Perovskite solar cell light wave synergic annealing device and process

Abstract

The application discloses a perovskite solar cell light wave cooperative annealing device and process, and relates to the technical field of perovskite solar cell production. The device comprises a cooperative annealing mechanism, a machine shell, driving elements, adjusting elements and jacking elements, a rotating rod, an installation element, an IR lamp and the like. The special wavelength IR lamp pre-annealing technology has unique optical properties, i.e. perovskite materials hardly absorb the light of the wavelength between 600-1500 nm, the light can smoothly pass through the perovskite layer, directly and quickly heat the solution in the component substrate and perovskite, quickly heat the "perovskite film layer inside" where the solvent is located, more efficiently break the interaction of "precursor-solvent", promote the solvent to dissociate and volatilize from the compound, reduce defects, obtain a better film surface effect, and make the perovskite solar cell have a more efficient device.

Description

Technical Field

[0001] This invention relates to the field of perovskite solar cell production technology, and in particular to a perovskite solar cell light wave synergistic annealing device and process. Background Technology

[0002] Perovskite is the latest generation of photovoltaic technology with the greatest development potential. As a core component of solar cells, perovskite material has excellent light absorption and photoelectric conversion performance. In the processing of perovskite solar cells, after coating the perovskite light-absorbing material, it needs to be annealed using an electric heating device to obtain the key perovskite light-absorbing film layer.

[0003] However, in practical applications, some problems remain unresolved. The following are some common issues with perovskite solar cell annealing devices:

[0004] 1. Slow heat conduction due to electric heating: Traditional annealing / pre-annealing methods mainly rely on electric heating, which has an extremely slow heat conduction process. Taking heating the substrate glass as an example, the time required is far more than 3 minutes. During this slow heating process, the evaporation rate of high-boiling-point solvents in the perovskite is greatly restricted, and high-boiling-point solvents cannot be effectively removed. A large amount of solvent remains in the perovskite film, causing the perovskite to crystallize prematurely in a small area, which easily forms void defects and seriously damages the uniformity of the crystal.

[0005] 2. Slow heating rate leads to local crystallization: The traditional electric heating pre-annealing method has a slow heating rate and a long heat conduction heating time, with a preheating process of more than 3 minutes. This makes perovskite prone to local point or block crystallization. This local crystallization will seriously interfere with the overall annealing consistency of the perovskite film surface, thus causing local defects and greatly affecting the performance of perovskite solar cells. Summary of the Invention

[0006] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0007] In view of the problems existing in the above and / or existing perovskite solar cell annealing apparatus, the present invention is proposed.

[0008] Therefore, the problem to be solved by this invention is how to efficiently separate and effectively volatilize the high-boiling-point solvent of perovskite and the perovskite solvent, so as to obtain a perovskite device with a high-quality film surface. At the same time, rapid heating solves the problem of local crystallization caused by slow electric heating conduction and slow heating rate, which affects the uniformity of the film surface.

[0009] To solve the above technical problems, the present invention provides the following technical solution: a perovskite solar cell light-wave synergistic annealing device, comprising: a synergistic annealing mechanism, including a housing, on which a driving component, an adjusting component, and a lifting component are respectively installed; a rotating rod is rotatably mounted on the housing and cooperates with the driving component; an installation component is fixed on the adjusting component; an IR lamp is mounted on the installation component; a cover is fixed to the upper end of the lifting component and disposed on the top of the housing; a filter is installed on the inner wall of the cover; a circulating fan, a mesh plate, and an electric heating tube are respectively installed inside the housing; and a conveying wheel mechanism, mounted on the surface of the rotating rod, including a wheel body sleeved on the surface of the rotating rod, on which a positioning component and a positioning post are installed. The positioning post has a fixed limiting post on its surface, and both the limiting post and the positioning post cooperate with the positioning component. The wheel body is equipped with a support component and an unlocking component. The support component has a rubber plate and a trigger plate fixed on its surface. The wheel body has a docking groove, and the inner surface of the wheel body has a rubber ring fixed. A transmission mechanism is also included, mounted on the wheel body, comprising a frame one and a frame two disposed on one side of the wheel body. A transmission component is installed between the frame one and the frame two. A docking post is fixed on one side of both the frame one and the frame two, and it cooperates with the docking groove. A snap-fit ​​component is installed on the docking post, and it cooperates with the unlocking component. Arc-shaped plates are fixed at both ends of the transmission component, and they are located within the frame one and the frame two.

[0010] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the driving component includes a support block fixed to one side of the housing, a long rod rotatably mounted on the support block, a gear 1 sleeved on the surface of the long rod, gear 2 fixed at both ends of the rotating rod and meshing with gear 1, a motor fixed to one side of the housing, a sprocket sleeved on both the output shaft of the motor and the surface of the long rod, and a chain sleeved on the surface of the sprocket.

[0011] In a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the adjusting component includes a fixing frame fixed to one side of the housing, a vertical rod sliding on the fixing frame, a support plate fixed to the upper end of the vertical rod, a fixing rod sliding on the housing with one end fixed to the surface of the support plate and the other end fixed to a frame, an mounting component fixed to the frame, a roller fixed to the bottom of the support plate, a guide rail fixed to one side of the housing, a drive plate sliding on the guide rail and cooperating with the roller, and a hydraulic cylinder fixed to the housing with its output end fixed to one side of the drive plate.

[0012] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the lifting component includes a second fixing frame fixed to one side of the housing, a guide sleeve fixed on the second fixing frame, a second vertical rod sliding inside the guide sleeve, and its upper end fixed to the bottom of the cover, and a second hydraulic cylinder fixed on the housing, and its output end fixed to the bottom of the cover.

[0013] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the positioning component includes a positioning sleeve that rotates on a wheel and cooperates with a positioning post. One end of the positioning sleeve is fixed with a short post, and the other end rotates on the wheel. A torsion spring is sleeved on the surface of the short post, and its two ends are respectively fixed to the inner wall of the wheel and the surface of the short post. A positioning slot is opened on the positioning sleeve and cooperates with a limiting post. A turntable rotates on the wheel and is sleeved on the surface of the positioning sleeve. A handle is fixed on the surface of the turntable.

[0014] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the support member includes a groove formed in the wheel body, a liquid bladder fixed on the inner surface of the wheel body, a short tube fixed in the wheel body with its two ends connected to the groove and the liquid bladder respectively, a piston sliding in the groove, a connecting tube sliding on the wheel body with one end connected to the piston and the other end connected to a circular plate, an elastic block fixed on the circular plate, a rubber plate fixed on the surface of the elastic block, and a first chamber and a second chamber respectively formed in the elastic block, the first chamber being connected to the circular plate.

[0015] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the elastic block has a circular hole that communicates with the second chamber; a bent pipe is fixed on the wheel body, with one end of the bent pipe communicating with the groove; a bent pipe is fixed on the elastic block, with one end of the bent pipe communicating with the second chamber; a flexible tube communicates between the bent pipe and the bent pipe; a sliding groove is formed inside the wheel body; a slider is fixed on the surface of the connecting pipe and slides within the sliding groove; and a spring is fixed between the surface of the slider and the inner wall of the sliding groove.

