Glass substrate air-floating double-side polishing machine and polishing process thereof

Abstract

This invention discloses a glass substrate air-floating double-sided polishing machine, comprising: two support plates, a first driving mechanism, a second driving mechanism, and a third driving mechanism. The two support plates are symmetrically distributed vertically, and flexible polishing pads are connected to the opposite end faces of the two support plates. A retractable airbag is formed between the flexible polishing pad and the support plate. Each support plate is provided with air holes communicating with the retractable airbag for inflating or deflating the retractable airbag. When the retractable airbag is inflated and in the open state, this invention achieves flexible contact between the flexible polishing pad and the glass substrate through the retractable airbag, effectively avoiding damage to the glass surface caused by hard contact. The first and second driving mechanisms drive the upper and lower support plates to rotate, respectively, and cooperate with the third driving mechanism to move the upper support plate along the X, Y, and Z axes, enabling polishing of various complex trajectories, improving polishing uniformity, and thus improving the polishing quality of the glass substrate.

Description

Technical Field

[0001] This invention relates to the technical field of glass processing, and in particular to a glass substrate air-float double-sided grinding machine and its grinding process. Background Technology

[0002] As a key material in the flat panel display industry, the quality of glass substrates plays a decisive role in the performance of display devices. Cutting and grinding are indispensable and crucial steps in the glass substrate production process.

[0003] Currently, the disc grinding process commonly used in the industry has many drawbacks. Because the grinding disc makes hard contact with the glass, it easily damages the glass surface during grinding, severely affecting the appearance quality and performance of the glass substrate. Furthermore, this hard contact method often leads to uneven grinding, making it difficult to meet stringent process requirements for glass substrate thickness variations. This results in low yield, increased production costs, and limitations on improving enterprise production efficiency and economic benefits. Summary of the Invention

[0004] In view of the above-mentioned problems in existing glass grinding processes, this paper aims to provide a glass substrate air-float double-sided grinding machine and its grinding process.

[0005] The specific technical solution is as follows: A glass substrate air-float double-sided polishing machine, comprising: Two support plates are arranged symmetrically in the upper and lower part of the support plates, and flexible grinding pads are connected to the opposite end faces of the two support plates. A retractable airbag is formed between the flexible grinding pads and the support plates. Each support plate is provided with air holes that communicate with the retractable airbag for inflating or deflating the retractable airbag. When the retractable airbag is inflated and in the open state, the side of the flexible grinding pad facing away from the support plate forms a grinding surface, and the glass substrate can be adsorbed onto the grinding surface by water. When the retractable airbag is in a contracted state after being deflated, the glass substrate can be adsorbed and fixed to the support plate through the grinding surface; A first drive mechanism is used to drive the support plate located below to rotate; A second drive mechanism is used to drive the support plate located above to rotate; The third drive mechanism is used to drive the support plate located above to move along the X, Y, and Z axes.

[0006] Furthermore, in a preferred embodiment, the opposite end faces of both support plates are raised to form support planes for supporting the grinding plane in the contracted state.

[0007] Furthermore, in a preferred embodiment, the first driving mechanism includes: A grinding table frame, wherein the support plate below is rotatably mounted on the grinding table frame; A first driving member is used to drive the support plate to rotate.

[0008] Furthermore, as a preferred embodiment, the drive component is a rotary motor, which is mounted on the grinding table frame.

[0009] Furthermore, in a preferred embodiment, the second drive mechanism includes: Mounting bracket, wherein the support plate located above is rotatably mounted on the mounting bracket; The second driving member is used to drive the support plate to rotate, and the third driving mechanism is used to drive the mounting bracket to move along the X, Y, and Z axes.

[0010] Furthermore, in a preferred embodiment, the second driving component is a drive motor mounted on the mounting bracket.

[0011] Furthermore, as a preferred embodiment, the third drive mechanism includes: Gantry rack; Z-axis linear module, which is connected to the mounting frame in a transmission manner, is used to drive the mounting frame to move along the Z-axis direction; The Y-axis linear module is connected to the Z-axis linear module and is used to drive the mounting bracket to move along the Y-axis direction. An X-axis linear module is mounted on the gantry frame and is connected to the Y-axis linear module for driving the mounting frame to move along the X-axis direction.

