Equivalent capacitance processing circuit and radio frequency power supply device

Abstract

The application provides an equivalent capacitance processing circuit and a radio frequency power supply device. The equivalent capacitance processing circuit is used for capacitive reactance neutralization of an equivalent capacitance of a radio frequency coupling device. The radio frequency coupling device is arranged in a transmission path of radio frequency electric energy. The radio frequency coupling device includes a first winding and a second winding which are coupled to each other. The radio frequency coupling device is used for coupling radio frequency electric energy on one side of the first winding to one side of the second winding. The equivalent capacitance processing circuit includes a compensation unit. The compensation unit is connected to the first winding and the second winding. The compensation unit is inductive and has a corresponding inductive reactance value. The compensation unit is used for capacitive reactance neutralization of the equivalent capacitance, so as to reduce or eliminate the equivalent capacitance. A resonance frequency of the compensation unit and the equivalent capacitance is a first resonance frequency. The first resonance frequency and the frequency of the radio frequency electric energy satisfy a first preset relationship, so as to prohibit part of the radio frequency electric energy on one side of the first winding from being transmitted to one side of the second winding through the compensation unit. The application can improve the output effect of the radio frequency electric energy.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to an equivalent capacitance processing circuit and a radio frequency power supply device. Background Technology

[0002] Currently, with the increasingly widespread application of radio frequency (RF) power supply equipment, various RF coupling devices are often used in practical applications to couple, isolate, and regulate RF power transmission. However, these RF coupling devices often have large equivalent capacitances, resulting in significant capacitive effects that greatly affect the output performance of RF power. Therefore, reducing the capacitive effect of RF coupling devices to improve RF power output has become a crucial issue. Summary of the Invention

[0003] This application provides an equivalent capacitance processing circuit and an RF power supply device, which can reduce the capacitance effect of RF coupling devices and significantly improve the output effect of RF power.

[0004] In a first aspect, an equivalent capacitance processing circuit is provided. This circuit neutralizes the capacitive reactance of the equivalent capacitance of a radio frequency (RF) coupling device. The RF coupling device is disposed in the transmission path of RF power and includes a coupled first winding and a second winding. The RF coupling device couples RF power from one side of the first winding to one side of the second winding. The equivalent capacitance processing circuit includes a compensation unit connected to both the first and second windings. The compensation unit is inductive and has a corresponding inductive reactance value. The compensation unit neutralizes the capacitive reactance of the equivalent capacitance to reduce or eliminate it. The resonant frequency between the compensation unit and the equivalent capacitance is a first resonant frequency. This first resonant frequency satisfies a first preset relationship with the frequency of the RF power, thereby preventing a portion of the RF power from the first winding side from being transmitted to the second winding side through the compensation unit.

[0005] In one possible implementation, the compensation unit includes an adjustable inductor module connected to both the first winding and the second winding. The adjustable inductor module has an inductance value that is variable, allowing the compensation unit to have a corresponding inductive reactance value that is also variable. Specifically, the inductance value of the adjustable inductor module varies according to changes in the capacitance of the equivalent capacitor and / or the frequency of the radio frequency power, ensuring that the inductance value of the adjustable inductor module corresponds to the inductance value. The inductive reactance value corresponding to the inductance value of the adjustable inductor module remains adapted to the capacitance of the equivalent capacitor and / or the frequency of the radio frequency power, thereby neutralizing the capacitive reactance of the equivalent capacitor.

[0006] In one possible implementation, the equivalent capacitance processing circuit further includes a control unit connected to the adjustable inductor module. The control unit is used to determine a target inductance value of the adjustable inductor module based on the capacitance value of the equivalent capacitance and the frequency of the radio frequency power, and adjust the inductance value of the adjustable inductor module to the target inductance value, so that the inductive reactance value corresponding to the target inductance value can neutralize the capacitive reactance of the equivalent capacitance.

[0007] In one possible implementation, the equivalent capacitance processing circuit further includes a DC blocking unit connected to the first winding and the adjustable inductor module. The DC blocking unit is used to prevent the DC component of the radio frequency power on the first winding side from being transmitted to the second winding side through the DC blocking unit.

