A copper sputtering target warping degree automatic correction and detection device

Abstract

The present application relates to sputtering target material processing technical field, propose a kind of copper sputtering target material warping degree automatic correction and detection device, including correction platform and the warping degree detector of warping degree detection of target material placed on correction platform, the top of correction platform is fixed with top plate by rectangular distribution's guide column;Support frame in the present application is lifted under the drive of first oil cylinder, adjusts the contact pressure of rolling mechanism and target material, and second oil cylinder drives rolling mechanism to move along horizontal direction, so that roller rolls on target material surface, partial warping is dispersed as continuous rolling stress, avoid target material damage caused by single point excessive stress, the roller of rolling mechanism is elastically connected with crossbeam by spring, can adapt to the different of target material maximum warping degree position, realize the correction of target material, the present application, by lifting, rolling mechanism of horizontal movement carries out continuous rolling rolling to target material, realize from " single point press down " to " multiple point rolling rolling ", improve correction uniformity.

Description

Technical Field

[0001] This invention relates to the field of sputtering target processing technology, specifically to an automatic correction and detection device for the warpage of copper sputtering targets. Background Technology

[0002] Sputtering targets are typically bonded to a backing plate using a welding process. The backing plate is usually made of oxygen-free copper, while the target blank can be made of various materials, such as high-purity aluminum, molybdenum, copper, titanium, and ITO (indium tin oxide). Due to the difference in thermal expansion coefficients between the target blank and the backing plate, the target will warp to varying degrees during the welding heating process. Depending on product requirements, the warped target caused by welding deformation needs to be corrected to ensure that the warping meets the specified requirements.

[0003] A search revealed that patent CN110631502B discloses a device for automatic correction and measurement of sputtering target warpage. The correction platform is mounted above the equipment base. The main hydraulic cylinder system includes a main hydraulic cylinder bracket and a main hydraulic cylinder slidably mounted on the bracket. The main hydraulic cylinder bracket is mounted on the equipment base via a first motion drive mechanism. The target ejection hydraulic cylinder system includes two or more target ejection cylinders, each mounted on the equipment base via a second motion drive mechanism. A groove is provided on the upper surface of the correction platform corresponding to each target ejection cylinder for the top of the cylinder to extend and slide. A target warpage laser measuring instrument is mounted on the side of the main hydraulic cylinder and below the correction platform. This invention not only has a simple structure, high efficiency in target warpage correction and measurement, and strong safety, but also achieves high-precision automatic correction and detection of target warpage, making it highly practical.

[0004] However, existing technologies still have the following problems: Existing technology uses a main hydraulic cylinder to apply vertical pressure from above to the highest point of the target material's warping, combined with the support of the hydraulic cylinder below as the target material pushes out, to achieve local deformation correction (similar to "press-and-correct"). This method relies on "forced plastic deformation correction" through single-point pressure, which easily leads to stress concentration and results in poor uniformity of correction for large-area or asymmetrically warped target materials. Existing technologies do not have a dedicated edge correction structure and only support the target from below using an ejector cylinder. During the correction process, when the target changes from warped to flat, the length of the target on the correction platform will inevitably increase. Therefore, forced correction will cause secondary deformation of the edge. Summary of the Invention

[0005] This invention proposes an automatic correction and detection device for the warpage of copper sputtering targets, which solves the problems of poor uniformity in correction of large-area or asymmetric warped targets and secondary deformation of the target edges in the prior art.

[0006] The technical solution of the present invention is as follows: An automatic correction and detection device for the warpage of copper sputtering targets includes a correction platform and a warpage measuring instrument for detecting the warpage of targets placed on the correction platform. A top plate is fixed above the correction platform by guide columns distributed in a rectangular pattern. First hydraulic cylinders are symmetrically fixed on both sides of the top plate. A support frame that moves up and down under the drive of the first hydraulic cylinders is provided below the top plate. A second hydraulic cylinder is fixed on one side of the support frame. A rolling mechanism that moves horizontally under the drive of the second hydraulic cylinder to roll and correct the warped target is provided in the middle of the support frame. Linear guide rails are symmetrically arranged below the correction platform. A warped edge support mechanism that adaptively supports the warped edge of the target under the drive of the linear guide rails is symmetrically arranged on the platform surface.

[0007] Preferably, the support frame includes two lifting seats, which are slidably connected to guide columns on both sides of the calibration platform, and a horizontally arranged guide rod is fixed between the two lifting seats.

