Laser etching dust extraction flight following system and control method

Abstract

The application discloses a laser etching dust extraction flight following system and a control method, and relates to the technical field of thin-film solar cell manufacturing. The following system comprises a focusing dust extraction module, a following driving module, a cooperative control unit and a negative pressure dynamic adjustment module. The cooperative control unit comprises a following PLC controller and a motion control card. The following PLC controller synchronously acquires path planning information from a galvanometer flight system of a laser beam and generates a displacement instruction. The displacement instruction is sent to the following driving module through the motion control card. The following driving module is synchronously triggered with a galvanometer scanning module of the galvanometer flight system. The following driving module moves according to the displacement instruction and controls the coaxial following movement of the center of the dust extraction cover body and the etching point of the laser beam. The application has high dust removal efficiency, small series resistance and good parameter stability, reduces equipment maintenance cost, and is suitable for processing large-size thin-film batteries such as perovskite and cadmium telluride.

Description

Technical Field

[0001] This invention relates to a laser etching dust extraction flying follower system and method, specifically to a dust treatment system for the laser etching process of thin-film solar cells, belonging to the field of thin-film solar cell manufacturing technology. Background Technology

[0002] The existing laser etching process for thin-film solar cells presents the following technical problems in dust treatment: In existing thin-film solar cell processing systems, a fixed dust extraction system is used, with multiple dust extraction ports set above the motion platform module to achieve full coverage of the thin-film solar cell substrate. Because the area to be covered by the dust extraction ports is very large and the number of dust extraction ports is also very large, the overall dust extraction negative pressure requirement is very high, resulting in high cost and high power consumption for the entire dust extraction system.

[0003] Inevitably, the negative pressure within the coverage area of ​​each dust extraction port is uneven. This not only results in low dust capture efficiency and allows particulate matter to easily remain at the edges of the etching lines, increasing the series resistance of the cells and adversely affecting the performance of thin-film solar cells, but also, if the negative pressure of the dust extraction system is simply increased, the substrate, especially flexible substrates, is prone to deformation or vibration, affecting the scanning path of the galvanometer scanning system. Therefore, controlling the negative pressure of the dust extraction system is also very difficult and difficult to achieve.

[0004] Therefore, existing technologies have shortcomings and need to be addressed by developing a complete new solution. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide a laser etching dust extraction flight following system and method. According to an embodiment of the present invention, a first embodiment is provided as: a laser-etched dust extraction flight follower system, such as... Figure 1 As shown, it includes: A focused dust extraction module, comprising a dust extraction hood, a dust extraction channel, and a filter unit, wherein the dust extraction hood covers the etching points of the laser beam; A follow-drive module controls the dust extraction hood to move in the XY plane, which is parallel to the surface of the thin-film solar cell substrate. The collaborative control unit includes a follower PLC controller and a motion control card. The follower PLC controller synchronously acquires path planning information from the galvanometer flight system of the laser beam and generates displacement commands. The displacement commands are sent to the follower drive module through the motion control card. The follow drive module is triggered synchronously with the galvanometer scanning module of the galvanometer flight system. The follow drive module moves according to the displacement command and controls the center of the dust extraction hood to follow the laser beam etching point coaxially.

[0006] Furthermore, the thin-film solar cell is fixed on the motion platform module and moves synchronously with the motion platform module. The preset speed of the motion platform module is 200mm / s-800mm / s. The overall feed direction of the motion platform module is the Y-axis direction. The vertical direction of the Y-axis direction of the motion platform module in the horizontal plane is the X-axis direction, and the vertical direction of the XY plane is the Z-axis direction.

[0007] Furthermore, the focusing dust extraction module includes a conical dust extraction port, the inner wall of which is arranged with an annular air blowing channel, the end of which is connected to the dust extraction channel, and a HEPA filter unit is installed inside the dust extraction channel.

[0008] Furthermore, the follow drive module includes an X-axis servo motor, a Y-axis servo motor, a ball screw transmission mechanism, and a high-precision encoder. The follow drive module's response frequency in the X-axis direction matches the galvanometer scanning frequency, and its movement speed in the Y-axis direction is synchronized with the motion platform module.

[0009] Furthermore, the path planning information synchronously acquired by the self-galvanometer flight system includes: multiple rectangular field-of-view units that the path planning unit of the galvanometer flight system divides the thin-film solar cell substrate into, the grid number and grid coordinates of the rectangular field-of-view units, and the serpentine scanning path generated by the path planning unit on each rectangular field-of-view unit.

[0010] Furthermore, the follow drive module moves according to the displacement command and controls the coaxiality deviation between the center of the dust extraction hood and the etching point of the laser beam to be less than 0.2mm.