[0012] A glass substrate polishing process, used in any of the above-described air-float double-sided polishing machines, the process comprising: S1: Spray water mist evenly on the lower surface of the glass substrate, and then attach the lower surface of the glass substrate to the grinding plane formed on the surface of the flexible rock grinding pad by the retractable airbag located below and in the open state. S2: Vacuum the retractable airbag by connecting the air hole of the retractable airbag. At this time, the flexible grinding pad and the glass substrate are adsorbed and fixed to the support plate located below. S3: Inflate the retractable airbag to the open state through the air hole connected to the upper retractable airbag, and the third drive mechanism drives the upper support plate to move to the upper surface of the glass substrate, and makes the grinding plane formed by the corresponding flexible grinding pad contact the upper surface of the glass substrate. S4: The third driving mechanism drives the support plate located above to grind the upper surface of the glass substrate along the X and Y axes in a predetermined trajectory. S5: After the upper surface of the glass substrate is ground, the glass is removed from the flexible grinding pad located below, and then sprayed on the upper surface of the glass substrate. Then the upper surface of the glass substrate is attached to the grinding plane formed by the upper grinding pad located above. S6: Vacuum the retractable airbag by connecting the air holes of the corresponding retractable airbag. At this time, the flexible grinding pad and the glass substrate are adsorbed and fixed to the support plate located above. S7: Inflate the retractable airbag located below to the open state, and make the grinding plane formed by the corresponding flexible grinding pad surface contact the lower surface of the glass substrate; S8: Repeat step S4 to grind the lower surface of the glass substrate; S9: After grinding is completed, the grinding action stops, the glass is removed, the ground glass is cleaned, and the two flexible grinding pads are cleaned to prepare for the double-sided grinding of the next glass substrate.

[0013] Furthermore, as a preferred embodiment, in step S4, the first driving mechanism drives the glass substrate to rotate. Alternatively, in step S8, the second driving mechanism drives the glass substrate to rotate.

[0014] Furthermore, as a preferred embodiment, in steps S4 and S8, the trajectory is rectangular, circular, or elliptical.

[0015] The positive effects of the above technical solution compared with the existing technology are: (1) The present invention achieves flexible contact between the flexible grinding pad and the glass substrate through the retractable airbag, effectively avoiding damage to the glass surface caused by hard contact; the first and second driving mechanisms drive the upper and lower support plates to rotate respectively, and cooperate with the third driving mechanism to make the upper support plate move along the X, Y and Z axis directions, which can realize grinding of various complex trajectories, improve grinding uniformity, and thus improve the grinding quality of the glass substrate.

[0016] (2) The support plane formed by the protrusion of the present invention provides stable support for the flexible grinding pad when the retractable airbag is contracted, ensuring the planar shape when the glass substrate is adsorbed and fixed, and improving the grinding accuracy.

[0017] (3) The grinding process of the present invention achieves stable fixation of the glass substrate on the flexible grinding pad by precisely controlling the inflation and deflation of the retractable airbag; the third driving mechanism drives the upper support plate to grind along a predetermined trajectory, thereby completing the double-sided grinding of the upper and lower surfaces of the glass substrate, improving grinding efficiency and yield, while ensuring the stability of the grinding quality of the glass substrate. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a glass substrate air-float double-sided polishing machine according to the present invention; Figure 2 This is a schematic diagram of the second and third drive mechanisms of a glass substrate air-float double-sided polishing machine according to the present invention. Figure 3 This is a schematic diagram of the structure of a glass substrate air-float double-sided grinding machine for grinding the upper surface of glass according to the present invention; Figure 4 This is a schematic diagram of the structure of a glass substrate air-float double-sided polishing machine for polishing the lower surface of a glass substrate according to the present invention; Figure 5 This is a schematic diagram of the first drive structure of a glass substrate air-float double-sided polishing machine according to the present invention; Figure 6 This is a grinding trajectory diagram of a glass substrate air-float double-sided grinding machine according to the present invention; In the attached diagram: 1. Support plate; 2. Flexible grinding pad; 3. Third drive mechanism; 4. First drive mechanism; 5. Second drive mechanism; 6. Glass substrate; 11. Support plane; 21. Telescopic airbag; 31. Gantry frame; 32. Z-axis linear module; 33. Y-axis linear module; 34. X-axis linear module; 41. Rotary motor; 42. Grinding table frame; 43. Gear; 44. Gear ring; 45. Spindle; 51. Drive motor; 52. Mounting bracket. Detailed Implementation

