Scanning probe fabrication and characterization apparatus

Abstract

The application discloses a scanning probe preparation and characterization device and relates to the technical field of micro-nano technology.The scanning probe preparation and characterization device comprises a bottom plate, a containing table, a first moving platform and a first scanning probe module, the containing table is rotationally arranged on the bottom plate, the containing table is used for carrying and fixing a sample, the first moving platform is arranged on the bottom plate and corresponds to the containing table, the first scanning probe module is arranged on the first moving platform and is height-adjustable, the first scanning probe module is used for preparing and characterizing the sample, and the first moving platform is used for adjusting the position of the first scanning probe module relative to the center of a sample to-be-operated area.The scanning probe preparation and characterization device can release the position limitation of a supporting platform on a scanning probe module, realizes large-range etching and scanning on the sample, and improves the preparation and characterization efficiency of the scanning probe.

Description

Technical Field

[0001] This invention relates to the field of micro-nano technology, and more specifically, to a scanning probe preparation and characterization apparatus. Background Technology

[0002] The field of micro / nano technology encompasses numerous processes such as etching, assembly, morphology scanning, and detection of micro / nano components. For example, taking etching as an example, a nanoscale scanning probe interacts with the sample to etch the desired pattern onto the sample. During morphology scanning of micro / nano components, the scanning probe scans the finished micro / nano component to acquire morphology information, thereby detecting the etching effect.

[0003] In related technologies, the main structure of micro-nano fabrication systems applied in the field of micro-nano device processing includes a scanning probe module and a support platform. The scanning probe module is set on the support platform with three-point support. Due to the limited range of movement of the scanning probe module, the actual etchable area and the scanning morphology range are small, which makes it unsuitable for large samples such as wafers. Moreover, when inspecting large wafers, only local sampling can be performed, which cannot comprehensively and quickly obtain the overall surface information of the wafer or etch the entire wafer. There is a potential risk of etching and scanning omissions, which seriously affects the efficiency of micro-nano fabrication and characterization. Summary of the Invention

[0004] The present invention aims to at least partially solve one of the technical problems in the related art.

[0005] To address this, this invention provides a scanning probe preparation and characterization apparatus that removes the positional limitations imposed by the support platform on the scanning probe module, enabling large-scale etching and scanning of the sample and improving the efficiency of scanning probe preparation and characterization.

[0006] The scanning probe preparation and characterization apparatus of this invention includes:

[0007] Base plate;

[0008] A receiving stage, which is rotatably mounted on the base plate, is used to support and fix the sample;

[0009] A first moving platform and a first scanning probe module are provided. The first moving platform is disposed on the base plate corresponding to the accommodating stage. The first scanning probe module is disposed on the first moving platform and its height is adjustable. The first scanning probe module is used to prepare and characterize the sample. The first moving platform is used to adjust the position of the first scanning probe module relative to the center of the sample working area.

[0010] The scanning probe preparation and characterization apparatus of this invention can remove the positional restrictions of the support platform on the scanning probe module, realize large-scale etching and scanning of the sample, and improve the preparation and characterization efficiency of the scanning probe.

[0011] In some embodiments, the system further includes length-adjustable support members, which are fixedly mounted on the first mobile platform and at least three of them are provided. The other end of the support member is hinged to the first scanning probe module to adjust the tilt angle of the first scanning probe module.

[0012] In some embodiments, the first scanning probe module includes a first housing and a first connecting rod, the first connecting rod being disposed in a one-to-one correspondence with the support member, and at least three of the support members being disposed at intervals along the circumference of the first housing.

[0013] In some embodiments, the first mobile platform includes a first plate, a second plate, and a third plate connected in sequence. The first plate is fixedly disposed on the base plate, the second plate is adjustablely disposed on the first plate along a first direction, and the third plate is adjustablely disposed on the second plate along a second direction. The first direction and the second direction intersect and are parallel to the first plate, respectively. The first scanning probe module is disposed on the third plate.

[0014] In some embodiments, multiple first mobile platforms and first scanning probe modules are provided, the multiple first mobile platforms are arranged at circumferential intervals along the receiving stage, and the first mobile platforms and the first scanning probe modules are arranged in a one-to-one correspondence.