[0016] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the wheel body is provided with a groove, an unlocking block slides in the groove, one end of the unlocking block extends to the outside of the wheel body and is fixed with an unlocking plate, an anti-detachment groove is provided on the inner wall of the groove, an anti-detachment block is fixed on the unlocking block and slides in the anti-detachment groove, a second spring is fixed between the surface of the anti-detachment block and the inner wall of the anti-detachment groove, a limit groove is provided on the wheel body, a limit bolt is fixed on one side of the unlocking plate and one end slides in the limit groove.

[0017] As a preferred embodiment of the perovskite solar cell light-wave synergistic annealing device of the present invention, the snap-fit ​​component includes a groove formed on the docking post, a snap-fit ​​block sliding in the groove and cooperating with the slot, a square groove formed on the inner wall of the groove, a square block fixed on the surface of the snap-fit ​​block and sliding in the square groove, and a spring fixed between the surface of the square block and the inner wall of the square groove.

[0018] As a preferred embodiment of the light-wave synergistic annealing process for perovskite solar cells described in this invention, it includes the following processes:

[0019] S1: Equipment and parameter selection. An IR lamp with a wavelength of 600-1500nm is used as the core component of the preheating equipment. The key characteristic of this wavelength is that the perovskite material hardly absorbs it, allowing it to directly penetrate the perovskite layer and precisely heat the module substrate and the perovskite solution. At the same time, it allows the "inside the perovskite film" where the solvent is located to heat up rapidly, more efficiently breaking the "precursor-solvent" interaction, causing the solvent to dissociate from the composite and evaporate, reducing defects, and resulting in a better film surface effect. This enables perovskite solar cells to have higher efficiency devices, which can rapidly increase the temperature of the module substrate and the perovskite solution to achieve rapid heating.

[0020] S2: Preheating operation: The perovskite substrate is sent into a light wave furnace equipped with the above-mentioned IR lamp. After the equipment is started, the surface temperature of the substrate and the perovskite solution is rapidly raised to above 120°C within 2 minutes, and the overall preheating time is strictly controlled within 3 minutes, which is far superior to the heating efficiency of traditional electric heating substrates.

[0021] S3: Simultaneous solvent treatment utilizes the special airflow structure of the microwave oven to rapidly heat up while efficiently separating and evaporating the high-boiling-point solvent from the perovskite. This prevents impurity solvents from affecting crystal growth during the perovskite crystallization process, reduces defects, and lays a uniform film foundation for subsequent crystal growth consistency.

[0022] S4: Connecting operation, the perovskite substrate that has completed the optical wave pre-annealing is directly transferred to the traditional electric heating annealing furnace to enter the deep annealing stage. At this time, the substrate already has a high base temperature, so there is no need for long preheating. Rapid annealing is more conducive to the uniformity of perovskite crystal growth, thus obtaining high-quality perovskite crystals.

[0023] S5: Crystal growth control. During the electrothermal annealing process, the solvent has been fully evaporated and the film uniformity has been improved due to the pre-annealing with light waves. Perovskite crystals can grow in a more stable and uniform environment, avoiding the problem of "local point / block crystallization first" in traditional processes, and finally forming a crystal film with stronger consistency.

[0024] The beneficial effects of this invention are:

[0025] 1. The special wavelength IR lamp pre-annealing technology is adopted, and lamps with wavelengths between 600 and 1500 nm are selected. This wavelength range has unique optical characteristics, that is, the perovskite material hardly absorbs light of this wavelength. Therefore, the light of this wavelength can pass smoothly through the perovskite layer and directly and quickly heat the component substrate and the solution in the perovskite. In less than 3 minutes, the temperature of the component substrate and the perovskite solution can be rapidly increased to achieve rapid heating.

[0026] 2. Efficient solvent dissipation and high-quality film formation: Due to the optical properties of light waves, after the module is heated by special light waves, the solvent in the perovskite can quickly separate the high-boiling-point solvent from the perovskite material and evaporate rapidly. The perovskite film is not affected by impurities and can form a more uniform and high-quality film, thereby improving the performance of perovskite solar cells.

[0027] 3. Synergistic annealing improves crystal growth quality: After being heated by special wavelength lamps in a microwave oven, the perovskite substrate is then annealed in an electric heating annealing furnace. During this synergistic annealing process, the perovskite crystals can grow under more ideal conditions, forming a crystal film with better uniformity. This high-quality crystal film can significantly improve the photoelectric conversion efficiency of perovskite solar cells, providing a strong guarantee for achieving efficient and stable perovskite solar cells.

[0028] 4. A special airflow design structure is adopted, which can quickly remove the volatile mist of the perovskite solvent and effectively prevent secondary contamination of the perovskite film surface by impurities, ensuring the yield and high photoelectric conversion efficiency of perovskite devices. This structure adds a high-efficiency filtration device to effectively prevent dust from falling on the perovskite film surface, causing voids and defects, and affecting the efficiency of perovskite solar cell modules. Attached Figure Description

[0029] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a structural diagram of the light-wave synergistic annealing device and process for perovskite solar cells.

[0031] Figure 2 This is a partial structural diagram of the light-wave synergistic annealing device and process for perovskite solar cells.

[0032] Figure 3 Device and process for co-annealing perovskite solar cells using light waves Figure 2 Enlarged view of region A in the middle.

[0033] Figure 4 Device and process for co-annealing perovskite solar cells using light waves Figure 2 Enlarged view of region B in the middle.

[0034] Figure 5 Device and process for co-annealing perovskite solar cells using light waves Figure 2 Enlarged view of region C.

[0035] Figure 6 Partial cross-sectional stereoscopic view of the perovskite solar cell light-wave synergistic annealing device and process Figure 1 .

[0036] Figure 7 Partial cross-sectional stereoscopic view of the perovskite solar cell light-wave synergistic annealing device and process Figure 2 .

[0037] Figure 8 Partial cross-sectional stereoscopic view of the perovskite solar cell light-wave synergistic annealing device and process Figure 3 .

[0038] Figure 9 This is a partial structural cross-sectional plan view of the perovskite solar cell photoluminescence co-annealing device and process.

[0039] Figure 10 Partial cross-sectional stereoscopic view of the perovskite solar cell light-wave synergistic annealing device and process Figure 4 .

[0040] Figure 11 Device and process for co-annealing perovskite solar cells using light waves Figure 10 Enlarged view of region D in the middle.

[0041] Figure 12 Device and process for co-annealing perovskite solar cells using light waves Figure 10 Enlarged view of region E in the middle.

[0042] Figure 13 This is a three-dimensional view of the conveyor wheel mechanism and transmission mechanism of the perovskite solar cell photoluminescence co-annealing device and process.

[0043] Figure 14 A three-dimensional view of the conveyor wheel mechanism of the perovskite solar cell light-wave co-annealing device and process.

[0044] Figure 15 A three-dimensional view of the transmission mechanism of the perovskite solar cell photoluminescence co-annealing device and process.

[0045] Figure 16 Device and process for co-annealing perovskite solar cells using light waves Figure 15 Enlarged view of the F region.

[0046] Figure 17 Device and process for co-annealing perovskite solar cells using light waves Figure 15 Enlarged view of the G region.

[0047] Figure 18 A three-dimensional view of the transmission components of the perovskite solar cell photoluminescence co-annealing device and process.

[0048] Figure 19 A sectional perspective view of the transmission components of the perovskite solar cell light-wave synergistic annealing device and process.

[0049] Figure 20 Device and process for co-annealing perovskite solar cells using light waves Figure 19 Enlarged view of region H in the middle.

[0050] Figure 21 Device and process for co-annealing perovskite solar cells using light waves Figure 19 Enlarged view of the J region.