[0008] In one possible implementation, the DC blocking unit is capacitive and has a corresponding capacitive reactance value to prevent the DC component of the radio frequency power on the first winding side from being transmitted to the second winding side through the DC blocking unit. The DC blocking unit is also used in conjunction with the compensation unit to neutralize the capacitive reactance of the equivalent capacitance. The resonant frequency of the DC blocking unit, the compensation unit, and the equivalent capacitance is a second resonant frequency, and the second resonant frequency satisfies a second preset relationship with the frequency of the radio frequency power.

[0009] In one possible implementation, the first preset relationship is the ratio of the first resonant frequency to the frequency of the radio frequency power within a first preset range, and the second preset relationship is the ratio of the second resonant frequency to the frequency of the radio frequency power within a second preset range. Wherein, the second preset range is within the first preset range.

[0010] In one possible implementation, the DC blocking unit includes an adjustable capacitor module connected to the first winding and an adjustable inductor module. The adjustable capacitor module has a capacitance value that is variable, allowing it to have a corresponding capacitive reactance value. Specifically, the capacitance value of the adjustable capacitor module is less than or equal to a first preset value and varies according to one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power. This ensures that the capacitance value of the adjustable capacitor module corresponds to the capacitance value, and the capacitive reactance value corresponding to the capacitance value of the adjustable capacitor module remains compatible with one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power, thus neutralizing the capacitive reactance of the equivalent capacitor in conjunction with the corresponding inductive reactance value.

[0011] In one possible implementation, the equivalent capacitance processing circuit further includes a control unit connected to the adjustable capacitor module. The control unit is used to determine the target capacitance value of the adjustable capacitor module based on the capacitance value of the equivalent capacitance, the inductance value of the compensation unit, and the frequency of the radio frequency power, and adjust the capacitance value of the adjustable capacitor module to the target capacitance value, so that the capacitive reactance value corresponding to the target capacitance value can cooperate with the corresponding inductive reactance value to neutralize the capacitive reactance of the equivalent capacitance.

[0012] In one possible implementation, the first winding includes a first end and a second end, and the second winding includes a third end and a fourth end. Both the first end and the third end are connected to the radio frequency power transmission path, and both the second end and the fourth end are used for grounding. The first end and the third end form one set of terminals with the same name, and the second end and the fourth end form another set of terminals with the same name. The compensation unit is connected between the first end and the third end.

[0013] Secondly, a radio frequency (RF) power supply device is also provided, comprising an RF source, an RF coupling device, and an equivalent capacitance processing circuit. The RF source is used to output RF power. The RF coupling device is disposed in the transmission path of the RF power. The equivalent capacitance processing circuit is used to neutralize the capacitive reactance of the equivalent capacitance of the RF coupling device. The RF coupling device includes a coupled first winding and a second winding, and is used to couple RF power from one side of the first winding to one side of the second winding. The equivalent capacitance processing circuit includes a compensation unit connected to both the first winding and the second winding, and the compensation unit is inductive with a corresponding inductive reactance value. The compensation unit is used to neutralize the capacitive reactance of the equivalent capacitance to reduce or eliminate the equivalent capacitance. The resonant frequency of the compensation unit and the equivalent capacitance is a first resonant frequency, and the first resonant frequency satisfies a first preset relationship with the frequency of the RF power to prevent a portion of the RF power from the first winding side from being transmitted to the second winding side through the compensation unit.

[0014] The equivalent capacitance processing circuit and RF power supply device of this application, by setting an inductive compensation unit with a corresponding inductive reactance value connected to both the first winding and the second winding, can neutralize the capacitive reactance of the equivalent capacitance of the RF coupling device, thereby reducing or eliminating the equivalent capacitance. This can avoid waveform distortion of RF power, as well as a series of adverse effects caused by capacitive coupling loss and impedance mismatch of RF power, thereby improving the output effect of RF power. Furthermore, by configuring the resonant frequency of the compensation unit and the equivalent capacitance to meet the first preset relationship, it can prevent part of the RF power on the first winding side from being transmitted to the second winding side through the compensation unit, thus avoiding affecting the normal transmission of RF power. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application.

[0017] Figure 2 This is another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application.

[0018] Figure 3 This is yet another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application.

[0019] Figure 4 This is another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application.

[0020] Figure 5 This is a schematic diagram showing that the radio frequency coupling device in some embodiments of this application is a planar transformer.

