Helium detection apparatus and method of controlling the same

Abstract

This application discloses a helium detection device and its control method, relating to the field of leak detection technology for vacuum chambers. It aims to improve the reliability of the helium detection device during leak detection. The helium detection device includes a chamber to be tested, a helium detection component, a valve, a first pressure detection component, a second pressure detection component, and a controller. The chamber to be tested has a first connection port. The helium detection component has an internal cavity and a second connection port communicating with the cavity. The valve is connected between the first and second connection ports and is used to connect or block the first and second connection ports. The first pressure detection component detects a first pressure value within the chamber to be tested. The second pressure detection component detects a second pressure value within the cavity. The controller is configured to close the valve when the absolute value of the difference between the first and second pressure values ​​is greater than a threshold. The helium detection device in this application is used for leak detection.

Description

Technical Field

[0001] This application relates to the field of leak detection technology for vacuum chambers, and in particular to a helium detection device and its control method. Background Technology

[0002] A helium detector is a device used to detect leaks in vacuum chambers and is widely used in the semiconductor industry. A helium detector is typically connected to the chamber under test via a valve. By controlling the opening and closing of the valve, the connection between the helium detector and the chamber under test can be established or severed.

[0003] Before leak testing, the valve is closed, and the chamber to be tested and the helium detector are evacuated separately. After the evacuation is completed, the valve is opened to perform leak testing. Therefore, the opening and closing of the valve directly affects the reliability of the helium detector during the detection process. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a helium detection device and its control method to improve the reliability of the helium detection device during leak detection.

[0005] This application is achieved through the following technical solution.

[0006] This application provides a helium detection device, which includes a test chamber, a helium detection component, a valve, and a first pressure detection component. The test chamber has a first connection port. The helium detection component has a cavity inside and a second connection port communicating with the cavity. The valve is connected between the first connection port and the second connection port, and the valve is used to connect or block the first connection port and the second connection port. The first pressure detection component is used to detect a first pressure value in the test chamber. The second pressure detection component is used to detect a second pressure value in the cavity. A controller is electrically connected to the valve, the first pressure detection component, and the second pressure detection component; the controller is configured to control the valve to be in a closed state in response to a valve opening command when the absolute value of the difference between the first pressure value and the second pressure value is greater than a threshold.

[0007] In the technical solution of this application embodiment, the valve is connected between the first connection port and the second connection port. By controlling the opening and closing of the valve, the chamber to be tested and the cavity can be connected or blocked.

[0008] Since the first pressure detection component can detect the first pressure value in the chamber under test, and the second pressure detection component can detect the second pressure value inside the chamber, the pressure status of the chamber under test and inside the chamber can be monitored. Because the valve is closed when the absolute value of the difference between the first and second pressure values ​​is greater than a threshold, if the absolute value of the difference between the first and second pressure values ​​does not meet the requirement, the valve will remain closed. This closed state prevents accidental valve opening and gas from rushing into the chamber under test when the pressure in the chamber under test is significantly greater than the pressure inside the chamber (i.e., the difference between the first and second pressure values ​​is greater than the threshold), thus reducing the probability of damage to the helium detection component. On the other hand, it also prevents gas from entering the chamber under test due to a sudden increase in pressure inside the chamber, causing the pressure in the chamber under test to be significantly lower than the pressure inside the chamber (i.e., the difference between the second and first pressure values ​​is greater than the threshold), thus reducing the probability of gas contamination in the chamber under test and improving the reliability of the helium detection equipment during leak detection.

[0009] In some embodiments of this application, the controller is configured to control the valve to remain closed in response to a valve opening command, provided that a first pressure value is greater than a second pressure value and the absolute value of the difference is greater than a threshold.

[0010] With this configuration, the valve will remain closed even if the user accidentally triggers the valve opening command. This prevents the valve from being opened unnecessarily, avoiding the situation where the pressure in the test chamber is significantly higher than the pressure inside the chamber (i.e., the difference between the first and second pressure values ​​exceeds a threshold). In such cases, the valve opening could cause gas to rush into the test chamber, reducing the probability of damage to the helium detection components and improving the reliability of the helium detection equipment.

[0011] In some embodiments of this application, the controller is configured to switch the valve from an open state to a closed state when the second pressure value is greater than the first pressure value and the absolute value of the difference is greater than a threshold.

[0012] With this setup, if the pressure inside the cavity suddenly increases, causing the pressure inside the chamber to be tested to be significantly lower than the pressure inside the cavity (i.e., the difference between the second pressure value and the first pressure value is greater than a threshold), the valve will switch from the open state to the closed state. This prevents gas inside the cavity from entering the chamber to be tested due to the valve opening, thereby reducing the probability of gas contamination in the chamber to be tested and improving the reliability of the helium detection equipment during leak detection.