[0011] Furthermore, the follow drive module also includes a Z-axis fine-tuning structure, which controls the distance between the dust extraction cover and the surface of the thin-film solar cell substrate to be within the range of 20±5mm.

[0012] Furthermore, it also includes a negative pressure dynamic adjustment module, which adjusts the dust extraction negative pressure according to the laser beam power and the moving speed of the thin-film solar cell in the Y-axis direction.

[0013] According to an embodiment of the present invention, utilizing the laser etching dust extraction flight follower system in the first solution provided by the present invention, a second solution is provided as follows: A laser etching dust extraction flight tracking method includes the following steps: Initialize the position of the dust extraction hood, and control the distance between the dust extraction hood and the surface of the thin-film solar cell substrate to 15±5mm through the Z-axis fine-tuning structure. calibrate the coaxiality between the center of the dust extraction hood and the etching point of the laser beam to within 0.2mm. Displacement commands are generated by obtaining path planning information from the galvanometer flight system through the PLC controller. The path planning information includes the grid number, grid coordinates, and serpentine scanning path on each rectangular field of view unit. The etching point following control is achieved by using a motion control card to control the X-axis servo motor and Y-axis servo motor of the following drive module to control the dust extraction hood of the focusing following module to move along the X-axis and Y-axis directions. Under the control of the displacement command, the center of the dust extraction hood always follows the serpentine scanning path of the laser beam etching point.

[0014] Compared with the prior art, the unique advantages of the technical solution provided in this application are as follows: This invention provides a novel, independently configured dust extraction system, specifically a laser etching dust extraction flight follow-up system adapted to existing thin-film solar cell laser etching systems. The device is configured to include a focusing dust extraction module, a follow-up drive module, and a collaborative control unit. The collaborative control unit obtains path planning information from the galvanometer flight system of the laser beam and generates displacement commands. The displacement commands control the follow-up drive module to control the focusing dust extraction module to always follow the etching point of the laser beam, thereby accurately capturing the dust at the etching point. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] in: Figure 1 This is a structural block diagram of a laser-etched dust extraction flight follower system in one embodiment; Figure 2 This is a flowchart of a laser etching dust extraction flight follower system in one embodiment; Figure 3 This is a schematic diagram illustrating the interaction between the thin-film solar substrate on the motion platform module, the focusing dust extraction module, and the laser beam in one embodiment.

[0017] Figure label: 1-Motion platform module; 2-Thin-film solar cell substrate; 3-Etching line; 4-Laser beam; 5-Dust extraction hood; 100 - Focused dust extraction module; 200 - Follow drive module; 300 - Cooperative control unit; 400 - Negative pressure dynamic adjustment module. Detailed Implementation

[0018] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] Example 1 The technical problem solved by this embodiment is the defect in dust treatment during the traditional laser etching process for thin-film solar cells. Traditional fixed dust extraction ports have limited coverage. When the laser scribing head moves at high speed, dust spreads rapidly. If the fixed dust extraction port has insufficient capture efficiency, dust residue will remain, resulting in a loss of photoelectric conversion efficiency of the battery. In particular, for large-size substrates and large-size flexible substrates, the traditional large-diameter dust extraction negative pressure is difficult to balance the negative pressure and the negative pressure on the substrate. That is, if the negative pressure is insufficient, the dust capture efficiency will be insufficient, and if the negative pressure is too large, it will cause vibration or even deformation of the substrate, which will adversely affect the scanning path of the galvanometer scanning system.

[0020] To address the aforementioned technical issues, this embodiment provides a laser etching dust extraction flight follow-up system, including a focusing dust extraction module 100, a follow-up drive module 200, a collaborative control unit 300, a negative pressure dynamic adjustment module 400, and a motion platform module 1. The modules work together to achieve real-time and precise capture of dust at the etching points.

[0021] (i) Specifically, the focusing dust extraction module 100 includes a dust extraction hood 5, a dust extraction channel and a filter unit. The dust extraction hood 5 covers the etching points of the laser beam 4. The focusing dust extraction module 100 forms a local high negative pressure flow field, which efficiently captures micron-sized dust at the etching points and filters and purifies the airflow.

