Loading device

Abstract

This application relates to a loading device. The loading device includes a base with a first limiting part; a rotating frame that can be driven by a first driving component to rotate relative to the base; a carrying component including a door stop component and a carrying bracket, the carrying bracket being fixedly installed on the rotating frame, the door stop component being rotatably connected to the carrying bracket, and the carrying bracket being used to hold wafer cassettes; the carrying bracket rotating relative to the base under the driving force of the first driving component; a locking component including a moving part, a limiting part, and a snap-fit ​​component connected to the door stop component; the moving part, under external force, can drive the limiting part to engage with the snap-fit ​​component or engage with the first limiting part, so that the rotating frame can rotate and be fixed relative to the door stop component, or the door stop component can rotate and the rotating frame is fixed relative to the base. This loading device can lock the position of the carrying bracket through simple manual operation when the door stop component is opened, which can significantly improve the loading and unloading efficiency and stability of wafer cassettes during loading and unloading.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a loading device. Background Technology

[0002] In the wafer manufacturing process, the cleanliness of the wafer cassette, which serves as the carrier and transporter of the wafers, directly affects the wafer yield and quality.

[0003] Currently, to improve the cleaning efficiency of wafer cassettes, multiple wafer cassettes are mounted on a carrier frame to enable batch cleaning. During the cleaning process, the carrier frame rotates, causing multiple wafer cassettes to rotate synchronously, thus achieving comprehensive cleaning and drying of different parts of the wafer cassettes.

[0004] However, when it is necessary to move wafer cassettes into or out of the carrier rack, the carrier rack is prone to rotation during the process of opening the door of the loading rack, making it difficult to move wafer cassettes into or out of the carrier rack. Summary of the Invention

[0005] In view of this, the present application provides a loading device to solve at least one problem existing in the background art.

[0006] In a first aspect, embodiments of this application provide a loading device, the loading device comprising:

[0007] The base is provided with a first limiting part;

[0008] The rotating frame is capable of being driven by a first drive assembly to rotate relative to the base;

[0009] The load-bearing assembly includes a door stop assembly and a load-bearing bracket, wherein the load-bearing bracket is fixedly mounted on the rotating frame, and the door stop assembly is rotatably connected to the load-bearing bracket;

[0010] A locking component, connected to the bottom of the supporting component, includes a movable part, a limiting part connected to the movable part, and a snap-fit ​​part connected to the door stop component;

[0011] Wherein, the moving member, when subjected to external force, can cause the limiting member to engage with the locking member or to engage with the first limiting part, so that the rotating frame can rotate and be fixed relative to the door stop assembly, or the door stop assembly can rotate and the rotating frame is fixed relative to the base.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the latching member is provided with a second limiting part, the second limiting part and the first limiting part are both located on the movement path of the moving member, and when the moving member is subjected to an external force, the limiting member can be driven to latch onto the second limiting part.

[0013] In conjunction with the first aspect of this application, in an optional embodiment, the first limiting portion and the second limiting portion are disposed opposite to and adjacent to each other on the movement path of the moving member.

[0014] In conjunction with the first aspect of this application, in an optional embodiment, the door stop assembly includes:

[0015] A rotating shaft is connected to the load-bearing bracket;

[0016] The door assembly is rotatably connected to the rotating shaft coaxially with the snap-fit ​​member and is openable and closable connected to the support bracket. The snap-fit ​​member is located above the base.

[0017] In conjunction with the first aspect of this application, in an optional embodiment, the limiting member includes a first locking portion and a second locking portion distributed along the axial direction of the rotation axis, wherein the first locking portion can be locked into the first limiting portion and the second locking portion can be locked into the second limiting portion.

[0018] In conjunction with the first aspect of this application, in an optional embodiment, the latching member is a circular chuck, and the second limiting portion is a first notch provided on the chuck;

[0019] When the support bracket rotates relative to the base, the second locking part of the limiting member engages with the first notch;

[0020] When an external force is applied to the moving member, causing the first locking portion of the limiting member to engage within the first limiting portion, the second locking portion of the limiting member abuts against the arc-shaped edge of the chuck.

[0021] In conjunction with the first aspect of this application, in an alternative embodiment, the door assembly has an opening and closing angle range of 0-90°.