[0021] Figure 6 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0022] Explanation of reference numerals in the attached figures:

[0023] 10. Equivalent capacitance processing circuit; 110. Compensation unit; 111. Adjustable inductor module; 120. Control unit; 130. DC blocking unit; 131. Adjustable capacitor module.

[0024] T, radio frequency coupling device; W1, first winding; W2, second winding.

[0025] 1000, Radio frequency power supply equipment; CO, Radio frequency source; RFP, Radio frequency power; RL, Load. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0027] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0028] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0029] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0030] Please see Figure 1 , Figure 1 This is a schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application. For example... Figure 1As shown, this application provides an equivalent capacitance processing circuit 10. The equivalent capacitance processing circuit 10 is used to neutralize the capacitive reactance of the equivalent capacitance of a radio frequency (RF) coupling device T. The RF coupling device T is disposed in the transmission path of radio frequency power (RFP). The RF coupling device T includes a coupled first winding W1 and a second winding W2. The RF coupling device T is used to couple the RFP from the first winding W1 side to the second winding W2 side. The equivalent capacitance processing circuit 10 includes a compensation unit 110, which is connected to both the first winding W1 and the second winding W2. The compensation unit 110 is inductive and has a corresponding inductive reactance value. The compensation unit 110 is used to neutralize the capacitive reactance of the equivalent capacitance to reduce or eliminate the equivalent capacitance. The resonant frequency of the compensation unit 110 and the equivalent capacitance is a first resonant frequency. The first resonant frequency and the frequency of the RFP satisfy a first preset relationship to prevent a portion of the RFP from the first winding W1 side from being transmitted to the second winding W2 side through the compensation unit 110.

[0031] Therefore, the equivalent capacitance processing circuit 10 in this application, by setting a compensation unit 110 with an inductive reactance value connected to both the first winding W1 and the second winding W2, can neutralize the capacitive reactance of the equivalent capacitance of the radio frequency coupling device T, thereby reducing or eliminating the equivalent capacitance. This can prevent waveform distortion of the radio frequency power RFP, as well as a series of adverse effects caused by capacitive coupling loss and impedance mismatch of the radio frequency power RFP, thereby improving the output effect of the radio frequency power RFP. Furthermore, by configuring the resonant frequency of the compensation unit 110 and the equivalent capacitance to satisfy the first preset relationship, it can prevent a portion of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the compensation unit 110, thus avoiding affecting the normal transmission of the radio frequency power RFP.

[0032] Specifically, the compensation unit 110 neutralizes the capacitive reactance of the equivalent capacitance, that is, it performs impedance matching on the equivalent capacitance through the corresponding inductive reactance value of the compensation unit 110, so as to reduce or eliminate the equivalent capacitance.

[0033] Please see Figure 2 , Figure 2 This is another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application. For example... Figure 2As shown, the compensation unit 110 includes an adjustable inductor module 111, which is connected to both the first winding W1 and the second winding W2. The adjustable inductor module 111 has an inductance value that can be varied, so that the compensation unit 110 has a corresponding inductive reactance value that can also be varied. Specifically, the inductance value of the adjustable inductor module 111 varies according to the capacitance value of the equivalent capacitor and / or the frequency of the radio frequency power RFP, so that the inductance value of the adjustable inductor module 111 is the corresponding inductance value. The inductive reactance value corresponding to the inductance value of the adjustable inductor module 111 remains adapted to the capacitance value of the equivalent capacitor and / or the frequency of the radio frequency power RFP, thereby neutralizing the capacitive reactance of the equivalent capacitor.

[0034] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by configuring the adjustable inductor module 111 to have an inductance value, presents a corresponding inductive reactance value. By configuring the inductance value of the adjustable inductor module 111 to be variable, the inductance value of the adjustable inductor module 111 can be made to correspond to the inductance value. Thus, the inductive reactance value corresponding to the inductance value of the adjustable inductor module 111 is kept to match the capacitance value of the equivalent capacitor and / or the frequency of the radio frequency power RFP, thereby achieving the neutralization of the capacitive reactance of the equivalent capacitor.

[0035] like Figure 2 As shown, the equivalent capacitance processing circuit 10 also includes a control unit 120, which is connected to the adjustable inductor module 111. The control unit 120 is used to determine the target inductance value of the adjustable inductor module 111 based on the capacitance value of the equivalent capacitance and the frequency of the radio frequency power RFP, and adjust the inductance value of the adjustable inductor module 111 to the target inductance value so that the inductive reactance value corresponding to the target inductance value can neutralize the capacitive reactance of the equivalent capacitance.