[0008] Preferably, the rolling mechanism includes a crossbeam and a first wheel frame and a second wheel frame symmetrically distributed on both sides of the crossbeam. The crossbeam is fixed to the piston rod end of the second oil cylinder. The crossbeam, the first wheel frame, and the second wheel frame are all slidably connected to the guide rod. The crossbeam, the first wheel frame, and the second wheel frame are all elastically connected by springs. The bottom of the first wheel frame and the second wheel frame are rotatably connected to rollers.

[0009] Preferably, the rolling mechanism further includes a drive component for driving the first wheel frame and the second wheel frame to move relative to each other.

[0010] Preferably, the driving component includes a dual-axis motor, which is fixed at the middle position of the crossbeam. The two output ends of the dual-axis motor are fixed with symmetrical threaded rods, and the threaded rods are arranged parallel to the guide rods. A spline sleeve is rotatably connected to the outer side of the threaded rod away from the dual-axis motor. The spline sleeve is slidably connected to the lifting seat. The threaded rods at both ends of the dual-axis motor are threadedly connected to the first wheel frame and the second wheel frame, respectively.

[0011] Preferably, the warpage measuring instrument includes a first target warpage laser measuring instrument and a second target warpage laser measuring instrument. The first target warpage laser measuring instrument is fixed at the center of the bottom surface of the crossbeam, and the second target warpage laser measuring instrument is located at the center below the calibration platform. The calibration platform is provided with a through hole directly above the second target warpage laser measuring instrument.

[0012] Preferably, the edge support mechanism includes a slide, a support plate movably mounted on the slide, and a tension spring elastically connecting the slide and the support plate.

[0013] Preferably, the slide block is fixed on the slider of the linear guide rail, the top of the calibration platform is provided with a slide groove that is slidably connected to the slide block along its length direction, the two sides of the slide block are provided with waist-shaped grooves in the same direction as the slide groove and upward semi-opening slots, and a hanging rod is fixed on the inner side of the slide block.

[0014] Preferably, the support plate has an L-shaped structure, and the two sides of the support plate are fixed with a first limiting rod located in the waist-shaped groove and a second limiting rod that can be locked in the slot.

[0015] Preferably, the bottom of the support plate has a through groove, the second limiting rod passes through the through groove, one end of the tension spring is fixed to the hanging rod, and the other end of the tension spring is fixed to the second limiting rod through the through groove.

[0016] The beneficial effects of this invention are as follows: In this invention, the support frame is raised and lowered under the drive of the first hydraulic cylinder to adjust the contact pressure between the rolling mechanism and the target material. The second hydraulic cylinder drives the rolling mechanism to move horizontally, causing the rollers to roll on the surface of the target material. This disperses the local warping into continuous rolling stress, avoiding damage to the target material caused by excessive force at a single point. The rollers of the rolling mechanism are elastically connected to the crossbeam through springs, which can adapt to different positions of the maximum warping of the target material and achieve the correction of the target material. This invention uses a rolling mechanism that can be raised, lowered, and moved horizontally to continuously roll and press the target material, realizing the transition from "single-point pressing" to "multi-point rolling and pressing", thus improving the uniformity of correction. In this invention, the slide block slides along the calibration platform via a linear guide rail, and can move closer to or further away from the edge of the target material. When the edge of the target material warps, the support plate is resisted by the edge of the target material and rotates around the first limit rod as an axis, while stretching the tension spring. This keeps the surface of the support plate in contact with the warped edge of the target material, similar to a "following clamp". As the rolling mechanism rolls, the edge of the target material gradually flattens. The rebound force of the tension spring drives the support plate to slide through the waist-shaped groove, always maintaining support for the edge. This invention is specifically designed to adaptively constrain the warping of the target material edge, preventing the edge from warping up again during the calibration process. In this invention, the first laser measuring instrument for the warpage of the target material is fixed at the bottom of the crossbeam of the rolling mechanism and moves synchronously with the rolling mechanism. It can measure the warpage at the current rolling position in real time and directly feed it back to the control system to adjust the rolling pressure. The second laser measuring instrument is located below the calibration platform and corresponds to the through hole, forming an upper and lower response with the first laser. It monitors the warpage changes before and after rolling respectively, realizing closed-loop control of "calibration-measurement-adjustment". Attached Figure Description

