一种氮化硅浆料球磨工艺

By synergistically dispersing silicon nitride powder of a specific shape, organic adhesive of a specific molecular weight, and block polymer, the dispersibility and stability issues of silicon nitride slurry during preparation were solved, achieving high-quality slurry preparation and product molding results.

CN121226027BActive Publication Date: 2026-07-17江苏富乐华功率半导体研究院有限公司 +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
江苏富乐华功率半导体研究院有限公司
Filing Date
2025-09-19
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Silicon nitride slurry has problems with substandard dispersibility and imbalance of powder material ratio during preparation, which leads to abnormalities such as bumps, lines, holes, cracks and indentations in the product, affecting product yield and quality.

Method used

Silicon nitride slurry was prepared by ball milling using silicon nitride powder of a specific shape, organic adhesive of a specific molecular weight, and block polymer as dispersants. Combined with the synergistic dispersing effect of linseed oil and block polymer, a stable bonding network was formed, which improved the fluidity and dispersibility of the slurry.

Benefits of technology

It significantly improves the dispersibility and stability of silicon nitride slurry, reduces product defects, and enhances the product qualification rate and casting effect during the production process.

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Abstract

本发明公开了一种氮化硅浆料球磨工艺,涉及陶瓷材料技术领域。包括以下过程:将分散剂加至溶剂后,依次加入氮化硅粉、烧结助剂、粘结剂混合,按序进行球磨、过筛、脱泡得到氮化硅浆料;所述球磨的转速为30~50r / min,球磨时间为8~20h;所述氮化硅浆料由以下成分组成:按重量份数计:15~30份溶剂,25~40份氮化硅粉,6~12份粘结剂,2~6份烧结助剂,1~5份分散剂;其中,氮化硅粉的形状包括块状、片状、球状中的一种或多种;所述粘结剂为有机胶,其中,有机胶的分子量为10000~80000。本申请制备的氮化硅浆料具有良好的流延良率,由此浆料制备得到的生胚具有优异的良品率。
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