[0022] In a preferred embodiment, the focusing dust extraction module 100 includes a conical dust extraction port. An annular airflow channel is arranged on the inner wall of the conical dust extraction port. The end of the conical dust extraction port is connected to the dust extraction channel, which is equipped with a HEPA filter unit. The conical dust extraction port adopts a 50mm diameter trumpet-shaped cover, with an annular airflow channel machined on its inner wall. The airflow channel has a diameter of 2mm and eight evenly distributed air outlets. The annular airflow channel blows out a spiraling downward annular airflow, which gathers the dust generated during etching on the thin-film solar cell substrate 2 to the center of the conical dust extraction port. The conical dust extraction port then draws in the gathered dust through the negative pressure provided by the negative pressure dynamic adjustment module 400. The drawn-in dust is then purified sequentially by a pre-cyclone separator and a HEPA filter unit before being discharged or recycled.

[0023] This special structure creates a negative pressure above the moving laser etching point through a negative pressure dynamic adjustment module 400, and a ring-shaped positive pressure zone around the laser etching point through an annular air blowing channel. The positive pressure zone prevents external air from being drawn into the etching zone around the laser etching point, and the negative pressure draws away the dust formed in the etching zone at high speed in the first time, thus forming a highly efficient and complete dust following and capture system.

[0024] (ii) Specifically, the follow drive module 200 controls the dust extraction hood 5 to move in the XY plane, which is parallel to the surface of the thin-film solar cell substrate 2. The follow drive module includes an X / Y axis drive unit and a Z axis fine-tuning structure. The X / Y axis drive unit includes two servo motors, a ball screw transmission mechanism and a high-precision encoder. The high-precision encoder has a resolution of 1μm. The response frequency in the X-axis direction matches the scanning frequency of the galvanometer, for example, the scanning frequency is 500Hz. The moving speed in the Y-axis direction is synchronized with the motion platform module 1. In this embodiment, the moving speed of the motion platform module 1 is 200mm / s-800mm / s. The follow drive module 200 also includes a Z-axis fine-tuning unit with a stroke of 10 mm and an adjustment accuracy of ±0.05 mm. It uses a laser displacement sensor to provide real-time feedback on the surface height of the thin-film solar cell substrate 2 and dynamically compensates for distance deviations. The Z-axis fine-tuning structure controls the distance between the dust extraction hood 5 and the surface of the thin-film solar cell substrate 2 to be within the range of 15 ± 5 mm.

[0025] The synchronous triggering mechanism of the follow drive module 200 is to be synchronously triggered with the galvanometer scanning module of the galvanometer flight system through the Profinet protocol, with a triggering delay of <1ms, ensuring that the path following error is <0.5mm.

[0026] (III) Specifically, the collaborative control unit 300 includes a follower PLC controller and a motion control card. The follower PLC controller obtains path planning information from the laser processing system in real time to generate displacement commands for the dust extraction module, realizing dynamic follower collaborative control of the laser beam 4 etching and the etching dust. The follower PLC controller is selected from the Siemens S7 series, and obtains path planning data from the galvanometer flight system via the industrial bus, including: Rectangular field-of-view cell division, such as dividing a 1m×2m substrate into 20×40 50mm×50mm grids; Snake-like scan path coordinates, single path length 500mm, line width 25μm; Real-time coordinates of etched points, updated at a frequency of 1kHz; The motion control card is selected from Advantech PCI series. It sends displacement commands in the form of pulse signals generated by the PLC to the follow drive module 200 to control the movement of the X / Y axis motors, ensuring that the coaxiality deviation between the center of the dust extraction hood 5 and the etched point of the movement is ≤0.2mm.

[0027] (iv) Specifically, a negative pressure dynamic adjustment module 400 is usually provided. The negative pressure dynamic adjustment module 400 controls the dust extraction negative pressure of the focusing dust extraction module 100. In this embodiment, the dust extraction negative pressure is dynamically adjusted according to the laser processing parameters. The purpose is to ensure the dust removal stability of the thin film solar cell etching line 3 with different materials and line widths.

[0028] The control logic of the negative pressure dynamic adjustment module 400 is as follows: Obtain the adjustment parameters, including laser power, etching linewidth, and substrate movement speed.

[0029] For example, the laser power is 10W-50W, the etching line width is 10μm-50μm, and the substrate moving speed is 200mm / s-800mm / s; This embodiment specifically uses a negative pressure calculation model: P = 50 + 0.5 × line width + 0.02 × laser power - 0.01 moving speed Where P is the negative pressure value in kPa, linewidth in μm, laser power in W, and moving speed in mm / s.

[0030] For example, if the perovskite etching parameters are: line width 25μm, power 30W, and moving speed 400mm / s, then the negative pressure value is set as P=50+0.5×25+0.02×30-0.01×400=60.1kPa; Specifically, the negative pressure dynamic adjustment module 400 can adjust the pump speed in real time through a variable frequency negative pressure pump and a PID algorithm, achieving a negative pressure control accuracy of ±1kPa.

