Galvanometer interpolation and open-loop PSO control method and device for laser resistance adjustment

CN121254758BActive Publication Date: 2026-10-20SHENZHEN JPT OPTO ELECTRONICS CO LTD
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Patent Information

Application Number
CN202511196647.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-08-26
Publication Date
2026-10-20
Estimated Expiration
2045-08-26

AI Technical Summary

Technical Problem

[0005]在常规的加减速控制下,只有速度为0时理论坐标和时间坐标对应,且常规调阻设备修阻在起点存在光点重合过密的问题,容易造成刀口起点宽,结尾窄的情况,另外不同切割速度下长度会不一致,在开环控制下通过加关光延时虽然可以改善该问题,但效率会变慢

Benefits of technology

[0050]本发明实施例提供的一种用于激光调阻的振镜插补和开环PSO控制方法及装置,本发明实施例用于激光调阻的振镜插补和开环PSO控制方法相较于现有的加减速控制方法,在激光高速加工过程中,将激光振镜的加速度因素整合到激光控制中,通过激光切割采样确定每个切割速度所对应的加速度信息,基于加速度信息和选定的激光切割速度,换算得到目标电阻的已切长度和激光光斑的当前坐标,在确定激光光斑在当前坐标和目标坐标之间的坐标插补值之后,并最终根据所述目标激光频率实时调阻激光光源的脉冲频率完成PSO控制,以及基于确定所述激光振镜在当前坐标和目标坐标之间的坐标插补值,实现每次移动相同的移动步距时,激光出光的光斑分布均匀,整体切割轨迹更加稳定,切割效果更好。

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Abstract

The application discloses a galvanometer interpolation and open-loop PSO control method and device for laser resistance adjustment, and the method comprises the following steps: setting multiple groups of laser cutting speeds, laser cutting sampling on a sampling resistor, and determining acceleration information of a laser galvanometer under the multiple groups of laser cutting speeds; selecting a laser cutting speed, acquiring acceleration information of the laser galvanometer, a set laser spot moving step distance and a current cutting time of a target resistor; based on the acceleration information, the laser cutting speed and the current cutting time, the length of the target resistor that has been cut and the current coordinates of the laser spot are obtained by conversion; the target coordinates of the laser spot and the moving time period of the target coordinates are acquired, and the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates is determined; and based on the moving time period, the pulse frequency of the laser light source is adjusted. When the laser cuts the resistor, the spot distribution of the laser light is uniform.
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Description

Technical Field

[0001] This invention relates to the field of laser processing technology, and in particular to a galvanometer interpolation and open-loop PSO control method and apparatus for laser trimming. Background Technology

[0002] Laser trimming involves focusing a laser beam onto the resistor to be trimmed using a laser galvanometer, causing the film layer of the resistor to be trimmed to vaporize and be removed to achieve the specified resistance value.

[0003] A laser galvanometer is a special motion device specifically designed for laser processing. It consists of two motors and two galvanometer mirrors. The two motors control the X and Y reflections of the laser from the two galvanometer mirrors to form the XY plane. The two motors are controlled by the galvanometer shaft interface on the controller.

[0004] Acceleration and deceleration control is a crucial function of the interpolator in a CNC system, significantly impacting machining accuracy and system performance. This is especially true in high-speed machining.

[0005] Under conventional acceleration and deceleration control, the theoretical coordinates and time coordinates only correspond when the speed is 0. Furthermore, conventional resistance adjustment equipment has the problem of excessively dense overlap of light spots at the starting point, which can easily result in a wide starting point and a narrow ending point for the cutting edge. In addition, the length will be inconsistent at different cutting speeds. Although adding a light delay under open-loop control can improve this problem, it will slow down the efficiency.

[0006] Therefore, there is an urgent need for a new method or device for galvanometer interpolation and open-loop PSO control for laser trimming. Summary of the Invention

[0007] In view of the above problems, the present invention is proposed to provide a galvanometer interpolation and open-loop PSO control method and apparatus for laser trimming that overcomes or at least partially solves the above problems.

[0008] Other features and advantages of the invention will become apparent from the following detailed description, or may be learned in part by practice of the invention.

[0009] According to a first aspect of the present invention, a galvanometer interpolation and open-loop PSO control method for laser trimming is provided, the galvanometer interpolation and open-loop PSO control method for laser trimming includes:

[0010] Multiple laser cutting speeds are set, and laser cutting sampling is performed on the sampling resistor to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds.

[0011] Select the laser cutting speed for the target resistor, and obtain the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor;

[0012] Based on acceleration information, the selected laser cutting speed, and the current cutting time, the cut length of the target resistor and the current coordinates of the laser spot are obtained.