[0022] In conjunction with the first aspect of this application, in an optional embodiment, the locking component further includes:

[0023] The first connector is attached to the bottom of the support bracket;

[0024] The second connector is connected to the first connector;

[0025] An elastic element, one end of which is connected to the second connecting element, and the other end of which is connected to the movable element;

[0026] When an external force is applied to the moving member, the limiting member moves along with the moving member and disengages from the second limiting part;

[0027] When the second limiting part of the snap-fit ​​member rotates to be opposite to the position of the limiting member, the limiting member moves into the second limiting part under the action of the elastic member overcoming the elastic force.

[0028] In conjunction with the first aspect of this application, in an optional embodiment, the locking component further includes:

[0029] A guide member is movably connected to the movable member, and the movable member reciprocates under the guidance of the guide member.

[0030] In conjunction with the first aspect of this application, in an alternative embodiment, the door assembly includes:

[0031] The door bracket is rotatably connected to the rotating shaft and is adapted to the load-bearing bracket;

[0032] A limiting component includes a locking block and a blocking component, wherein the locking block is connected to the door bracket and the blocking component is connected to the support bracket; when the door bracket is closed to the support bracket, the blocking component blocks the locking block; when the door bracket needs to be opened, the blocking component disengages from the locking block.

[0033] The moving component in the loading device provided in this application embodiment can be driven by external force to engage with the limiting component and the locking component, or to be locked at the first limiting part, so that the rotating frame can rotate and be fixed relative to the door stop assembly, or the door stop assembly can rotate and the rotating frame is fixed relative to the base. This loading device, through simple manual operation of the moving component, can not only ensure the mechanical locking of the door stop assembly and the support bracket in the working state, but also realize the simultaneous release of the mechanical locking between the support bracket and the base and the door stop assembly and the support bracket in the stopped working state. This locking component can ensure the mechanical locking of the device in different working states, ensuring the stability and safety of wafer cassette loading and unloading, and also ensuring the cleaning efficiency, cleaning stability, and safety during the wafer cassette cleaning process.

[0034] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0035] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0036] Figure 1 This is a schematic diagram of a wafer cassette cleaning apparatus provided in an embodiment of this application.

[0037] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0038] Figure 3 This is another schematic diagram of the wafer cassette cleaning apparatus provided in the embodiments of this application;

[0039] Figure 4 for Figure 3 Enlarged view of point B in the middle;

[0040] Figure 5 This is another schematic diagram of the wafer cassette cleaning apparatus provided in the embodiments of this application;

[0041] Figure 6 for Figure 5 Enlarged view at point D;

[0042] Figure 7 This is a partial structural schematic diagram of the loading device provided in the embodiments of this application;

[0043] Figure 8 This is a schematic diagram of the locking component and the snap-fit ​​element in the loading device provided in the embodiments of this application;

[0044] Figure 9 A schematic diagram of a portion of the locking assembly and the snap-fit ​​component in the loading device provided in this application embodiment;

[0045] Figure 10 for Figure 3 Enlarged view of point C in the middle.

[0046] Figure label:

[0047] 100. Wafer cell cleaning device;

[0048] 10. Base; 11. First limiting part; 111. Second notch;

[0049] 20. Load-bearing component; 21. Door stop component; 211. Rotating shaft; 212. Door component; 21a. Door bracket; 21b. Limiting component; 21b1. Locking block; 21b2. Blocking component; 21b3. Box body; 21b4. Button; 21b5. Blocking block; 21c. Positioning component; 21c1. Positioning block; 21c2. Insertion hole; 21c3. Positioning pin;

[0050] 22. Support bracket;

[0051] 30. First drive assembly; 31. Motor;

[0052] 40. Locking component; 41. First connecting member; 42. Moving member; 43. Limiting member; 431. First locking part; 432. Second locking part; 44. Second connecting member; 45. Elastic member; 46. Roller; 47. Snap-fit ​​member; 471. Second limiting part; 472. Chuck; 473. First notch;

[0053] 50. Processing facilities;

[0054] 60. Rotating frame. Detailed Implementation

[0055] To make the technical solution and beneficial effects of the present invention more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0056] In the description of this invention, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this invention and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. That is, they should not be construed as limiting this invention.