[0031] This embodiment also involves: (V-1) Motion Platform Module 1 of the Galvanometer Flight System The motion platform module 1 carries the thin-film solar cell substrate 2 and moves continuously along a preset direction at a preset speed.

[0032] (V-2) The galvanometer scanning module of the galvanometer flight system emits a laser beam 4 onto the surface of the thin-film solar cell substrate 2 and forms an etching line 3 during the continuous movement of the thin-film solar cell substrate 2.

[0033] (5-3) Motion synchronization control module of galvanometer flight system, including platform encoder, PLC controller and path planning unit; The path planning unit divides the thin-film solar cell substrate 2 into multiple rectangular field-of-view units and generates a continuous serpentine scanning path for the galvanometer scanning module to travel in each rectangular field-of-view unit.

[0034] This embodiment solves the problems of low dust removal efficiency, poor path tracking, and severe equipment contamination in traditional fixed dust removal systems through a synergistic design of focused dust extraction, real-time tracking, and dynamic negative pressure adjustment. This significantly improves the processing yield and equipment stability of thin-film solar cells. The dust removal rate is increased from 50% in traditional fixed dust extraction to over 95%, and the amount of residual perovskite dust is significantly reduced, effectively preventing the formation of micro-short circuit channels. Testing shows that the series resistance decreased from 0.8 Ω·cm² to 0.45 Ω·cm², and the photoelectric conversion efficiency loss decreased from >5% to <1.5%. Furthermore, the optical lens cleaning cycle can be significantly extended, reducing equipment maintenance costs. It is compatible with various thin-film materials such as cadmium telluride and copper indium gallium selenide, and the dust removal efficiency fluctuation is ≤5% within the substrate movement speed range of 200-800 mm / s, meeting the dynamic processing requirements of flexible substrates.

[0035] Example 2 This embodiment specifically provides a structure for the dust extraction cover 5 of the focusing dust extraction module 100, and the relative relationship between the dust extraction cover 5 and the thin-film solar cell substrate 2 is as follows: Figure 3 As shown.

[0036] In the prior art, the dust extraction hood 5 can be set as a circular or square dust extraction port. The dust extraction port can cover a certain negative pressure range. The simple dust extraction negative pressure can remove floating dust within the coverage area to avoid contaminating the device or equipment. However, the dust generated by laser etching comes from two sources: one is the dust generated at the etching point at any time, and the other is the dust floating in from the surrounding environment. In particular, the negative pressure environment will cause the surrounding air to gather at the dust extraction port and attach the surrounding dust to the etching point of the thin film solar cell substrate 2. Therefore, the prior art needs to be adjusted and improved to solve this technical problem.

[0037] This embodiment provides a specific focusing dust extraction module 100, including a conical dust extraction port, an annular air blowing channel arranged on the inner wall of the conical dust extraction port, the end of the conical dust extraction port being connected to the dust extraction channel, and a HEPA filter unit being arranged inside the dust extraction channel.

[0038] Specifically, the annular air blowing channel is integrated into the upper inner wall of the conical dust extraction port. The annular air blowing channel includes an annular passage and 8-12 micro-nozzles arranged on the annular passage. The axis of the micro-nozzles forms an angle of 15°-30° with the inner wall of the dust extraction port. The annular air blowing channel is configured to spray a spiral downward airflow as a whole. The airflow sprayed by the annular air blowing channel gathers the smoke and dust generated by laser etching to the center of the conical dust extraction port. The conical dust extraction port draws in the gathered smoke and dust through the negative pressure provided by the negative pressure dynamic adjustment module 400. The drawn-in smoke and dust are purified by the pre-cyclone separator and the HEPA filter unit before being discharged or recycled. The coaxiality deviation between the center of the conical dust extraction port and the laser etching point is maintained within the first deviation range and a negative pressure is formed around the laser etching point. The airflow sprayed by the annular air blowing channel forms a positive pressure zone around the laser etching point to prevent external air from being drawn into the etching area around the laser etching point.

[0039] Example 3 Furthermore, in this embodiment, the laser etching dust extraction flight follow-up system, where "follow" refers to the dust extraction system synchronously controlling dust extraction while following the galvanometer flight system, is triggered by the following mechanism: The galvanometer scanning module of the galvanometer flight system does not start from the boundary of the rectangular field of view unit. Instead, it sets a transition zone for the stitching boundary of adjacent rectangular field of view units through the path planning unit. The PLC controller of the galvanometer flight system controls the energy gradient of the laser beam emitted by the galvanometer scanning module within the transition zone of the stitching boundary of adjacent rectangular field of view units based on the displacement data. That is, when the laser beam 4 emitted by the galvanometer scanning module enters the transition zone of the stitching boundary of adjacent rectangular field of view units, the PLC controller triggers the laser beam 4 and controls the energy gradient of the laser beam 4 based on the displacement data, thereby realizing the stitching of the etching line 3 of adjacent rectangular field of view units.