[0013] Based on the laser spot's movement step distance, acceleration information, cut length, and current coordinates, the target coordinates and the movement time period of the target coordinates are obtained, and the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates is determined.

[0014] The pulse frequency of the laser source is adjusted based on the shift time period.

[0015] In some embodiments of the present invention, determining the acceleration information of the laser galvanometer at multiple laser cutting velocities includes:

[0016] Set a total cut-off distance for the sampling resistor;

[0017] The cutting task is executed at multiple sets of laser cutting speeds according to the set total cutting distance, and multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times are obtained.

[0018] Based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, the acceleration information corresponding to each set of cutting speeds is determined.

[0019] In some embodiments of the present invention, determining the acceleration information corresponding to each cutting speed based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times includes:

[0020] By visually detecting and identifying the actual cutting distance corresponding to each laser cutting speed, a set of actual cutting distances is obtained;

[0021] The actual cutting distance set is filtered based on a predetermined rule to obtain a valid cutting distance set, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance;

[0022] Based on each laser cutting speed in the set of effective cutting distances, the acceleration information corresponding to each laser cutting speed is determined.

[0023] In some embodiments of the present invention, determining the acceleration information corresponding to each laser cutting speed based on each laser cutting speed in the effective cutting distance set includes:

[0024] The end time point when the laser galvanometer stops moving is collected, and the deceleration time difference is obtained based on the actual cutting time;

[0025] Acceleration information is calculated based on the laser cutting speed and the deceleration time difference.

[0026] In some embodiments of the present invention, determining the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates includes:

[0027] Obtain the scanning period of the laser galvanometer and determine the number of scans within the moving time period;

[0028] Based on the number of scans and the target coordinates, determine the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates.

[0029] According to a second aspect of the present invention, a galvanometer interpolation and open-loop PSO control device for laser trimming is provided, the galvanometer interpolation and open-loop PSO control device for laser trimming comprising:

[0030] A resistance sampling module is used to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds.

[0031] The information acquisition module is used to select a laser cutting speed for the target resistor, and acquire the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor.

[0032] The parameter conversion module is used to obtain the cut length of the target resistor and the current coordinates of the laser spot based on acceleration information, the selected laser cutting speed and the current cutting time.

[0033] An interpolation generation module is used to obtain the target coordinates and the movement time period of the laser spot based on the laser spot movement step distance, acceleration information, cut length and current coordinates, and to determine the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates.

[0034] A pulse adjustment module is used to adjust the pulse frequency of the laser source based on the moving time period.

[0035] In some embodiments of the present invention, the resistance sampling module is used to determine the acceleration information of the laser galvanometer under multiple sets of laser cutting speeds, including:

[0036] Set a total cut-off distance for the sampling resistor;

[0037] The cutting task is executed according to the set total cutting distance at multiple sets of laser cutting speeds, and multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times are obtained.

[0038] Based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, the acceleration information corresponding to each set of cutting speeds is determined.

[0039] In some embodiments of the present invention, the resistance sampling module, based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, further determines the acceleration information corresponding to each set of cutting speeds by including:

[0040] By visually detecting and identifying the actual cutting distance corresponding to each laser cutting speed, a set of actual cutting distances is obtained;

[0041] The actual cutting distance set is filtered based on a predetermined rule to obtain a valid cutting distance set, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance;

[0042] Based on each laser cutting speed in the set of effective cutting distances, the acceleration information corresponding to each laser cutting speed is determined.

[0043] In some embodiments of the present invention, the resistance sampling module further determines the acceleration information corresponding to each laser cutting speed based on each laser cutting speed in the effective cutting distance set, including:

[0044] The end time point when the laser galvanometer stops moving is collected, and the deceleration time difference is obtained based on the actual cutting cycle;

[0045] Acceleration information is calculated based on the laser cutting speed and the deceleration time difference.

[0046] In some embodiments of the present invention, the interpolation generation module obtains the target coordinates and the movement time period of the laser spot based on the laser spot movement step distance, acceleration information, cut length, and current coordinates, and determines the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates, including:

[0047] Obtain the scanning period of the laser galvanometer and determine the number of scans within the moving time period;

[0048] Based on the number of scans and the target coordinates, determine the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates.

