A handling apparatus

Abstract

The application discloses a carrying device for carrying a record disc wheel, which comprises a shell assembly, a storage assembly, a mechanical arm assembly and a transfer assembly. The shell assembly comprises a placing cavity. The bottom of the placing cavity is provided with the transfer assembly. The storage assembly comprises a support which is slidably installed in the placing cavity and is used for placing the record disc wheel. The mechanical arm assembly comprises a mechanical arm part which is arranged in the placing cavity and is used for grabbing the record disc wheel. The mechanical arm part has a first state and a second state. When the mechanical arm part is in the first state, the mechanical arm part grabs the record disc wheel and places the grabbed record disc wheel on the support. When the mechanical arm part is in the second state, the mechanical arm part places the grabbed record disc wheel on the support. Through the cooperative arrangement of the shell assembly, the storage assembly, the mechanical arm assembly and the transfer assembly, the record disc wheel can be quickly carried, and the carrying efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a handling device. Background Technology

[0002] In the semiconductor industry, during substrate processing, the dressing wheel used in surface grinding equipment is a key component of the grinding and polishing equipment. It is mainly used to maintain the flatness of the grinding / polishing disc, remove embedded abrasive, scratches or unevenness on the surface of the grinding disc through mechanical friction, restore the surface flatness of the grinding disc, and ensure processing quality and efficiency.

[0003] As the semiconductor industry develops, substrate sizes continue to increase, leading to larger equipment and consequently, larger and heavier tooling fixtures—dressing wheels. Traditionally, dressing wheels are handled manually, which is becoming increasingly difficult for operators, increases personal safety risks, and is also inefficient. Summary of the Invention

[0004] This application proposes a handling device that replaces manual handling to ensure personal safety and improve efficiency.

[0005] To achieve the above objectives, this application discloses the following technical solutions:

[0006] A handling device for handling a dressing wheel, the handling device comprising: a housing assembly, a storage assembly, a robotic arm assembly, and a transfer assembly;

[0007] The housing assembly includes: a placement cavity; the transfer assembly is disposed at the bottom of the placement cavity;

[0008] The storage component includes: a bracket, which is slidably mounted in the placement cavity, and is used to place and store the dressing wheel;

[0009] The robotic arm assembly includes: a robotic arm component; the robotic arm component is disposed in the placement cavity and is used to grasp the dressing wheel;

[0010] The robotic arm component has a first state and a second state; when the robotic arm component is in the first state, the robotic arm component grasps the dressing wheel and places the grasped dressing wheel on the support; when the robotic arm component is in the second state, the robotic arm component removes the grasped dressing wheel from the support.

[0011] In some embodiments, the robotic arm component includes: a robotic arm, the fixed end of which is fixed to the outer wall of the placement cavity, and the gripping end of which is used to grip the dressing wheel;

[0012] The robot arm consists of two robotic arms, with a clamping space formed between the gripping ends of the two robotic arms. This clamping space is used to grip the dressing wheel.

[0013] In some embodiments, the robotic arm includes: a gripper, a first drive mechanism, and a second drive mechanism;

[0014] The first drive mechanism is fixed to the outer wall of the placement cavity, and its power output end is connected to the second drive mechanism, which can drive the second drive mechanism to move linearly along the first direction.

[0015] The power output end of the second drive mechanism is connected to the gripper, which can drive the gripper to move in the second direction;

[0016] Wherein, the first direction and the second direction are perpendicular to each other.

[0017] In some embodiments, the bracket includes: a bracket body and a first axial drive member;

[0018] The bracket body is slidably connected to the placement cavity via a sliding structure. The first axial drive member is disposed in the placement cavity, and the drive end of the first axial drive member is connected to the bracket body, which can drive the bracket body to move along the axial direction of the placement cavity.

[0019] In some embodiments, the support body includes: a placement platform for placing the dressing wheel; the placement platform is a plurality of platforms arranged along the axial direction.