[0057] In this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0058] In this invention, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0059] In this invention, unless otherwise explicitly defined, the terms "above," "on top of," "over," "above," "below," "below," "below," or "below" for "first feature above second feature" can refer to the first and second features being in direct contact, or to the first and second features being in indirect contact through an intermediate medium. Furthermore, "above," "over," and "below" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0060] Please refer to Figures 1 to 6 This application provides a loading device for installation in a wafer processing apparatus. The wafer processing apparatus also includes a cleaning device and a drying device, which are used to clean and dry the wafer cassettes loaded in the loading device, respectively. The loading device includes a base 10, a support assembly 20, a first drive assembly 30, and a rotating frame 60. The rotating frame 60 is rotatably connected to the base 10. Multiple support assemblies 20 are provided and are fixedly arranged around the rotating frame 60 along its rotation axis. The first drive assembly 30 can drive the rotating frame 60 to rotate relative to the base, thereby causing the multiple support assemblies 20 to rotate, so that the cleaning device and the drying device sequentially clean and dry the wafer cassettes within the support assembly 20.

[0061] Specifically, the base 10 is provided with a first limiting part 11; the bearing assembly 20 is rotatably connected to the base 10. The bearing assembly 20 includes a door stop assembly 21 and a bearing bracket 22 for holding the wafer cassette. The bearing bracket 22 is fixedly connected to the rotating frame 60. The door stop assembly 21 and the bearing bracket 22 are rotatably connected. The door stop assembly 21 can rotate relative to the bearing bracket 22 under the action of external force, so that the door stop assembly 21 can block the opening of the bearing bracket 22 or open the opening of the bearing bracket 22.

[0062] In an optional embodiment, the door stop assembly 21 includes a rotating shaft 211 and a door assembly 212. The rotating shaft 211 is connected to the support bracket 22, and the door assembly 212 is rotatably connected to the rotating shaft 211 and openable and closable connected to the support bracket 22.

[0063] In this embodiment, the rotating shaft 211 is fixed to the side wall of the support bracket 22, forming an immovable support point. One side of the door assembly 212 is sleeved on the outer surface of the rotating shaft 211 via a bearing, allowing the door assembly 212 to rotate around the axis of the rotating shaft 211. For example, when an external force is applied to the door stop assembly 21, the door stop assembly 21 rotates outward relative to the support bracket 22, opening the opening of the support bracket 22, allowing the wafer cassette to be removed from the support bracket 22 or placed inside the support bracket 22. When an external force is applied to the door stop assembly 21, the door stop assembly 21 can rotate inward relative to the support bracket 22, blocking the opening of the support bracket 22 and confining the wafer cassette within the support bracket 22, preventing the support bracket 22 from being thrown out by the centrifugal force generated by rotation when driven by the first drive assembly 30 to rotate with the rotating frame 60.

[0064] The first drive assembly 30 includes a motor 31 and a rotating shaft (not shown in the figure). The rotating shaft is connected to the motor 31 and to the support bracket 22. Under the drive of the motor 31, the rotating shaft rotates around its own axis and drives the support bracket 22 to rotate.

[0065] The embodiments of this application can lock the position of the support bracket 22 through simple manual operation when the door stop assembly 21 is opened, which can significantly improve the loading and unloading efficiency and stability of the wafer box during the loading and unloading process.

[0066] In this embodiment, the loading device further includes a locking component 40, which can respectively enable the rotating frame 60 to rotate and be fixed relative to the door stop component 21, or enable the door stop component 21 to rotate and the rotating frame 60 to be fixed relative to the base 10.

[0067] Specifically, the locking assembly 40 is located between the base 10 and the support bracket 22. The locking assembly 40 includes a first connector 41, a movable member 42, and a limiting member 43. The limiting member 43 is connected to the movable member 42 and can move relative to the first connector 41. The first connector 41 is fixed to the bottom of the support bracket 22. When a force in the first direction is applied to the movable member 42, the limiting member 43 disengages from the base 10, the support bracket 22 rotates with the rotating frame 60, and the locking assembly 40 rotates with the rotating frame 60. When a second force opposite to the force in the first direction is applied to the movable member 42, the limiting member 43 moves with the movable member 42 into the first limiting part 11 to lock the relative position of the base 10 and the support bracket 22.

[0068] In this embodiment, the support bracket 22 is driven to rotate by the first drive assembly 30 during the cleaning process. At this time, the limiting member 43 of the locking assembly 40 remains separated from the base 10, and the locking assembly 40 and the support bracket 22 rotate synchronously. When it is necessary to load or unload the wafer cassette, the operator applies a force to the moving member 42, which moves the limiting member 43. When the limiting member 43 is fully embedded in the first limiting part 11 of the base 10, a rigid constraint is formed between the support bracket 22 and the base 10, eliminating the degree of freedom of relative rotation between the two.