[0017] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0018] Figure 1This is a schematic diagram of the overall structure of an automatic correction and detection device for the warpage of a copper sputtering target proposed in this invention; Figure 2 This is a schematic diagram of the overall front view of the automatic correction and detection device for the warpage of a copper sputtering target proposed in this invention; Figure 3 This is a schematic diagram of the rolling mechanism proposed in this invention; Figure 4 This is a schematic diagram of the rolling mechanism proposed in this invention from another perspective; Figure 5 This is a schematic diagram of the edge support mechanism proposed in this invention; Figure 6 This is a schematic diagram of the edge support mechanism proposed in the present invention in its initial state; Figure 7 This is a schematic diagram showing the warped edge support mechanism proposed in this invention in contact with the warped edge of the target material. Figure 8 This is a schematic diagram showing the support mechanism for the warped edge of the target material after it has been supported by the edge support mechanism proposed in this invention. In the diagram: 1. Correction platform; 11. Through hole; 2. Guide column; 3. Top plate; 4. First hydraulic cylinder; 5. Support frame; 51. Lifting seat; 52. Guide rod; 6. Rolling mechanism; 61. Crossbeam; 62. First wheel frame; 63. Second wheel frame; 64. Roller; 65. Dual-axis motor; 66. Threaded rod; 67. Spline sleeve; 68. Spring; 7. Warping edge support mechanism; 71. Slide seat; 711. Waist-shaped groove; 712. Bayonet; 713. Hanging rod; 72. Support plate; 721. First limit rod; 722. Second limit rod; 723. Through groove; 73. Tension spring; 8. Linear guide rail; 9. Warping degree measuring instrument; 10. Second hydraulic cylinder. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0020] Please see Figure 1 and Figure 2This invention provides a technical solution: an automatic correction and detection device for the warpage of copper sputtering targets, including a correction platform 1 and a warpage measuring instrument 9 for detecting the warpage of the target placed on the correction platform 1. A top plate 3 is fixed above the correction platform 1 by rectangularly distributed guide columns 2. First hydraulic cylinders 4 are symmetrically fixed on both sides of the top plate 3. A support frame 5 is provided below the top plate 3, which moves up and down under the drive of the first hydraulic cylinders 4. A second hydraulic cylinder 10 is fixed on one side of the support frame 5. A rolling mechanism 6 is provided in the middle of the support frame 5, which moves horizontally under the drive of the second hydraulic cylinder 10 to roll and correct the warped target. A linear guide rail 8 is symmetrically arranged below the correction platform 1. A warped edge support mechanism 7 is symmetrically arranged on the table surface of the correction platform 1, which adaptively supports the warped edge of the target under the drive of the linear guide rail 8.

[0021] Furthermore, the support frame 5 includes two lifting seats 51, which are slidably connected to the guide columns 2 on both sides of the calibration platform 1. A horizontally arranged guide rod 52 is fixed between the two lifting seats 51. The support frame 5 is raised and lowered under the drive of the first oil cylinder 4 to adjust the contact pressure between the rolling mechanism 6 and the target material.

[0022] Please see Figure 3 and Figure 4 The rolling mechanism 6 includes a crossbeam 61 and a first wheel frame 62 and a second wheel frame 63 symmetrically distributed on both sides of the crossbeam 61. The crossbeam 61 is fixed to the piston rod end of the second cylinder 10. The crossbeam 61, the first wheel frame 62 and the second wheel frame 63 are all slidably connected to the guide rod 52. The crossbeam 61 is elastically connected to the first wheel frame 62 and the second wheel frame 63 through springs 68. Rollers 64 are rotatably connected to the bottom of the first wheel frame 62 and the second wheel frame 63. The second cylinder 10 drives the rolling mechanism 6 to move in the horizontal direction, so that the rollers 64 roll on the surface of the target material, dispersing the local warping into continuous rolling stress, avoiding damage to the target material caused by excessive force at a single point. The rollers 64 of the rolling mechanism are elastically connected to the crossbeam 61 through springs 68, which can adapt to different positions of the maximum warping of the target material and realize the correction of the target material.

[0023] Furthermore, the rolling mechanism 6 also includes a driving component for driving the first wheel frame 62 and the second wheel frame 63 to move relative to each other. The driving component includes a dual-axis motor 65, which is fixed at the middle position of the crossbeam 61. Symmetrical threaded rods 66 are fixed at the two output ends of the dual-axis motor 65, and the threaded rods 66 are arranged parallel to the guide rod 52. A spline sleeve 67 is rotatably connected to the outer side of the end of the threaded rod 66 away from the dual-axis motor 65. The spline sleeve 67 is slidably connected to the lifting seat 51. The threaded rods 66 at both ends of the dual-axis motor 65 are threadedly connected to the first wheel frame 62 and the second wheel frame 63, respectively.