[0015] In some embodiments, the system further includes a top plate, a second moving platform, and a second scanning probe module. The top plate is disposed parallel to the bottom plate above it, the second moving platform is disposed below the top plate, and the second scanning probe module is disposed on the second moving platform and located above the receiving stage. The height of the second scanning probe module is adjustable and it is used to prepare and characterize the sample. The second moving platform is used to adjust the position of the second scanning probe module relative to the center of the sample working area.

[0016] In some embodiments, the second scanning probe module includes a second housing and a second connecting rod. The second connecting rod has at least three rods spaced apart circumferentially on the second housing. The second connecting rod has a connector for connecting to the second moving platform. The connector is used to drive the second scanning probe module to move toward or away from the second moving platform and to adjust the tilt angle of the second scanning probe module.

[0017] In some embodiments, the connector is made of a flexible material, a drum is rotatably mounted on the second moving platform, the connector is wound around the drum, and a drive member is fixedly mounted on the second moving platform. The drive member is throttle-connected to the drum and drives the drum to rotate to tighten or release the connector.

[0018] In some embodiments, the second mobile platform has the same structure as the first mobile platform and there are multiple second mobile platforms. The multiple second mobile platforms are arranged at intervals along the circumference of the receiving stage, and the second scanning probe module is arranged in a one-to-one correspondence with the second mobile platform.

[0019] In some embodiments, a third movable platform is further included, the third movable platform including a first movable plate and a second movable plate, the first movable plate being disposed on the base plate and adjustable in position along the length direction of the base plate, the second movable plate being disposed on the first movable plate and adjustable in position along the width direction of the base plate, and the receiving platform being rotatably disposed on the second movable plate. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the scanning probe preparation and characterization apparatus according to an embodiment of the present invention.

[0021] Figure 2 This is a schematic diagram showing the connection between the first scanning probe module and the first moving platform in the scanning probe preparation and characterization apparatus of this invention.

[0022] Figure 3 This is a schematic diagram of the arrangement of the first scanning probe module in the scanning probe preparation and characterization apparatus of this invention.

[0023] Figure 4 This is a schematic diagram showing the connection between the second scanning probe module and the second moving platform in the scanning probe preparation and characterization apparatus of this invention.

[0024] Figure 5 This is a schematic diagram of the arrangement of the second scanning probe module in the scanning probe preparation and characterization apparatus of this invention.

[0025] Figure 6 This is a schematic diagram of the structure of the third moving platform in the scanning probe preparation and characterization apparatus of this invention.

[0026] Figure label:

[0027] Base plate 1;

[0028] Container 2;

[0029] First mobile platform 3; First board 301; Second board 302; Third board 303;

[0030] First scanning probe module 4; First housing 401; First connecting rod 402;

[0031] Sample 5;

[0032] Support component 6;

[0033] Top plate 7;

[0034] Second mobile platform 8; Roller 801;

[0035] Second scanning probe module 9; second housing 901; second connecting rod 902; connecting ring 903;

[0036] Connector 10;

[0037] Third mobile platform 11; First movable plate 1101; Second movable plate 1102. Detailed Implementation

[0038] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0039] like Figure 1 , Figure 2 and Figure 3 As shown, the scanning probe preparation and characterization device of this invention includes a base plate 1, a stage 2, a first moving platform 3, and a first scanning probe module 4. The stage 2 is rotatably mounted on the base plate 1 and is used to support and fix the sample 5. The first moving platform 3 is mounted on the base plate 1 corresponding to the stage 2. The first scanning probe module 4 is mounted on the first moving platform 3 and its height is adjustable. The first scanning probe module 4 is used to prepare and characterize the sample 5. The first moving platform 3 is used to adjust the position of the first scanning probe module 4 relative to the center of the area to be processed on the sample 5.

[0040] In use, the scanning probe preparation and characterization apparatus of this invention places the sample 5 on the stage 2 and rotates the stage 2 to further adjust the position of the sample 5. At the same time, the first scanning probe module 4 is moved in a direction parallel to the stage 2 to the corresponding area of ​​the sample 5 to be processed, that is, the position to be etched or scanned. Then, the first scanning probe module 4 is adjusted in the height direction by the first moving platform 3 so that the first scanning probe module 4 is at the height requirement to meet the etching or scanning operation. The etching or scanning operation on the sample 5 begins. After the operation in this area is completed, the position of the first scanning probe module 4 is adjusted radially in the area of ​​the sample 5 to be processed by the first moving platform 3. At the same time, by rotating the stage 2, large-area etching and scanning operations on the sample 5 can be achieved.