[0036] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by setting the control unit 120, can determine the target inductance value of the adjustable inductor module 111 according to the capacitance value of the equivalent capacitance and the frequency of the radio frequency power RFP, and can adjust the inductance value of the adjustable inductor module 111 to adjust the inductance value of the adjustable inductor module 111 to the target inductance value, so as to completely eliminate the equivalent capacitance.

[0037] In some embodiments, the adjustable inductor module 111 may include one or more inductors with adjustable inductance values. When the adjustable inductor module 111 includes one inductor, the inductor can be an adjustable inductor, and the control unit 120 adjusts the inductance value of the adjustable inductor module 111 to a target inductance value by adjusting the inductance value of the adjustable inductor. When the adjustable inductor module 111 includes multiple inductors, each inductor can be a non-adjustable inductor, and each inductor can be connected to or disconnected from the first winding W1. The control unit 120 adjusts the inductance value of the adjustable inductor module 111 to a target inductance value by adjusting the number of inductors connected to the first winding W1 among the multiple inductors.

[0038] Please see Figure 3 , Figure 3 This is yet another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application. For example... Figure 3 As shown, the equivalent capacitance processing circuit 10 also includes a DC blocking unit 130, which is connected to the first winding W1 and the adjustable inductor module 111. The DC blocking unit 130 is used to prevent the DC component of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the DC blocking unit 130.

[0039] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by configuring the DC blocking unit 130, can prevent the DC component of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the DC blocking unit 130, thereby avoiding the setting of the equivalent capacitance processing circuit 10 from affecting the isolation effect of the radio frequency coupling device T.

[0040] The DC blocking unit 130 is capacitive and has a corresponding capacitive reactance value to prevent the DC component of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the DC blocking unit 130. The DC blocking unit 130 is also used in conjunction with the compensation unit 110 to neutralize the capacitive reactance of the equivalent capacitance. The resonant frequency of the DC blocking unit 130, the compensation unit 110, and the equivalent capacitance is the second resonant frequency, and the second resonant frequency and the frequency of the radio frequency power RFP satisfy a second preset relationship.

[0041] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by configuring the DC blocking unit 130 to be capacitive and having a corresponding capacitive reactance value, can prevent the DC component of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the DC blocking unit 130. It can also cooperate with the compensation unit 110 to neutralize the capacitive reactance of the equivalent capacitance, avoiding the difficulty in completely eliminating the equivalent capacitance when the compensation unit 110 is used alone to neutralize the capacitive reactance of the equivalent capacitance, resulting in the radio frequency coupling device T still having a partial capacitive effect.

[0042] Specifically, adjusting the inductive reactance of the compensation unit 110 is more difficult than adjusting the capacitive reactance of the DC blocking unit 130. The inductive reactance of the compensation unit 110 is difficult to adapt to the capacitance value of the equivalent capacitor and / or the frequency change of the radio frequency power RFP more quickly or accurately. Therefore, the capacitive reactance of the DC blocking unit 130 can provide corresponding impedance compensation to better eliminate the equivalent capacitance.

[0043] Furthermore, the first preset relationship is the ratio of the first resonant frequency to the frequency of the radio frequency power RFP within a first preset range, and the second preset relationship is the ratio of the second resonant frequency to the frequency of the radio frequency power RFP within a second preset range. The second preset range is within the first preset range.

[0044] Therefore, the equivalent capacitance processing circuit 10 in this application, by configuring the ratio of the first resonant frequency to the frequency of the radio frequency power RFP within a first preset range and the ratio of the second resonant frequency to the frequency of the radio frequency power RFP within a second preset range, can prevent a portion of the radio frequency power RFP on the first winding W1 side from being transmitted to the second winding W2 side through the compensation unit 110 based on the characteristics of parallel resonance. Furthermore, by configuring the second preset range within the first preset range, the DC blocking unit 130 can further compensate the impedance of the equivalent capacitance to better eliminate the equivalent capacitance.

[0045] Furthermore, the first preset range can be 90%-110%, and the second preset range can be 95%-105%.