[0051] Figure 22 Device and process for co-annealing perovskite solar cells using light waves Figure 19 Enlarged view of the K region.

[0052] Figure 23 This is a partial sectional perspective view of the wheel body of the perovskite solar cell optical wave synergistic annealing device and process.

[0053] Figure 24 Device and process for co-annealing perovskite solar cells using light waves Figure 23 Enlarged view of the L-region.

[0054] Figure 25 Device and process for co-annealing perovskite solar cells using light waves Figure 23 Enlarged view of region M in the middle.

[0055] Figure 26 A sectional perspective view of the positioning component for the light-wave synergistic annealing device and process for perovskite solar cells.

[0056] Figure 27 A partial sectional perspective view of the docking column and wheel body of the perovskite solar cell optical wave synergistic annealing device and process.

[0057] Figure 28 Device and process for co-annealing perovskite solar cells using light waves Figure 27 Enlarged view of region N in the middle.

[0058] Figure 29 This is a partial three-dimensional cross-sectional view of the wheel body of the perovskite solar cell optical wave synergistic annealing device and process.

[0059] Figure 30 This is a comparison chart of experimental results for the light-wave synergistic annealing device and process for perovskite solar cells.

[0060] Figure 31 A comparison diagram of the wavelength absorption range of perovskite crystals for the optical wave-coordinated annealing device and process of perovskite solar cells.

[0061] In the diagram: 1. Cooperative annealing mechanism; 11. Housing; 12. Drive component; 13. Rotating rod; 14. Adjusting component; 15. Mounting component; 16. IR lamp; 17. Lifting component; 18. Cover; 19. Filter; 110. Circulating fan; 111. Mesh plate; 112. Heating element; 2. Conveying wheel mechanism; 21. Wheel body; 22. Positioning component; 23. Positioning post; 24. Limiting post; 25. Support component; 26. Rubber plate; 27. Docking groove; 28. Unlocking component; 29. ​​Trigger plate; 210. Rubber ring; 211. Slot; 212. Insert block; 3. Transmission mechanism; 31. Frame 1; 32. Frame 2; 33. Transmission component; 34. Docking post; 35. Connecting piece; 36. Curved plate; 37. Guide post; 38. Spring; 12-1. Support block; 12-2. Long rod; 12-3. Gear 1; 12-4. Gear 2; 12-5. Motor; 12-6. Sprocket; 12-7. Chain; 14-1. Fixing frame 1; 14-2. Vertical rod 1; 14-3. Support plate; 14-4. Fixing rod; 14-5. Frame; 14-6. Roller; 14-7. Guide rail; 14-8. Drive plate; 14-9. Hydraulic cylinder 1; 15-1. Screw; 15-2. Elastic clamp; 15-3. Screw; 15-4. Nut; 17-1. Fixing frame 2; 17-2. Guide sleeve; 17-3. Vertical rod II; 17-4, Hydraulic Cylinder II; 22-1, Positioning Sleeve; 22-2, Short Column; 22-3, Torsion Spring; 22-4, Positioning Slot; 22-5, Turntable; 22-6, Handle; 25-1, Groove; 25-2, Liquid Bag; 25-3, Short Pipe; 25-4, Piston; 25-5, Connecting Pipe; 25-6, Circular Plate; 25-7, Elastic Block; 25-8, Chamber I; 25-9, Chamber II; 25-10, Circular Hole; 25-11, Bend I; 25-12, Bend II; 25-13, Flexible Hob; 25-14, Slide Groove; 25-15, Slider; 25-16, Spring I; 28-1, Hole Groove; 28-2, Unlocking Block; 2 8-3, Unlocking plate; 28-4, Anti-detachment groove; 28-5, Anti-detachment block; 28-6, Spring II; 28-7, Limiting groove; 28-8, Limiting bolt; 33-1, Round tube; 33-2, Sleeve; 33-3, Cylindrical; 33-4, Guide hole I; 33-5, Guide post I; 33-6, Guide hole II; 33-7, Guide post II; 33-8, Connecting post I; 33-9, Connecting post II; 33-10, Spring III; 35-1, Groove; 35-2, Locking block; 35-3, Square groove; 35-4, Square block; 35-5, Spring IV; 22-41, Slot I; 22-42, Slot II; 22-43, Slot III; 22-44, Slot IV. Detailed Implementation

[0062] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0063] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0064] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0065] Example 1, referring to Figures 1-15 This is the first embodiment of the present invention. This embodiment provides a perovskite solar cell light wave co-annealing device and process. The perovskite solar cell light wave co-annealing device and process include a co-annealing mechanism 1, a conveying wheel mechanism 2 and a transmission mechanism 3.

[0066] Specifically, the co-annealing mechanism 1 includes a housing 11, on which a drive component 12, an adjusting component 14, and a lifting component 17 are respectively installed. The operation of the drive component 12 can drive the rotating rod 13, thereby causing the conveying wheel mechanism 2 to rotate and convey the perovskite substrate within the device. The rotating rod 13 rotates on the housing 11 and cooperates with the drive component 12. The adjusting component 14 has a mounting component 15 fixed on it. The height of the mounting component 15 can be adjusted by adjusting the adjusting component 14, thereby adjusting the height position of the IR lamp 16, and thus adjusting the distance between the IR lamp 16 and the conveyed perovskite substrate. The adjustment can be made according to the actual situation to meet the usage requirements.

[0067] An IR lamp 16 is mounted on the mounting component 15. Several IR lamps 16 are installed in the device and are arranged in a linear array. The wavelength of the IR lamps 16 is set to be between 600-1500 nanometers. The characteristic of this wavelength is that it can heat up quickly. It can quickly raise the surface temperature of the perovskite component to above 120°C within 2 minutes. This can accelerate the temperature rise of the perovskite substrate, which can not only accelerate the evaporation of solvent in the perovskite, but also promote the faster growth of perovskite crystals, resulting in a better perovskite film and better device efficiency.

[0068] After heating the perovskite substrate with light of a specific wavelength in a microwave oven, it is then annealed in an electrically heated annealing furnace. This process allows for better perovskite crystal growth and the formation of a more uniform crystal film during annealing, resulting in devices with higher efficiency. Rapid heating significantly shortens annealing time and improves production efficiency. Efficient solvent evaporation reduces solvent residue and improves film quality. Optimized crystal growth, achieved through microwave pre-annealing combined with electrically heated annealing, yields more uniform and high-quality perovskite crystals, further enhancing device performance. Special structural features, such as airflow design and wavelength selection, prevent impurities from interfering with the film, further improving film quality. Process synergy enhances efficiency, shortening the total annealing time while significantly improving product performance and mass production stability.

[0069] A cover 18 is fixed to the upper end of the lifting component 17 and is located on the top of the housing 11. The lifting component 17 can lift the cover 18 and the filter 19, facilitating maintenance of the device's interior. The filter 19 is installed on the inner wall of the cover 18. A circulating fan 110, a mesh plate 111, and an electric heating tube 112 are installed inside the housing 11. The filter 19 and the circulating fan 110 can quickly remove and trap the volatile mist of the perovskite solvent, and effectively prevent secondary contamination of the perovskite film surface by impurities, ensuring the yield and high photoelectric conversion efficiency of the perovskite device. The mesh plate 111 can prevent objects from falling into the circulating fan 110 and also serves as a filter. The electric heating tube 112 can heat the circulating gas to ensure stable temperature inside the device. Using this technology, a 1.92 square meter perovskite device achieved a photoelectric conversion efficiency of nearly 18% in just two months, while the efficiency without this technology is far lower than 17%.