[0049] The technical solutions provided in the embodiments of the present invention have at least the following technical effects or advantages:

[0050] This invention provides a method and apparatus for galvanometer interpolation and open-loop PSO control for laser trimming. Compared with existing acceleration and deceleration control methods, this invention integrates the acceleration factor of the laser galvanometer into the laser control during high-speed laser processing. It determines the acceleration information corresponding to each cutting speed through laser cutting sampling. Based on the acceleration information and the selected laser cutting speed, it calculates the cut length of the target resistor and the current coordinates of the laser spot. After determining the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates, it finally completes PSO control by adjusting the pulse frequency of the laser source in real time according to the target laser frequency. Furthermore, based on the determined coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates, it achieves uniform laser spot distribution, a more stable overall cutting trajectory, and better cutting effect when moving the same step distance each time.

[0051] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0053] Figure 1 This is a reference diagram showing the mirror speed versus processing time as defined in traditional laser processing.

[0054] Figure 2 This is a reference diagram showing the actual galvanometer speed versus processing time in traditional laser processing.

[0055] Figure 3 A schematic flowchart of a galvanometer interpolation and open-loop PSO control method for laser trimming provided in an embodiment of the present invention;

[0056] Figure 4 The diagram shown is a reference schematic of galvanometer speed-processing time in step control using laser-trimmed galvanometer interpolation and open-loop PSO control methods.

[0057] Figure 5-1 This is a laser spot pattern created by increasing the laser movement step size to demonstrate the laser trimming effect before employing laser trimming mirror interpolation and open-loop PSO control methods.

[0058] Figure 5-2 It is a laser spot pattern with the laser movement step size increased to demonstrate the laser trimming effect after using galvanometer interpolation and open-loop PSO control method.

[0059] Figure 6 This is a schematic diagram of the principle structure of a galvanometer interpolation and open-loop PSO control device for laser trimming, provided in an embodiment of the present invention. Detailed Implementation

[0060] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings.

[0061] The accompanying drawings illustrate various structural schematics according to embodiments of the present disclosure. These drawings are not to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0062] In the context of this disclosure, when a layer / component is referred to as being "above" another layer / component, that layer / component may be directly above the other layer / component, or there may be an intermediate layer / component between them. Additionally, if a layer / component is "above" another layer / component in one orientation, then when the orientation is reversed, that layer / component may be "below" the other layer / component. In the context of this disclosure, similar or identical components may be denoted by the same or similar reference numerals.

[0063] To better understand the above technical solutions, the following will describe the above technical solutions in detail with reference to specific implementation methods. It should be understood that the embodiments of this disclosure and the specific features in the embodiments are detailed descriptions of the technical solutions of the present invention, rather than limitations on the technical solutions of the present invention. In the absence of conflict, the embodiments of the present invention and the technical features in the embodiments can be combined with each other.

[0064] In traditional laser processing, once the galvanometer processing speed is selected, it is usually assumed to be the stable, actual speed of the galvanometer during its movement, neglecting the acceleration and deceleration processes. This is especially true for high-speed galvanometers, where the galvanometer moves at very high speeds and experiences significant acceleration and deceleration, making it even easier to overlook these processes. The relationship between galvanometer processing speed and processing time is as follows: Figure 1The laser processing length S and processing time T1 are in a corresponding relationship. The control of laser emission is also based on the processing time T1. When the processing time is reached, the trajectory of the laser reflected by the galvanometer reaches the laser processing length S. At the same time, the laser emission must be stopped to avoid prolonged laser irradiation at the end.

[0065] However, during high-speed, high-precision laser processing for resistance correction, the galvanometer actually undergoes acceleration and deceleration. Using the processing time T1 to control the laser to stop emitting light and to stop the galvanometer's movement will result in the inertial galvanometer still experiencing deceleration, while the laser simply shuts off its output. (Refer to...) Figure 2 On the one hand, the actual processing length S1 does not reach the set laser processing length S. The final spot coordinates after the laser stops emitting light do not correspond to the coordinates after the galvanometer finally stops moving, meaning the laser stops emitting light prematurely. On the other hand, in traditional control, the acceleration and deceleration process of the galvanometer causes the laser processing starting points to be too dense, affecting the accuracy of laser trimming. Even by adding a switching delay to the motion process in the external control, it is impossible to completely achieve consistent processing length and consistent laser spot and galvanometer coordinates. Furthermore, the problem of uneven laser spot distribution still exists, resulting in excessively dense laser spots at the laser processing starting and ending points. Figure 5-1 .

