保护磁流体的主轴结构
By setting an annular plate and a magnetic fluid sealing mechanism between the spindle and the housing, combined with the air intake channel, protective air channel and exhaust channel, a gas barrier is formed, which solves the leakage and contamination problems of the magnetic fluid sealing system in complex process environments, and realizes the protection of magnetic fluid and improves the stability of the spindle structure.
CN121111992BActive Publication Date: 2026-07-17JIANGSU MICROVIA NANO EQUIP TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2025-11-07
- Publication Date
- 2026-07-17
Smart Images
Figure CN121111992B_ABST
Abstract
本发明提供一种保护磁流体的主轴结构、晶圆加工设备及磁流体保护方法，主轴结构包括背吸通道、主轴和套设于主轴上的壳体，在壳体上设置有径向贯穿的进气通道和抽气通道，在主轴与壳体之间设置有环形板和分别设置在环形板的轴向两侧的磁流体密封机构，在磁流体密封机构和主轴之间填充有磁流体，在磁流体密封机构与环形板之间设有端面间隙，在环形板内设置有保护气道，保护气道连通进气通道与端面间隙，环形板与主轴之间具有环形间隙，环形间隙与端面间隙连通，环形间隙与抽气通道连通，背吸通道与环形间隙连通；进气后可形成流动的气体屏障对磁流体进行保护，延长了磁流体的寿命。
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