[0070] Specifically, the conveyor wheel mechanism 2 is installed on the surface of the rotating rod 13, including a wheel body 21 sleeved on the surface of the rotating rod 13. A positioning element 22 and a positioning post 23 are installed on the wheel body 21. A limit post 24 is fixed on the surface of the positioning post 23. Both the limit post 24 and the positioning post 23 cooperate with the positioning element 22. The two wheel bodies 21 are combined to form a complete wheel. The two ends of one wheel body 21 are respectively provided with the positioning element 22 and the positioning post 23. When the conveyor wheel mechanism 2 is installed on the rotating rod 13, the positioning post 23 on one wheel body 21 is inserted into the positioning element 22 on the other wheel body 21, and then the limit post 24 is used for limiting. Through the quick-release design of the conveyor wheel, the time for adjusting the position of the conveyor wheel is shortened, the replacement time of the damaged conveyor wheel is shortened, the maintenance cost and downtime of the device are greatly reduced, and the production continuity is improved without disassembling other parts. If the conveyor wheel is damaged, only the two wheel bodies 21 need to be separated, without disassembling the entire device.

[0071] The wheel body 21 is equipped with a support member 25 and an unlocking member 28. With the support member 25 and the cooperation of the rubber plate 26, the contact area between the conveyor wheel and the perovskite substrate is increased when the wheel body 21 rotates. This transforms the traditional line contact into a "line-surface combination" contact method, increasing the contact area compared to the traditional conveyor wheel. It also enhances the friction on the substrate surface, effectively preventing slippage. The surface of the support member 25 is fixed with the rubber plate 26 and the trigger plate 29, respectively. The surface of the wheel body 21 is provided with a docking groove 27, and a rubber ring 210 is fixed on the inner surface of the wheel body 21.

[0072] The transmission mechanism 3, which is mounted on the wheel body 21, can be unlocked and fixed by the unlocking component 28, facilitating disassembly. The rubber plate 26 is arc-shaped, and multiple rubber plates 26 and the outer periphery of the support component 25 form a complete circle, enabling continuous conveying of the substrate. The trigger plate 29 can act on the transmission mechanism 3, causing the conveying wheel mechanism 2 at both ends of a rotating rod 13 to move to both sides under the action of gravity and be positioned on both sides of the perovskite substrate, limiting the conveyed perovskite substrate. This allows for automatic limit adjustment of the substrate within a small width range without manual intervention, adapting to the conveying needs of perovskite substrates of different specifications. At the same time, the modular design allows the number of conveying wheels to be quickly increased or decreased according to production needs, adapting to substrates of different lengths, expanding the scope of application compared to traditional devices. The quick-release and automatic limit adjustment designs reduce the manual operation steps of operators, lower the skill requirements for operators, and improve the stability and reliability of the device operation.

[0073] The transmission mechanism 3 is conveniently installed on the docking groove 27, thereby connecting the two adjacent conveying wheel mechanisms 2 at both ends of the rotating rod 13. The rubber ring 210 increases the friction between the wheel body 21 fixed on the rotating rod 13 and the conveying wheel mechanism 2, thus stably fixing the conveying wheel mechanism 2 on the rotating rod 13. The conveying wheel mechanism 2 at both ends of the rotating rod 13 is not equipped with rubber ring 210. With this setting, when the substrate is subjected to gravity, the conveying wheel mechanism 2 at the end can move to the side on the rotating rod 13 with the cooperation of the transmission mechanism 3. Then, under the subsequent back-attachment action, it can play a role in limiting the conveyed substrate, realizing automatic limit adjustment of the substrate within a small width range without manual intervention, and adapting to the conveying needs of perovskite substrates of different specifications.

[0074] Specifically, the transmission mechanism 3 is installed on the wheel body 21 and includes a frame 31 and a frame 32 on one side of the wheel body 21. A transmission component 33 is installed between the frame 31 and the frame 32. A docking post 34 is fixed on one side of the frame 31 and the frame 32 and it cooperates with the docking groove 27. A snap-fit ​​component 35 is installed on the docking post 34 and it cooperates with the unlocking component 28. Through the setting of the snap-fit ​​component 35, after the docking post 34 is inserted into the docking groove 27, it is fixed on the wheel body 21 so that they will not be separated. The conveying wheel mechanism 2 at the end of the rotating rod 13 rotates under the drive of other conveying wheel mechanisms 2. It can be unlocked by the unlocking component 28 when it is disassembled later. An arc plate 36 is fixed at both ends of the transmission component 33 and it is located inside the frame 31 and the frame 32.

[0075] The arc plate 36 is provided with an arc-shaped inclined surface. With this setting, when the trigger plate 29 moves and presses it, it can move and then act on the transmission component 33 to extend it. This causes the conveyor wheel mechanism 2 at both ends of the rotating rod 13 to move in opposite directions. After it leaves the substrate, under its rebound action, the conveyor wheel mechanism 2 at the end contacts the side of the substrate for limiting. The adaptive limit adjustment can realize the automatic limit adjustment of the substrate within a small width range without manual intervention.

[0076] Example 2, refer to Figures 2-12 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0077] Specifically, the drive component 12 includes a support block 12-1 fixed to one side of the housing 11, a long rod 12-2 rotatably mounted on the support block 12-1, a gear 12-3 sleeved on the surface of the long rod 12-2, a gear 2 12-4 fixed at both ends of the rotating rod 13 and meshing with the gear 12-3, a motor 12-5 fixed to one side of the housing 11, a sprocket 12-6 sleeved on the output shaft of the motor 12-5 and the surface of the long rod 12-2, and a chain 12-7 sleeved on the surface of the sprocket 12-6.

[0078] The long rod 12-2 is rotatably connected to the support block 12-1 via a bearing, and the rotating rod 13 is rotatably connected to the housing 11 via a bearing. Gear 12-3 is fixedly connected to the surface of the long rod 12-2. There are several rotating rods 13. Gear 12-3 and gear 212-4 are both bevel gears. The motor 12-5 is a servo motor, which can precisely control the conveying speed of the substrate. This is existing technology. The working principle of this part is also existing technology, which can be clearly understood by those skilled in the art, and will not be described in detail here. The operation of the motor 12-5, with the cooperation of the sprocket 12-6 and the chain 12-7, enables the long rod 12-2 and the multiple gears 12-3 on it to rotate, which in turn causes the multiple gears 212-4 and the rotating rod 13 to rotate, thereby causing the conveying wheel mechanism 2 on the rotating rod 13 to rotate and convey the perovskite substrate.

[0079] Specifically, the adjusting component 14 includes a fixing frame 14-1 fixed to one side of the housing 11, a vertical rod 14-2 slidingly mounted on the fixing frame 14-1, the vertical rod 14-2 passing through the fixing frame 14-1 and slidably connected thereto, a support plate 14-3 fixed to the upper end of the vertical rod 14-2, a fixing rod 14-4 slidingly mounted on the housing 11, one end of which is fixed to the surface of the support plate 14-3, and the other end of which is fixed to a frame 14-5. The housing 11 has openings for fixing... The fixed rod 14-4 has a square hole for longitudinal movement. Multiple fixed rods 14-4 are provided on a frame 14-5. The mounting piece 15 is fixed on the frame 14-5. The bottom of the support plate 14-3 is fixed with a roller 14-6. The side of the machine housing 11 is fixed with a guide rail 14-7. The drive plate 14-8 slides on the guide rail 14-7 and cooperates with the roller 14-6. The machine housing 11 is fixed with a hydraulic cylinder 14-9, and its output end is fixed to one side of the drive plate 14-8.

