基于开尔文探针力显微镜对电势的测量方法及相关装置
By using a coaxial optical path and collimating lens design, combined with a synchronous control unit, precise focusing of the laser beam and precise in-situ detection of sample micro-areas are achieved. This solves the measurement shortcomings of traditional KPFM under illumination conditions and realizes high-resolution and real-time synchronous photogenerated surface potential measurement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- INST OF PHYSICS HENAN ACAD OF SCI
- Filing Date
- 2025-10-14
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies have shortcomings in achieving high spatial resolution, high temporal accuracy, and low noise in-situ illumination dynamic measurement of nanoscale surface potential, especially in terms of the synchronization and resolution of illumination conditions and potential measurement. Furthermore, commercial AFM systems lack a highly integrated and controllable built-in laser excitation module.
By designing a physical coaxial optical path and a collimating lens, the laser optical path is made coaxial with the illumination optical path of the AFM body. Combined with a synchronous control unit, the laser parameters are adjusted in real time and surface potential data is collected synchronously to generate time-potential curves or spatial potential distribution maps.
It achieves precise focusing of the laser beam and precise in-situ detection of sample micro-areas, solving the problem that traditional KPFM can only measure the dark-state surface potential of photosensitive materials, overcoming the difficulties of introducing external light sources, and realizing high-resolution and real-time synchronous photogenerated surface potential measurement.
Smart Images
Figure CN121114498B_ABST