[0013] In some embodiments of this application, in response to a valve opening command, the valve is controlled to switch from a closed state to an open state when the first pressure value is greater than the second pressure value and the absolute value of the difference is less than or equal to a threshold.

[0014] With this setting, if the absolute value of the difference is less than or equal to the threshold, the valve can be opened after the user outputs the valve opening command, so that the chamber under test and the cavity body are connected, which will facilitate the subsequent leak detection of the chamber under test.

[0015] In some embodiments of this application, the helium detection device further includes a helium gas generating component and a notification module. Both the helium gas generating component and the notification module are electrically connected to the controller. The helium gas generating component is used to inject helium gas into the outer periphery of the chamber to be tested. The controller is also configured to:

[0016] In response to a detection command, after the control valve switches from the closed state to the open state, the control helium generating component is controlled to inject helium gas.

[0017] When helium gas enters the chamber under test through the chamber, the control prompt module issues a prompt message.

[0018] With this setup, after the valve is opened, in response to the detection command, the controller controls the helium generating component to spray helium to the outer periphery of the chamber under test. If helium enters the chamber through the chamber under test, it indicates that the chamber under test has a leak and helium will enter. At this time, the prompting module issues a prompt message to remind the user.

[0019] In some embodiments of this application, the helium detection device further includes an error reporting module, which is electrically connected to the controller; the controller is further configured to:

[0020] In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, the control error reporting module outputs an error message.

[0021] With this configuration, when the first pressure value is greater than the second pressure value, and the difference between the first and second pressure values ​​is greater than a threshold, in response to the valve opening command, in addition to keeping the valve closed, the error reporting module outputs error information to remind the user so as to facilitate the user's subsequent operations.

[0022] A second aspect of this application provides a control method for a helium detection device, applied to the helium detection device in any of the above embodiments, the control method comprising:

[0023] Obtain the difference between the first pressure value in the chamber to be tested and the second pressure value in the chamber;

[0024] If the absolute value of the difference is greater than the threshold, the control valve is in the closed state.

[0025] In the technical solution of this application embodiment, since the valve is in a closed state when the absolute value of the difference between the first pressure value and the second pressure value is greater than the threshold, the valve will be in a closed state if the absolute value of the difference between the first pressure value and the second pressure value cannot meet the requirements. The valve being in a closed state can, on the one hand, prevent the pressure in the chamber to be tested from being too much greater than the pressure inside the chamber, that is, when the difference between the first pressure value and the second pressure value is greater than the threshold, the valve may be accidentally opened, causing gas in the chamber to rush into the chamber, thus reducing the probability of damage to the helium detection component. On the other hand, it can also prevent the pressure in the chamber to be tested from being too much less than the pressure inside the chamber due to a sudden increase in the pressure inside the chamber, that is, when the difference between the second pressure value and the first pressure value is greater than the threshold, gas in the chamber may enter the chamber to be tested due to the opening of the valve, thus reducing the probability of gas contamination in the chamber to be tested, thereby improving the reliability of the helium detection equipment during the leak detection process.

[0026] In some embodiments of this application, when the absolute value of the difference is greater than a threshold, the control valve is kept in a closed state, including:

[0027] In response to a valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than a threshold, the valve is controlled to remain closed.

[0028] With this configuration, the valve will remain closed even if the user accidentally triggers the valve opening command. This prevents the valve from being opened unnecessarily, avoiding the situation where the pressure in the test chamber is significantly higher than the pressure inside the chamber (i.e., the difference between the first and second pressure values ​​exceeds a threshold). In such cases, the valve opening could cause gas to rush into the test chamber, reducing the probability of damage to the helium detection components and improving the reliability of the helium detection equipment.

[0029] In some embodiments of this application, when the absolute value of the difference is greater than a threshold, the control valve is kept in a closed state, including:

[0030] When the second pressure value is greater than the first pressure value, and the absolute value of the difference is greater than the threshold, the control valve switches from the open state to the closed state.

[0031] With this setup, if the pressure inside the cavity suddenly increases, causing the pressure inside the chamber to be tested to be significantly lower than the pressure inside the cavity (i.e., the difference between the second pressure value and the first pressure value is greater than a threshold), the valve will switch from the open state to the closed state. This prevents gas inside the cavity from entering the chamber to be tested due to the valve opening, thereby reducing the probability of gas contamination in the chamber to be tested and improving the reliability of the helium detection equipment during leak detection.