[0080] The drive plate 14-8 is provided with an inclined surface. With this design, when the hydraulic cylinder 14-9 extends and drives the drive plate 14-8 to move, it can squeeze the roller 14-6. Under the guidance and limiting action of the vertical rod 14-2 and the fixed frame 14-1, the roller 14-6 can move upward, thereby driving the support plate 14-3, the fixed rod 14-4, the frame 14-5, the mounting part 15 and the IR lamp 16 to move upward, thereby adjusting the height of the IR lamp 16. The roller 14-6 reduces the friction force during the upward squeezing, making the adjustment smoother.

[0081] Specifically, the lifting component 17 includes a fixing frame 17-1 fixed to one side of the housing 11, a guide sleeve 17-2 fixed on the fixing frame 17-1, a vertical rod 17-3 sliding inside the guide sleeve 17-2, and its upper end fixed to the bottom of the cover 18. A hydraulic cylinder 17-4 is fixed on the housing 11, and its output end is fixed to the bottom of the cover 18. The vertical rod 17-3 passes through the guide sleeve 17-2 and is slidably connected to it. The vertical rod 17-3 and the guide sleeve 17-2 guide and limit the cover 18 so that it will not tilt when the hydraulic cylinder 17-4 lifts it, thus ensuring stable lifting.

[0082] Example 3, referring to Figures 13-28 This is the third embodiment of the present invention, which is based on the first two embodiments.

[0083] Specifically, the positioning component 22 includes a positioning sleeve 22-1 that rotates on the wheel body 21 and cooperates with the positioning post 23. One end of the positioning sleeve 22-1 is fixed with a short post 22-2, and the other end rotates on the wheel body 21. The short post 22-2 is rotatably connected to the wheel body 21 through a bearing. A torsion spring 22-3 is sleeved on the surface of the short post 22-2, and its two ends are respectively fixed to the inner wall of the wheel body 21 and the surface of the short post 22-2. The positioning sleeve 22-1 has a positioning slot 22-4. Through the setting of the positioning slot 22-4, during the process of the positioning post 23 on one wheel body 21 being inserted into the positioning sleeve 22-1 on another wheel body 21, the limiting post 24 on the positioning post 23 moves into the positioning slot 22-4 for limiting, thereby fixing the two semi-circular wheels 21 on the rotating rod 13 to form a complete conveying wheel.

[0084] Furthermore, it cooperates with the limiting post 24, and a turntable 22-5 rotates on the wheel body 21, which is sleeved on the surface of the positioning sleeve 22-1. A handle 22-6 is fixed on the surface of the turntable 22-5. Through the setting of the torsion spring 22-3, the limiting post 24 deforms during the process of being inserted into the positioning slot 22-4, providing a force for the positioning sleeve 22-1 to reset, causing the positioning sleeve 22-1 to rotate, thereby causing the positioning slot 22-4 to limit the limiting post 24 on the positioning sleeve 22-1. The turntable 22-5 is fixed on the surface of the positioning sleeve 22-1. Through the setting of the handle 22-6, rotating it drives the turntable 22-5 and the positioning sleeve 22-1 to rotate, so that the corresponding part of the positioning slot 28-1 corresponds to the limiting post 24. Then, the two wheels 21 can be moved to both sides to separate the two wheels 21. The modular conveyor wheel mechanism 2 and the quick-release design shorten the time for adjusting the position and disassembling the conveyor wheel.

[0085] The support member 25 includes a groove 25-1 formed inside the wheel body 21, a liquid bladder 25-2 fixed on the inner surface of the wheel body 21, a short tube 25-3 fixed inside the wheel body 21 with its two ends connected to the groove 25-1 and the liquid bladder 25-2 respectively, a piston 25-4 sliding inside the groove 25-1, a connecting tube 25-5 sliding on the wheel body 21 with one end connected to the piston 25-4 and the other end connected to a circular plate 25-6, an elastic block 25-7 fixed on the circular plate 25-6, a rubber plate 26 fixed to the surface of the elastic block 25-7, and a first chamber 25-8 and a second chamber 25-9 formed inside the elastic block 25-7 respectively, with the first chamber 25-8 connected to the circular plate 25-6.

[0086] The space formed by the liquid bladder 25-2, the tank 25-1, the connecting pipe 25-5, and the chamber 25-8 on the elastic block 25-7 is filled with liquid, except for the liquid bladder 25-2 on the conveying wheel mechanism 2 at both ends of the rotating rod 13, which is not filled with liquid. The piston 25-4 and the tank 25-1 are sealed, and the connecting pipe 25-5 and the wheel 21 are sealed. The chamber 25-8 is connected to the tank 25-1 through the connecting pipe 25-5, and the liquid bladder 25-2 is connected to the tank 25-1 through the short pipe 25-3. The elastic block 25-7 is elastic and can deform. This is prior art. The working principle of this part is also prior art, which can be clearly understood by those skilled in the art, and will not be described in detail here.

[0087] With the elastic block 25-7 in place, when it and the rubber plate 26 rotate under the pressure of the conveying substrate, the elastic block 25-7 deforms and squeezes the liquid in the compression chamber 25-8. This liquid acts on the liquid bladder 25-2 through the connecting channel, thereby increasing the interaction between the liquid bladder 25-2 and the rotating rod 13, improving the stability of the conveying wheel mechanism 2 mounted on the rotating rod 13, and reducing slippage. Then, after reaching the deformation limit, gravity applies pressure to the circular plate 25-6 with the help of the elastic block 25-7, thereby causing the connecting pipe 25-5 and the piston 25-4 to move. The piston 25-4 moves and squeezes the liquid in the tank 25-1, which then acts on the liquid bladder 25-2 through the connecting channel, thereby further increasing the interaction between the liquid bladder 25-2 and the rotating rod 13, and improving the stability of the fixation.

[0088] The elastic block 25-7 has a circular hole 25-10 that communicates with the second chamber 25-9. A bent pipe 25-11 is fixed to the wheel body 21, with one end connected to the groove 25-1. A bent pipe 25-12 is fixed to the elastic block 25-7, with one end connected to the second chamber 25-9. A flexible hose 25-13 connects the bent pipe 25-11 and the bent pipe 25-12. A sliding groove 25-14 is formed inside the wheel body 21, and a connecting pipe 25-5... A slider 25-15 is fixed on the surface and slides within a groove 25-14. The groove 25-14 and the slider 25-15 guide and limit the connecting tube 25-5 to prevent it from rotating. A spring 25-16 is fixed between the surface of the slider 25-15 and the inner wall of the groove 25-14. The spring 25-16 compresses the slider 25-15 as it moves with the connecting tube 25-5, providing force for subsequent reset.