[0024] In a preferred embodiment, the warpage measuring instrument 9 includes a first target warpage laser measuring instrument and a second target warpage laser measuring instrument. The first target warpage laser measuring instrument is fixed at the center of the bottom surface of the crossbeam 61, and the second target warpage laser measuring instrument is located at the center below the calibration platform 1. The calibration platform 1 is provided with a through hole 11 directly above the second target warpage laser measuring instrument.

[0025] Please see Figure 5 , Figure 6 , Figure 7 and Figure 8 The edge-supporting mechanism 7 includes a slide 71, a support plate 72 movably mounted on the slide 71, and a tension spring 73 elastically connecting the slide 71 and the support plate 72. The slide 71 is fixed to the slider of the linear guide rail 8. The top of the correction platform 1 has a groove along its length that is slidably connected to the slide 71. The two sides of the slide 71 have waist-shaped grooves 711 aligned with the direction of the groove and upwardly semi-opening slots 712. A hanging rod 713 is fixed inside the slide 71. The support plate 72 has an L-shaped structure. The two sides of the support plate 72 are fixed with a first limiting rod 721 that is limited within the waist-shaped groove 711 and a second limiting rod 722 that can be locked within the slot 712. The bottom of the support plate 72 has an opening. There is a through groove 723, through which the second limiting rod 722 passes. One end of the tension spring 73 is fixed to the hanging rod 713, and the other end of the tension spring 73 is fixed to the second limiting rod 722 through the through groove 723. The slide block 71 slides along the calibration platform 1 through the linear guide rail 8, and can move closer to or further away from the edge of the target material. When the edge of the target material warps, the support plate 72 is resisted by the edge of the target material and rotates around the first limiting rod 721 as the axis, while stretching the tension spring 73, so that the surface of the support plate 72 always fits the warped edge of the target material, similar to "following clamping". As the rolling mechanism 6 rolls, the edge of the target material gradually flattens. The rebound force of the tension spring 73 drives the support plate 72 to slide through the waist-shaped groove 711, always maintaining support for the edge of the target material.

[0026] The working principle and usage process of this invention are as follows: During use, the target material to be calibrated is placed on the calibration platform 1, and the centerline of the target material is positioned close to the axis along the length direction of the calibration platform 1. Then, the reinforcing plates 7 are driven to move closer to the target material by the synchronous operation of the 8 on both sides below the calibration platform 1. Initially, the 72 on the through hole 71 is in the position... Figure 6 As shown, due to the upward arching of the middle of the target, there is a certain angle between the edge end face of the target and the table surface of the correction platform 1. Therefore, when the through hole 71 continues to move closer to the target, 72 can start to stretch 73 under the obstruction of the edge of the target and rotate outward adaptively with 721 as the center until the plate surface of 72 fits with the end face of the target in the warped state. Then 10 starts to drive the second fastener 6 to move horizontally. During the movement, the first target warp laser measuring instrument at the bottom of 61 detects the warp at different positions along the length of the target in real time. In the initial state, 64 on 62 and 63 is at the position where the axis coincides. Under the adjustment of 10, 64 is at the position where the target warp is at its maximum. After the adjustment is completed, the positioning pin 4 starts to work and adjusts the pressing height according to the data measured by the laser measuring instrument of the first target material warp. Then, 64 presses down the position of the target material with the maximum warp to the horizontal. Then, 65 in the middle position of 61 starts to work, driving 66 to rotate. The thread action of 66, 62, and 63 drives 62 and 63 to move outward in a synchronous manner until one side of 64 touches 72. At this time, the position of 64 on that side no longer changes, while the other side of 64 continues to move to the opposite side until it touches 72 on the opposite side. When the target material is rolled by the relative motion of 64 on 62 and 63, the warped edge of the target material is gradually flattened. 72, through the sliding limit of 721 and 711 and the pulling force of 73, adapts to the width change of the flattened target material on the correction platform 1, thereby supporting the warped edge of the target material to be flattened. 65 reciprocates to drive 64 on 62 and 63 to continuously roll the target material, and with the real-time detection of the second target material warp laser measuring instrument, until the warp of the target material meets the production requirements.