[0040] At this time, the laser etching dust extraction flight follow system and the galvanometer scanning module of the galvanometer flight system are triggered synchronously. In order to achieve precise control of the dust extraction process, the negative pressure dynamic adjustment module 400 dynamically adjusts the dust extraction negative pressure according to the laser beam power, the moving speed of the thin film solar cell in the Y-axis direction, and the energy gradient of the laser beam 4 in the splicing boundary transition area.

[0041] This solution relates to laser etching technology for thin-film solar cells, specifically disclosing a negative pressure dynamic adjustment system that integrates laser power, processing speed, and energy gradient feedback to solve the problem of fluctuating dust capture efficiency in large-size substrate splicing processing. It is suitable for precision etching and dust removal of thin-film batteries such as cadmium telluride and perovskite.

[0042] The negative pressure adjustment scheme in Example 1 has the following limitations: it only relies on laser power or processing speed to adjust the negative pressure, ignoring the dust fluctuation caused by changes in energy gradient at the splicing boundary. For example, energy overlap at the junction of adjacent field units can cause a sudden increase of 30% in dust generation. The traditional PID adjustment response time is >100ms, which cannot match the dynamic switching requirements of the galvanometer scanning system at 500Hz, resulting in a decrease in the dust capture rate in the splicing area to 85%. When splicing rectangular field units, there is a 0.1ms-0.5ms energy transition at the boundary of the laser beam 4. For example, if the power jumps from 30W to 35W, the traditional system does not adjust the negative pressure accordingly, resulting in a local dust residue exceeding 0.5mg / m².

[0043] This embodiment optimizes the negative pressure dynamic adjustment module 400 based on the first embodiment, specifically including a multi-parameter sensing unit, an energy gradient analysis unit, and an adaptive control algorithm. The negative pressure dynamic adjustment module 400 consists of multiple sub-modules: a multi-parameter sensing unit, an energy gradient analysis unit, an adaptive control algorithm, and an actuator.

[0044] Specifically, the multi-parameter sensing unit collects laser power, processing speed, and energy gradient data in real time. For example, laser power: 10W-50W (sampling frequency 1kHz); processing speed: 200-800mm / s (resolution 0.1mm / s). The energy gradient analysis unit obtains path planning data from the galvanometer flight system and calculates the energy change rate of the splicing boundary. The energy gradient is defined as the change in laser energy per unit area: 0-20 J / mm².

[0045] An adaptive control algorithm establishes a coupled model between the negative pressure value and three parameters, and outputs real-time adjustment commands. Control cycle: 1ms to match the galvanometer scanning frequency; Adjustment accuracy: ±0.5kPa.

[0046] The actuator uses a variable frequency vacuum pump and a proportional control valve to achieve dynamic response to negative pressure. The maximum negative pressure of the vacuum pump is -80 kPa; the response time of the control valve is <20 ms.

[0047] The control logic of the negative pressure dynamic adjustment module 400 is as follows: The negative pressure value (P) is calculated using the following coupled model:

[0048] in, Power coefficient (0.5 kPa / W): For every 10W increase in laser power, the negative pressure increases by 5 kPa. Speed ​​coefficient (100 kPa·s / mm): When the processing speed decreases from 800 mm / s to 200 mm / s, the negative pressure increases by 0.375 kPa. Energy gradient coefficient (2 kPa·mm² / J): For every 5 J / mm² increase in energy gradient, the negative pressure increases by 10 kPa. Basic negative pressure (50 kPa, minimum requirement for 2 μm particle size dust).

[0049] When the laser moves from the forward field of view unit to the target field of view unit: the energy gradient analysis unit receives the path switching signal from the galvanometer system 5ms in advance and predicts the boundary region; based on the laser pulse interval of adjacent paths, it calculates the energy gradient. : ,in, It is the change in energy. Let be the area of ​​the boundary.

[0050] like If the value is greater than 5 J / mm², an instantaneous negative pressure increase is triggered, and the duration is consistent with the boundary transition time.

[0051] Technical Results: Dust removal efficiency at the splicing boundary increased from 85% to over 95%, and dust residue caused by energy gradient fluctuations was controlled within 0.1 mg / m²; the negative pressure regulation response speed control cycle was shortened to 1 ms, matching the 500 Hz scanning frequency of the galvanometer with no adjustment lag; the series resistance fluctuation in the splicing area decreased from ±0.1 Ω·cm² to ±0.02 Ω·cm², and the overall cell efficiency difference was <0.5%; cell performance consistency was optimized. Furthermore, energy consumption can be optimized through dynamic adjustment.