[0020] In some embodiments, the support body further includes: a sliding plate; the placement cavity is provided with a slide rail that cooperates with the sliding plate;

[0021] The placement platform is axially mounted on the slide plate;

[0022] The placement platform includes: a rotating shaft, a rotating shaft drive, and a conveyor belt; the end of the rotating shaft is rotatably mounted on the slide plate; the rotating shaft includes at least: a main rotating shaft and a slave rotating shaft;

[0023] The conveyor belt is wound between the main shaft and the slave shaft; the shaft drive drives the main shaft to rotate.

[0024] In some embodiments, the top of the placement cavity has a cavity opening, the shape of which is adapted to the shape of the support body so that the support body can pass through the cavity opening.

[0025] In some embodiments, a portion of an outer side wall of the placement cavity protrudes outward to form a docking platform. The upper surface of the docking platform is flat, and the docking platform is disposed below the movement path of the robotic arm component to receive the robotic arm component when it grasps the dressing wheel.

[0026] In some embodiments, the placement cavity and the transfer assembly are connected by a second axial drive;

[0027] The second axial drive component is fixed to the transfer assembly. The second axial drive component can drive the placement cavity to move linearly along its axis, thereby driving the docking platform to move linearly along its axis.

[0028] In some embodiments, the housing assembly further includes: a waste liquid collection tank;

[0029] The waste liquid collection tank is installed inside the bottom of the placement cavity.

[0030] In some embodiments, the transfer assembly includes: a support bracket and pulleys;

[0031] The top surface of the support bracket is located at the bottom of the placement cavity, and the bottom surface of the support bracket is provided with pulleys.

[0032] As can be seen from the above technical solution, the handling equipment, through the coordinated arrangement of the housing assembly, storage assembly, robotic arm assembly, and transfer assembly, can quickly move the dressing wheel, improving handling efficiency. Furthermore, it eliminates the need for operator handling, effectively mitigating personal safety risks. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort, and this application can be applied to other similar scenarios based on the provided drawings, all of which fall within the scope of protection of this invention. Unless obvious from the linguistic context or otherwise specified, the same reference numerals in the drawings represent the same structure or operation.

[0034] Figure 1 This is a first axial view of the conveying equipment provided in the embodiments of this application;

[0035] Figure 2 This is a top view of the conveying equipment provided in the embodiments of this application;

[0036] Figure 3 This is a second axial view of the conveying equipment provided in an embodiment of this application;

[0037] Figure 4 This is a front view of the handling equipment provided in the embodiments of this application;

[0038] Figure 5 This is a first partial enlarged view of the handling equipment provided in the embodiments of this application;

[0039] Figure 6 This is a second partial enlarged view of the handling equipment provided in the embodiments of this application;

[0040] Figure 7 A partial structural schematic diagram of the robotic arm assembly of the handling equipment provided in the application embodiment;

[0041] Figure 8 A schematic diagram of the gripper structure of the robotic arm component of the handling equipment provided in the application embodiment;

[0042] Figure 9 This is a third-axis view of the handling equipment provided in an embodiment of this application (with the robotic arm assembly hidden).

[0043] Figure 10 A schematic diagram showing the fit between the housing assembly and the support platform;

[0044] Figure 11 This is a schematic diagram of the waste liquid collection tank for the housing assembly;

[0045] Figure 12 This is a schematic diagram of the pulley structure of the transfer component;

[0046] in:

[0047] 10 is the shell assembly, 11 is the placement cavity, 12 is the cavity opening, 13 is the waste liquid collection tank, and 14 is the docking platform;

[0048] 20 is a storage component, 21 is a support, 211 is the support body, 212 is a placement platform, 213 is a sliding plate, 214 is a rotating shaft, and 215 is a conveyor belt;

[0049] 30 is a robotic arm assembly, 31 is a robotic arm, 311 is a gripper, 312 is a first drive mechanism, 313 is a second drive mechanism, and 314 is a connecting rod;

[0050] 40 is the transfer component, 41 is the support bracket, and 42 is the pulley;

[0051] 50 is the support platform;

[0052] 60 is the second axial drive component. Detailed Implementation

[0053] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the application and not intended to limit it. The described embodiments are only a part of the embodiments of the present application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without inventive effort are within the scope of protection of the present application.

[0054] For the purposes of this application, the following structures are described in detail with reference to the accompanying drawings:

[0055] like Figure 1 As shown, this application provides a handling device for handling a dressing wheel. The handling device may include: a housing assembly 10, a storage assembly 20, a robotic arm assembly 30, and a transfer assembly 40.