[0066] Figure 3 This is a schematic flowchart of a galvanometer interpolation and open-loop PSO control method for laser trimming provided in an embodiment of the present invention, as shown below. Figure 3 As shown, the galvanometer interpolation and open-loop PSO control method for laser trimming includes the following steps:

[0067] S1. Set multiple laser cutting speeds, perform laser cutting sampling on the sampling resistor, and determine the acceleration information of the laser galvanometer under multiple laser cutting speeds;

[0068] In this embodiment of the invention, after setting the resistance-correcting blade type via an industrial control computer, pre-sampling is performed based on the resistance-correcting blade type to obtain the actual acceleration information of the laser galvanometer. Specifically, this embodiment of the invention sets multiple sets of laser cutting speeds, performs laser cutting sampling on a sampling resistor, and determines the acceleration information of the laser galvanometer under multiple sets of laser cutting speeds. Specifically, this includes: setting a total cutting distance for the sampling resistor; executing cutting tasks at multiple sets of laser cutting speeds according to the set total cutting distance, obtaining multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times; and determining the acceleration information corresponding to each set of cutting speeds based on the multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times.

[0069] Specifically, sampling is performed using the selected resistance-correcting blade type, and sampling calculations are performed based on actual application requirements. In this embodiment of the invention, a total cutting distance and multiple sets of different laser cutting speeds are set for the sampling resistor. For example, the set total cutting distance is 1mm, and the multiple sets of different laser cutting speeds are, for example, 10, 20, 50...400mm / s. Therefore, performing the cutting task at the set total cutting distance using the multiple sets of laser cutting speeds means performing a cutting task with a total cutting distance of 1mm at laser cutting speeds of 10, 20, 50...400mm / s respectively.

[0070] like Figure 2 As shown, when selecting multiple different laser cutting speeds to achieve the same total cutting distance, the actual cutting time will also vary. Furthermore, each laser cutting speed involves an acceleration and deceleration process; different laser cutting speeds have different acceleration and deceleration rates, thus affecting the degree to which the laser shuts off prematurely, and consequently, the actual cutting distance. In this embodiment of the invention, the acceleration and deceleration rates at the corresponding laser cutting speed are calculated based on the actual cutting time and actual cutting distance.

[0071] In this embodiment of the invention, the acceleration information corresponding to each cutting speed is determined based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times. This includes: visually identifying the actual cutting distance corresponding to each laser cutting speed to obtain a set of actual cutting distances; filtering the set of actual cutting distances based on a predetermined rule to obtain a set of effective cutting distances, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance; and determining the acceleration information corresponding to each laser cutting speed based on each laser cutting speed in the set of effective cutting distances.

[0072] Since the acceleration of the galvanometer module during the cutting task is ideally the same during the acceleration and deceleration phases (existing galvanometers will indicate the acceleration time in their parameter table, and the deceleration time is the same by default; if they are different, the deceleration time will be marked separately; this embodiment of the invention uses a galvanometer with the same deceleration and acceleration time as an example for explanation), when the actual cutting distance is equal to half of the total cutting distance, it can be considered that the time point corresponding to the actual cutting distance is exactly the node of acceleration / deceleration switching. When the actual cutting distance is greater than half of the total cutting distance, it can be considered that the time point corresponding to the actual cutting distance is the uniform speed phase in the middle of acceleration / deceleration switching. When the actual cutting distance is less than half of the total cutting distance, it may still be in the acceleration process. If this data is used, errors may occur. Therefore, this embodiment of the invention filters all the obtained actual cutting distances through a predetermined rule. The predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance. That is, the actual cutting distance greater than or equal to half of the total cutting distance is considered valid, and the actual cutting distance less than half of the total cutting distance is considered invalid. The invalid actual cutting distance is removed from the set of actual cutting distances to obtain the set of valid cutting distances.

[0073] In this embodiment of the invention, the acceleration information corresponding to each laser cutting speed in the effective cutting distance set is determined. Specifically, this includes: acquiring the end time point when the laser galvanometer stops moving, obtaining the deceleration time difference based on the actual cutting time, and calculating the acceleration information based on the laser cutting speed and the deceleration time difference. Since the final laser cutting speed is reduced to zero, the acceleration information during the deceleration process can be directly obtained by dividing the initial velocity by the deceleration time difference.

[0074] Alternatively, the acceleration information corresponding to each laser cutting speed can be determined based on the actual cutting distance in the set of effective cutting distances. Specifically, this includes: obtaining the distance to be cut based on the actual cutting distance and the total cutting distance in the set of effective cutting distances; obtaining the deceleration time difference based on the distance to be cut and the laser cutting speed; and calculating the acceleration information based on the laser cutting speed and the deceleration time difference.

[0075] Combination Figure 2 As shown, T1 is the control point for stopping the cutting process, T2 is the end point for the laser galvanometer to decelerate to zero, and V1 is the selected laser cutting speed. Figure 2 The area of ​​the trapezoid in the diagram represents the moving distance of the galvanometer, which is also the total cutting distance S to be cut. The area of ​​S1 is the actual cutting distance of the laser.

