一种半片滚轮剔除机构

By using a half-wafer roller rejection mechanism to instantly rotate a magnetic linkage component to reject defective silicon wafers, the problem of low silicon wafer rejection efficiency in existing technologies is solved, and non-destructive and efficient silicon wafer transportation is achieved.

CN121155939BActive Publication Date: 2026-07-17NANJING ZHUOSHENG AUTOMATION EQUIP CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING ZHUOSHENG AUTOMATION EQUIP CO LTD
Filing Date
2025-09-04
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing silicon wafer rejection mechanisms have difficulty efficiently picking up moving silicon wafers when stationary, resulting in low production efficiency. Furthermore, the silicon wafer transport speed needs to be reduced to avoid breakage, which affects transport efficiency.

Method used

The half-wafer roller rejection mechanism includes a load-bearing component, a drive gear, and a magnetic linkage component. It achieves instantaneous rotation rejection of defective silicon wafers through magnetic linkage, avoiding deceleration or stagnation and maintaining transportation efficiency.

Benefits of technology

This enables the non-destructive removal of defective silicon wafers during transportation, maintains the efficient operation of the transportation mechanism, and avoids a decrease in production efficiency due to speed adjustments.

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Abstract

本发明公开了一种半片滚轮剔除机构,其承载组件、驱动齿轮和磁联动组件,所述承载组件由载轮和连接条相交替链接而成,驱动齿轮与连接条啮合,磁联动组件配合于承载组件的底部,当载轮移动时,至少与一组载轮磁性联动。本发明通过运输过程中出现半片(硅片)有不合格的产品时,不合格产品运输到磁联动组件正下方时,磁联动组件快速转动一瞬时间,通过磁性联动让不合格产品承载的载轮同步转动一次,让不合格的产品沿着承载组件垂直方向剔除承载组件,承载组件无需减速甚至停滞的前提下实现无损不干扰运输的剔除方式。
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