[0032] In some embodiments of this application, the control method further includes: in response to a valve opening command, when a first pressure value is greater than a second pressure value and the absolute value of the difference is less than or equal to a threshold, controlling the valve to switch from a closed state to an open state.

[0033] With this setting, if the absolute value of the difference is less than or equal to the threshold, the valve can be opened after the user outputs the valve opening command, so that the chamber under test and the cavity body are connected, which will facilitate the subsequent leak detection of the chamber under test. Attached Figure Description

[0034] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0035] Figure 1 This is a schematic diagram of the external structure of the chamber under test and the valve provided in the related technology;

[0036] Figure 2 This is a schematic diagram of the external structure of the chamber to be tested, connected to a helium detector via a valve, as provided in related technologies.

[0037] Figure 3 A schematic diagram of the chamber to be tested, valves, and helium detector provided in related technologies;

[0038] Figure 4 A schematic diagram of the external structure of the chamber to be tested connected by a valve and a helium detection component, provided for some embodiments of this application;

[0039] Figure 5 A first flowchart illustrating a control method for a helium detection device provided in some embodiments of this application;

[0040] Figure 6 A second flowchart illustrating a control method for a helium detection device provided for some embodiments of this application;

[0041] Figure 7 A third flowchart illustrating a control method for a helium detection device provided in some embodiments of this application;

[0042] Figure 8 This is a fourth flowchart illustrating the control method for a helium detection device provided in some embodiments of this application.

[0043] Explanation of reference numerals in the attached figures

[0044] 1000 - Helium detection equipment; 100 - Test chamber; 200 - Helium detection component; 300 - Valve; 400 - First pressure detection component; 500 - Second pressure detection component; 600 - Controller. Detailed Implementation

[0045] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this application; the terms “comprising” and “having”, and any variations thereof, in the specification and the foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0047] In the description of the embodiments of this application, technical terms such as "first," "second," and "third" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0048] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0049] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects are in an "or" relationship.

[0050] In the description of the embodiments of this application, the technical terms "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed, operated or used in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0051] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0052] In the description of the embodiments of this application, unless otherwise expressly specified and limited, the technical term "contact" should be interpreted broadly, and can be direct contact, contact through an intermediate medium layer, contact between two contacting parties with substantially no interaction force, or contact between two contacting parties with interaction force.

[0053] The following is a detailed description of this application.

[0054] A helium detector is an instrument used to detect leaks in vacuum chamber equipment, that is, to test the airtightness of vacuum chamber equipment, and therefore it is widely used in the semiconductor field.

[0055] For example, vacuum chamber equipment can be an evaporation coating machine, a sputtering coating machine, a chemical vapor deposition (CVD) machine, a plasma etching machine, a reactive ion etching (PECVD) machine, a lithography machine, or a wafer transfer chamber, etc.

[0056] During use, a helium detector is used with various components. Generally, the helium detector is connected to the chamber to be tested (vacuum chamber equipment) through a valve. By controlling the opening and closing of the valve, the helium detector can be connected to the chamber to be tested or disconnected when needed.

[0057] In related technologies, during the entire helium detection process, before leak detection, such as Figure 1 As shown, valve 300 is first in the closed state, then the chamber to be tested 100 is evacuated. After the chamber to be tested 100 is evacuated, as follows... Figure 2As shown, connect the helium detector (helium detection component 200) and valve 300, and evacuate the helium detector. After evacuation, open valve 300 and inject helium gas outside the test chamber 100. If helium gas enters the test chamber 100, it will also enter the detector because the test chamber 100 and the helium detector are connected. This indicates a leak in the test chamber 100. Conversely, if helium gas cannot enter the test chamber 100, it cannot enter the detector, and the detector will not react. This indicates that the test chamber 100 is not leaking and has good sealing, thus completing the leak detection. Figure 3 As shown, after the leak test is completed, valve 300 is closed, the helium detector is turned off, and the pressure of the chamber under test 100 and the helium detector is restored to normal, thus completing one helium test.

[0058] However, the entire helium detection process described above may have uncontrollable risks, meaning the reliability of the helium detector is relatively low. This is specifically reflected in the following three aspects:

[0059] Firstly, before leak detection, valve 300 is in the closed state, and both the chamber to be tested 100 and the helium detector need to be evacuated. When evacuating the chamber to be tested 100, the evacuation equipment may be damaged, resulting in the chamber to be tested 100 not being evacuated, but the helium detector being evacuated. Thus, when valve 300 is opened to continue helium detection, the gas in the chamber to be tested 100 will suddenly rush into the helium detector, thereby damaging the helium detector.