[0041] The scanning probe preparation and characterization apparatus of this invention, by setting a first moving platform 3, realizes the adjustment of the overall position of the first scanning probe module 4, removes the positional restriction of the scanning probe module by the support platform, realizes large-scale etching and scanning of the sample 5, and improves the preparation and characterization efficiency of the scanning probe.

[0042] The scanning probe module includes a scanning probe, a scanning probe holder, and a piezoelectric scanner. The scanning probe is mounted on the scanning probe holder, which is in turn mounted on the piezoelectric scanner. The spatial position of the piezoelectric scanner relative to the scanning probe module is adjustable to facilitate the adjustment of the scanning probe's position relative to sample 5, ensuring the high precision requirements of the scanning probe etching and scanning.

[0043] Optionally, the stage 2 is a frustum structure so that when the sample 5 is placed, the stage 2 and the working area of ​​the sample 5 are placed coaxially, which facilitates the positioning of the first scanning probe module 4 and the adjustment of the working area of ​​the first scanning probe module 4.

[0044] In some embodiments, such as Figure 2 and Figure 3 As shown, it also includes a length-adjustable support member 6, which is fixedly mounted on the first moving platform 3 and at least three of them are provided. The other end of the support member 6 is hinged to the first scanning probe module 4 to adjust the tilt angle of the first scanning probe module 4.

[0045] Specifically, the support member 6 is a direct-drive module, which can be an electric telescopic rod, a hydraulic telescopic rod, a pneumatic telescopic rod, etc. The end of the support member 6 is connected to the first scanning probe module 4 using a ball joint structure or a fisheye bearing. At least three support members 6 connect the first moving platform 3 and the first scanning probe module 4. The working height of the first scanning probe module 4 can be adjusted by extending or retracting the three support members 6 by the same length, which is convenient and reliable. Alternatively, the tilt angle of the first scanning probe module 4 can be adjusted by extending or retracting the three support members 6 by different lengths, so as to ensure the working posture and stability of the first scanning probe module 4 during operation and improve the etching and scanning efficiency of the sample 5.

[0046] In some embodiments, such as Figure 2 As shown, the first scanning probe module 4 includes a first housing 401 and a first connecting rod 402. The first connecting rod 402 is arranged in a one-to-one correspondence with the support member 6, and at least three support members 6 are arranged at intervals along the circumference of the first housing 401.

[0047] The first connecting rod 402 is provided, which can be used as an extension of the first housing 401. This allows the connection position between the support member 6 and the first housing 401 to be located at a set distance outside the first housing 401. This avoids interference between the support member 6 and the first housing 401 when adjusting the height and tilt angle of the first housing 401, thus preventing the adjustment range of the support member 6 from being affected. This makes the operation convenient, safe and reliable.

[0048] Optionally, multiple sensors are provided on the first housing 401 corresponding to the support rod, and the tilt angle of the first scanning probe module 4 is monitored through the multiple sensors.

[0049] Optionally, the first housing 401 has a circular cross-section, and the first connecting rod 402 is disposed at the end of the first housing 401 near the first moving platform 3; or, the first housing 401 has a fan-shaped cross-section, and part of the first connecting rod 402 is disposed at the end of the first housing 401 near the first moving platform 3, and part of the first connecting rod 402 is disposed on the side wall of the first housing 401.

[0050] In some embodiments, such as Figure 2 As shown, the first mobile platform 3 includes a first plate 301, a second plate 302 and a third plate 303 connected in sequence. The first plate 301 is fixedly mounted on the base plate 1. The second plate 302 is adjustablely mounted on the first plate 301 along a first direction. The third plate 303 is adjustablely mounted on the second plate 302 along a second direction. The first direction and the second direction intersect and are parallel to the first plate 301 respectively. The first scanning probe module 4 is mounted on the third plate 303.

[0051] Specifically, the first plate 301 is provided with a first groove extending in a first direction, the second plate 302 is provided with a first slider, the first slider is slidably assembled in the first groove and stops with the first groove in the thickness direction of the first plate 301, and the first plate 301 or the second plate 302 is provided with a first driving member, the first driving member drives the second plate 302 to move relative to the first plate 301 in the first direction, the second plate 302 is provided with a second groove extending in a second direction, the third plate 303 is provided with a second slider, the second slider is slidably assembled in the second groove and stops with the second groove in the thickness direction of the first plate 301, and the second plate 302 or the third plate 303 is provided with a second driving member, the second driving member drives the third plate 303 to move relative to the second plate 302 in the second direction.