[0046] In some embodiments, the first preset relationship may also be that the difference between the first resonant frequency and the frequency of the radio frequency power RFP is less than a first preset value, and the second preset relationship may also be that the difference between the second resonant frequency and the frequency of the radio frequency power RFP is less than a second preset value. Wherein, the second preset value is less than the first preset value.

[0047] Please see Figure 4 , Figure 4 This is another schematic diagram of the equivalent capacitance processing circuit in some embodiments of this application. For example... Figure 4As shown, the DC blocking unit 130 includes an adjustable capacitor module 131, which is connected to the first winding W1 and the adjustable inductor module 111. The adjustable capacitor module 131 has a capacitance value that can be varied, so that it has a corresponding capacitive reactance value. Specifically, the capacitance value of the adjustable capacitor module 131 is less than or equal to a first preset value, and varies according to one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power RFP. This ensures that the capacitance value of the adjustable capacitor module 131 corresponds to the capacitance value, and the capacitive reactance value corresponding to the capacitance value of the adjustable capacitor module 131 remains compatible with one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power RFP, thus neutralizing the capacitive reactance of the equivalent capacitor in conjunction with the corresponding inductive reactance value.

[0048] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by configuring the adjustable capacitor module 131 to have a capacitance value, presents a corresponding capacitive reactance value. By configuring the capacitance value of the adjustable capacitor module 131 to be variable, the capacitance value of the adjustable capacitor module 131 can be made to correspond to the capacitance value. Thus, the capacitive reactance value corresponding to the capacitance value of the adjustable capacitor module 131 is kept to be compatible with one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power RFP. It can cooperate with the corresponding inductive reactance value to achieve capacitive reactance neutralization of the equivalent capacitor.

[0049] like Figure 4 As shown, the equivalent capacitance processing circuit 10 also includes a control unit 120, which is connected to the adjustable capacitor module 131. The control unit 120 is used to determine the target capacitance value of the adjustable capacitor module 131 based on the capacitance value of the equivalent capacitance, the inductance value of the compensation unit 110, and the frequency of the radio frequency power RFP, and adjust the capacitance value of the adjustable capacitor module 131 to the target capacitance value so that the capacitive reactance value corresponding to the target capacitance value can cooperate with the corresponding inductive reactance value to neutralize the capacitive reactance of the equivalent capacitance.

[0050] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by setting the control unit 120, can determine the target capacitance value of the adjustable capacitor module 131 based on the capacitance value of the equivalent capacitance, the inductance value of the compensation unit 110 and the frequency of the radio frequency power RFP, and can adjust the capacitance value of the adjustable capacitor module 131 to adjust the capacitance value of the adjustable capacitor module 131 to the target capacitance value, so as to completely eliminate the equivalent capacitance.

[0051] In some embodiments, the control unit 120 may include a processor, which may be a general-purpose processor such as a central processing unit (CPU), or a logic control device such as a digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc., or a microprocessor such as a microcontroller unit (MCU).

[0052] In some embodiments, the adjustable capacitor module 131 may include an adjustable capacitor, and the control unit 120 may also include a motor. The control unit 120 is connected to the adjustable capacitor of the adjustable capacitor module 131 through the motor. The control unit 120 is used to adjust the capacitance value of the adjustable capacitor by controlling the rotation of the motor, thereby adjusting the capacitance value of the adjustable capacitor module 131 to the target capacitance value.

[0053] Please see Figure 5 , Figure 5 This is a schematic diagram showing that the radio frequency coupling device T is a planar transformer in some embodiments of this application. In some embodiments, the radio frequency coupling device T can be a planar transformer. Figure 5 As shown, the first winding W1 includes a first end and a second end, and the second winding W2 includes a third end and a fourth end. The first end and the third end are both connected to the transmission path of the radio frequency power RFP, and the second end and the fourth end are both used for grounding. The first end and the third end are one set of terminals with the same name, and the second end and the fourth end are another set of terminals with the same name. The compensation unit 110 is connected between the first end and the third end.

[0054] In particular, radio frequency coupling devices (T) often employ planar transformers to provide better coupling, isolation, and regulation in the transmission path of high-power radio frequency power (RFP). However, planar transformers often have a large equivalent capacitance, resulting in a significant capacitive effect that greatly affects the output performance of the RFP.