[0056] like Figure 3 As shown, the housing assembly 10 may include: a placement cavity 11; a transfer assembly 40 is provided at the bottom of the placement cavity 11.

[0057] like Figure 3 As shown, the storage assembly 20 may include a bracket 21, which is slidably mounted on the placement cavity 11 and is used to place the storage dressing wheel.

[0058] like Figure 2 As shown, the robotic arm assembly 30 may include: a robotic arm component; the robotic arm component is disposed in the placement cavity 11 and is used to grasp the dressing wheel.

[0059] The robotic arm component has a first state and a second state; when the robotic arm component is in the first state, the robotic arm component grasps the dressing wheel and places the grasped dressing wheel on the support 21; when the robotic arm component is in the second state, the robotic arm component places the grasped dressing wheel from the support 21.

[0060] In the above technical solution, the placement cavity 11 and the transfer component 40 are assembled, the bracket 21 is slidably mounted on the placement cavity 11, and the robotic arm component is mounted on the placement cavity 11. When the dressing wheel needs to be moved, the handling equipment moves to the location where the dressing wheel is placed via the transfer component 40, and then uses the robotic arm component (in its first state) to grab the dressing wheel and transfer it to the bracket 21. After the dressing wheel is on the bracket 21, the transfer component 40 moves the handling equipment to the final destination for moving the dressing wheel, and then uses the robotic arm component (in its second state) to grab the dressing wheel and transfer it to the final destination. Through the coordinated arrangement of the housing component 10, storage component 20, robotic arm component 30, and transfer component 40, the dressing wheel can be moved quickly, improving handling efficiency. Furthermore, it avoids the need for manual handling, effectively mitigating personal safety risks.

[0061] To ensure the robotic arm components move more smoothly when gripping the dressing wheel, such as Figure 4 and Figure 5 As shown, the robotic arm component may include: a robotic arm 31, the fixed end of which is fixed to the outer wall of the placement cavity 11, and the clamping end of which is used to clamp the dressing wheel.

[0062] The robot arm 31 consists of two robotic arms, and a clamping space is formed between the clamping ends of the two robotic arms 31. The clamping space is used to clamp the dressing wheel.

[0063] In the above technical solution, the fixed ends of the robotic arm 31 are all located on the outer wall of the placement cavity 11, so that a clamping space is formed between the clamping ends of the robotic arm 31. In use, when the robotic arm 31 wants to grab the dressing wheel, the clamping ends of the robotic arm 31 move towards each other to clamp the dressing wheel; when the robotic arm 31 wants to release the dressing wheel, the clamping ends of the robotic arm 31 move away from each other to clamp and release the dressing wheel.

[0064] Based on the above technical solutions, such as Figure 6 As shown, the robotic arm 31 may include: a gripper 311, a first drive mechanism 312, and a second drive mechanism 313.

[0065] The first drive mechanism 312 is fixed on the outer wall of the placement cavity 11, and its power output end is connected to the second drive mechanism 313, which can drive the second drive mechanism 313 to move linearly along the first direction.

[0066] The power output end of the second drive mechanism 313 is connected to the gripper 311, and can drive the gripper 311 to move in the second direction.

[0067] The first direction and the second direction are perpendicular to each other.

[0068] In the above technical solution, the first drive mechanism 312, the second drive mechanism 313, and the gripper 311 are connected in sequence; in use, as... Figure 6 As shown, the first drive mechanism 312 can drive the gripper 311 to move in the first direction X, and the second drive mechanism 313 can drive the gripper 311 to move in the second direction Y. The first direction X can be the width direction of the placement cavity 11, and the second direction Y can be the length direction of the placement cavity 11. It should be noted that the robotic arm 31 can adopt a nested structure, such as... Figure 7 As shown, the robotic arm 31 also includes a connecting rod 314, which may include a first connecting rod and a second connecting rod connected in sequence. The first connecting rod is telescopic relative to the second connecting rod, and the outer side of the first connecting rod has a raised structure that serves as a limit. Additionally, the first drive mechanism 312 and the second drive mechanism 313 can be motors or cylinders. Wherein, for example... Figure 8As shown, the gripper 311 has an arc-shaped toothed groove with teeth on the inner side. When the gripper 311 is tightly engaged with the dressing wheel, it grips the dressing wheel. It should be noted that the gripper 311 and the second drive mechanism 313 are detachably connected, and different grippers 311 can be replaced according to different dressing wheels.