[0069] In an optional embodiment, the locking component 40 further includes a latching member 47 connected to the door component 212. When the moving member 42 is subjected to external force, it can drive the limiting member 43 to latch with the latching member 47, so that the rotating frame 60 can rotate and is fixed relative to the door stop component 21; it can also drive the limiting member 43 to latch with the first limiting part 11, so that the door stop component 21 can rotate and the rotating frame 60 is fixed relative to the base 10.

[0070] Furthermore, the snap-fit ​​member 47 is rotatably connected to the rotating shaft 211. The snap-fit ​​member 47 rotates synchronously with the door assembly 212. The snap-fit ​​member 47 is provided with a second limiting part 471. The second limiting part 471 and the first limiting part 11 are both located on the moving path of the moving member 42. When the support bracket 22 rotates relative to the base 10, the limiting member 43 snaps into the second limiting part 471 to limit the relative position of the door stop assembly 21 and the support bracket 22.

[0071] In this embodiment, when in operation, that is, when the support bracket 22 rotates relative to the base 10 under the driving force of the first drive assembly 30, the limiting member 43 is engaged in the second limiting part 471 of the locking member 47, which can limit the rotation of the locking member 47 relative to the rotation axis 211, and also limit the rotation of the door assembly 212 relative to the rotation axis 211, thereby ensuring the cleaning stability and safety of the wafer cassette located in the support bracket 22 and preventing the wafer cassette from being thrown out from the opening of the support bracket 22.

[0072] When the first drive assembly 30 stops driving and the support bracket 22 and the base 10 are relatively stationary, and the door assembly 212 needs to be opened, the moving part 42 is first manually operated so that the limiting part 43 disengages from the second limiting part 471 and moves into the first limiting part 11, thereby unlocking the mechanical restriction between the door assembly 212 and the rotating shaft 211, and at the same time, the mechanical locking between the support bracket 22 and the base 10 can be achieved.

[0073] This embodiment of the application, through simple manual operation of the moving part 42, not only ensures the mechanical locking of the door assembly 212 and the support bracket 22 in the working state, but also enables the simultaneous release of the mechanical lock between the support bracket 22 and the base 10 in the stopped working state. This locking component 40 ensures the mechanical locking of the device in different working states, guaranteeing the stability and safety of wafer cassette loading and unloading, and simultaneously ensuring the cleaning efficiency, stability, and safety during the wafer cassette cleaning process.

[0074] In an optional embodiment, the first limiting part 11 and the second limiting part 471 are arranged opposite to and adjacent to each other on the moving path of the moving part 42.

[0075] This can be understood as the limiting member 43 moving a short distance with the moving member 42 to switch between being held at the first limiting part 11 or the second limiting part 471. It can also be understood as the limiting member 43 moving without any obstruction from the first limiting part 11 to the second limiting part 471, or from the second limiting part 471 to the first limiting part 11. The limiting member 43 can directly transfer with the moving member 42, thereby greatly reducing the potential movement deviation of the limiting member 43 during movement, thus ensuring the stability and safety of wafer cassette loading and unloading.

[0076] In an optional embodiment, the locking member 47 is positioned higher than the base 10 in the height direction, so the first limiting portion 11 and the second limiting portion 471 are also vertically distributed. The limiting member 43 includes a first locking portion 431 and a second locking portion 432 distributed along the axial direction of the rotation axis 211. The first locking portion 431 can be locked into the first limiting portion 11, and the second locking portion 432 can be locked into the second limiting portion 471.

[0077] In this embodiment, the limiting member 43 is a shaft structure extending along the axial direction of the rotation shaft 211. The limiting member 43 is fitted into the moving member 42 to move synchronously with the moving member 42. The moving member 42 moves along an axial direction perpendicular to the rotation shaft 211 to switch the limiting member 43 between the first limiting part 11 and the second limiting part 471. When the limiting member 43 is engaged with the first limiting part 11, the first locking part 431 of the limiting member 43 engages with the first limiting part 11, while the second locking part 432 of the limiting member 43 moves out of the second limiting part 471. When the revolving door assembly 212 is in place, the second locking part 432 of the limiting member 43 abuts against the arc-shaped edge of the engaging member 47. When the second locking part 432 of the limiting member 43 abuts against the second limiting part 471, the first locking part 431 of the limiting member 43 is located outside the edge of the base 10, that is, the first locking part 431 is disengaged from the base 10.