[0055] Therefore, the equivalent capacitance processing circuit 10 described above in this application, by configuring the compensation unit 110 connected between the first terminal and the third terminal, realizes the capacitive reactance neutralization of the equivalent capacitance of the radio frequency coupling device T, so as to reduce or eliminate the equivalent capacitance.

[0056] The equivalent capacitance processing circuit 10 of this application, through the above structure, can neutralize the capacitive reactance of the equivalent capacitance of the radio frequency coupling device T, thereby reducing or eliminating the equivalent capacitance. This can avoid waveform distortion of the radio frequency power RFP, as well as a series of adverse effects caused by capacitive coupling loss and impedance mismatch of the radio frequency power RFP, thereby improving the output effect of the radio frequency power RFP and avoiding affecting the normal transmission of the radio frequency power RFP.

[0057] Please see Figure 6 , Figure 6 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 6 As shown, this application also provides an RF power supply device 1000, which includes an RF source CO, an RF coupling device T, and an equivalent capacitance processing circuit 10 as described in any of the foregoing embodiments. The RF source CO is used to output RF power RFP. The RF coupling device T is disposed in the transmission path of the RF power RFP. The equivalent capacitance processing circuit 10 is used to neutralize the capacitive reactance of the equivalent capacitance of the RF coupling device T.

[0058] Please refer to it again. Figure 1 .like Figure 1 As shown, the radio frequency coupling device T includes a first winding W1 and a second winding W2 coupled together. The radio frequency coupling device T is used to couple radio frequency power RFP from the first winding W1 side to the second winding W2 side. The equivalent capacitance processing circuit 10 includes a compensation unit 110, which is connected to both the first winding W1 and the second winding W2. The compensation unit 110 is inductive and has a corresponding inductive reactance value. The compensation unit 110 is used to neutralize the capacitive reactance of the equivalent capacitance to reduce or eliminate the equivalent capacitance. The resonant frequency of the compensation unit 110 and the equivalent capacitance is a first resonant frequency. The first resonant frequency and the frequency of the radio frequency power RFP satisfy a first preset relationship to prevent a portion of the radio frequency power RFP from being transmitted from the first winding W1 side to the second winding W2 side through the compensation unit 110.

[0059] For a more specific description of the equivalent capacitance processing circuit 10, please refer to the relevant content of the equivalent capacitance processing circuit 10 in any of the foregoing embodiments, which will not be repeated here.

[0060] In some embodiments, the radio frequency power RFP output by the radio frequency source CO of the radio frequency power supply device 1000 can be transmitted to the load RL through the radio frequency coupling device T to provide radio frequency power RFP to the load RL.

[0061] The equivalent capacitance processing circuit 10 and the RF power supply device 1000 of this application, through the above structure, can neutralize the capacitive reactance of the equivalent capacitance of the RF coupling device T, thereby reducing or eliminating the equivalent capacitance. This can avoid waveform distortion of the RF power RFP, as well as a series of adverse effects caused by capacitive coupling loss and impedance mismatch of the RF power RFP, thereby improving the output effect of the RF power RFP and avoiding affecting the normal transmission of the RF power RFP.

[0062] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An equivalent capacitance processing circuit, characterized in that, This device is used to neutralize the capacitive reactance of the equivalent capacitance of a radio frequency coupling device. The radio frequency coupling device is disposed in the transmission path of radio frequency power. The radio frequency coupling device includes a first winding and a second winding coupled together. The radio frequency coupling device is used to couple radio frequency power from one side of the first winding to one side of the second winding. The equivalent capacitance processing circuit includes a compensation unit, which is connected to both the first winding and the second winding. The compensation unit is inductive and has a corresponding inductive reactance value. The compensation unit is used to neutralize the capacitive reactance of the equivalent capacitance to reduce or eliminate the equivalent capacitance. The resonant frequency of the compensation unit and the equivalent capacitance is the first resonant frequency. The first resonant frequency and the frequency of the radio frequency power satisfy a first preset relationship, so as to prevent part of the radio frequency power on the first winding side from being transmitted to the second winding side through the compensation unit. Wherein, the first preset relationship is the ratio of the first resonant frequency to the frequency of the radio frequency power within a first preset range.