[0027] The technological innovation of this invention is achieved through three major innovations: "multi-point rolling compaction instead of single-point pressing", "edge adaptive support", and "real-time linkage of measurement and correction". These innovations solve the shortcomings of existing patents in terms of uniformity of large-area target material correction, edge deformation control, and dynamic accuracy feedback. It is especially suitable for materials such as copper sputtering targets that have high requirements for surface flatness and are easily damaged by rigid correction, significantly improving correction efficiency and finished product qualification rate.

[0028] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An automatic correction and detection device for the warpage of a copper sputtering target, comprising a correction platform (1) and a warpage measuring instrument (9) for detecting the warpage of the target placed on the correction platform (1), characterized in that, The top plate (3) is fixed above the correction platform (1) by rectangular guide columns (2), and the top plate (3) is symmetrically fixed with first oil cylinders (4) on both sides. The bottom of the top plate (3) is provided with a support frame (5) that moves up and down under the drive of the first oil cylinders (4). The support frame (5) includes two lifting seats (51), which are slidably connected to the guide columns (2) on both sides of the correction platform (1), and a horizontally arranged guide rod (52) is fixed between the two lifting seats (51). A second hydraulic cylinder (10) is fixed to one side of the support frame (5). A rolling mechanism (6) is provided in the middle of the support frame (5) to roll and correct the warped target material by moving horizontally under the drive of the second hydraulic cylinder (10). The rolling mechanism (6) includes a crossbeam (61) and a first wheel frame (62) and a second wheel frame (63) symmetrically distributed on both sides of the crossbeam (61). The crossbeam (61) is fixed to the piston rod end of the second hydraulic cylinder (10). The crossbeam (61), the first wheel frame (62) and the second wheel frame (63) are all slidably connected to the guide rod (52). The crossbeam (61) is elastically connected to the first wheel frame (62) and the second wheel frame (63) by springs (68). The first wheel frame (62) and the second wheel frame (63) are elastically connected by springs (68). Rollers (64) are rotatably connected to the bottom of each of the rollers (63); the rolling mechanism (6) also includes a driving component for driving the first wheel frame (62) and the second wheel frame (63) to move relative to each other; the driving component includes a dual-axis motor (65), the dual-axis motor (65) is fixed at the middle position of the crossbeam (61), the two output ends of the dual-axis motor (65) are fixed with symmetrical threaded rods (66), and the threaded rods (66) are arranged parallel to the guide rod (52). A spline sleeve (67) is rotatably connected to the outer side of the end of the threaded rod (66) away from the dual-axis motor (65), and the spline sleeve (67) is slidably connected to the lifting seat (51). The threaded rods (66) at both ends of the dual-axis motor (65) are threadedly connected to the first wheel frame (62) and the second wheel frame (63) respectively. A linear guide rail (8) is symmetrically arranged below the calibration platform (1), and a warping support mechanism (7) is symmetrically arranged on the table surface of the calibration platform (1) to adaptively support the warped edge of the target material under the drive of the linear guide rail (8); the warping support mechanism (7) includes a slide (71), a support plate (72) movably arranged on the slide (71), and a tension spring (73) elastically connecting the slide (71) and the support plate (72); the support plate (72) has an L-shaped structure.

2. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 1, characterized in that, The warpage measuring instrument (9) includes a first target warpage laser measuring instrument and a second target warpage laser measuring instrument. The first target warpage laser measuring instrument is fixed at the middle position of the bottom surface of the crossbeam (61). The second target warpage laser measuring instrument is located at the center position below the calibration platform (1). The calibration platform (1) is provided with a through hole (11) directly above the second target warpage laser measuring instrument.

3. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 1, characterized in that, The slide block (71) is fixed on the slider of the linear guide rail (8). The top of the calibration platform (1) is provided with a sliding groove that is slidably connected to the slide block (71) along its length direction. The two sides of the slide block (71) are provided with waist-shaped grooves (711) that are consistent with the direction of the sliding groove, and a half-opening buckle (712). A hanging rod (713) is fixed inside the slide block (71).

4. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 3, characterized in that, The support plate (72) has a first limiting rod (721) fixed on both sides within the waist-shaped groove (711) and a second limiting rod (722) that can be locked in the slot (712).

5. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 4, characterized in that, The bottom of the support plate (72) is provided with a through groove (723), the second limiting rod (722) passes through the through groove (723), one end of the tension spring (73) is fixed to the hanging rod (713), and the other end of the tension spring (73) is fixed to the second limiting rod (722) through the through groove (723).

Images