[0052] Preferably, the cross-section of the first plate 301 is rectangular or square, the first direction is the extension direction of one of the two adjacent sides of the quadrilateral on the bottom surface of the first plate 301, and the second direction is the extension direction of the other of the two adjacent sides of the quadrilateral on the bottom surface of the first plate 301, that is, the first direction and the second direction are perpendicular to each other.

[0053] It is understandable that a coordinate system is established on the first plate 301 with the first direction as the X-axis and the second direction as the Y-axis. The position of the first scanning probe module 4 is adjusted along the X-axis by the second plate 302 and along the Y-axis by the third plate 303. The first moving platform 3 is the XY two-degree-of-freedom adjustment platform.

[0054] Preferably, the first or second direction is parallel to the extension direction of one of the diameters of the area to be worked on in the sample 5.

[0055] Optionally, the first driving component includes a first adjusting motor, a first gear, and a first rack. The first rack is disposed on the first plate 301, the first adjusting motor is disposed on the second plate 302, and the first gear is fixedly disposed at the output end of the first adjusting motor and meshes with the first rack. The movement of the second plate 302 relative to the first plate 301 is achieved by driving the first gear to rotate through the first adjusting motor.

[0056] The second driving component includes a second adjusting motor, a second gear, and a second rack. The second rack is mounted on the third plate 303, the second adjusting motor is mounted on the second plate 302, and the second gear is fixedly mounted on the output end of the second adjusting motor and meshes with the second rack. The movement of the third plate 303 relative to the second plate 302 is achieved by driving the second gear to rotate through the second adjusting motor.

[0057] Optionally, the first driving component is a first linear motor, which is mounted on the first plate 301. The worktable on the first linear motor is fixedly connected to the second plate 302. The first linear motor is used to drive the second plate 302 to move relative to the first plate 301 along a first direction. The second driving component is a second linear motor, which is mounted on the second plate 302. The worktable on the second linear motor is fixedly connected to the third plate 303. The second linear motor is used to drive the third plate 303 to move relative to the second plate 302 along a second direction.

[0058] In some embodiments, such as Figure 1 and Figure 3 As shown, there are multiple first moving platforms 3 and first scanning probe modules 4. Multiple first moving platforms 3 are arranged at intervals along the circumference of the receiving stage 2, and the first moving platforms 3 and first scanning probe modules 4 are arranged in a one-to-one correspondence.

[0059] Multiple first moving platforms 3 are set up so that when etching or scanning the sample 5, the first scanning probe modules 4 set on the multiple first moving platforms 3 can work simultaneously to realize the preparation and characterization of high-throughput scanning probes, improve etching or scanning efficiency. The multiple first moving platforms 3 are set up circumferentially along the stage 2, which facilitates the division of the working area of ​​each first scanning probe module 4 and avoids interference between two adjacent first moving platforms 3 or two adjacent first scanning probe modules 4 when adjusting their positions, thereby improving the etching or scanning efficiency of the first scanning probe module 4 on the sample 5.

[0060] In some embodiments, such as Figure 1 , Figure 4 and Figure 5 As shown, it also includes a top plate 7, a second moving platform 8, and a second scanning probe module 9. The top plate 7 is arranged parallel to the bottom plate 1 above it, the second moving platform 8 is arranged below the top plate 7, and the second scanning probe module 9 is arranged on the second moving platform 8 and located above the receiving stage 2. The height of the second scanning probe module 9 is adjustable and it is used to prepare and characterize the sample 5. The second moving platform 8 is used to adjust the position of the second scanning probe module 9 relative to the center of the area to be worked on the sample 5.

[0061] Specifically, a vertical plate is provided on the base plate 1, and a top plate 7 is provided at the end of the vertical plate parallel to the base plate 1. The second moving platform 8 is located below the top plate 7. When working on the sample 5, the position of the second scanning probe module 9 can be adjusted through the second moving platform 8. By adjusting the radial position of the second scanning probe module 9 on the sample 5, etching or scanning operations can be performed on the sample 5 simultaneously on both the upper and lower sides, thereby improving the etching and scanning efficiency of the sample 5.