[0076] In this embodiment of the invention, the distance to be cut, S2, is obtained by the difference between the actual cutting distance S1 and the total cutting distance S. The starting time point T1 and the ending time point T2 corresponding to the distance to be cut are then used to calculate the deceleration time difference ΔT, which is T2-T1. The ending time point T2 can be obtained directly by data acquisition or calculated using the distance to be cut, S2, through a distance formula.

[0077] Since the final velocity of the laser galvanometer decreases to zero, the acceleration information can be calculated using the acceleration formula 0 = V1 + aΔT. The acceleration information calculated at this time is the acceleration information during the deceleration phase. By default, the acceleration information during the deceleration phase is the same as the acceleration information during the acceleration phase. Therefore, the acceleration information is the acceleration information during the deceleration phase and the acceleration information during the acceleration phase, with the same value but opposite directions.

[0078] S2. Select the laser cutting speed for the target resistor, and obtain the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor;

[0079] In this embodiment of the invention, after the target resistance is determined, the laser cutting speed corresponding to the target resistance can be selected based on actual application requirements. The acceleration information of the laser galvanometer is obtained through the aforementioned step S1. The set laser spot movement step distance and the current cutting time of the target resistance can be obtained through the industrial control computer during the laser resistance repair process. The industrial control computer, as the control terminal in the laser resistance repair process, can set and save control parameters, and simultaneously monitor various information parameters during the resistance repair process, such as cutting time, cutting distance, and laser power. In other embodiments of the invention, the laser spot movement step distance can be set to different values ​​according to actual application requirements.

[0080] S3. Based on acceleration information, the selected laser cutting speed, and the current cutting time, obtain the cut length of the target resistor and the current coordinates of the laser spot;

[0081] After obtaining the acceleration information in step S1 and selecting the laser cutting speed in step S2, the cut length of the target resistor and the current coordinates of the laser spot can be calculated based on the acceleration information and the selected laser cutting speed. Specifically, the transition time point from the acceleration phase to the constant speed phase of the laser galvanometer can be calculated from the acceleration information and the laser cutting speed. During the laser cutting sampling of the sampling resistor to determine the acceleration information, the actual cutting time T1 is the transition time point from the constant speed phase to the deceleration phase. Therefore, the velocity-time function expressions for the acceleration phase, the constant speed phase, and the deceleration phase can all be determined. Using the current cutting time, the cut length of the target resistor and the coordinate position of the last laser spot can be calculated.

[0082] It is understandable that the laser cutting trajectory during laser resistance trimming is formed by the overlap of laser spots. Furthermore, the laser resistance trimming process generally involves laser cutting from the edge of the resistor towards its center. The cutting distance is usually considered to be the distance between the starting and ending laser spots. Additionally, in environments requiring high-precision cutting, the cutting distance can also be considered as the distance between the starting and ending laser spots plus the laser spot radius. The specific calculation method used depends on the diameter of the laser spot and the precision requirements; relevant technicians can set it according to actual requirements, and this application does not impose any restrictions.

[0083] S4. Based on the laser spot movement step distance, acceleration information, cut length and current coordinates, obtain the target coordinates of the laser spot and the movement time period of the target coordinates, and determine the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates.

[0084] Based on the laser spot movement step distance, the cut length of the target resistor, and the current coordinates of the laser spot, the target coordinates of the laser spot can be obtained.

[0085] Combination Figure 4 As shown, the constant velocity phase constitutes the largest portion of the laser galvanometer's motion. Therefore, the step size of the laser galvanometer usually refers to the step size during the constant velocity phase. Figure 4 L0 in the equation. Combining the above, the velocity-time function expressions for the acceleration, constant velocity, and deceleration phases can all be determined. For any laser galvanometer movement step, it can be calculated using the velocity-time function expression. For example, in the acceleration phase, the distance-acceleration formula gives L0 = LT = V0T + 1 / 2aT. 2 V0 is the final velocity after the previous step movement, thus the movement time period Δt corresponding to each movement step LT can be determined, such as Δt1 (i.e., T1-0), Δt2 (i.e., T2-T1), etc. The same applies to the deceleration phase.

[0086] After determining the movement time period corresponding to each movement step, the embodiments of the present invention further determine the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates, including: obtaining the scanning period of the laser galvanometer, determining the number of scans within the movement time period; and determining the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates based on the number of scans and the target coordinate value.