[0089] Multiple circular holes 25-10 are provided on the elastic block 25-7. The first bend 25-11 and the second bend 25-12 are kept in communication through the hose 25-13, and the movement of the second bend 25-12 does not affect the communication between them. With the setting of the circular holes 25-10, when the support member 25 is under the pressure of the substrate, the piston 25-4 moves in the groove 25-1, and the substrate contacts the elastic block 25-7. The movement of the piston 25-4 increases the space formed by the groove 25-1, the first bend 25-11, the hose 25-13, the second bend 25-12 and the second chamber 25-9. Since the gas volume is constant, it plays an adsorption role under the action of the circular holes 25-10, and is gradually released with rotation, thereby achieving a stable conveying effect and further reducing slippage.

[0090] The wheel body 21 has a slot 28-1. After the docking post 34 is inserted into the docking groove 27, the locking block 35-2 on the locking member 35 is inserted into it, thereby fixing the transmission mechanism 3 between the two adjacent conveying wheel mechanisms 2 at both ends. The unlocking block 28-2 slides in the slot 28-1. When the unlocking plate 28-3 is moved by the force applied, the locking block 35-2 can be acted on, causing it to gradually disengage from the slot 28-1. Then, the transmission mechanism 3 can be pulled to remove it and complete the disassembly. One end of the unlocking block 28-2 extends to the outside of the wheel body 21 and is fixed with the unlocking plate 28-3.

[0091] An anti-detachment groove 28-4 is provided on the inner wall of the slot 28-1. An anti-detachment block 28-5 is fixed on the unlocking block 28-2 and slides within the anti-detachment groove 28-4. The anti-detachment groove 28-4 and the anti-detachment block 28-5 guide and limit the unlocking block 28-2 to prevent it from detaching from the wheel body 21. A second spring 28-6 is fixed between the surface of the anti-detachment block 28-5 and the inner wall of the anti-detachment groove 28-4. By setting the second spring 28-6, it is compressed when the unlocking block 28-2 moves the anti-detachment block 28-5, providing force for the subsequent reset of the unlocking block 28-2 and the unlocking plate 28-3. A limit groove 28-7 is provided on the wheel body 21. A limit bolt 28-8 is fixed on one side of the unlocking plate 28-3 and one end slides within the limit groove 28-7. The limit groove 28-7 and the limit bolt 28-8 guide and limit the unlocking plate 28-3 to ensure its stability during movement.

[0092] The snap-fit ​​component 35 includes a groove 35-1 formed on the mating post 34, a snap-fit ​​block 35-2 sliding in the groove 35-1 and cooperating with the slot 28-1, a square slot 35-3 formed on the inner wall of the groove 35-1, a square block 35-4 fixed on the surface of the snap-fit ​​block 35-2 and sliding in the square slot 35-3, and a spring 35-5 fixed between the surface of the square block 35-4 and the inner wall of the square slot 35-3.

[0093] The locking block 35-2 has two inclined surfaces at one end. The purpose of one of the inclined surfaces is that when the docking post 34 is inserted into the docking groove 27, the locking block 35-2 can move into the groove 35-1 under the pressure of the wheel 21, thereby compressing the spring 35-5. When the locking block 35-2 corresponds to the hole groove 28-1, under the action of the spring 35-5, one end of the locking block 35-2 is inserted into the hole groove 28-1, fixing the docking post 34 in the docking groove 27.

[0094] The purpose of setting another inclined surface is that one end of the unlocking block 28-2 is set with an inclined surface, which works in conjunction with the unlocking block 28-2 to squeeze the locking block 35-2 when the unlocking block 28-2 moves, so that the locking block 35-2 can move into the groove 25-1. After the unlocking block 28-2 has moved completely, the locking block 35-2 has not completely moved into the docking post 34. Then the end conveying wheel mechanism 2 is moved to one side, and the inclined surface is squeezed by the hole groove 28-1, so that it moves out of the groove 25-1, thus completing the unlocking. It can be disassembled and guided and limited by the square groove 35-3 and the square block 35-4, so that it can move within a certain range.

[0095] Example 4, refer to Figures 12-26 This is the fourth embodiment of the present invention, which is based on the first three embodiments.

[0096] Specifically, the mounting component 15 includes a screw 15-1 fixed to the frame 14-5, an elastic clip 15-2 fixed to the lower end of the screw 15-1, the end of the IR lamp 16 located inside the elastic clip 15-2, a screw 15-3 passing through the elastic clip 15-2, and a nut 15-4 threadedly connected to one end of the screw 15-3.

[0097] Multiple nuts are provided on the screw 15-1, distributed at the upper and lower ends of the screw 15-1. The two nuts at the upper end fix the screw 15-1 to the frame 14-5, and the two nuts at the lower end fix the elastic clips 15-2 to the screw 15-1, similar to the structure of a building ceiling. This is existing technology, and the working principle of this part is also existing technology, which can be clearly understood by those skilled in the art, and will not be described in detail here. By setting the elastic clips 15-2, the two ends of the IR lamp 16 are respectively placed in the two sets of elastic clips 15-2. Then, the nut 15-4 is rotated and moved on the screw 15-3, deforming the elastic clips 15-2 to clamp and fix the IR lamp 16. To unlock, the nut 15-4 is rotated in the opposite direction to release the elastic clips 15-2 from fixing the IR lamp 16. Then, the IR lamp 16 is rotated to move the angle, and can be removed from the lower end of the elastic clips 15-2.

[0098] Guide posts 37 are slidably mounted on both frame 1 31 and frame 2 32, with one end of each post fixed to the surface of the arc plate 36. The guide posts 37 penetrate both frame 1 31 and frame 2 32 and are slidably connected to them. Spring pieces 38 are fixed between the surface of the arc plate 36 and the surfaces of frame 1 31 and frame 2 32, respectively. The guide posts 37 can guide and limit the arc plate 36. With the spring pieces 38, the arc plate 36 deforms when it is pressed and moved by the trigger plate 29, providing force for subsequent reset.

[0099] The transmission component 33 includes a circular tube 33-1 that rotates on the frame 32. A sleeve 33-2 slides on the frame 31, with one end fixed to the surface of an arc-shaped plate 36 on one side. The sleeve 33-2 is fitted onto the surface of the circular tube 33-1. A cylinder 33-3 slides inside the circular tube 33-1, with one end fixed to the surface of the arc-shaped plate 36 on one side. A guide hole 33-4 is provided on the surface of the circular tube 33-1. A guide post 33 is fixed to one end of the surface of the cylinder 33-3. -5, and it slides in the guide hole 33-4. The sleeve 33-2 has a guide hole 33-6 on its surface. One end of the round tube 33-1 is fixed with a guide post 33-7, and it slides in the guide hole 33-6. One end of the round tube 33-1 is connected to a connecting post 33-8. One end of the sleeve 33-2 is connected to a connecting post 33-9 on its inner wall. A spring 33-10 is fixed between the surface of the connecting post 33-8 and the surface of the connecting post 33-9.

[0100] The circular tube 33-1 is rotatably connected to the frame 32 via a bearing. The sleeve 33-2 passes through the frame 31 and is slidably connected to it. Through the guide hole 33-4 and guide post 33-5, when the arc plate 36 on one side of the cylindrical tube 33-3 moves, the guide post 33-5 moves within the guide hole 33-4, thereby causing the circular tube 33-1 to rotate. Through the guide hole 33-6 and guide post 33-7, the rotation of the circular tube 33-1 causes the guide post 33-7 to rotate within the guide hole 33-6. The movement within 3-6 causes the circular tube 33-1 and sleeve 33-2 to extend, moving the conveying wheel mechanism 2 at the end of the rotating rod 13 to the side of the substrate. Connecting column 1 33-8 is rotatably connected to the circular tube 33-1 via a bearing, and connecting column 2 33-9 is rotatably connected to the sleeve 33-2 via a bearing. With the setting of spring 3 33-10, it is stretched when the circular tube 33-1 and sleeve 33-2 extend, so that the conveying wheel mechanism 2 at the end will be moved and limited to the side of the substrate for subsequent reset.