[0069] In order to allow the support 21 to slide within the placement cavity 11, such as Figure 4 As shown, the bracket 21 may include: a bracket body 211 and a first axial drive member.

[0070] The bracket body 211 is slidably connected to the placement cavity 11 through a sliding structure. The first axial drive member is disposed in the placement cavity 11, and the drive end of the first axial drive member is connected to the bracket body 211, which can drive the bracket body 211 to move along the axial direction of the placement cavity 11.

[0071] In the above technical solution, during use, when the support body 211 needs to place or unload the dressing wheel, the first axial drive component is activated to move the support body 211 upward along the axial direction of the placement cavity 11, moving to... Figure 4 The position is as follows: After the dressing wheel is placed or unloaded, the first axial drive component is activated, causing the bracket body 211 to move downwards along the axial direction of the placement cavity 11 until it reaches the desired position. Figure 4 The middle position is sufficient; move until... Figure 2 The position in the middle is fine.

[0072] To accommodate multiple dressing wheels, the support body 211 may include: placement platforms 212 for placing dressing wheels; multiple placement platforms 212 are arranged axially. During use, the first axial drive unit can drive the support body 211 to move axially along the placement cavity 11, ensuring that the loading and unloading of each placement platform 212 matches the position of the robotic arm component. This allows the robotic arm component to place dressing wheels on or remove dressing wheels from the placement platform 212. The number of placement platforms 212 can be eight.

[0073] In the specific use of the handling equipment, an example can be given: After the handling equipment arrives at the correct handling point, the loading of the dressing wheel is initiated. Once the dressing wheel reaches the fixed position, the handling equipment begins loading the dressing wheel, and so on, loading other dressing wheels in a cyclical manner. During the loading of dressing wheels, the bottom placement platform 212 rises to be flush with the plane of the gripper 311. The gripper 311 grasps the dressing wheel and places it on the placement platform 212. Each time a dressing wheel is placed, one layer of the placement platform 212 descends. Furthermore, for the unloading of dressing wheels from the support body 211, after the handling equipment arrives at the correct handling point, the dressing wheel unloading is initiated, and the handling equipment begins unloading dressing wheels sequentially. When removing a dressing wheel from the placement platform 212, it first grasps from the top placement platform 212. Each time a dressing wheel is removed, one layer of the placement platform 212 rises until the bottom placement platform 212 is flush with the gripper 311, thus completing the dressing wheel unloading.

[0074] like Figure 5 As shown, the support body 211 may further include: a sliding plate 213; the placement cavity 11 is provided with a slide rail that cooperates with the sliding plate 213 to realize the relative sliding of the support body 211 and the support body 211.

[0075] The placement platform 212 is set on the slide plate 213 along the axial direction.

[0076] The placement platform may include: a rotating shaft 214, a rotating shaft drive and a conveyor belt 215; the end of the rotating shaft 214 is rotatably mounted on the slide plate 213; the rotating shaft includes at least: a main rotating shaft and a slave rotating shaft.

[0077] The conveyor belt 215 is wound between the main shaft and the driven shaft; the shaft drive unit drives the main shaft to rotate.

[0078] In the above technical solution, by rotating the main shaft forward or backward, the dressing wheel placed on the placement platform 212 can be moved away from and closer to the robotic arm component, allowing the robotic arm component to better grasp the dressing wheel. Additionally, the slide plate 213 may include a first slide plate and a second slide plate. One end of the shaft is rotatably mounted on the first slide plate, and the other end is rotatably mounted on the second slide plate. The shaft drive component is disposed within the slide plate 213, and the shaft drive component can be a motor. Furthermore, multiple slave shafts can be provided along the main shaft and slave shafts. The conveyor belt 215 is positioned close to the two slide plates 213, increasing the contact area between the shaft 214 and the dressing wheel to ensure stable movement of the dressing wheel during placement on the placement platform 212.