[0062] In some embodiments, such as Figure 4 As shown, the second scanning probe module 9 includes a second housing 901 and a second connecting rod 902. The second connecting rod 902 has at least three rods that are spaced apart circumferentially on the second housing 901. The second connecting rod 902 has a connector 10 that is connected to the second moving platform 8. The connector 10 is used to drive the second scanning probe module 9 to move towards or away from the second moving platform 8 and to adjust the tilt angle of the second scanning probe module 9.

[0063] At least three second connecting rods 902 and connectors 10 are arranged at circumferential intervals to ensure the stability of the second scanning probe module 9 when connected to the second moving platform 8. The height of the second scanning probe module 9 can be adjusted by adjusting the same size of the three connectors 10, and the tilt angle of the second scanning probe module 9 can be adjusted by adjusting different sizes of the three connectors 10. The second connecting rods 902, as extensions of the second housing 901, allow the connection position of the connectors 10 and the second housing 901 to be located at a set distance outside the second housing 901, avoiding interference between the connectors 10 and the second housing 901 when adjusting the height and tilt angle of the second housing 901, thus avoiding affecting the adjustment range of the connectors 10. The operation is convenient and safe.

[0064] In some embodiments, such as Figure 4 As shown, the connector 10 is made of flexible material. A drum 801 is rotatably mounted on the second moving platform 8. The connector 10 is wound around the drum 801. A driving component (not shown in the figure) is fixedly mounted on the second moving platform 8. The driving component is connected to the drum 801 and drives the drum 801 to rotate to tighten or release the connector 10.

[0065] Specifically, the second mobile platform 8 has multiple drums 801 rotatably mounted on the second mobile platform 8, corresponding to the multiple second connecting rods 902. The two sides of each drum 801 are supported and fixed by lugs, and a driving component is provided on one side of each drum 801. Optionally, the driving component is a drive motor, and the output shaft of the drive motor is connected to the drum 801 via a coupling or gear transmission. The other end of the connecting member 10 wound on the drum 801 is connected to the second connecting rod 902. When multiple drive motors simultaneously drive the drum 801, the connecting member 10 is wound in place. The second scanning probe module 9... The second scanning probe module 9 moves towards the second moving platform 8. Multiple drive motors simultaneously drive the drum 801 to release the connector 10. The second scanning probe module 9 moves away from the second moving platform 8. When some of the multiple drive motors drive the drum 801 to tighten or release the connector 10, and some drive motors stop working, or when some of the multiple drive motors drive the drum 801 to tighten the connector 10, and some drive the drum 801 to release the connector 10, the tilt angle of the second scanning probe module 9 can be adjusted.

[0066] By using a flexible material for the connector 10, stress concentration at the connection point between the second connecting rod 902 and the connector 10 can be avoided during the adjustment of the tilt angle of the second scanning probe module 9, thus preventing damage to the connector 10 or the second connecting rod 902. At the same time, the number of turns of the reel 801 for releasing or retracting facilitates the measurement of the distance the second scanning probe module 9 moves, making it easier to accurately control the height position of the second scanning probe module 9. Furthermore, the flexible connection can reduce the impact force between the second scanning probe module 9 and the sample 5 in case of operational errors during adjustment, thus protecting the second scanning probe module 9.

[0067] Optionally, connector 10 is a connecting rope or chain.

[0068] Optionally, the second connecting rod 902 is provided with connecting holes, and the distance from multiple connecting holes to the top surface of the second housing 901 is equal. A connecting ring 903 is provided on the connecting hole, and the connecting ring 903 is connected to the connecting member 10. The connecting ring 903 facilitates the connection between the flexible connecting member 10 and the second connecting rod 902, and prevents the connecting member 10 from twisting or wrapping around the second connecting rod 902 during the adjustment of the second scanning probe module 9, thus ensuring the precise adjustment of the second scanning probe module 9 and the stability of the second scanning probe module 9 during operation.