[0078] In this embodiment, the first locking part 431 and the second locking part 432 of the limiting member 43 are respectively locked to the first limiting part 11 and the second limiting part 471 in different working states, thereby realizing mechanical locking in different working states and ensuring the stability and safety of the device. In addition, the same limiting member 43 can realize mechanical locking of different components in different states, which greatly simplifies the structural complexity of the device.

[0079] In an optional embodiment, the latching member 47 is a circular chuck 472, and the second limiting part 471 is a first notch 473 provided on the chuck 472. When the supporting bracket 22 rotates relative to the base 10, the second latching part 432 of the limiting member 43 latches into the first notch 473; when an external force is applied to the moving member 42, causing the first latching part 431 of the limiting member 43 to latch into the first limiting part 11, and during the opening of the door assembly 212, since the circular chuck 472 rotates synchronously with the door assembly 212, the first notch 473 rotates clockwise, so that the outer edge of the circular chuck 472 always abuts against the second latching part 432.

[0080] In this embodiment, when the first locking portion 431 of the limiting member 43 is engaged within the first limiting portion 11, during the opening of the door assembly 212, the second locking portion 432 of the limiting member 43 abuts against the outer wall of the chuck 472. This prevents the rotating frame from rotating relative to the base during the process of the operator placing or removing wafer cassettes from the support bracket 22 while the door assembly 212 is open, eliminating the need for a separate structure to limit the base and the rotating frame. It can be understood that after the moving member 42 moves the limiting member 43 from the first limiting portion 11 to the second limiting portion 471 under external force, the rotating door assembly 212 allows the second locking portion 432 of the limiting member 43 to abut against the outer wall of the chuck 472. The contact force between the second locking portion 432 and the outer wall of the chuck 472 restricts the moving member 42 to maintain its current position, thereby freeing the operator's hands and reducing operational inconvenience.

[0081] In an optional embodiment, the first limiting part 11 is the second notch 111 provided on the base 10. The manufacturing process of the first notch 473 and the second notch 111 is simple and can meet the requirements, reducing the manufacturing cost and structural complexity of the device.

[0082] The shapes of the first notch 473 and the second notch 111 are adapted to the limiting member 43. The depths of the first notch 473 and the second notch 111 can be set according to requirements, based on the ability to follow the moving member 42 to enter and exit easily, and to achieve a snap-fit ​​effect. This application embodiment does not make specific limitations.

[0083] Both the first notch 473 and the second notch 111 are located on the moving path of the moving part 42, and the first notch 473 and the second notch 111 are set close to each other, which can reduce the problem of moving deviation. It can be understood that the limiting part 43 can be locked into the first notch 473 or the second notch 111 during the process of moving with the moving part 42.

[0084] In one optional embodiment, the door assembly 212 has an opening angle range of 0-90°. This wide opening angle range prevents the door assembly 212 from affecting the loading and unloading of wafer cassettes in adjacent support brackets 22, ensuring that wafer cassettes in multiple support brackets 22 on the rotating frame 60 can be loaded and unloaded simultaneously. Preferably, the door assembly 212 has an opening angle range of 0-75° to further ensure the stability and safety of loading and unloading wafer cassettes in multiple support brackets 22.

[0085] In one alternative embodiment, please refer to Figures 7 to 9 The locking assembly 40 also includes a second connector 44 and an elastic member 45. The second connector 44 is connected to the first connector 41. One end of the elastic member 45 is connected to the second connector 44, and the other end is connected to the moving member 42. When an external force is applied to the moving member 42, the limiting member 43 moves with the moving member 42 and disengages from the second limiting part 471. When the second limiting part 471 of the latching member 47 rotates to be opposite to the position of the limiting member 43, the limiting member 43 moves into the second limiting part 471 under the action of the elastic member 45 overcoming the elastic force.

[0086] The elastic element 45 refers to a mechanical element capable of producing elastic deformation, which can be implemented by a compression spring or a tension spring. Its function is to drive the moving element 42 to reset by storing and releasing elastic force.

[0087] When an external force is applied to the moving member 42, the moving member 42 drives the limiting member 43 to move along the guide path, causing the limiting member 43 to disengage from the second limiting part 471 of the latching member 47. At this time, the elastic member 45 deforms due to stretching or compression and stores elastic force. When the latching member 47 rotates to the point where the second limiting part 471 is aligned with the limiting member 43, the external force disappears, the elastic member 45 releases the stored elastic force and drives the moving member 42 to move in the opposite direction, forcing the limiting member 43 to accurately enter the second limiting part 471, thereby automatically completing the reset action of the limiting member 43.