[0052] Example 4 This embodiment relates to a laser etching processing method for thin-film solar cells, specifically disclosing a laser etching dust removal flight follow-up method, which is particularly suitable for dynamic dust removal of large-size (e.g., 1m×2m) perovskite and cadmium telluride thin-film solar cell substrates 2, and focuses on solving the problems of large path following error and low dust removal efficiency at splicing boundaries in traditional methods.

[0053] The technical problems solved by this embodiment are: the distance deviation and coaxiality error between the dust extraction hood 5 and the surface of the thin-film solar cell substrate 2 lead to uneven local negative pressure distribution and dust capture rate fluctuation >10%; the path planning information of the galvanometer flight system is not synchronized with the dust extraction and following command. When the moving speed of the thin-film solar cell substrate 2 is greater, the displacement command delay is more severe and the following error is also greater; when switching between adjacent field units, there is a motion phase difference between the dust extraction hood 5 and the laser etching point, resulting in the residual dust at the boundary exceeding 0.3mg / m².

[0054] Based on the laser etching dust extraction flight follow-up system of Embodiment 1, this embodiment achieves high-precision dust removal through four stages: initialization calibration, path synchronization, dynamic following, and trigger compensation. Figure 2 As shown, the specific steps are as follows: S101, Initialize the position of the dust extraction hood. The distance between the dust extraction hood and the surface of the thin-film solar cell substrate is controlled at 15±5mm through the Z-axis fine-tuning structure. The coaxiality between the center of the dust extraction hood and the etching point of the laser beam is calibrated to within 0.2mm. S102: Displacement command generation, by obtaining path planning information in the galvanometer flight system through the follow PLC controller, the path planning information includes the grid number of the rectangular field of view unit, the grid coordinates, and the serpentine scanning path on each rectangular field of view unit; S103: Etching point following control. The motion control card controls the X-axis servo motor and Y-axis servo motor of the following drive module to control the dust extraction hood of the focusing following module to move along the X-axis and Y-axis directions. Under the control of the displacement command, the center of the dust extraction hood always follows the serpentine scanning path of the laser beam etching point.

[0055] Specifically: Phase 1: Initialization and Calibration of Dust Extraction Hood 5 Step 1.1: Z-axis distance adjustment The distance between the tapered dust extraction port and the surface of the thin-film solar cell substrate 2 is controlled to 15±5mm using the Z-axis fine-tuning structure of the focusing dust extraction module 100, including a micro servo motor and a laser displacement sensor. The laser displacement sensor can be used as a calibration tool.

[0056] A servo motor drives a ball screw, and an encoder is used to achieve a distance adjustment accuracy of ±0.05mm.

[0057] Step 1.2: Coaxiality calibration The collaborative control unit 300 sends a calibration command, driving the X / Y axis servo motors to move the dust extraction hood 5, ensuring that the coaxiality deviation between the center of the dust extraction port and the etching point of the laser beam 4 is ≤0.2mm. The PLC controller corrects the deviation in real time using a PID algorithm until it is <0.2mm.

[0058] Phase Two: Synchronization of Path Planning Information and Generation of Displacement Commands Step 2.1: Establishing the Data Interface The follower PLC controller of the cooperative control unit 300 establishes real-time communication with the galvanometer flight system through the Profinet protocol.

[0059] Step 2.2: Path Planning Information Analysis The following data is obtained from the galvanometer flight system by the PLC controller: Rectangular field of view unit division: The 1m×2m substrate is divided into 20×40 50mm×50mm grids, and the grid number is incremented in the Y-axis direction, such as the first row and first column being denoted as G01-01; Snake-like scanning path: Within each grid, laser beam 4 reciprocates along the X-axis, with a line width of 25μm, a scanning speed of 500mm / s, and a spacing of 50μm between adjacent scanning lines; Parameters for the splicing transition zone: the width of the overlapping area between adjacent grids is 0.5 mm, the power of laser beam 4 increases linearly from 30 W to 35 W in the transition zone, and the energy gradient is 20 J / mm².

[0060] Step 2.3: Generation of Displacement Commands The PLC controller generates XY axis displacement instructions for the dust extraction hood 5 based on the path information, including: the starting coordinates of each grid (e.g., starting point X=0mm, Y=0mm for G01-01); the inflection point coordinates of the serpentine path (e.g., after scanning to 50mm in the X direction, the Y axis steps by 50μm); and the early trigger signal for the splicing transition zone (sent 0.5ms before the laser beam 4 arrives at the transition zone).