[0060] Secondly, during the leak detection process, valve 300 has been switched to the open state. At this time, due to certain reasons (human power failure of the helium detector, accidental switch activation, or valve 300 not being closed and the helium detector being stopped directly, etc.), the helium detector is forcibly connected to the atmosphere. Since the test chamber 100 is still in a vacuum state at this time, there is a pressure difference between the inside of the helium detector and the test chamber 100. The gas inside the helium detector will rush to the test chamber 100, which will cause the test chamber 100 to be contaminated by other gases, thus affecting the accuracy of the helium detection.

[0061] Thirdly, after the leak test is completed, the valve 300, which is in the open state, needs to be switched to the closed state. However, due to an operational error, the valve 300 was not closed, causing the helium detector to be connected to the atmosphere. At this time, the chamber under test 100 is still in a vacuum state, so the gas inside the helium detector will rush into the chamber under test, which will also cause the chamber to be contaminated by other gases.

[0062] In general, if valve 300 cannot be opened or closed when the pressure inside the helium detector and the pressure inside the test chamber 100 are in a suitable state, it will lead to damage to the helium detector or contamination of the test chamber 100.

[0063] Based on this, such as Figure 4 As shown, this application provides a helium detection device 1000, which includes a test chamber 100, a helium detection component 200, a valve 300, and a first pressure detection component 400. The test chamber 100 has a first connection port. The helium detection component 200 has a cavity inside and a second connection port communicating with the cavity. The valve 300 is connected between the first connection port and the second connection port, and is used to connect or block the first connection port and the second connection port. The first pressure detection component 400 is used to detect a first pressure value in the test chamber 100. The second pressure detection component 500 is used to detect a second pressure value in the cavity. A controller 600 is electrically connected to the valve 300, the first pressure detection component 400, and the second pressure detection component 500. The controller 600 is configured to control the valve 300 to be in a closed state in response to a valve opening command when the absolute value of the difference between the first pressure value and the second pressure value is greater than a threshold.

[0064] It is understood that the threshold value can be selected and set according to actual needs, and this application does not limit the specific value. When the valve body is open, it connects the test chamber 100 and the cavity; when the valve 300 is closed, it blocks the test chamber 100 and the cavity.

[0065] In some examples, the chamber under test 100 refers to a vacuum chamber device that needs to be leak-tested and evacuated before leak testing. The chamber under test 100 can be an evaporation coating machine, a sputtering coating machine, a chemical vapor deposition (CVD) system, a plasma etching machine, a reactive ion etching (PECVD) machine, a lithography machine, or a wafer transport chamber, etc.

[0066] Among them, the helium detection component 200 refers to the component that has the function of detecting the presence of helium. For example, the helium detection component 200 includes a mass spectrometer, which can detect the helium in the cavity to determine whether the chamber 100 under test is leaking or whether the airtightness is good.

[0067] In addition, valve 300 can be a gate valve, ball valve, or butterfly valve, etc., and the specific type can be selected and set according to the needs.

[0068] The first pressure detection component 400 refers to a component that includes at least the function of a pressure sensor. For example, the first pressure detection component 400 may include a pressure sensor, which may be a piezoresistive sensor, a piezoelectric sensor, or a capacitive sensor, etc.

[0069] Similarly, for the second pressure detection component 500, the second pressure detection component 500 refers to a component that includes at least the function of a pressure sensor. For example, the second pressure detection component 500 may include a pressure sensor, which may be a piezoresistive sensor, a piezoelectric sensor, or a capacitive sensor, etc.

[0070] The first pressure detection component 400 can be placed inside the chamber 100 to detect the first pressure value of the chamber 100. The second pressure detection component 500 is placed inside the chamber to detect the pressure value inside the chamber.

[0071] With the above configuration, valve 300 is connected between the first connection port and the second connection port. By controlling the opening and closing of valve 300, the test chamber 100 and the cavity can be connected, or the test chamber 100 and the cavity can be blocked.

[0072] Since the first pressure detection component 400 can detect the first pressure value inside the chamber 100 under test, and the second pressure detection component 500 can detect the second pressure value inside the chamber, the pressure status of the chamber 100 under test and inside the chamber can be monitored. Since valve 300 is closed when the absolute value of the difference between the first and second pressure values ​​is greater than the threshold, valve 300 will also be closed if the absolute value of the difference between the first and second pressure values ​​does not meet the requirements. The closed state of valve 300 serves two purposes: firstly, it prevents gas from rushing into the chamber 100 when the pressure inside the test chamber 100 is significantly greater than the pressure inside the chamber (i.e., the difference between the first and second pressure values ​​is greater than the threshold), thus reducing the probability of damage to the helium detection component 200. Secondly, it also prevents gas from entering the test chamber 100 due to the opening of valve 300 when the pressure inside the chamber suddenly increases and the pressure inside the chamber is significantly lower than the pressure inside the chamber (i.e., the difference between the second and first pressure values ​​is greater than the threshold), thus reducing the probability of gas contamination in the test chamber 100 and improving the reliability of the helium detection equipment 1000 during leak detection.