[0019] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of this invention, it should be noted that terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, terms such as "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] Figure 1 This is a schematic diagram of the structure of a glass substrate air-float double-sided polishing machine according to the present invention; Figure 2 This is a schematic diagram of the second and third drive mechanisms of a glass substrate air-float double-sided polishing machine according to the present invention. Figure 3 This is a schematic diagram of the structure of a glass substrate air-float double-sided grinding machine for grinding the upper surface of glass according to the present invention; Figure 4 This is a schematic diagram of the structure of a glass substrate air-float double-sided polishing machine for polishing the lower surface of a glass substrate according to the present invention; Figure 5 This is a schematic diagram of the first drive structure of a glass substrate air-float double-sided polishing machine according to the present invention; Figure 6 This is a grinding trajectory diagram of a glass substrate air-float double-sided grinding machine according to the present invention, as shown below. Figure 1-6The diagram illustrates a preferred embodiment of a glass substrate 6 air-floating double-sided polishing machine, comprising: two support plates 1, a first driving mechanism 4, a second driving mechanism 5, and a third driving mechanism 3. The two support plates 1 are symmetrically distributed vertically, and flexible polishing pads 2 are connected to the opposite end faces of the two support plates 1. A retractable air bladder 21 is formed between the flexible polishing pad 2 and the support plate 1. Each support plate 1 is provided with air holes communicating with the retractable air bladder 21 for inflating or deflating the retractable air bladder 21. When the retractable air bladder 21 is inflated and in the open state, the side of the flexible polishing pad 2 facing away from the support plate 1 forms a polishing surface, and the glass substrate 6 can be adsorbed onto the polishing surface by water. When the retractable air bladder 21 is deflated and in the contracted state, the glass substrate 6 can be adsorbed and fixed onto the support plate 1 by the polishing surface. The first driving mechanism 4 is used to drive the lower support plate 1 to rotate, the second driving mechanism 5 is used to drive the upper support plate 1 to rotate, and the third driving mechanism 3 is used to drive the upper support plate 1 to move along the X, Y, and Z axes.

[0023] In this application, the flexible grinding pad 2 and the glass substrate 6 are made into flexible contact through the retractable airbag 21, which effectively avoids damage to the glass surface caused by hard contact; the first and second drive mechanisms drive the upper and lower support plates 1 to rotate respectively, and cooperate with the third drive mechanism 3 to make the upper support plate 1 move along the X, Y and Z axis directions, which can realize grinding of various complex trajectories, improve grinding uniformity, and thus improve the grinding quality of the glass substrate 6.

[0024] Furthermore, in a preferred embodiment, the opposing end faces of the two support plates 1 are both raised to form support planes 11, which are used to support the grinding plane in the retracted state. The raised support planes 11 provide stable support for the flexible grinding pad 2 when the retractable airbag 21 is retracted, ensuring the planar shape of the glass substrate 6 when it is adsorbed and fixed, and improving the grinding accuracy.

[0025] Furthermore, in a preferred embodiment, the first drive mechanism 4 includes a grinding table frame 42 and a first drive member, wherein the lower support plate 1 is rotatably mounted on the grinding table frame 42, and the first drive member is used to drive the support plate 1 to rotate.

[0026] Furthermore, as a preferred embodiment, the drive component is a rotary motor 41, which is mounted on the grinding table frame 42.

[0027] More preferably, the support plate 1 located below is rotatably connected to the grinding table frame 42 via the main shaft 45, and a gear ring 44 is sleeved on the outside of the main shaft 45. The output shaft of the rotary motor 41 is connected to a gear 43, and the gear 43 meshes with the gear ring 44.

[0028] Furthermore, in a preferred embodiment, the second drive mechanism 5 includes a mounting frame 52 and a second drive member. The support plate 1 located above is rotatably mounted on the mounting frame 52. The second drive member is used to drive the support plate 1 to rotate, and the third drive mechanism 3 is used to drive the mounting frame 52 to move along the X, Y, and Z axes.

[0029] Furthermore, as a preferred embodiment, the second driving component is a drive motor 51 mounted on the mounting bracket 52.

