A method of packaging a semiconductor chip
CN121123043BActive Publication Date: 2026-08-28弘润半导体(苏州)有限公司
Patent Information
- Application Number
- CN202511254942.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-04
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2045-09-04
AI Technical Summary
Technical Problem
[0005]因此,本发明提供了一种半导体芯片的封装方法解决预测精度有限,难以有效识别高风险焊点并优化工艺参数且光刻和电镀步骤易受工艺波动影响的问题
Benefits of technology
[0016]本发明有益效果为:通过形貌质量数据集建立芯片预测模型,实现了高精度的焊点失效概率预测和针对高风险焊点的优化参数组合,显著降低了焊点失效率,提高了工艺参数的适应性,避免了漏检失效焊点,增强了生产一致性和可靠性。此外,通过凸点形貌数据集,实现了焊盘区域的几何一致性和低界面电阻的凸点结构,显著提高了凸点几何精度,减少了对位误差,增强了电信号传输效率,为高可靠性倒装封装奠定了基础。
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Abstract
The application discloses a packaging method of a semiconductor chip, and relates to the technical field of semiconductor packaging, which comprises the following steps: collecting data after bump preparation of the semiconductor chip to obtain a bump topography data set; cleaning after preparation of a substrate to obtain substrate surface data, and fusing the substrate surface data with the bump topography data set to generate a topography quality data set; establishing a chip prediction model, outputting a solder joint failure probability and optimized process parameters; turning over the chip, performing alignment operation to obtain an aligned chip and substrate assembly; passing through a reflow soldering furnace, performing optimized soldering parameters and forming uniform intermetallic compounds to obtain a soldered chip and substrate assembly; and processing the soldered chip and substrate assembly by using a dispensing machine and a molding press to obtain a packaged chip assembly. By establishing the chip prediction model, the application significantly reduces the solder joint failure rate, improves the adaptability of the process parameters, and avoids missing the failure solder joint.
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Citation Information
Patent Citations
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