[0073] Specifically, the technical solution of this application can also solve the three technical problems mentioned above.

[0074] Regarding the first aspect, before leak testing, valve 300 is in the closed state, and both the chamber to be tested 100 and the cavity are evacuated. When evacuating the chamber to be tested 100, even if the evacuation equipment is damaged, resulting in the chamber to be tested 100 not being evacuated and the pressure inside the chamber to be tested 100 being greater than the pressure inside the cavity, if the difference between the first pressure value inside the chamber to be tested 100 and the second pressure value inside the cavity is greater than the threshold, valve 300 will not open. This can prevent the gas inside the chamber to be tested 100 from suddenly rushing into the cavity and can prevent damage to the helium detection component 200.

[0075] Regarding the second aspect, during leak detection, valve 300 has been switched to the open state. At this time, due to certain reasons (human power failure of helium detection component 200, accidental switch activation, or valve 300 not being closed before stopping helium detection component 200, etc.), helium detection component 200 is forcibly connected to the atmosphere. Since the test chamber 100 is still in a vacuum state at this time, the second pressure value inside the chamber is greater than the second pressure value inside the test chamber 100. At this time, valve 300 can be switched from the open state to the closed state to prevent the gas inside helium detection component 200 from rushing into the test chamber 100. This can prevent the test chamber 100 from being contaminated by other gases, thereby ensuring the accuracy of helium detection by helium detection component 200.

[0076] Regarding the third aspect, after the leak test is completed, the chamber 100 under test is in a vacuum state. The valve 300, which is in the open state, needs to be switched to the closed state. Even if there is an operational error and the valve 300 is not closed, the helium detection component 200 will be connected to the atmosphere, thereby making the pressure inside the chamber greater than the pressure inside the chamber 100 under test. However, as long as the absolute value of the difference between the first pressure value and the second pressure value is greater than the threshold, the valve 300 will automatically be closed. This can prevent the gas inside the chamber from entering the chamber 100 under test, thereby preventing the chamber 100 under test from being contaminated by other gases.

[0077] In some embodiments, the controller 600 is configured to control the valve 300 to remain closed in response to an opening command if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than a threshold.

[0078] In some examples, this operation occurs before leak detection. The chamber 100 to be tested should have been evacuated, but due to various external factors, it was not evacuated and the cavity of the helium detection component 200 is in a vacuum state. At this time, the valve should not be opened, but the user may accidentally issue a valve opening command. In this case, the valve 300 will control the valve 300 to remain closed based on the absolute value of the difference being greater than the threshold.

[0079] In this context, "responding to the valve opening command" means that the user issues a valve opening command to the controller 600, and the controller 600 responds to the valve opening command.

[0080] In some examples, while valve 300 remains closed, a fault is checked. If the chamber under test 100 is not evacuated, then the chamber under test 100 can be evacuated to increase the vacuum level in the chamber under test 100, thereby making the first pressure value of the chamber under test 100 minus the second pressure value in the chamber less than or equal to the threshold, so as to facilitate subsequent valve opening for leak detection.

[0081] With the above settings, when the user accidentally triggers the valve opening command, the valve 300 will remain closed. This avoids accidental valve opening when it is not appropriate to open the valve, and prevents gas from rushing into the cavity when the pressure in the test chamber 100 is much greater than the pressure inside the cavity (i.e., the difference between the first pressure value and the second pressure value is greater than the threshold). This reduces the probability of damage to the helium detection component 200 and improves the reliability of the helium detection equipment 1000.

[0082] In some embodiments, the controller 600 is configured to switch the valve 300 from an open state to a closed state when the second pressure value is greater than the first pressure value and the absolute value of the difference is greater than a threshold.

[0083] In some examples, this operation occurs during leak testing. At this time, valve 300 is in the open state, and the test chamber 100 and the cavity are in a vacuum state. However, due to various external factors, such as human-caused power failure of helium detector 200 or accidental switch activation, helium detector 200 is exposed to the atmosphere. At this time, the pressure inside helium detector 200 rises rapidly and exceeds the pressure inside test chamber 100. That is, the difference between the second pressure value and the first pressure value is greater than the threshold. Then, valve 300 is controlled to switch from the open state to the closed state, thereby preventing gas from helium detector 200 from entering test chamber 100 and thus preventing contamination of test chamber 100.