[0087] The scanning cycle of the laser galvanometer is a performance parameter of the product and is a fixed value, such as 1µs or 2µs. After obtaining the movement time cycle of the laser galvanometer at each movement step, the number of scans by the laser galvanometer within different movement time cycles can be determined. Based on the number of scans by the laser galvanometer and the current and target coordinates of the laser spot, the coordinate interpolation value of the laser galvanometer between the current and target coordinates is determined. The coordinate values ​​of the laser galvanometer to be written in each laser scan cycle ensure a smooth transition to the target position over multiple scan cycles. Generally, after the number of scans by the laser galvanometer between the current and target coordinates has been determined, multiple linear coordinate interpolation values ​​between the current and target coordinates are calculated using a linear interpolation algorithm, and the corresponding linear interpolation values ​​are written in each laser galvanometer scan cycle.

[0088] S5. Adjust the pulse frequency of the laser source based on the moving time period.

[0089] In the laser trimming process, after each step movement of the laser galvanometer, the laser emits a synchronous pulsed laser beam. This laser beam acts on the resistor, achieving the laser trimming process. Using the obtained movement time period, the pulse frequency of the controlled pulsed laser is adjusted, thereby synchronizing the pulsed laser and the laser galvanometer, ultimately resulting in a uniform laser spot distribution during processing. It can be understood that during the laser galvanometer acceleration phase, the laser galvanometer speed gradually increases, the laser galvanometer movement time period gradually decreases, and the corresponding pulsed laser frequency gradually increases; during the laser galvanometer constant speed phase, the laser galvanometer movement time period is stable, and the corresponding pulsed laser frequency is stable; and during the laser galvanometer deceleration phase, the laser galvanometer movement time period gradually increases, and the corresponding pulsed laser frequency gradually decreases. (Refer to...) Figure 5-2 After calculating the target pulse frequency, this invention adjusts the pulse frequency of the laser source in real time and controls the laser source's output light through the target pulse frequency, thereby completing PSO control. Based on determining the coordinate interpolation value between the current coordinates and the target coordinates of the laser galvanometer, the laser output spot distribution is uniform when moving the same step distance each time. After the resistance is corrected, this invention can, for example, transmit back parameters such as the cut length of the target resistor and the current coordinates of the laser spot for subsequent PSO control.

[0090] In this embodiment of the invention, the laser source outputs a laser beam, which is then projected onto the product surface via a laser galvanometer to scan a specific pattern. The laser source may contain infrared lasers (including, but not limited to, infrared nanosecond lasers, infrared picosecond lasers, infrared femtosecond lasers, CO2 lasers, etc.), green lasers (including, but not limited to, green nanosecond lasers, green picosecond lasers, green femtosecond lasers, etc.), or ultraviolet lasers (including, but not limited to, ultraviolet nanosecond lasers, ultraviolet picosecond lasers, ultraviolet femtosecond lasers, etc.). The laser galvanometer may contain 1D, 2D, or 3D mirrors. The laser galvanometer may or may not contain field lenses, focusing lenses, etc.

[0091] Compared to existing acceleration / deceleration control methods, the galvanometer interpolation and open-loop PSO control method for laser trimming in this invention integrates the acceleration factor of the laser galvanometer into the laser control during high-speed laser processing. It determines the acceleration information corresponding to each cutting speed through laser cutting sampling. Based on the acceleration information, the selected laser cutting speed, and the current cutting time, it obtains the cut length of the target resistor and the current coordinates of the laser spot. After determining the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates, it finally completes PSO control by adjusting the pulse frequency of the laser source in real time according to the target laser frequency. This achieves uniform laser spot distribution, a more stable overall cutting trajectory, and better cutting results when moving the same step distance each time.

[0092] Based on the above embodiments, as a supplement to the above... Figure 1 The present invention provides an embodiment of a galvanometer interpolation and open-loop PSO control device for laser trimming, which is similar to the method described above. Figure 1 Corresponding to the method embodiments shown, this device can be specifically applied to various electronic devices, see reference. Figure 6 As shown, the galvanometer interpolation and open-loop PSO control device for laser trimming includes:

[0093] The resistance sampling module 100 is used to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds;

[0094] Information acquisition module 200 is used to select a laser cutting speed for the target resistor, and acquire the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor.

[0095] The parameter conversion module 300 is used to obtain the cut length of the target resistor and the current coordinates of the laser spot based on acceleration information, the selected laser cutting speed and the current cutting time.

[0096] The interpolation generation module 400 is used to obtain the target coordinates and the movement time period of the laser spot based on the laser spot movement step distance, acceleration information, cut length and current coordinates, and determine the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates.