[0061] Phase 3: Dynamic tracking control of etched points Step 3.1: Driver module linkage The motion control card converts displacement commands into pulse signals to drive the X / Y axis servo motors. X-axis motion: Matching the galvanometer scanning frequency of 500Hz ensures no lag at scanning inflection points; Y-axis motion: Synchronized with motion platform module 1, speed coupling is achieved through an electronic gear ratio (1:10).

[0062] Step 3.2: Real-time location feedback A high-precision encoder collects the position of the dust extraction hood in real time and feeds it back to the PLC controller.

[0063] Step 3.3: Dynamic Matching of Negative Pressure The negative pressure adjustment module adjusts the negative pressure value according to real-time processing parameters: Basic negative pressure: 60 kPa; Dynamic compensation: negative pressure increases by 5 kPa for every 10 W increase in laser power; negative pressure increases by 2 kPa for every 200 mm / s decrease in processing speed.

[0064] Phase Four: Synchronization Trigger Mechanism Step 4.1: Setting the splicing transition area The galvanometer flight system sets a 0.5mm wide transition zone at the Y-axis end of each rectangular field of view unit. Before the laser beam 4 enters the transition zone, the galvanometer controller sends a pre-trigger signal to the PLC.

[0065] Step 4.2: Dual-system synchronous triggering Triggering timing: When the laser beam 4 is 1mm away from the boundary of the transition zone, the galvanometer system sends a trigger signal; after receiving the signal, the PLC controller immediately sends a displacement command to the follow drive module 200, and the X / Y axis servo motor starts 0.5ms in advance to ensure that the dust extraction hood 5 has completed the position switching when the laser reaches the transition zone; through the motion control card, the motion phase of the dust extraction hood 5 is locked with the scanning phase of the galvanometer, and the phase difference is ≤0.1ms.

[0066] Step 4.3: Enhancement of boundary negative pressure Within the transition zone, the energy gradient analysis unit calculates the rate of energy change, and the negative pressure adjustment module temporarily increases the negative pressure to 70 kPa for the same duration as the transition zone passage time, ensuring that the increase in dust caused by the energy surge is completely captured.

[0067] The synchronous triggering mechanism in this embodiment is achieved through pre-trigger signals and electronic phase locking, and can be directly reused in the processing of other thin-film batteries such as cadmium telluride and copper indium gallium selenide without additional hardware modifications. The dynamic tracking error between the dust extraction hood 5 and the etching point is ≤0.5mm, and the coaxiality deviation is ≤0.2mm, ensuring that the negative pressure flow field always covers the etching point; the dust capture rate in the transition zone is increased from 85% in the traditional method to 95%, and the boundary residue is <0.05mg / m²; the phase difference between the galvanometer scanning and dust extraction tracking is <0.1ms, with no motion lag; the overall battery yield is significantly improved.

[0068] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The above embodiments only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this application's patent. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this application, and these all fall within the protection scope of this application.

[0069] It should be noted that when an element is referred to as being "fixed to" or "set on" another component, it can be directly or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly or indirectly connected to the other component. It should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0070] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" or "several" means two or more, unless otherwise explicitly specified.

[0071] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

Claims

1. A laser-etched dust extraction flight follower system, characterized in that, include: A focused dust extraction module, comprising a dust extraction hood, a dust extraction channel, and a filter unit, wherein the dust extraction hood covers the etching points of the laser beam; A follow-drive module controls the dust extraction hood to move in the XY plane, which is parallel to the surface of the thin-film solar cell substrate. The collaborative control unit includes a follower PLC controller and a motion control card. The follower PLC controller synchronously acquires path planning information from the galvanometer flight system of the laser beam and generates displacement commands. The displacement commands are sent to the follower drive module through the motion control card. The path planning information synchronously acquired from the galvanometer flight system includes: multiple rectangular field-of-view units divided by the path planning unit of the galvanometer flight system into thin-film solar cell substrates, the grid number and grid coordinates of the rectangular field-of-view units, and the serpentine scanning path generated by the path planning unit on each rectangular field-of-view unit. The galvanometer scanning module of the galvanometer flight system sets a stitching boundary transition zone between adjacent rectangular field-of-view units through the path planning unit. The PLC controller of the galvanometer flight system controls the energy gradient of the laser beam emitted by the galvanometer scanning module within the stitching boundary transition zone between adjacent rectangular field-of-view units based on displacement data. That is, when the laser beam emitted by the galvanometer scanning module enters the stitching boundary transition zone between adjacent rectangular field-of-view units, the PLC controller triggers the laser beam and controls the energy gradient of the laser beam based on displacement data to realize the stitching of the etching lines between adjacent rectangular field-of-view units. There is an energy transition of 0.1ms-0.5ms at the boundary of the laser beam. The control logic of the negative pressure dynamic adjustment module is that the negative pressure value P is calculated through the following coupling model: ;in, Power coefficient 0.5 kPa / W; for every 10W increase in laser power, negative pressure increases by 5 kPa. With a speed coefficient of 100 kPa·s / mm, the negative pressure increases by 0.375 kPa when the processing speed decreases from 800 mm / s to 200 mm / s. Energy gradient coefficient: 2 kPa·mm² / J; for every 5 J / mm² increase in energy gradient, negative pressure increases by 10 kPa. The base negative pressure is 50 kPa, which is the minimum requirement for dust particles with a diameter of 2 μm. When the laser moves from the front field of view unit to the target field of view unit: the energy gradient analysis unit receives the path switching signal of the galvanometer system 5 ms in advance and predicts the boundary region; based on the laser pulse interval of adjacent paths, it calculates the energy gradient. : ,in, It is the change in energy. The boundary area is defined as follows: the follow drive module and the galvanometer scanning module of the galvanometer flight system are triggered synchronously. The follow drive module moves according to the displacement command and controls the center of the dust extraction hood to follow the laser beam etching point coaxially.