[0084] In some examples, the valve 300 can switch from an open state to a closed state by the controller 600 controlling the valve 300 to switch in response to information that a second pressure value is greater than a first pressure value and the absolute value of the difference is greater than a threshold. This improves the ease of switching.

[0085] With the above settings, when the pressure inside the cavity suddenly increases, causing the pressure inside the chamber under test 100 to be significantly lower than the pressure inside the cavity (i.e., when the difference between the second pressure value and the first pressure value is greater than the threshold), the valve 300 will switch from the open state to the closed state. This prevents gas inside the cavity from entering the chamber under test 100 due to the opening of the valve 300, thereby reducing the probability of gas contamination in the chamber under test 100 and improving the reliability of the helium detection equipment 1000 during leak detection.

[0086] In some embodiments, in response to a valve opening command, if a first pressure value is greater than a second pressure value and the absolute value of the difference is less than or equal to a threshold, the control valve 300 is switched from a closed state to an open state.

[0087] In some examples, this operation occurs before leak testing. When the pressure difference between the chamber to be tested 100 and the cavity body meets the valve opening requirements, the controller 600 responds to the user's valve opening command and controls the valve 300 to switch from the closed state to the open state to facilitate subsequent leak testing.

[0088] With the above settings, when the absolute value of the difference is less than or equal to the threshold, after the user outputs the valve opening command, the valve 300 can be controlled to open, so that the chamber under test 100 and the cavity body are connected, so as to facilitate the subsequent leak detection of the chamber under test 100.

[0089] In some embodiments, the helium detection device 1000 further includes a helium gas generating component and a notification module. Both the helium gas generating component and the notification module are electrically connected to the controller 600. The helium gas generating component is used to inject helium gas into the outer periphery of the chamber to be tested 100. The controller 600 is further configured to:

[0090] In response to a detection command, after the control valve 300 switches from the closed state to the open state, the control helium generating component is controlled to inject helium gas.

[0091] When helium gas enters the chamber through the test chamber 100, the control prompt module issues a prompt message.

[0092] Among them, the helium generating component refers to the component that can generate helium. For example, the helium generating component can be a spray gun. When spraying helium into the outer periphery of the chamber to be tested 100, it can be sprayed into the weld seam or other parts of the chamber to be tested 100 that are prone to leakage. Alternatively, helium can be sprayed from top to bottom into the outer periphery of the chamber to be tested 100 to avoid omissions and ensure the accuracy of the test.

[0093] "Responding to a detection command" means that, in response to a user-issued detection command, the controller 600, after opening the valve 300, controls the helium generating component to inject helium gas to the outer periphery of the chamber under test 100. If helium gas enters the chamber under test 100, it will continue to flow into the chamber, at which point the helium detection component 200 will detect the helium gas, indicating a leak in the chamber under test 100. If helium gas does not enter the chamber under test 100, it will not be detected in the chamber, proving that there is no leak in the chamber under test 100.

[0094] Additionally, the prompting module may include an indicator light that flashes to provide a prompt. Alternatively, the prompting module may include a display screen that displays text, images, or other visual information to provide a prompt. The prompting module may also include a speaker that emits an audible prompt. Alternatively, the prompting module may include an indicator light, a display screen, and a speaker, using a combination of light, images, and sound to provide a prompt.

[0095] With the above settings, after the valve 300 is opened, in response to the detection command, the controller 600 controls the helium generating component to spray helium gas to the outer periphery of the chamber under test 100. If helium gas enters the chamber through the chamber under test 100, it indicates that the chamber under test 100 has a leak and helium gas will enter. At this time, the prompting module issues a prompt message to remind the user.

[0096] In some embodiments, the helium detection device 1000 further includes an error reporting module electrically connected to the controller 600; the controller 600 is further configured to:

[0097] In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, the control error reporting module outputs an error message.

[0098] The error reporting module may include an indicator light that flashes to indicate an error. Alternatively, it may include a display screen that displays text, images, or other error messages. It may also include a speaker that emits an audible alert when an error occurs. Alternatively, it may combine an indicator light, a display screen, and a speaker to provide error messages through a combination of light, images, and sound.

[0099] With the above settings, when the first pressure value is greater than the second pressure value and the difference between the first pressure value and the second pressure value is greater than the threshold, in response to the valve opening command, in addition to valve 300 remaining closed, the error reporting module outputs error information to remind the user so as to facilitate the user's subsequent operations.