[0097] A pulse adjustment module 500 is used to adjust the pulse frequency of the laser source based on the moving time period.

[0098] In this embodiment of the invention, the resistance sampling module 100 is used to determine the acceleration information of the laser galvanometer under multiple sets of laser cutting speeds, including: setting a total cutting distance for the sampling resistor; performing cutting tasks according to the set total cutting distance at each of the multiple sets of laser cutting speeds, obtaining multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times; and determining the acceleration information corresponding to each set of cutting speeds based on the multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times.

[0099] In this embodiment of the invention, the resistance sampling module 100 determines the acceleration information corresponding to each cutting speed based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times. This process further includes: visually identifying the actual cutting distance corresponding to each laser cutting speed to obtain a set of actual cutting distances; filtering the set of actual cutting distances based on a predetermined rule to obtain a set of effective cutting distances, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance; and determining the acceleration information corresponding to each laser cutting speed based on each laser cutting speed in the set of effective cutting distances.

[0100] In this embodiment of the invention, the resistance sampling module 100 determines the acceleration information corresponding to each laser cutting speed based on each laser cutting speed in the effective cutting distance set, which further includes: collecting the end time point when the laser galvanometer stops moving, obtaining the deceleration time difference based on the actual cutting time; and calculating the acceleration information based on the laser cutting speed and the deceleration time difference.

[0101] In this embodiment of the invention, the interpolation generation module 400 obtains the target coordinates and the movement time period of the laser spot based on the laser spot movement step distance, acceleration information, cut length and current coordinates, and determines the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates. This includes: obtaining the scanning period of the laser galvanometer and determining the number of scans within the movement time period; and determining the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates based on the number of scans and the target coordinate value.

[0102] The mirror interpolation and open-loop PSO control device for laser trimming described in this embodiment can execute the mirror interpolation and open-loop PSO control method for laser trimming provided in the above embodiments. The mirror interpolation and open-loop PSO control device for laser trimming has the corresponding functional steps and beneficial effects of the mirror interpolation and open-loop PSO control method for laser trimming described in the above embodiments. For details, please refer to the embodiments of the mirror interpolation and open-loop PSO control method for laser trimming described above. The embodiments of this invention will not be repeated here.

[0103] This invention also provides an electronic device, which may include a processor and a memory, wherein the processor and memory can be connected via a bus or other means. The processor may be a Central Processing Unit (CPU). The processor may also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations thereof. The memory, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as the program instructions / modules corresponding to the galvanometer interpolation and open-loop PSO control method for laser trimming in this invention embodiment. The processor executes various functional applications and data processing by running the non-transitory software programs, instructions, and modules stored in the memory, thereby implementing the galvanometer interpolation and open-loop PSO control method for laser trimming in the above method embodiment.

[0104] The memory may include a program storage area and a data storage area. The program storage area may store the operating system and application programs required for at least one function; the data storage area may store data created by the processor, etc. Furthermore, the memory may include high-speed random access memory and non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. The one or more modules are stored in the memory and, when executed by the processor, perform the galvanometer interpolation and open-loop PSO control method for laser trimming as described in the above method embodiments. Specific details of the above electronic device can be understood by referring to the corresponding descriptions and effects in the above method embodiments, and will not be repeated here. Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it may include the processes of the embodiments of the above methods. The storage medium may be a read-only memory (ROM), a random access memory (RAM), a flash memory, a hard disk drive (HDD), or a solid-state drive (SSD), etc.; the storage medium may also include a combination of the above types of memory.

[0105] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0106] Similarly, it should be understood that, in order to simplify this disclosure and aid in understanding one or more of the various aspects of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of the invention above. Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and it should be noted that the above embodiments are illustrative of the invention and not restrictive, and that alternative embodiments can be devised by those skilled in the art without departing from its scope.

Claims

1. A method for galvanometer interpolation and open-loop PSO control for laser trimming, characterized in that, The galvanometer interpolation and open-loop PSO control method for laser trimming includes: Multiple laser cutting speeds are set, and laser cutting sampling is performed on the sampling resistor to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds. Select the laser cutting speed for the target resistor, and obtain the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor; Based on acceleration information, the selected laser cutting speed, and the current cutting time, the cut length of the target resistor and the current coordinates of the laser spot are obtained. Based on the laser spot's movement step distance, acceleration information, cut length, and current coordinates, the target coordinates and the movement time period of the target coordinates are obtained, and the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates is determined. The pulse frequency of the laser source is adjusted based on the shift time period.

