Optical beam scanning device of integrated photonics chip and testing method

Abstract

The application provides a light beam scanning device and a test method of an integrated photonics chip, and the light beam scanning device of the integrated photonics chip comprises a chip sample table, a chip sample table base, a light beam receiver connected with a lens barrel, and a horizontally arranged turntable base; the lens barrel is arranged above the turntable base, the lens barrel is internally provided with an aperture adjusting structure and at least four lens groups; the center point of the chip sample table base overlaps the center point of the turntable base, the chip sample table base is located above the turntable base, and the chip sample table is vertically arranged at the center point of the chip sample table base. The switching of different lens groups in the lens barrel is used to realize the measurement of the far field and the near field of the to-be-tested chip by using the same lens barrel, and the lens barrel is arranged on the turntable base, so that the test angle range can be adjusted according to specific test requirements, and various chip test requirements can be met.

Images