[0100] To better understand the operation of the helium detection equipment 1000 in this application, the helium detection process is described below.

[0101] The test chamber 100 and the cavity body are connected by valve 300, with valve 300 in the closed state;

[0102] Before leak testing, the controller 600, the first pressure detection component 400, and the second pressure detection component 500 are in the open state. At this time, a vacuum operation is performed on the chamber 100 to be tested and the cavity. After the vacuum operation is completed, if the first pressure value of the chamber 100 to be tested is greater than the second pressure value of the cavity, and the difference between the first pressure value and the second pressure value is greater than the threshold, then the valve 300 will not be able to open, whether by accidental or active opening. The fault is then investigated, and the chamber 100 to be tested is evacuated again to reduce the first pressure value so that the difference between the first pressure value and the second pressure value is less than or equal to the threshold. Then the valve is opened, and the valve 300 opens normally.

[0103] Next, the leak detection process begins. Valve 300 is opened, controlling the helium gas generating component to spray helium gas outside the test chamber 100. If helium gas enters the test chamber 100 and then further into the cavity, the helium detection component 200 will indicate a leak in the test chamber 100. If the helium detection component 200 does not indicate a leak, it means that the test chamber 100 is leak-free and has good airtightness. During this process, if the second pressure value inside the cavity is greater than the first pressure value inside the test chamber 100, and the difference between the second pressure value and the first pressure value is greater than a threshold, then valve 300 is switched from the open state to the closed state to prevent gas from the cavity from entering the test chamber 100 and to avoid contaminating the test chamber 100. If the leak test is not completed, after closing valve 300, continue to evacuate the cavity. Once the absolute value of the difference between the first and second pressure values ​​is less than or equal to the threshold, reopen the valve to continue the leak test. If the leak test is completed, after closing valve 300, directly disconnect valve 300 and the helium detector component 200. This completes one leak test.

[0104] Based on the helium detection device 1000 described above, this application also provides a control method for the helium detection device 1000, which is applied to the helium detection device 1000 described above, and will be described in detail below.

[0105] like Figure 5 As shown, the control method includes S100 to S200:

[0106] S100: Obtain the difference between the first pressure value inside the chamber 100 and the second pressure value inside the chamber.

[0107] It is understandable that the controller 600 acquires the first pressure value and the second pressure value, and then calculates the difference between the first pressure value and the second pressure value.

[0108] In some examples, a vacuum operation is performed on both the chamber 100 and the cavity before obtaining the difference between the first pressure value inside the chamber 100 and the second pressure value inside the cavity.

[0109] S200: When the absolute value of the difference is greater than the threshold, the control valve 300 is in the closed state.

[0110] It is understandable that the threshold for the difference can be any suitable value, as long as opening valve 300 can prevent gas from entering the chamber 100 under test, thus preventing damage to the helium detector 1000, or prevent gas from entering the chamber 100 under test, thus preventing contamination of the chamber 100 under test.

[0111] With the above settings, valve 300 is closed when the absolute value of the difference between the first and second pressure values ​​is greater than the threshold. Therefore, if the absolute value of the difference between the first and second pressure values ​​does not meet the requirements, valve 300 will also be closed. The closed state of valve 300 serves two purposes: firstly, it prevents gas from rushing into the chamber 100 when the pressure inside the test chamber 100 is significantly greater than the pressure inside the chamber (i.e., the difference between the first and second pressure values ​​is greater than the threshold), thus reducing the probability of damage to the helium detection component 200. Secondly, it also prevents gas from entering the test chamber 100 due to the opening of valve 300 when the pressure inside the chamber suddenly increases and the pressure inside the chamber is significantly lower than the pressure inside the chamber (i.e., the difference between the second and first pressure values ​​is greater than the threshold), thus reducing the probability of gas contamination in the test chamber 100 and improving the reliability of the helium detection equipment 1000 during leak detection.

[0112] In some embodiments, such as Figure 6 As shown, S200: When the absolute value of the difference is greater than the threshold, the control valve 300 is in the closed state, including:

[0113] S210: In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, control valve 300 to remain closed.

[0114] In this context, "responding to the valve opening command" means that the user issues a valve opening command to the controller 600, and the controller 600 responds to the valve opening command.

[0115] With the above settings, when the user accidentally triggers the valve opening command, the valve 300 will remain closed. This avoids accidental valve opening when it is not appropriate to open the valve, and prevents gas from rushing into the cavity when the pressure in the test chamber 100 is much greater than the pressure inside the cavity (i.e., the difference between the first pressure value and the second pressure value is greater than the threshold). This reduces the probability of damage to the helium detection component 200 and improves the reliability of the helium detection equipment 1000.