[0079] To allow for a longer axial movement of the support body 211, such as... Figure 4As shown, the top of the placement cavity 11 is provided with a cavity opening 12. The shape of the cavity opening 12 is adapted to the shape of the support body 211 so that the support body 211 can pass through the cavity opening 12. It can be understood that the minimum size of the cavity opening 12 is greater than the maximum size of the support body 211 so that the support body 211 can pass freely in the cavity opening 12.

[0080] To prevent the dressing wheel from falling off during movement, such as Figure 3 , Figure 9 and Figure 10 As shown, a portion of the outer wall of the placement cavity 11 protrudes outward to form a docking platform 14. The upper surface of the docking platform 14 is flat, and it is positioned below the movement path of the robotic arm component to support the robotic arm component when gripping the dressing wheel. When gripping the dressing wheel, the transport device is moved to the edge of the support platform 50, making the upper surface of the docking platform 14 flush with the upper surface of the support platform 50. The robotic arm component then grips the dressing wheel, and the lower surface of the dressing wheel is dragged from the upper surface of the support platform 50 to the upper surface of the docking platform 14. The same principle applies when gripping a dressing wheel from the transport device onto the support platform 50.

[0081] In order to adjust the relative height of the docking platform 14 so that it is level with the height of the different support platforms 50, the placement cavity 11 and the transfer assembly 40 are connected by a second axial drive 60.

[0082] The second axial drive component 60 is fixed to the transfer assembly 40. The second axial drive component 60 can drive the placement cavity 11 to move linearly along its axis, thereby driving the docking platform 14 to move linearly along its axis. In addition, the second axial drive component 60 can be a motor or a cylinder.

[0083] In the above technical solutions, such as Figure 10 As shown, the second axial drive 60 drives the placement cavity 11 to move linearly along its axis, which in turn drives the docking platform 14 to move linearly along its axis. When the second axial drive 60 drives the docking platform 14 to reach the preset height, it stops adjusting so that the upper surface of the docking platform 14 is flush with the upper surface of the support platform 50.

[0084] In order to collect the waste liquid from the repair process, such as Figure 9 and Figure 11 As shown, the housing assembly 10 may further include a waste liquid collection tank 13; the waste liquid collection tank 13 is fitted into the bottom of the placement cavity 11. Specifically, the waste liquid collection tank 13 is provided with a raised strip, and the bottom of the placement cavity 11 is provided with a grooved strip that matches the raised strip, the grooved strip being a slide rail.

[0085] To make the transfer process smoother, such as Figure 4 and Figure 12As shown, the transfer assembly 40 may include a support bracket 41 and a pulley 42; the top surface of the support bracket 41 is disposed at the bottom of the placement cavity 11, and the bottom surface of the support bracket 41 is provided with the pulley 42. During use, a thrust can be applied to the support bracket 41 to cause the pulley 42 to rotate (that is, the pulley 42 enables the device to move horizontally in all directions on the ground), so that the transport equipment can be moved to its destination.

[0086] It should be noted that this handling equipment is also equipped with an identification system. The gripper 311 uses infrared to measure the straight-line distance to the support table 50. When the required distance is reached, the gripper 311 begins to grasp the dressing wheel. In addition, this handling equipment is equipped with indicator lights. When the handling equipment receives a work signal, the indicator light displays green; in standby mode, it displays yellow; and in abnormal mode, it displays red. Sensors are installed inside the indicator lights to control the equipment's running trajectory and the distance between it and the dressing wheel grinding equipment. The gripper 311 grasps the dressing wheel according to the preset distance to the dressing wheel grinding equipment. A power switch is located on the side of the placement cavity 11 to control the equipment's power supply. Furthermore, the support table 50 can be used as a processing machine table.

[0087] In the above context, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0088] In the description of the embodiments of this application, unless otherwise stated, " / " means "or". For example, A / B can mean A or B. "And / or" in this article is merely a description of the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone.