2. The galvanometer interpolation and open-loop PSO control method for laser trimming according to claim 1, characterized in that, Determining the acceleration information of the laser galvanometer at multiple laser cutting velocities includes: Set a total cut-off distance for the sampling resistor; The cutting task is executed at multiple sets of laser cutting speeds according to the set total cutting distance, and multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times are obtained. Based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, the acceleration information corresponding to each set of cutting speeds is determined.

3. The galvanometer interpolation and open-loop PSO control method for laser trimming according to claim 2, characterized in that, Based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, the acceleration information corresponding to each set of cutting speeds is determined as follows: By visually detecting and identifying the actual cutting distance corresponding to each laser cutting speed, a set of actual cutting distances is obtained; The actual cutting distance set is filtered based on a predetermined rule to obtain a valid cutting distance set, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance; Based on each laser cutting speed in the set of effective cutting distances, the acceleration information corresponding to each laser cutting speed is determined.

4. The galvanometer interpolation and open-loop PSO control method for laser trimming according to claim 3, characterized in that, Based on each laser cutting speed in the set of effective cutting distances, the acceleration information corresponding to each laser cutting speed is determined as follows: The end time point when the laser galvanometer stops moving is collected, and the deceleration time difference is obtained based on the actual cutting time; Acceleration information is calculated based on the laser cutting speed and the deceleration time difference.

5. The galvanometer interpolation and open-loop PSO control method for laser trimming according to claim 1, characterized in that, Determining the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates includes: Obtain the scanning period of the laser galvanometer and determine the number of scans within the moving time period; Based on the number of scans and the target coordinates, determine the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates.

6. A galvanometer interpolation and open-loop PSO control device for laser trimming, characterized in that, The galvanometer interpolation and open-loop PSO control device for laser trimming includes: A resistance sampling module is used to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds. The information acquisition module is used to select a laser cutting speed for the target resistor, and acquire the acceleration information of the laser galvanometer, the set laser spot movement step distance, and the current cutting time of the target resistor. The parameter conversion module is used to obtain the cut length of the target resistor and the current coordinates of the laser spot based on acceleration information, the selected laser cutting speed and the current cutting time. An interpolation generation module is used to obtain the target coordinates and the movement time period of the laser spot based on the laser spot movement step distance, acceleration information, cut length and current coordinates, and to determine the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates. A pulse adjustment module is used to adjust the pulse frequency of the laser source based on the moving time period.

7. The galvanometer interpolation and open-loop PSO control device for laser trimming according to claim 6, characterized in that, The resistance sampling module is used to determine the acceleration information of the laser galvanometer under multiple laser cutting speeds, including: Set a total cut-off distance for the sampling resistor; The cutting task is executed according to the set total cutting distance at multiple sets of laser cutting speeds, and multiple sets of actual cutting times and the actual cutting distance corresponding to each set of actual cutting times are obtained. Based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times, the acceleration information corresponding to each set of cutting speeds is determined.

8. The galvanometer interpolation and open-loop PSO control device for laser trimming according to claim 7, characterized in that, The resistance sampling module determines the acceleration information corresponding to each cutting speed based on multiple sets of actual cutting times and the actual cutting distance corresponding to each set of cutting times. This also includes: By visually detecting and identifying the actual cutting distance corresponding to each laser cutting speed, a set of actual cutting distances is obtained; The actual cutting distance set is filtered based on a predetermined rule to obtain a valid cutting distance set, wherein the predetermined rule is that the actual cutting distance is greater than or equal to half of the total cutting distance; Based on each laser cutting speed in the set of effective cutting distances, the acceleration information corresponding to each laser cutting speed is determined.

9. The galvanometer interpolation and open-loop PSO control device for laser trimming according to claim 8, characterized in that, The resistance sampling module, based on each laser cutting speed in the effective cutting distance set, determines the acceleration information corresponding to each laser cutting speed, further including: The end time point when the laser galvanometer stops moving is collected, and the deceleration time difference is obtained based on the actual cutting time; Acceleration information is calculated based on the laser cutting speed and the deceleration time difference.

10. The galvanometer interpolation and open-loop PSO control device for laser trimming according to claim 9, characterized in that, The interpolation generation module, based on the laser spot's movement step distance, acceleration information, cut length, and current coordinates, obtains the target coordinates and the target coordinate's movement time period of the laser spot, and determines the coordinate interpolation value of the laser spot between the current coordinates and the target coordinates, including: Obtain the scanning period of the laser galvanometer and determine the number of scans within the moving time period; Based on the number of scans and the target coordinates, determine the coordinate interpolation value of the laser galvanometer between the current coordinates and the target coordinates.

Citation Information

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