[0116] In some embodiments, such as Figure 7As shown, the control method also includes:

[0117] S300: In response to the valve opening command, when the first pressure value is greater than the second pressure value and the absolute value of the difference is less than or equal to the threshold, the control valve 300 switches from the closed state to the open state.

[0118] It is understandable that the valve opening command responded to in this step could be either mistakenly issued by the user or triggered normally by the user.

[0119] With the above settings, when the absolute value of the difference is less than or equal to the threshold, after the user outputs the valve opening command, the valve 300 can be controlled to open, so that the chamber under test 100 and the cavity body are connected, so as to facilitate the subsequent leak detection of the chamber under test 100.

[0120] In some embodiments, such as Figure 8 As shown, S200: When the absolute value of the difference is greater than the threshold, the control valve 300 is in the closed state, including:

[0121] S220: When the second pressure value is greater than the first pressure value and the absolute value of the difference is greater than the threshold, the control valve 300 switches from the open state to the closed state.

[0122] In some examples, the valve 300 can switch from an open state to a closed state by the controller 600 controlling the valve 300 to switch in response to information that a second pressure value is greater than a first pressure value and the absolute value of the difference is greater than a threshold. This improves the ease of switching.

[0123] With the above settings, when the pressure inside the cavity suddenly increases, causing the pressure inside the chamber under test 100 to be significantly lower than the pressure inside the cavity (i.e., when the difference between the second pressure value and the first pressure value is greater than the threshold), the valve 300 will switch from the open state to the closed state. This prevents gas inside the cavity from entering the chamber under test 100 due to the opening of the valve 300, thereby reducing the probability of gas contamination in the chamber under test 100 and improving the reliability of the helium detection equipment 1000 during leak detection.

[0124] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A helium detection device, characterized in that, include: The chamber to be tested has a first connection port; A helium detection component has an internal cavity, and the helium detection component also has a second connection port communicating with the cavity; A valve is connected between the first connection port and the second connection port, and the valve is used to connect or block the first connection port and the second connection port; The first pressure detection component is used to detect the first pressure value in the chamber to be tested. The second pressure detection component is used to detect the second pressure value inside the cavity; The controller is electrically connected to the valve, the first pressure detection component, and the second pressure detection component; the controller is configured to control the valve to be in a closed state when the absolute value of the difference between the first pressure value and the second pressure value is greater than a threshold.

2. The helium detection device according to claim 1, characterized in that, The controller is configured to: In response to a valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, the valve is controlled to maintain the closed state.

3. The helium detection device according to claim 1, characterized in that, The controller is configured to: When the second pressure value is greater than the first pressure value, and the absolute value of the difference is greater than the threshold, the valve is controlled to switch from the open state to the closed state.

4. The helium detection device according to claim 2, characterized in that, The controller is also configured to: In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is less than or equal to the threshold, the valve is controlled to switch from the closed state to the open state.

5. The helium detection device according to claim 4, characterized in that, The helium detection device further includes a helium gas generating component and a notification module. Both the helium gas generating component and the notification module are electrically connected to the controller. The helium gas generating component is used to inject helium gas into the outer periphery of the chamber to be tested. The controller is further configured to: In response to a detection command, after the valve is switched from the closed state to the open state, the helium generating component is controlled to inject helium. When helium gas enters the cavity through the chamber under test, the prompting module is controlled to issue a prompt message.

6. The helium detection device according to claim 2, 4, or 5, characterized in that, The helium detection device further includes an error reporting module, which is electrically connected to the controller; the controller is further configured to: In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, the error reporting module is controlled to output error information.

7. A control method for a helium detection device, characterized in that, The control method, applied in any one of claims 1-6, comprises: Obtain the difference between the first pressure value in the chamber to be tested and the second pressure value in the chamber; If the absolute value of the difference is greater than the threshold, the control valve is in the closed state.

8. The control method according to claim 7, characterized in that, The step of controlling the valve to be in a closed state when the absolute value of the difference is greater than a threshold includes: In response to a valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is greater than the threshold, the valve is controlled to maintain the closed state.

9. The control method according to claim 7, characterized in that, The step of controlling the valve to be in a closed state when the absolute value of the difference is greater than a threshold includes: When the second pressure value is greater than the first pressure value, and the absolute value of the difference is greater than the threshold, the valve is controlled to switch from the open state to the closed state.

10. The control method according to claim 8, characterized in that, The control method further includes: In response to the valve opening command, if the first pressure value is greater than the second pressure value and the absolute value of the difference is less than or equal to the threshold, the valve is controlled to switch from the closed state to the open state.

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