[0089] It should be noted that, for ease of description, only the parts relevant to the application are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0090] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed, and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. The scope of this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described application concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A handling device for handling a dressing wheel, characterized in that, The handling equipment includes: a housing assembly (10), a storage assembly (20), a robotic arm assembly (30), and a transfer assembly (40). The housing assembly (10) includes: a placement cavity (11); the transfer assembly (40) is disposed at the bottom of the placement cavity (11). The storage assembly (20) includes: a bracket (21) slidably mounted in the placement cavity (11), the bracket (21) being used to place and store the dressing wheel; The robotic arm assembly (30) includes: a robotic arm component; the robotic arm component is disposed in the placement cavity (11) and is used to grasp the dressing wheel; The robotic arm component has a first state and a second state; when the robotic arm component is in the first state, the robotic arm component grasps the dressing wheel and places the grasped dressing wheel on the bracket (21); when the robotic arm component is in the second state, the robotic arm component places the grasped dressing wheel from the bracket (21); A portion of the outer side wall of the placement cavity (11) protrudes outward to form a docking platform (14). The upper surface of the docking platform (14) is flat, and the docking platform (14) is located below the movement path of the robotic arm component to support the robotic arm component in grasping the dressing wheel. The placement cavity (11) and the transfer assembly (40) are connected by a second axial drive (60); The second axial drive (60) is fixed on the transfer assembly (40). The second axial drive (60) can drive the placement cavity (11) to move linearly along its axis, so as to drive the docking platform (14) to move linearly along its axis.

2. The handling equipment as described in claim 1, characterized in that, The robotic arm component includes: a robotic arm (31), the fixed end of which is fixed to the outer wall of the placement cavity (11), and the clamping end of which is used to clamp the dressing wheel; The number of robotic arms (31) is two, and a clamping space is formed between the clamping ends of the two robotic arms (31), which is used to clamp the dressing wheel.

3. The handling equipment as described in claim 2, characterized in that, The robotic arm (31) includes: a gripper (311), a first drive mechanism (312), and a second drive mechanism (313); The first drive mechanism (312) is fixed on the outer wall of the placement cavity (11), and its power output end is connected to the second drive mechanism (313), which can drive the second drive mechanism (313) to move linearly in the first direction; The power output end of the second drive mechanism (313) is connected to the gripper (311) and can drive the gripper (311) to move in the second direction; Wherein, the first direction and the second direction are perpendicular to each other.

4. The handling equipment as described in claim 1, characterized in that, The bracket (21) includes: a bracket body (211) and a first axial drive member; The bracket body (211) is slidably connected to the placement cavity (11) through a sliding structure. The first axial drive member is disposed in the placement cavity (11), and the drive end of the first axial drive member is connected to the bracket body (211), which can drive the bracket body (211) to move along the axial direction of the placement cavity (11).

5. The handling equipment as described in claim 4, characterized in that, The support body (211) includes: a placement platform (212) for placing the dressing wheel; the placement platform (212) is a plurality of platforms arranged along the axial direction.

6. The handling equipment as described in claim 5, characterized in that, The support body (211) further includes: a sliding plate (213); the placement cavity (11) is provided with a slide rail that cooperates with the sliding plate (213); The placement platform (212) is axially mounted on the slide plate (213); The placement platform includes: a rotating shaft (214), a rotating shaft drive, and a conveyor belt (215); the end of the rotating shaft (214) is rotatably disposed on the slide plate (213); the rotating shaft includes at least: a main rotating shaft and a slave rotating shaft; The conveyor belt (215) is wound between the main shaft and the slave shaft; the shaft drive drives the main shaft to rotate.

7. The handling equipment as described in claim 4, characterized in that, The top of the placement cavity (11) is provided with a cavity opening (12), the shape of which is adapted to the shape of the support body (211) so that the support body (211) can pass through the cavity opening (12).

8. The handling equipment as described in claim 1, characterized in that, The housing assembly (10) further includes: a waste liquid collection tank (13); The waste liquid collection tank (13) is fitted into the bottom of the placement cavity (11).

9. The handling equipment as described in claim 1, characterized in that, The transfer assembly (40) includes: a support bracket (41) and a pulley (42). The top surface of the support bracket (41) is located at the bottom of the placement cavity (11), and the bottom surface of the support bracket (41) is provided with a pulley (42).

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