[0101] The positioning slots 22-4 include slot 1 22-41, slot 22-42, slot 3 22-43, and slot 4 22-44, which are sequentially connected. Slot 1 22-41 allows the positioning pin 23 to be inserted into the positioning sleeve 22-1, and the limiting pin 24 to enter slot 22-42 more smoothly. Slot 22-42 causes the positioning sleeve 22-1 to rotate when the limiting pin 24 is inserted, and slot 3 22-44... With the setting of -43, after the limiting post 24 enters the slot 22-42, the positioning sleeve 22-1 rotates under the reset action of the torsion spring 22-3, thereby limiting the limiting post 24 in the slot 3 22-43. With the setting of the slot 4 22-44, after the positioning sleeve 22-1 is rotated by the rotating turntable 22-5, the slot 4 22-44 is aligned with the limiting post 24, thereby releasing the limitation on the limiting post 24 and allowing the two wheels 21 to be separated.

[0102] One end of the shorter rubber plate 26 has a slot 211, and the other end of the shorter rubber plate 26 has a fixed insert 212 that cooperates with the slot 211. A liquid filling tube is fixed on the wheel body 21, and one end of the tube is connected to the liquid bladder 25-2. The other end of the tube is threaded with a sealing cap. The slot 211 and the insert 212 facilitate the splicing of the corresponding rubber plates 26 on the two wheels 21. The liquid filling tube and the sealing cap facilitate the addition of liquid to the liquid bladder 25-2 and its sealing.

[0103] When in use, when the conveying wheel mechanism 2 is installed on the rotating rod 13, the positioning pin 23 on one wheel body 21 is inserted into the positioning part 22 on the other wheel body 21. During the process of the positioning pin 23 on one wheel body 21 being inserted into the positioning sleeve 22-1 on the other wheel body 21, the limiting pin 24 on the positioning pin 23 moves into the positioning slot 22-4 for limiting, thereby fixing the two semi-circular wheels 21 on the rotating rod 13 to form a complete conveying wheel.

[0104] During the process of inserting the limiting post 24 into the positioning slot 22-4, the torsion spring 22-3 deforms, providing a force for the positioning sleeve 22-1 to reset, causing the positioning sleeve 22-1 to rotate, thereby causing the positioning slot 22-4 to limit the limiting post 24 on the positioning sleeve 22-1. With the cooperation of the support member 25 and the rubber plate 26, the contact area between the conveying wheel and the perovskite substrate is increased when the wheel body 21 rotates. The rubber ring 210 can increase the friction between the wheel body 21 fixed on the rotating rod 13 and the rubber ring 210, thus stably fixing the conveying wheel mechanism 2 on the rotating rod 13.

[0105] After the docking post 34 is inserted into the docking groove 27, the snap-fit ​​piece 35 is fixed on the wheel body 21, so that the conveying wheel mechanism 2 at the end of the rotating rod 13 rotates under the drive of the other conveying wheel mechanism 2. It can be unlocked by the unlocking piece 28 when it is disassembled. When the trigger plate 29 moves and squeezes the arc plate 36, it acts on the transmission piece 33 to make it extend, thereby causing the conveying wheel mechanism 2 at both ends of the rotating rod 13 to move in opposite directions. After it is separated from the substrate, under its rebound, the conveying wheel mechanism 2 at the end contacts the side of the substrate for limiting.

[0106] Example 5, refer to Figures 1 to 31 This is the fifth embodiment of the present invention, which is based on the previous four embodiments.

[0107] Specifically, it also includes the following processes:

[0108] S1: Equipment and Parameter Selection. An IR lamp (16) with a wavelength of 600-1500nm is used as the core component of the preheating equipment. The optical characteristics of this wavelength enable efficient separation of high-boiling-point solvents from other solutions and rapid evaporation, while also rapidly evaporating high-boiling-point solvents from the perovskite, reducing their impact on crystal growth consistency. Simultaneously, the light wave rapidly heats the material, and since the perovskite material hardly absorbs this wavelength, it can directly penetrate the perovskite layer, precisely heating the component substrate and the perovskite solution, avoiding any additional impact on the film layer.

[0109] S2: Preheating operation: The perovskite substrate is sent into the light wave oven equipped with the above-mentioned IR lamp 16. After the equipment is started, the surface temperature of the substrate and the perovskite solution is rapidly raised to above 120°C within 2 minutes, and the overall preheating time is strictly controlled within 3 minutes, which is far superior to the heating efficiency of traditional electric heating substrates.

[0110] S3: Simultaneous solvent treatment utilizes the special airflow structure of the microwave oven to rapidly heat up while simultaneously removing the mist generated by solvent evaporation from the perovskite. This prevents secondary contamination of the film layer by impurity mist, ensures full solvent evaporation, reduces residue, and lays a uniform film layer foundation for subsequent crystal growth.

[0111] S4: Connecting operation, the perovskite substrate that has completed the light wave pre-annealing is directly transferred to the traditional electric heating annealing furnace to enter the deep annealing stage. At this time, the substrate already has a high base temperature and does not require a long preheating. This caters to the rapid annealing characteristics of perovskite, thereby obtaining a high-quality film surface and improving the efficiency of perovskite cells.

[0112] S5: Crystal growth control. During the electrothermal annealing process, the solvent has been fully evaporated and the film uniformity has been improved due to the pre-annealing with light waves. Perovskite crystals can grow in a more stable and uniform environment, avoiding the problem of "local point / block crystallization first" in traditional processes, and finally forming a crystal film with stronger consistency.

[0113] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A perovskite solar cell light-wave synergistic annealing device, characterized in that: include, The co-annealing mechanism (1) includes a housing (11), on which a drive (12), an adjusting component (14) and a lifting component (17) are respectively installed. A rotating rod (13) is rotatable on the housing (11) and cooperates with the drive (12). An installation component (15) is fixed on the adjusting component (14). An IR lamp (16) is installed on the installation component (15). The wavelength of the IR lamp (16) is between 600-1500 nanometers. A cover (18) is fixed at the upper end of the lifting component (17) and is located on the top of the housing (11). A filter (19) is installed on the inner wall of the cover (18). A circulating fan (110), a mesh plate (111) and an electric heating tube (112) are respectively installed inside the housing (11). A conveyor wheel mechanism (2) is installed on the surface of a rotating rod (13), including a wheel body (21) sleeved on the surface of the rotating rod (13). A positioning element (22) and a positioning post (23) are installed on the wheel body (21). A limit post (24) is fixed on the surface of the positioning post (23). The limit post (24) and the positioning post (23) both cooperate with the positioning element (22). A support element (25) and an unlocking element (28) are installed on the wheel body (21). A rubber plate (26) and a trigger plate (29) are fixed on the surface of the support element (25). A docking groove (27) is opened on the surface of the wheel body (21). A rubber ring (210) is fixed on the inner surface of the wheel body (21). The transmission mechanism (3) is installed on the wheel body (21) and includes a frame one (31) and a frame two (32) set on one side of the wheel body (21). A transmission component (33) is installed between the frame one (31) and the frame two (32). A docking post (34) is fixed on one side of the frame one (31) and the frame two (32), and it cooperates with the docking groove (27). A snap-fit ​​component (35) is installed on the docking post (34), and it cooperates with the unlocking component (28). An arc plate (36) is fixed at both ends of the transmission component (33), and it is located inside the frame one (31) and the frame two (32).