2. The equivalent capacitance processing circuit according to claim 1, characterized in that, The compensation unit includes an adjustable inductor module, which is connected to both the first winding and the second winding. The adjustable inductor module has an inductance value that can be varied, so that the compensation unit has a corresponding inductive reactance value that can be varied. The inductance value of the adjustable inductor module varies according to the capacitance value of the equivalent capacitor and / or the frequency of the radio frequency power, so that the inductance value of the adjustable inductor module is the corresponding inductance value, and the inductive reactance value corresponding to the inductance value of the adjustable inductor module is kept adapted to the capacitance value of the equivalent capacitor and / or the frequency of the radio frequency power, thereby neutralizing the capacitive reactance of the equivalent capacitor.

3. The equivalent capacitance processing circuit according to claim 2, characterized in that, The equivalent capacitance processing circuit further includes a control unit connected to the adjustable inductor module. The control unit is used to determine the target inductance value of the adjustable inductor module based on the capacitance value of the equivalent capacitance and the frequency of the radio frequency power, and adjust the inductance value of the adjustable inductor module to the target inductance value so that the inductive reactance value corresponding to the target inductance value can neutralize the capacitive reactance of the equivalent capacitance.

4. The equivalent capacitance processing circuit according to claim 2, characterized in that, The equivalent capacitance processing circuit further includes a DC blocking unit, which is connected to the first winding and the adjustable inductor module. The DC blocking unit is used to prevent the DC component of the radio frequency power on the first winding side from being transmitted to the second winding side through the DC blocking unit.

5. The equivalent capacitance processing circuit according to claim 4, characterized in that, The DC blocking unit is capacitive and has a corresponding capacitive reactance value to prevent the DC component of the radio frequency power on the first winding side from being transmitted to the second winding side through the DC blocking unit. The DC blocking unit is also used in conjunction with the compensation unit to neutralize the capacitive reactance of the equivalent capacitance; The resonant frequency of the DC blocking unit, the compensation unit, and the equivalent capacitor is the second resonant frequency, and the second resonant frequency and the frequency of the radio frequency power satisfy a second preset relationship.

6. The equivalent capacitance processing circuit according to claim 5, characterized in that, The second preset relationship is the ratio of the second resonant frequency to the frequency of the radio frequency power within a second preset range; The second preset range is within the first preset range.

7. The equivalent capacitance processing circuit according to claim 5, characterized in that, The DC blocking unit includes an adjustable capacitor module, which is connected to the first winding and an adjustable inductor module. The adjustable capacitor module has a capacitance value and the capacitance value of the adjustable capacitor module can be changed so that the adjustable capacitor module has a corresponding capacitive reactance value and the capacitance value of the adjustable capacitor module can be changed. The capacitance value of the adjustable capacitor module is less than or equal to a first preset value, and varies according to one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power, so that the capacitance value of the adjustable capacitor module is the corresponding capacitance value, and the capacitive reactance value corresponding to the capacitance value of the adjustable capacitor module is adapted to one or more of the capacitance value of the equivalent capacitor, the corresponding inductive reactance value, and the frequency of the radio frequency power, and works with the corresponding inductive reactance value to neutralize the capacitive reactance of the equivalent capacitor.

8. The equivalent capacitance processing circuit according to claim 7, characterized in that, The equivalent capacitance processing circuit further includes a control unit connected to the adjustable capacitor module. The control unit is used to determine the target capacitance value of the adjustable capacitor module based on the capacitance value of the equivalent capacitance, the inductance value of the compensation unit, and the frequency of the radio frequency power, and adjust the capacitance value of the adjustable capacitor module to the target capacitance value, so that the capacitive reactance value corresponding to the target capacitance value can cooperate with the corresponding inductive reactance value to neutralize the capacitive reactance of the equivalent capacitance.

9. The equivalent capacitance processing circuit according to claim 1, characterized in that, The first winding includes a first end and a second end, and the second winding includes a third end and a fourth end. The first end and the third end are both connected to the radio frequency power transmission path, and the second end and the fourth end are both used for grounding. The first end and the third end are a set of terminals with the same name, and the second end and the fourth end are another set of terminals with the same name. The compensation unit is connected between the first end and the third end.

10. A radio frequency power supply device, characterized in that, include: Radio frequency (RF) source, used to output radio frequency power; A radio frequency coupling device is disposed in the transmission path of the radio frequency power; The equivalent capacitance processing circuit as described in any one of claims 1-9 is used to neutralize the capacitive reactance of the equivalent capacitance of the radio frequency coupling device.

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