[0069] In some embodiments, the connector 10 is a direct-drive module, which can be an electric telescopic rod, a hydraulic telescopic rod, or a pneumatic telescopic rod. One end of the connector 10 is fixedly connected to the second moving platform 8, and the other end of the connector 10 is hinged to the second connecting rod 902 through a universal ball joint structure or a fisheye bearing. Setting the connector 10 as a direct-drive module can strengthen the connection between the second scanning probe module 9 and the second moving platform 8, avoid delays in the movement of the second scanning probe module 9 when the second moving platform 8 moves, and prevent the second scanning probe module 9 from shaking relative to the second moving platform 8 when it reaches the set working position after the second moving platform 8 moves. This facilitates rapid and continuous multi-area operation of the second scanning probe module 9.

[0070] In some embodiments, such as Figure 1 and Figure 5 As shown, the second moving platform 8 has the same structure as the first moving platform 3 and there are multiple second moving platforms 8. The multiple second moving platforms 8 are arranged at intervals along the circumference of the accommodating stage 2, and the second scanning probe module 9 is arranged in a one-to-one correspondence with the second moving platform 8.

[0071] Specifically, the second moving platform 8 includes a fourth plate, a fifth plate, and a sixth plate. The fourth plate is fixedly mounted on the top plate 7 and has a third sliding groove. The fifth plate has a third slider, which is slidably fitted within the third sliding groove and engages with the third sliding groove in the thickness direction of the fourth plate. A third driving component is provided on either the fourth or fifth plate, driving the fifth plate to move relative to the fourth plate along the length or width direction of the fourth plate. The fifth plate has a fourth sliding groove, and the sixth plate has a fourth slider, which is slidably fitted within the fourth sliding groove and engages with the fourth sliding groove in the thickness direction of the fourth plate. A fourth driving component is provided on either the fifth or sixth plate, driving the sixth plate to move relative to the fifth plate along the width or length direction of the fourth plate. It should be noted that the third driving component and the first driving component have the same structure, and the fourth driving component and the second driving component have the same structure, which will not be described further here.

[0072] By setting up multiple second moving platforms 8, multiple second scanning probe modules 9 can be operated simultaneously, further realizing the preparation and characterization of high-throughput scanning probes, improving the etching or scanning efficiency of sample 5. By setting multiple second moving platforms 8 at circumferential intervals along the stage 2, it is convenient to divide the sample 5 into multiple working areas above the stage 2, avoiding interference between adjacent second moving platforms 8 or second scanning probe modules 9, and improving preparation and characterization efficiency.

[0073] In some embodiments, such as Figure 1 and Figure 6 As shown, it includes a third moving platform 11, which includes a first movable plate 1101 and a second movable plate 1102. The first movable plate 1101 is disposed on the base plate 1 and its position is adjustable along the length direction of the base plate 1. The second movable plate 1102 is disposed on the first movable plate 1101 and its position is adjustable along the width direction of the base plate 1. The accommodating platform 2 is rotatably disposed on the second movable plate 1102.

[0074] By setting up a third moving platform 11, the movement of the first movable plate 1101 and the second movable plate 1102 relative to the base plate 1 can further adjust the position of the stage 2 relative to the plane of the base plate 1, which facilitates etching or scanning of the sample 5.

[0075] It is understandable that a coordinate system is established on the receiving stage 2 with the length direction of the base plate 1 as the X-axis, the width direction of the base plate 1 as the Y-axis, and the thickness direction of the base plate 1 as the Z-axis. The position of the receiving stage 2 is adjusted on the X-axis by the first movable plate 1101, and on the Y-axis by the second movable plate 1102. The position of the receiving stage 2 and the sample 5 are adjusted by rotating the receiving stage 2 relative to the second movable plate 1102 around the Z-axis. The third moving platform 11 is XYθ. Z Three-degree-of-freedom adjustment platform.

[0076] Optionally, two linear motors extending along the length of the base plate 1 are provided parallel to each other on the base plate 1. The two ends of the first movable plate 1101 are respectively connected to the worktables on the two linear motors, and the first movable plate 1101 is moved by the linear motors.

[0077] Optionally, the second movable plate 1102 is slidably disposed on the first movable plate 1101. The first movable plate 1101 is provided with a linear motor connected to the fourth plate 72. The linear motor is used to drive the second movable plate 1102 to move along the extension direction of the first movable plate 1101.

[0078] Optionally, the second movable plate 1102 is slidably disposed on the first movable plate 1101. The first movable plate 1101 is rotatably provided with a screw, and the second movable plate 1102 is provided with a connecting block that is threadedly engaged with the screw. The screw rotates to drive the connecting block and the second movable plate 1102 to move relative to the first movable plate 1101.