[0088] This application can ensure that the limiting member 43 of the door stop assembly 21 automatically resets to the second limiting part 471 during the opening and closing process, eliminating the need for manual intervention, improving the reliability of the position locking between the door stop assembly 21 and the support bracket 22, and preventing the support bracket 22 from rotating unexpectedly due to the failure of the limiting member during the wafer cassette handling process.

[0089] In an optional embodiment, the locking component 40 further includes a guide member, which is movably connected to the movable member 42, and the movable member 42 reciprocates under the guidance of the guide member.

[0090] The guide component is a structural part that guides the movement trajectory of the moving part 42, thereby improving the positioning accuracy between the limiting part 43 and the first limiting part 11 and the second limiting part 471, thus enhancing the locking reliability of the relative position between the base 10 and the support bracket 22. The stable movement of the moving part 42 under the guidance also reduces the risk of mechanical wear or component damage caused by movement deviation during operation.

[0091] In one alternative embodiment, please refer to Figure 9 The guide is a plurality of rollers 46 rotatably connected to the second connector 44. The plurality of rollers 46 are in contact with the moving part 42 and are located on both sides of the moving part 42.

[0092] The roller 46 can be a cylindrical component that rotates around its own axis. Specifically, it can be implemented using a bearing or roller 46 structure to reduce the frictional resistance when the moving part 42 moves through rolling contact.

[0093] In another alternative embodiment, the guide is a slide rail (not shown in the figure) provided on the surface of the second connector 44, and the moving member 42 is provided with a slider adapted to the slide rail, and the slider is slidably connected to the slide rail.

[0094] In one alternative embodiment, please refer to Figure 2 and Figure 10 The door assembly 212 includes a door bracket 21a, a positioning assembly 21c, and a limiting assembly 21b. The positioning assembly 21c includes a positioning block 21c1 and a positioning pin 21c3. The positioning block 21c1 is connected to the support bracket 22. The positioning block 21c1 is provided with a plurality of insertion holes 21c2 that are adapted to the positioning pin 21c3. The positioning pin 21c3 is connected to the door bracket 21a. The door bracket 21a can rotate relative to the support bracket 22. When the door bracket 21a is closed to the support bracket 22, the positioning pin 21c3 is inserted into the insertion hole 21c2 to ensure the relative positional accuracy between the door bracket 21a and the support.

[0095] The limiting component 21b includes a locking block 21b1 and a blocking component 21b2. The locking block 21b1 is connected to the door bracket 21a. The blocking component 21b2 includes a housing 21b3, a button 21b4, and a blocking block 21b5. The housing 21b3 is connected to the support bracket 22. The button 21b4 is movable relative to the housing 21b3. The blocking block 21b5 is connected to the button 21b4. When the door bracket 21a is closed to the support bracket 22, pressing the button 21b4 causes the blocking block 21b5 to move to a position that matches the locking block 21b1. That is, the blocking block 21b5 can prevent the door bracket 21a from opening, thus locking the door bracket 21a and its relative position to the support bracket 22. When it is necessary to open the door bracket 21a, pulling up the button 21b4 causes the blocking block 21b5 to disengage from the locking block 21b1, thereby enabling the door bracket 21a to open.

[0096] In this embodiment, the limiting component 21b and the second locking part 432 of the limiting component 43 using the locking component 47 mentioned above can both restrict the opening of the door bracket 21a. In the working state, the door component 212 is subjected to centrifugal force, and the double protection can further ensure the safety and stability of the wafer cell in the support bracket 22.

[0097] This application provides a wafer cassette cleaning apparatus 100, which includes a loading device and a processing mechanism 50. The processing mechanism 50 is disposed adjacent to the rotation axis, meaning it is located at the center of a support bracket 22. The processing mechanism 50 includes at least the aforementioned cleaning and drying devices. Multiple cleaning devices are distributed along the axial direction of the rotation axis. During the rotation of the support bracket 22, the multiple cleaning devices rinse the wafer cassettes located within the support bracket 22. The drying device is used to dry the multiple wafer cassettes on the support bracket 22. The processing mechanism 50 also includes other components for cleaning the wafer cassettes.