[0030] Furthermore, in a preferred embodiment, the third drive mechanism 3 includes a gantry frame 31, a Z-axis linear module 32, a Y-axis linear module 33, and an X-axis linear module 34. The Z-axis linear module 32 is drivenly connected to the mounting frame 52 and is used to drive the mounting frame 52 to move along the Z-axis direction. The Y-axis linear module 33 is drivenly connected to the Z-axis linear module 32 and is used to drive the mounting frame 52 to move along the Y-axis direction. The X-axis linear module 34 is mounted on the gantry frame 31 and is drivenly connected to the Y-axis linear module 33 and is used to drive the mounting frame 52 to move along the X-axis direction.

[0031] A polishing process for a glass substrate 6, used in any of the above-mentioned air-float double-sided polishing machines, includes the following steps: S1: Spray water mist evenly on the lower surface of the glass substrate 6, and then attach the lower surface of the glass substrate 6 to the grinding plane formed on the surface of the flexible rock grinding pad by the retractable airbag 21 located below and in the open state. S2: Vacuum the retractable airbag 21 by connecting the air hole of the retractable airbag 21. At this time, the flexible grinding pad 2 and the glass substrate 6 are adsorbed and fixed to the support plate 1 located below. S3: Inflate the retractable airbag 21 to the open state through the air hole connected to the upper retractable airbag 21, and the third drive mechanism 3 drives the upper support plate 1 to move to the upper surface of the glass substrate 6, and makes the grinding plane formed on the surface of the corresponding flexible grinding pad 2 contact the upper surface of the glass substrate 6. S4: The third drive mechanism 3 drives the upper support plate 1 to grind the upper surface of the glass substrate 6 along the X and Y axes in a predetermined trajectory. S5: After the upper surface of the glass substrate 6 is ground, the glass is removed from the flexible grinding pad 2 located below, and then sprayed on the upper surface of the glass substrate. Then the upper surface of the glass substrate is attached to the grinding plane formed by the upper grinding pad surface located above. S6: Vacuum the retractable airbag 21 by connecting the air holes of the corresponding retractable airbag 21. At this time, the flexible grinding pad 2 and the glass substrate 6 are adsorbed and fixed to the support plate 1 located above. S7: Inflate the retractable airbag 21 located below to the open state, and make the grinding plane formed on the surface of the corresponding flexible grinding pad 2 contact the lower surface of the glass substrate 6. S8: Repeat step S4 to grind the lower surface of the glass substrate 6; S9: After grinding is completed, the grinding action stops, the glass is removed, the ground glass is cleaned, and the two flexible grinding pads 2 are cleaned to prepare for the double-sided grinding of the next glass substrate 6.

[0032] In this application, the grinding process achieves stable fixation of the glass substrate 6 on the flexible grinding pad 2 by precisely controlling the inflation and deflation of the retractable airbag 21; the third driving mechanism 3 drives the upper support plate 1 to grind along a predetermined trajectory, completing the double-sided grinding of the upper and lower surfaces of the glass substrate 6, improving grinding efficiency and yield, while ensuring the stability of the grinding quality of the glass substrate 6.

[0033] Furthermore, as a preferred embodiment, in step S4, the first driving mechanism 4 drives the glass substrate 6 to rotate, and in step S8, the second driving mechanism 5 drives the glass substrate 6 to rotate. During the polishing process, driving the glass substrate 6 to rotate via the first or second driving mechanism 5 can generate relative movement between the glass substrate 6 and the flexible polishing pad 2, further enhancing the uniformity of polishing and improving the surface quality of the glass substrate 6.

[0034] Furthermore, as a preferred embodiment, in steps S4 and S8, the trajectory is rectangular, circular, or elliptical. This provides a variety of grinding trajectory options, allowing for flexible adjustment of the grinding trajectory according to the specifications, material, and grinding requirements of the glass substrate 6, meeting different production needs and improving the adaptability and flexibility of the grinding process.

[0035] The above description is merely a preferred embodiment of the present invention and does not limit the implementation and protection scope of the present invention. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present invention should be included within the protection scope of the present invention.