[0079] Optionally, a third adjusting motor is fixedly installed on the second movable plate 1102. The output shaft of the third adjusting motor is vertically set and fixedly connected to the receiving platform 2. The receiving platform 2 is driven to rotate by the rotation of the third adjusting motor.

[0080] Optionally, the first moving platform 3 is positioned above the first movable plate 1101 and the second movable plate 1102 to avoid interference with the movement of the first moving platform 3 on the first movable plate 1101 and the second movable plate 1102.

[0081] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0082] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0083] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0084] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0086] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A scanning probe preparation and characterization apparatus, characterized in that, include: A bottom plate and a top plate, wherein the top plate is disposed parallel to and above the bottom plate; A receiving stage, which is rotatably mounted on the base plate, is used to support and fix the sample; A first moving platform and a first scanning probe module, wherein the first moving platform is disposed on the base plate corresponding to the accommodating stage, and the first scanning probe module is disposed on the first moving platform and is height adjustable; the first scanning probe module is used to prepare and characterize the lower surface of the sample, and the first moving platform is used to adjust the position of the first scanning probe module relative to the center of the sample's working area. The second moving platform is located below the top plate, and the second scanning probe module is located on the second moving platform and above the receiving stage. The height of the second scanning probe module is adjustable and it is used to prepare and characterize the upper surface of the sample. The second moving platform is used to adjust the position of the second scanning probe module relative to the center of the sample's working area.

2. The scanning probe preparation and characterization apparatus according to claim 1, characterized in that, It also includes adjustable length support members, which are fixedly mounted on the first moving platform and at least three of them are provided. The other end of the support member is hinged to the first scanning probe module to adjust the tilt angle of the first scanning probe module.

3. The scanning probe preparation and characterization apparatus according to claim 2, characterized in that, The first scanning probe module includes a first housing and a first connecting rod. The first connecting rod is arranged in a one-to-one correspondence with the support member, and at least three of the support members are arranged at intervals along the circumference of the first housing.

4. The scanning probe preparation and characterization apparatus according to any one of claims 1-3, characterized in that, The first mobile platform includes a first plate, a second plate, and a third plate connected in sequence. The first plate is fixedly disposed on the base plate. The second plate is adjustablely disposed on the first plate along a first direction. The third plate is adjustablely disposed on the second plate along a second direction. The first direction and the second direction intersect and are parallel to the first plate respectively. The first scanning probe module is disposed on the third plate.

5. The scanning probe preparation and characterization apparatus according to claim 4, characterized in that, The first mobile platform and the first scanning probe module are provided in multiple ways. The multiple first mobile platforms are arranged at intervals along the circumference of the receiving stage, and the first mobile platform and the first scanning probe module are arranged in a one-to-one correspondence.

6. The scanning probe preparation and characterization apparatus according to claim 4, characterized in that, The second scanning probe module includes a second housing and a second connecting rod. The second connecting rod has at least three rods spaced circumferentially on the second housing. The second connecting rod has a connector for connecting to the second moving platform. The connector is used to drive the second scanning probe module to move closer to or further away from the second moving platform and to adjust the tilt angle of the second scanning probe module.

7. The scanning probe preparation and characterization apparatus according to claim 6, characterized in that, The connector is made of flexible material. A drum is rotatably mounted on the second moving platform. The connector is wound around the drum. A drive unit is fixedly mounted on the second moving platform. The drive unit is connected to the drum and drives the drum to rotate to tighten or release the connector.

8. The scanning probe preparation and characterization apparatus according to claim 4, characterized in that, The second mobile platform has the same structure as the first mobile platform and there are multiple second mobile platforms. The multiple second mobile platforms are arranged at intervals along the circumference of the receiving stage, and the second scanning probe module is arranged in a one-to-one correspondence with the second mobile platform.

9. The scanning probe preparation and characterization apparatus according to any one of claims 1-3, characterized in that, It also includes a third moving platform, which includes a first movable plate and a second movable plate. The first movable plate is disposed on the base plate and its position is adjustable along the length direction of the base plate. The second movable plate is disposed on the first movable plate and its position is adjustable along the width direction of the base plate. The receiving platform is rotatably disposed on the second movable plate.

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