电子束发射装置、清洗装置、质谱仪、工作方法及质谱系统
By combining an electron beam emitter and a vacuum pump, the problems of low cleaning efficiency and large space occupation of the ion source in mass spectrometers are solved, achieving efficient and rapid ion source cleaning and improving the overall performance of the mass spectrometer.
CN121171875BActive Publication Date: 2026-07-17ZYBIO INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZYBIO INC
- Filing Date
- 2024-06-11
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing mass spectrometer ion source cleaning technologies are inefficient and the cleaning devices occupy a large space, making it difficult to meet the needs of efficient cleaning and space utilization.
Method used
An electron beam emitting device, including a filament and a flow guide, is used to clean the ion source with a high-energy electron beam. Combined with a vacuum pump, contaminants are quickly removed, achieving highly efficient cleaning.
Benefits of technology
It achieves efficient and rapid ion source cleaning, reduces space occupation, improves cleaning efficiency and space utilization, and ensures the detection quality of the mass spectrometer.
✦ Generated by Eureka AI based on patent content.
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Figure CN121171875B_ABST
Abstract
本发明属于质谱仪及其周边配套设备技术领域，特别是涉及一种电子束发射装置、清洗装置、质谱仪及工作方法。该电子束发射装置包括电子束发射组件和绝缘座，电子束发射组件支撑安装在绝缘座上，电子束发射组件包括电源连接件、灯丝和导流罩；灯丝与电源连接件连接以在电源连接件通电时产生电子束；导流罩具有第一开口，导流罩罩住灯丝，并在电源连接件通电时形成适于引导电子束从第一开口射出的电场。灯丝能够产生高能量密度的电子束，达到清洁目的，导流罩能够引导电子束沿着预设路径射出以便电子束作用于指定目标物，电子束的方向性好，有利于提高控制精度；灯丝和导流罩相互配合既能保证清洁效果，又有利于简化结构，减小占用空间。
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