Claims

1. A polishing process for a glass substrate, using a glass substrate air-floating double-sided polishing machine, the glass substrate air-floating double-sided polishing machine comprising two support plates, the two support plates being symmetrically distributed vertically, and a flexible polishing pad being connected to the opposite end face of each of the two support plates, a retractable airbag being formed between the flexible polishing pad and the support plate, and each support plate being provided with air holes communicating with the retractable airbag for inflating or deflating the retractable airbag. When the retractable airbag is inflated and in the open state, the side of the flexible grinding pad facing away from the support plate forms a grinding surface, and the glass substrate can be adsorbed onto the grinding surface by water. When the retractable airbag is in a contracted state after being deflated, the glass substrate can be adsorbed and fixed to the support plate through the grinding surface; A first drive mechanism is used to drive the support plate located below to rotate; A second drive mechanism is used to drive the support plate located above to rotate; A third driving mechanism, wherein the third driving mechanism is used to drive the support plate located above to move along the X, Y, and Z axes; characterized in that the process includes: S1: Spray water mist evenly on the lower surface of the glass substrate, and then attach the lower surface of the glass substrate to the grinding plane formed on the surface of the flexible rock grinding pad by the retractable airbag located below and in the open state. S2: Vacuum the retractable airbag by connecting the air hole of the retractable airbag. At this time, the flexible grinding pad and the glass substrate are adsorbed and fixed to the support plate located below. S3: Inflate the retractable airbag to the open state through the air hole connected to the upper retractable airbag, and the third drive mechanism drives the upper support plate to move to the upper surface of the glass substrate, so that the grinding plane formed by the corresponding flexible grinding pad surface contacts the upper surface of the glass substrate. S4: The third driving mechanism drives the support plate located above to grind the upper surface of the glass substrate along the X and Y axes in a predetermined trajectory. S5: After the upper surface of the glass substrate is ground, the glass is removed from the flexible grinding pad located below, and then sprayed on the upper surface of the glass substrate. Then the upper surface of the glass substrate is attached to the grinding plane formed by the upper grinding pad located above. S6: Vacuum the retractable airbag by connecting the air holes of the corresponding retractable airbag. At this time, the flexible grinding pad and the glass substrate are adsorbed and fixed to the support plate located above. S7: Inflate the retractable airbag located below to the open state, and make the grinding plane formed by the corresponding flexible grinding pad surface contact the lower surface of the glass substrate; S8: Repeat step S4 to grind the lower surface of the glass substrate; S9: After grinding is completed, the grinding action stops, the glass is removed, the ground glass is cleaned, and the two flexible grinding pads are cleaned to prepare for the double-sided grinding of the next glass substrate.

2. The glass substrate grinding process according to claim 1, characterized in that, In step S4, the first driving mechanism drives the glass substrate to rotate. Alternatively, in step S8, the second driving mechanism drives the glass substrate to rotate.

3. The grinding process for a glass substrate according to claim 1, characterized in that, In steps S4 and S8, the trajectory is rectangular, circular, or elliptical.

4. The glass substrate grinding process according to claim 1, characterized in that, The opposing end faces of the two support plates are raised to form a support plane, which is used to support the grinding plane in the contracted state.

5. The glass substrate grinding process according to claim 1, characterized in that, The first driving mechanism includes: A grinding table frame, on which the lower support plate is rotatably mounted; a first drive member for driving the support plate to rotate.

6. The grinding process for a glass substrate according to claim 5, characterized in that, The first driving component is a rotary motor, which is mounted on the grinding table frame.

7. The glass substrate grinding process according to claim 1, characterized in that, The second drive mechanism includes: Mounting bracket, the support plate located above is rotatably mounted on the mounting bracket; second drive member, the second drive member is used to drive the support plate to rotate, and the third drive mechanism is used to drive the mounting bracket to move along the X, Y, Z axis directions.

8. The grinding process for a glass substrate according to claim 7, characterized in that, The second driving component is a drive motor mounted on the mounting bracket.

9. The grinding process for a glass substrate according to claim 7, characterized in that, The third drive mechanism includes: Gantry rack; Z-axis linear module, which is connected to the mounting frame in a transmission manner, is used to drive the mounting frame to move along the Z-axis direction; The Y-axis linear module is connected to the Z-axis linear module and is used to drive the mounting bracket to move along the Y-axis direction. An X-axis linear module is mounted on the gantry frame and is connected to the Y-axis linear module for driving the mounting frame to move along the X-axis direction.

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