2. The perovskite solar cell light-wave synergistic annealing device as described in claim 1, characterized in that: The driving component (12) includes a support block (12-1) fixed to one side of the housing (11), a long rod (12-2) rotatably mounted on the support block (12-1), a gear (12-3) sleeved on the surface of the long rod (12-2), a gear (12-4) fixed at both ends of the rotating rod (13) and meshing with the gear (12-3), a motor (12-5) fixed to one side of the housing (11), a sprocket (12-6) sleeved on the output shaft of the motor (12-5) and the surface of the long rod (12-2), and a chain (12-7) sleeved on the surface of the sprocket (12-6).

3. The perovskite solar cell light-wave synergistic annealing device as described in claim 1, characterized in that: The adjusting component (14) includes a fixing frame (14-1) fixed to one side of the housing (11), a vertical rod (14-2) sliding on the fixing frame (14-1), a support plate (14-3) fixed at the upper end of the vertical rod (14-2), a fixing rod (14-4) sliding on the housing (11), one end of which is fixed to the surface of the support plate (14-3), and the other end of which is fixed to a frame (14-5). The mounting component (15) is fixed to the frame (14-5). A roller (14-6) is fixed at the bottom of the support plate (14-3). A guide rail (14-7) is fixed on one side of the housing (11). A drive plate (14-8) sliding on the guide rail (14-7) and cooperating with the roller (14-6) is also fixed on the housing (11). A hydraulic cylinder (14-9) is fixed on the housing (11), and its output end is fixed to one side of the drive plate (14-8).

4. The perovskite solar cell light-wave synergistic annealing device as described in claim 1, characterized in that: The lifting component (17) includes a second fixing frame (17-1) fixed to one side of the housing (11), a guide sleeve (17-2) fixed on the second fixing frame (17-1), a second vertical rod (17-3) sliding inside the guide sleeve (17-2), and its upper end fixed to the bottom of the cover (18). A second hydraulic cylinder (17-4) is fixed on the housing (11), and its output end is fixed to the bottom of the cover (18).

5. The perovskite solar cell light-wave synergistic annealing device as described in claim 2, characterized in that: The positioning component (22) includes a positioning sleeve (22-1) that rotates on the wheel (21) and cooperates with a positioning post (23). One end of the positioning sleeve (22-1) is fixed with a short post (22-2) and the other end rotates on the wheel (21). A torsion spring (22-3) is sleeved on the surface of the short post (22-2) and its two ends are respectively fixed to the inner wall of the wheel (21) and the surface of the short post (22-2). A positioning slot (22-4) is opened on the positioning sleeve (22-1) and cooperates with a limiting post (24). A turntable (22-5) rotates on the wheel (21) and is sleeved on the surface of the positioning sleeve (22-1). A handle (22-6) is fixed on the surface of the turntable (22-5).

6. The perovskite solar cell light-wave synergistic annealing device as described in claim 2, characterized in that: The support member (25) includes a groove (25-1) opened in the wheel body (21), a liquid bladder (25-2) fixed on the inner surface of the wheel body (21), a short tube (25-3) fixed in the wheel body (21), and its two ends are respectively connected between the groove (25-1) and the liquid bladder (25-2). A piston (25-4) slides in the groove (25-1), a connecting tube (25-5) slides on the wheel body (21), one end of which is connected to the piston (25-4), and the other end of which is connected to a circular plate (25-6). An elastic block (25-7) is fixed on the circular plate (25-6), and a rubber plate (26) is fixed on the surface of the elastic block (25-7). A first chamber (25-8) and a second chamber (25-9) are respectively opened in the elastic block (25-7), and the first chamber (25-8) is connected to the circular plate (25-6).

7. The perovskite solar cell light-wave synergistic annealing apparatus as described in claim 6, characterized in that: The elastic block (25-7) has a round hole (25-10) and it communicates with the second chamber (25-9). The wheel body (21) is fixed with a bent pipe (25-11) and one end of it communicates with the groove (25-1). The elastic block (25-7) is fixed with a bent pipe (25-12) and one end of it communicates with the second chamber (25-9). A flexible tube (25-13) communicates between the bent pipe (25-11) and the bent pipe (25-12). The wheel body (21) has a sliding groove (25-14). The surface of the connecting pipe (25-5) is fixed with a slider (25-15) and it slides in the sliding groove (25-14). A spring (25-16) is fixed between the surface of the slider (25-15) and the inner wall of the sliding groove (25-14).

8. The perovskite solar cell light-wave synergistic annealing device as described in claim 1, characterized in that: The wheel body (21) has a slot (28-1) and an unlocking block (28-2) slides in the slot (28-1). One end of the unlocking block (28-2) extends to the outside of the wheel body (21) and is fixed with an unlocking plate (28-3). The inner wall of the slot (28-1) has an anti-detachment groove (28-4). An anti-detachment block (28-5) is fixed on the unlocking block (28-2) and slides in the anti-detachment groove (28-4). A second spring (28-6) is fixed between the surface of the anti-detachment block (28-5) and the inner wall of the anti-detachment groove (28-4). A limit groove (28-7) is opened on the wheel body (21). A limit bolt (28-8) is fixed on one side of the unlocking plate (28-3) and slides in the limit groove (28-7) at one end.

9. The perovskite solar cell light-wave synergistic annealing apparatus as described in claim 8, characterized in that: The snap-fit ​​component (35) includes a groove (35-1) formed on the docking post (34), a snap-fit ​​block (35-2) sliding in the groove (35-1) and cooperating with the slot (28-1), a square slot (35-3) formed on the inner wall of the groove (35-1), a square block (35-4) fixed on the surface of the snap-fit ​​block (35-2) and sliding in the square slot (35-3), and a spring four (35-5) fixed between the surface of the square block (35-4) and the inner wall of the square slot (35-3).

10. A light-wave synergistic annealing process for perovskite solar cells, characterized in that: The perovskite solar cell light-wave synergistic annealing apparatus as described in any one of claims 1-9 further includes the following process: S1: Equipment and parameter selection: IR lamps (16) with wavelengths of 600-1500nm are used as the core components of the preheating equipment. They can directly penetrate the perovskite layer and accurately heat the component substrate and perovskite solution. S2: Preheating operation: The perovskite substrate is sent into the light wave oven equipped with the above-mentioned IR lamp (16). After the equipment is started, the surface temperature of the substrate and the perovskite solution is quickly raised to above 120°C within 2 minutes, and the overall preheating time is strictly controlled within 3 minutes. S3: Simultaneous solvent treatment, with the help of the special air path structure of the microwave oven, removes the mist generated by solvent evaporation in the perovskite in real time while rapidly heating up. S4: Connecting operation, the perovskite substrate that has completed the light wave pre-annealing is directly transferred to the traditional electric heating annealing furnace to enter the deep annealing stage; S5: Crystal growth control. During the electrothermal annealing process, the solvent has been fully evaporated and the film uniformity has been improved due to the pre-annealing with light waves. Perovskite crystals can grow in a more stable and uniform environment, ultimately forming a crystal film with stronger consistency.

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