[0098] This embodiment ensures the reliable positioning of the support bracket 22 during wafer cassette loading and unloading, avoiding operational risks caused by accidental equipment rotation, while maintaining the normal rotational function of the support bracket 22 during cleaning and drying stages. The device simplifies the operation process through a mechanical interlock structure, requiring only a single point of force to complete state switching, significantly improving wafer cassette handling efficiency and operational safety.

[0099] It should be understood that the above embodiments are exemplary and not intended to encompass all possible implementations. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A loading device, characterized in that, The loading device includes: The base (10) is provided with a first limiting part (11); The rotating frame (60) can be driven by the first drive assembly (30) to rotate relative to the base (10); The load-bearing component (20) includes a door stop component (21) and a load-bearing bracket (22). The load-bearing bracket (22) is fixedly installed on the rotating frame (60), and the door stop component (21) is rotatably connected to the load-bearing bracket (22). The locking component (40), connected to the bottom of the bearing component (20), includes a movable component (42), a limiting component (43) connected to the movable component (42), and a snap-fit ​​component (47) connected to the door stop component (21). Wherein, the moving part (42) is subjected to external force to drive the limiting part (43) to engage with the locking part (47) or to engage with the first limiting part (11), so that the rotating frame (60) can rotate and be fixed relative to the door stop assembly (21) or the door stop assembly (21) can rotate and the rotating frame (60) is fixed relative to the base (10); The snap-fit ​​member (47) is provided with a second limiting part (471). The second limiting part (471) and the first limiting part (11) are both located on the moving path of the moving member (42). When the moving member (42) is subjected to external force, it can drive the limiting member (43) to snap onto the second limiting part (471). The door stop assembly (21) includes a rotating shaft (211) connected to the support bracket (22). The limiting member (43) includes a first locking part (431) and a second locking part (432) distributed along the axial direction of the rotating shaft (211). The first locking part (431) can be locked into the first limiting part (11), and the second locking part (432) can be locked into the second limiting part (471). The latching member (47) is a circular chuck (472), and the second limiting part (471) is a first notch (473) provided on the chuck (472).

2. The loading device according to claim 1, characterized in that, On the movement path of the moving member (42), the first limiting part (11) and the second limiting part (471) are arranged opposite to each other and adjacent to each other.

3. The loading device according to claim 1, characterized in that, The door stop assembly (21) also includes: The door assembly (212) is rotatably connected to the rotating shaft (211) on the same axis as the snap fastener (47) and can be opened and closed connected to the support bracket (22). The snap fastener (47) is located above the base (10).

4. The loading device according to claim 1, characterized in that, When the support bracket (22) rotates relative to the base (10), the second locking part (432) of the limiting member (43) engages in the first notch (473); When the support bracket is fixed relative to the base, when the first locking part (431) of the limiting member (43) is locked in the first limiting part (11), the second locking part (432) of the limiting member (43) abuts against the arc edge of the chuck (472).

5. The loading device according to claim 3, characterized in that, The door assembly (212) has an opening angle range of 0-90°.

6. The loading device according to claim 2, characterized in that, The locking component (40) further includes: The first connector (41) is connected to the bottom of the support bracket (22); The second connector (44) is connected to the first connector (41). An elastic element (45) has one end connected to the second connecting element (44) and the other end connected to the moving element (42); When an external force is applied to the moving member (42), the limiting member (43) moves with the moving member (42) and disengages from the second limiting part (471). When the second limiting part (471) of the snap-fit ​​member (47) rotates to a position opposite to the limiting member (43), the limiting member (43) moves into the second limiting part (471) under the action of the elastic member (45) overcoming the elastic force.

7. The loading device according to claim 1, characterized in that, The locking component (40) further includes: The guide is movably connected to the moving part (42), and the moving part (42) moves back and forth under the guidance of the guide.

8. The loading device according to claim 3, characterized in that, The door assembly (212) includes: The door bracket (21a) is rotatably connected to the rotating shaft (211) and is adapted to the bearing bracket (22); The limiting component (21b) includes a locking block (21b1) and a blocking component (21b2). The locking block (21b1) is connected to the door bracket (21a), and the blocking component (21b2) is connected to the support bracket (22). When the door bracket (21a) is closed to the support bracket (22), the blocking component (21b2) blocks the locking block (21b1). When the door bracket (21a) needs to be opened, the blocking component (21b2) disengages from the locking block (21b1).

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