing Date
- 2025-09-30
- Publication Date
- 2026-07-17
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Figure CN121089950B_ABST
Abstract
本发明提供了一种基于锥形波导探针的近场THz应力测量方法及系统，属于光学机械技术领域，该方法通过锥形波导探针作为有孔径近场探针，将太赫兹波被导入所述锥形波导探针得到近场太赫兹信号，并照射于待测样品表面；所述近场太赫兹信号的光斑尺寸小于原太赫兹光斑尺寸和太赫兹波理论衍射极限，即其波长的一半；通过计量近场太赫兹信号在待测样品内部传播时间的改变量，并基于应力双折射理论，实现对待测样品内部应力的定量测量。本发明实现了高空间分辨的应力探测，以满足将太赫兹时域光谱应用于应力梯度信息密集区域应力场精细表征中的测试需求。
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