2. The laser etching dust extraction flight follower system according to claim 1, characterized in that, The thin-film solar cell is fixed on the motion platform module and moves synchronously with the motion platform module. The preset speed of the motion platform module is 200mm / s-800mm / s. The overall feed direction of the motion platform module is the Y-axis direction. The vertical direction of the Y-axis direction of the motion platform module in the horizontal plane is the X-axis direction, and the vertical direction of the XY plane is the Z-axis direction.

3. The laser etching dust extraction flight follower system according to claim 1, characterized in that, The focusing dust extraction module includes a conical dust extraction port, an annular air blowing channel arranged on the inner wall of the conical dust extraction port, and the end of the conical dust extraction port is connected to the dust extraction channel, which is equipped with a HEPA filter unit.

4. The laser etching dust extraction flight follower system according to claim 1, characterized in that, The follow drive module includes an X-axis servo motor, a Y-axis servo motor, a ball screw transmission mechanism, and a high-precision encoder. The follow drive module's response frequency in the X-axis direction matches the galvanometer scanning frequency, and its movement speed in the Y-axis direction is synchronized with the motion platform module.

5. The laser etching dust extraction flight follower system according to claim 1, characterized in that, The follow drive module moves according to the displacement command and controls the coaxiality deviation between the center of the dust extraction hood and the etching point of the laser beam to be less than 0.2mm.

6. The laser etching dust extraction flight follower system according to claim 1, characterized in that, The follow drive module also includes a Z-axis fine-tuning structure, which controls the distance between the dust extraction cover and the surface of the thin-film solar cell substrate to be within the range of 20±5mm.

7. The laser etching dust extraction flight follower system according to claim 1, characterized in that, It also includes a negative pressure dynamic adjustment module, which adjusts the dust extraction negative pressure according to the laser beam power and the moving speed of the thin-film solar cell in the Y-axis direction.

8. A laser etching dust extraction flight follower method, applied to the laser etching dust extraction flight follower system according to any one of claims 1-7, characterized in that, Including the following steps: Initialize the position of the dust extraction hood, and control the distance between the dust extraction hood and the surface of the thin-film solar cell substrate to 15±5mm through the Z-axis fine-tuning structure. calibrate the coaxiality between the center of the dust extraction hood and the etching point of the laser beam to within 0.2mm. Displacement commands are generated by obtaining path planning information from the galvanometer flight system through the PLC controller. The path planning information includes the grid number, grid coordinates, and serpentine scanning path on each rectangular field of view unit. The etching point following control is achieved by using a motion control card to control the X-axis servo motor and Y-axis servo motor of the following drive module to control the dust extraction hood of the focusing following module to move along the X-axis and Y-axis directions. Under the control of the displacement command, the center of the dust extraction hood always follows the serpentine scanning path of the laser beam etching point.

9. The laser etching dust extraction flight following method according to claim 8, characterized in that, The steps for synchronous triggering of the follow-drive module and the galvanometer scanning module of the galvanometer flight system are as follows: The path planning unit of the galvanometer flight system sets up a stitching transition zone between adjacent rectangular field-of-view units. When the laser beam enters the stitching transition zone of the front rectangular field-of-view unit, the galvanometer scanning module is triggered to start, and the follow-up drive module is triggered to start synchronously.

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